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Extreme Hazards
Process Name
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Acetic Acid, Glacial
Ammonium Fluoride
Ammonium Hydroxide
Aqua Regia
Buffered Oxide Etch
HNA
Hydrochloric Acid (HCl)
Hydrofluoric Acid (HF)
Hydrogen Peroxide
Nitric Acid
PAN
Phosphoric Acid
Piranha
Potassium Hydroxide
RCA1 (Base)
RCA2 (Acid)
SulphoNitric
Sulphuric Acid
Process Name
Chemical Handling and Equipment
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Breadth of Hazards
Haz Waste Management
Labeling Experiments
Pouring and Mixing
PPE Choice & Cleaning
Sharps
Work Station Use
KOH Bath
RCA Bath
Sonicators
Stir‐ and Hotplates
Users: By initialing, you agree that you understand and will follow the SOP.
If you forget any rules it is your responsibility to seek help from the lab staff, who will happily provide further training.
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Tools
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Alcatel DRIE
Cannon Aligner
CHA E‐beam Evaporator
CHA Sputterer
CPD
Dektak 3030 and/or 2A
Dicing Saw
EVG Aligner
FEI NanoSEM
FirstNano Nanowire CVD
Karl Suss MA‐4
Lesker Sputter
Mann PG
MRL Furnace
Nanonex PlasmaTherm Etcher
RTP
Solitec Spinner/Hotplate
Spin Rinsers
Technics PECVD
Technics RIE
UV Flood
Process Name
Common Lesser Hazards
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Aqueous Developers
Chrome Etch
DMSO
EBL Developer
Halogenated Solvents
Monolayer Deposition
PR Diluents & Strippers
Squirt Bottle Solvents
Standard Photoresists
Users: By initialing, you agree that you understand and will follow the SOP.
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Ifyouintendtouseanyofthelistedchemicals,youmustanswerallofthefollowingCommon
Procedures:
‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐CommonProcedures‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐
BreadthofHazards
1. WhatPPEshouldyouwearifapproachinganunknownchemical?Makesuretoincludeeverything
youwouldusetoprotectyourbody,handsandfacebeyondyourstandardcleanroomwear.
2. Whatarethe3majorpossibilitiesforexplosionsatNCNC?
3. Whatmakesanestheticchemicalssodangerous?
HazWasteManagement
1. YoucanconvenientlyaspiratealmostanyacidsolutionsatNCNC.Whatisanexception?Thereare
manypossibleanswers,butpleasepickjustone.
2. Whatshouldyoudowithnearlyemptybottlesofchemicals?Shouldyoureturnthebottletoits
cabinetordiscardtheremainingchemicalsandrinsethebottle?
3. Ifawastebottlecreatestoxicfumes,howtightlyshouldyoucapitifusinganormalcap?
LabelingExperiments
1. Inwhatcasescanyouusechemicalacronymswhenlabelinganexperiment?
2. Whatshouldyouputonovernightchemicalbathlabels?
3. Canyouwriteyourlabelonatekwipe?
PouringandMixing
1. Whenmixingconcentratedacids/baseswithwater,whichshouldyoumixintowhich?
2. WhenpouringhazardousmaterialsfromabottlewhilewearingfullPPE,whyshouldyoukeepthe
baseofthebottleovertheworkbench?
3. RoughlyhowlongmustyoustirSulphuricacidandwaterforthematerialstofullymixandfinish
releasingheat?
PPEChoiceandCleaning
1. Foreachofthefollowing,shouldyouuseablackorablueglove:Acids,Bases,Oxidizers,Organics?
2. Whatprocessesareyouallowedtodoubleglove(wearasecondpairofwhitenitriles)for?
3. Howcanyoukeepapairofblackbutyl/Vitonglovescleanwhenworkingmessilywithresist?
Sharps
1. NameanytwocommonsharpsatNCNC.
2. Wherecanyoufindgauzeandbandagesforfirstaid?Nameanyoftheseverallocations.
3. Nameanytwoofthecommonsignsofinfection.
WorkStationUse
1. WhichNCNCprovidedchemicals(ifany)canattackawetbenchworkstation(plenum)top?
2. HowcanyoudeterminethepHofresiduesonawetbenchworkstation(plenum).
3. Whatcleanroomdevicecanyouusetoquicklyremoverinsewaterfromcleaningawetbench
workstation(plenum)top?
‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐ChemicalsandMixtures‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐
AceticAcid
1. HowresistantareNCNC’sblueheavynitrileglovestoconcentrated(>40%)Aceticacid?Arethey
notresistant,splashresistantoremersionresistant?
2. CanyouigniteheatedAceticAcid?
3. ShouldyoustoreanewbottleofAceticAcidwithacids,organicsorelsewhere?
AmmoniumFluoride
1. YoufindaspillthatmightbeAmmoniumFluoride.WhatwouldthepHbe?
2. WhatistheeasiestwaytodisposeofAmmoniumFluoridesolutionthatdonotcontainheavy
metals?
3. WillheatedAmmoniumFluoridecreateavaporhazard?Howaboutroomtemp?
AmmoniumHydroxide
1. HowlongwillAmmoniumHydroxideresidueslastincleanroomconditions?hours,weeks,years?
2. (Part1)WillheatedAmmoniumHydroxidepresentavaporhazard?(Part2)Howaboutroom
temp?
3. WhatsideeffectwilloccurifyournosetinglesfrominhaledAmmoniafumes.
AquaRegia
1. IsAquaRegiaatransientorpersistentoxidizer?
2. WhyshouldyoumixanewbatchesofAquaRegiaratherthanstoringandre‐usingoldones?
3. CanyouuseAquaRegiawithTeflonbeakersordishesatNCNC?
BOE
1. YoufindaspillthatmightbeBOE.WhatwouldthepHbe?
2. HowlongdoBOEburnstaketobecomeapparent?minutes,hours,days?
3. WhatistheeasiestwaytodisposeofBOEsolutionsthatdonotcontainheavymetals?
HNA
1. WhencappinganHNAwastebottle,howdoyouavoidexplosion?
2. WhatlabwarecanyouusewithHNA?Polypropylene,Teflon,Pyrex,Aluminum,Stainless?
3. WhatdangerwillyoufacewhenetchingSilicon,especiallyinhotHNA?
HydrochloricAcid(HCl)
1. CanyouignitehotHCl?
2. WhatadditionalcontacthazardshouldyoubecautiousofifetchingmetalsinHCl?
3. WhatisthewhitemistthateruptsfromHClbottles?
HydrofluoricAcid(HF)
1. CanyousmellHFvaporsbeforetheyreachchronicallyhazardouslevels?
2. Isthepoorsplashwarning‐propertymorelikelyfordiluted(~20%)orconcentrated(~49%)HF?
3. WhereatNCNCcanyouusehotbathsofHF?Nameallthepossiblelocations.
HydrogenPeroxide
1. WhydoHydrogenPeroxidebottleshavespecialcaps?Whatdotheyprevent?
2. Whyshouldyounevermixsolvents(liquidorganics)intoH2O2?
3. WhenusingawastebottleofHydrogenPeroxidewithanon‐ventingcaphowmany“turnsfrom
tight”shouldthecapbe?
NitricAcid
1. Whatclass(orclasses)ofchemicalisNitricAcid?Acid,Base,Fluoride,Organic,Oxidizer?
2. WhatandhowhazardousisthebrowngasthatNitricAcidoccasionallyemits?
3. Whyisithazardoustomixliquidorganicsintonitricacid?
PAN
1. WhenusingawastebottleofPANwithanon‐ventingcaphowmany“turnsfromtight”shouldthe
capbe?
2. WherecanyoudisposeofPANusedtoetchlargeamountsofAluminum?
3. WhatistheNCNCapprovedmixingorderofPAN?Don’tforgetthewater!
PhosphoricAcid
1. HowlongwillresiduesofPhosphoricacidpersist?Hours,Weeks,Years?
2. DoesPhosphoricacidhaveavaporhazardatroomtemperature?
3. HowdoesboilingPhosphoricacidcreateanespeciallyhazardousvaporandresidue?
Piranha
1. Thoughpermitted,whathazardsoccurwhenmixingHydrogenPeroxideintoSulphuricAcidrather
thantheNCNCrecommendedvice‐versa?
2. IsPiranhaapersistentortransientoxidizer?
3. Glycerol(asolvent)isaddedtomanyetchestoattenuatetheetch.WhywoulditbebadinPiranha?
PotassiumHydroxide
1. WhatandhowhazardousarethebubblesformedwhenusingPotassiumHydroxideasanetchant?
2. WherecanyouusehotbathsofPotassiumHydroxide?Nameallthepossiblelocations.
3. Willconcentrated(~50%)PotassiumHydroxidefumeorleavehazardousresiduesatroom
temperature?
RCA1
1. Whatclass(orclasses)ofchemicalareinRCA1?Acid,Base,Fluoride,Organic,Oxidizer?
2. WhereinNCNCcanyouuseheatedRCA1?Nameallthepossiblelocations.
3. WhatfumeswilleruptfromaheatedRCA1bath?
RCA2
1. WhenusingadedicatedRCAbathcanyouaddhydrogenperoxideafterheatingtherestofRCA2?
2. AfterusingRCA2onmostlycleanwafers,canyoudecant(dump)RCA2totheneutralizer?
3. WhatcolorisRCA2?
SulphoNitric
1. Aretheresiduescreatedwhensimmering/boilingSulphoNitrictemporaryorlong‐lasting?
2. WhatisthefirstsignofarunawayetchinginhotSulphoNitric?Howshouldyoustopit?
3. WhatmayhappenifyoumistakenlydisposeofSulphoNitricinthewastebottleforPiranha?
SulphuricAcid
1. HowresistantareNCNC’sblueheavynitrileglovestoconcentrated(>40%)Sulphuricacid?Are
theynotresistant,splashresistantoremersionresistant?
2. HowlongwillresiduesofSulphuricacidpersist?Hours,Weeks,Years?
3. WhenyoufirstpourSulphuricacidintowater,itdoesn’tmixorheatup.Howlongshouldyoustir
tomixthetwoandcreateheat?