Effects of Metal-dopants into Diamond-like Carbon Materials
by Miss Foong Yuan Mei
Date: 11th April 2008 (Friday)
Time: 12:00pm to 1:00pm
Venue: Block EA-02-11 (Seminar Room)
Abstract
Diamond- like carbon is a meta- stable form of amorphous carbon containing significant fraction of sp3 bonding and it is characterized by high
mechanical hardness, chemical inertness and attractive tribological properties. These properties make DLC as potential material for high
performance micro- electromechanical devices (MEMS). In this work, metal- doped DLC thin films are fabricated by using Filtered Cathodic Vacuum
Arc (FCVA) system and the properties of the metal doped- DLC films incorporated with different types of metal are characterized.
Miss Foong Yuan Mei
Speaker
Miss Foong Yuan Mei received her bachelor’s degree in Materials Science and Engineering from University of Science, Malaysia in year 2005 and jointed Intel
Corporation as Failure Analysis Engineer from year 2005-2007. Currently, she is pursuing her master degree under the supervision of Dr. Daniel Chua and
her research focus is on carbon- based Micro- electromechanical systems (MEMS).
Dr. Xue Jun Min Host