High precision measurement of nitrogen for silicon production

Application Description AG/FCB300_101-EN
ABB CoriolisMaster FCB350
High precision measurement of nitrogen for silicon production
Measurement made easy
The ABB Coriolis mass flowmeter improves reliability in the production of silicon
electronic components.
The need
The industry producing silicon for microprocessors, integrated
circuits, photovoltaic panels and other electronic components,
needs extremely pure nitrogen to protect the product from
impurities during the various phases of the process. An air
separation plant installed inside or near the production plants
is used to obtain nitrogen gas. Measuring the flow of nitrogen
in the gaseous and liquid state precisely is essential to obtain
a high quality product and keep track of consumption.
The current installation using dated technology
ABB has long been collaborating with the producers of
technical gases and the relevant processing plants, and
traditionally in the past, flow was measured using a
Vortex/Swirl flowmeter installed in line and temperature and
pressure sensors connected to a flow computer unit, with
pressure and temperature compensation. These systems,
while based on reliable technology, did suffer from an inherent
flow instrument “rangeability” limit, which in some cases
wasn't suitable for measuring very low flow rates.
The main features of the instrument installed:
— Compact version with DN50, PN40 primary measuring
connection
— Measuring accuracy: 0.15 % liquid, 0.5 % gas
— Greater measuring range than with traditional technology
— 2 analog outputs for mass flow, standardized volumetric
flow, fluid temperature, plus other I/O for exchanging
information with the control system
Furthermore, as the new instrument doesn't have any limits in
terms of pipeline length upstream and downstream, it can be
installed in a short straight section, with notable length savings
for the cables connecting the regulation system. These
features make Coriolis technology the preferential choice in
industrial processes: high accuracy, simplicity and low
maintenance.
The new ABB CoriolisMaster installation
Change from two to one column
Contact us
ABB Limited
Process Automation
Oldends Lane, Stonehouse
Gloucestershire, GL10 3TA
UK
Tel:
+44 (0)1453 826661
Fax:
+44 (0)1453 829671
ABB Automation Products GmbH
Process Automation
Dransfelder Str. 2
37079 Goettingen
Germany
Tel:
+49 551 905-534
Fax:
+49 551 905-555
ABB Inc.
Process Automation
125 E. County Line Road
Warminster, PA 18974
USA
Tel:
+1 215 674 6000
Fax:
+1 215 674 7183
[email protected]
www.abb.com
Note
We reserve the right to make technical changes or
modify the contents of this document without prior
notice. With regard to purchase orders, the agreed
particulars shall prevail. ABB does not accept any
responsibility whatsoever for potential errors or
possible lack of information in this document.
We reserve all rights in this document and in the
subject matter and illustrations contained therein.
Any reproduction, disclosure to third parties or
utilization of its contents - in whole or in parts – is
forbidden without prior written consent of ABB.
Copyright© 2013 ABB
All rights reserved
3KDE010061R3001
08.2013
The instrument supplied is one of the new FCB3xx series used
to measure liquids, gases, and multiphase fluids. ABB
produces this series of CoriolisMaster flowmeters in various
diameters for several nominal pressures, certified for classified
areas and flow and/or density accuracy levels for a wide range
of industrial applications.
AG/FCB300_101-EN
The solution
When these plants, managed by Air Liquide Italia, a company
producing technical gas in the north of Italy, were refurbished,
ABB helped improve the process in terms of reliability by
supplying a CoriolisMaster flow meter to directly measure the
nitrogen gas flow in Nm3/h. The ABB CoriolisMaster flow
meters are characterized by a low pressure drop and a
notable measuring range. Therefore, they can provide precise
measurements, while guaranteeing significant savings in terms
of pumping, maintenance and installation costs.