KJC-MOCVD-55
Last modified : 2004.3.26
Hf(NEtMe)4
Hafnium tetrakis(ethylmethylamide)
Tetrakis(ethylmethylamino)hafnium
Chemical formula
Hf[N(C2H5)CH3]4
CAS No.
[352535-01-4]
Formula weight 410.9
Physical form
colorless or pale-yellow liquid
Melting point
< -70℃
3
Density
1.32g/cm
Viscosity(40℃)
2～3cP (estimate from viewing)
Degree of association
0.94 (in benzene solution)
Solubility
miscible with toluene , hexane and octane
air and moisture sensitive
Typical impurities (ppm) Na<1 K<1 Mg<1 Ca<1 Cr<1 Fe<1 Cu<1 Ni<1 Zr 1000
Vapor pressure (as monomer)
Temperature (℃)
measured by gas saturation method
120 100 80 60
40
20
(temperature : 40～100℃)
1
62℃/0.1Torr
Clausius-Clapeyron equation
P : Torr
3846
T
0
+ 10.47
Log10P
log10 P = －
T:K
Heat of vaporization : 17.6 kcal/mol
TG
(%)
-1
DTA
(μV)
-2
0.00
20.00
-20.00
0.00
-40.00
-60.00
2.5
2.7
2.9
3.1
3.3
1000/T (K-1)
Fig. Clausius-Clapeyron plots for Hf(NEtMe)4
-20.00
-80.00
-95.76%
-100.00
100.0
200.0
300.0
-40.00
400.0
Temperature(℃)
TEMP （℃）
Fig. TG-DTA of Hf(NEtMe)4
3.5
(1atm , in Ar)
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