Pure Gases
Product Specifications
VLSI
Electronic
Technical/NG
Minimum Purity
O2 + Ar
H2O
THC
CO
CO2
N2
Iron
Metals
99.999%
99.997%
99.5%
≤1
≤4
≤1
≤2
≤1
≤2
≤1
≤1
≤2
≤5
≤2
≤ 10
≤ 0.5
≤1
Concentrations given are ppm by volume unless otherwise specified.
Ordering Information
PRODUCT
VLSI
Cylinder
Size
Contents
lbs
Standard
Valve Outlet
(CGA)
Y
300
200
645
71
62
330
330
330
Equipment Recommendations
Product
Number
Cylinder
Pressure at
70°F (psig)
HC VLY
HC VL300
HC VL200
611
611
611
Description
Product
Number
Single-Stage
Regulator
Y11-E464 * 330
Certificate of Conformance available upon request.
Electronic
Y
300
200
645
71
62
330
330
330
HC ELY
HC EL300
HC EL200
611
611
611
Certificate of Conformance available upon request.
Technical/NG
Y
300
645
71
330
330
Delivery
Pressure
Range (psig)
A=
A 0-30
= 25
B=
B 0-60
= 50
CC
= 0-100
= 100
Cross Purge
Assembly
Y99-CPAM330
Page
Number
E29
E50
* Insert Delivery Pressure Range Code
HC NGTT
HC NGY
Certificate of Conformance available upon request.
611
611
Single-Stage
Regulators
Y11-C334C330
Y11-C330C330
Y11-E464C330
Cross Purge
Assembly
Y99-CPAM330
Y99-CPA4330
0-50
0-50
0-100
E49
E49
E29
E50
E50
Technical Data & Shipping Information
Molecular Weight
Specific Volume
Flammability Limits in Air
U.S. DOT Name
ID Number
U.S. DOT Hazard Class
U.S. DOT Label
CAS Registry
36.461
10.61 cf/lb @70˚ F & 1 ATM
Nonflammable
Hydrogen Chloride, Anhydrous
UN 1050
2.3
Inhalation Hazard & Corrosive
7647-01-0
Airgas Quality Policy
The purpose of the Airgas Quality System is to continually improve our manufacturing and related processes to provide our
customers with the highest product purity, consistency, and service.
www.airgas.com
Pure Gases
Hydrogen Chloride (HCI)
A colorless, toxic, corrosive, nonflammable liquefied gas with a
sharp, suffocating odor; severely irritating to the upper respiratory
tract and corrosive to eyes, skin, and mucous membranes.