Doc. No. & Rev.
EHS-00022 R10
Hard copy of this document, if not marked “CONTROLLED” in red,
Is by definition uncontrolled and may be out of date.
Specification
for
Hazardous Waste Contingency Plan
REVISION
Rev
No.
10
DCN No.
DCN1135
Change Summary
Added location of emergency coordinators
home addresses and the listing of all fire
extinguishers on site
Release
Date
DCN
Initiator
Document
Owner
10-22-14
K. Brust
R. Segura
Prior revision history, if applicable, is available from the Document Control Office
Printed copies are considered uncontrolled. Verify revision prior to use.
Created by CNSE on October 16, 2014
CNSE Confidential
Page 1 of 74
Specification for Hazardous Waste Contingency Plan
EHS-00022 R10
1.
INTRODUCTION
1.1
The Colleges of Nanoscale Science and Engineering (CNSE) at SUNY
Polytechnic Institute (SUNY Poly) are a semi-conductor
educational/research and development facility in Albany, New York. CNSE
uses silicon, glass, various acids, gases and solvents to process semiconductor wafers and is considered to be a Large Quantity Generator
(LQG) of hazardous waste (generates greater than 1000 kg/month).
CNSE also has seven wastewater pretreatment systems, three of which
neutralize acidic and alkaline waste streams from the wastewater, two that
remove fluoride waste streams from the wastewater, and two that remove
copper waste streams from the wastewater before discharging to the
Albany County Sewer District.
1.2
As an LQG of hazardous waste, CNSE is required to have a written
contingency plan per CFR 49 Part 372.2(a)(8)(ii) and 3731.1(d)(1)(iii)('c')('5') which states: "the generator complies with the
requirements for personnel training in section 373-3.2 of this Part, for
preparedness and prevention in section 373-3.3 and contingency plans
and emergency procedures in section 373-3.4, and with 376.1(g)(1)(v)."
1.3
Also, because it treats acidic and/or alkaline, fluoride and copper waste
streams on-site in the pretreatment systems, it must comply with the
Special Requirements for Wastewater Treatment Systems.
1.4
CNSE also stores some Extremely Hazardous Substances (EHSs) or
Hazardous Production Materials (HPMs) on-site (e.g., Hydrogen Fluoride,
Silane, Hydrogen, Arsine, Sulfuric Acid, Nitric Acid, etc.). Following good
industry practice, CNSE designated an Emergency Coordinator and
provided the Albany Emergency Planning Committee (AEPC) with an
Emergency Response Plan for its facility.
1.5
This contingency plan covers all of the above-mentioned requirements by
combining emergency response information for both hazardous waste and
hazardous materials. This approach makes sense since emergency
response procedures are often very similar for raw materials and waste
by-products.
1.6
This contingency plan contains specific response guidelines to be followed
in the event of other emergencies, including fires, natural disasters, severe
weather events, utility failures, and other catastrophic events.
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Specification for Hazardous Waste Contingency Plan
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2.
PURPOSE
2.1
To prevent and to minimize hazards to public health, safety, or welfare or
the environment from fires, explosions, spills or any other unplanned
sudden or non-sudden release of hazardous waste or hazardous materials
to air, soil, surface water, or ground water.
2.2
To provide specific response guidelines intended to prevent and to
minimize hazards to public health, safety, or welfare or the environment
from other emergencies, including fires, natural disasters, severe weather
events, utility failures, and other catastrophic events.
3.
SCOPE
3.1
The provisions of this plan will be carried out immediately whenever there
is a potential for, or there actually is, a fire, explosion, or other release of
hazardous waste or hazardous materials which could threaten public
health, safety, or welfare, or the environment.
3.2
The specific response guidelines included with this plan will be carried out
immediately whenever there is a potential for, or there actually is, an
emergency, including spills, and other catastrophic events.
4.
GENERAL FACILITY IDENTIFICATION INFORMATION
Facility Name
Colleges of Nanoscale Science and
Engineering at SUNY Polytechnic Institute
Owner/Operator/Agent Fuller Road Management Corporation
Physical Address
141, 251-257 Fuller Road, Albany, New York
12203
Mailing Address
141, 251-257 Fuller Road, Albany, New York
12203
NAICS Code(s)
54171, 61131
Key Contact(s) for
Plan Development
Environmental Health and Safety, Associate
Vice President
EHS Manager
Environmental Engineer
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Specification for Hazardous Waste Contingency Plan
Phone Number for
Key Contacts
(518) 437-8686
Facility Fax Number:
(518) 437-8687
EHS-00022 R10
5.
CONTINGENCY PLAN DISTRIBUTION
5.1
Copies of this contingency plan will be maintained at this facility by the
following personnel:
5.2

Primary and Alternate Emergency Coordinators

Emergency Response Team (ERT) Members

Security

SUNY Poly at Albany, EHS Department
If requested, copies of this contingency plan will be submitted to the
following external agencies:

Albany Fire Department

McKownville Fire Department

University Police Department

Albany Police Department

Albany Board of Health

Albany Medical Center

St. Peter’s Hospital

Local Emergency Planning Committee (LEPC)

Occupational Health Services

Clean Harbors Environmental Services, Inc.
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EHS-00022 R10
6.
TRAINING
6.1
Training for personnel with contingency plan responsibilities will be
provided at least annually;
6.2
New hires who will have plan responsibilities should receive training
shortly after they are hired.
6.3
Ultimately, contingency plan personnel should be trained to the extent that
that they are able to execute their respective recovery procedures without
aid of the actual document.
6.4
Recovery personnel should be trained on the following elements:
 Purpose of the plan
 Cross-team coordination and communication
 Reporting procedures
 Security requirements
 Team-specific processes Individual responsibilities
7.
HAZARDOUS WASTE GENERATION ACTIVITIES
7.1
CNSE is a Large Quantity Generator of hazardous waste. The following
hazardous and non-hazardous wastes are generated at this facility.
7.2
Hazardous Wastes
7.2.1
Flammable liquid mixed solvents (D001, F003, Acetone, Isopropanol,
Propylene Glycol Monomethyl Ether, Propylene Glycol Monomethyl Ether
Acetate, Cyclohexanone, N-methyl Pyrrolidone, etc.)
7.2.2
Flammable solids contaminated with (F003) solvents (Acetone)
7.2.3
Flammable solids contaminated with (D001) mineral spirits (Isopropanol)
7.2.4
Corrosive liquids (D002) (Hydrochloric Acid, Sulfuric, Hydrofluoric, Nitric,
Phosphoric and Citric Acids, Copper Sulfate/Sulfuric Acid plating
solutions)
7.2.5
Corrosive – (Acid) solids contaminated with Sulfuric, Hydrochloric, and
Phosphoric Acids.
7.2.6
Corrosive – (Base) solids contaminated with Tetra methyl Ammonium
Hydroxide, Ammonium Hydroxide
7.2.7
Toxic solids contaminated with Arsenic (D004)
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7.2.8
Lab pack chemicals from labs, including mixed acids, oxidizers, and toxics
7.2.9
Crushed fluorescent bulbs with mercury (D009) from facility change outs
7.2.10
Selective resin, carbon, and filters for copper removal during wastewater
treatment of copper baring rinsewater and slurries
7.3
Non-Hazardous Wastes
7.3.1
CMP polishing solutions and CMP solid wastes
7.3.2
Calcium Fluoride Sludge
7.3.3
Facilities Waste Oil (D-limonene, Vacuum Pump Oil)
7.3.4
Facilities Oil/Refrigerant (Freon)
7.3.5
Facilities Ethylene Glycol
7.3.6
Biomedical Waste
7.4
Universal Wastes
7.4.1
Fluorescent light bulbs
7.4.2
Mercury vapor lamps
7.4.3
Non-PCB Ballasts
7.4.4
Lead acid, Ni-Cad, Lithium and Alkaline Batteries
7.4.5
Metal Halide Bulbs
8.
HAZARDOUS MATERIALS/HAZARDOUS WASTE STORAGE
8.1
Hazardous Materials
8.1.1
Chemical Storage is located in the following areas of the CNSE complex:
8.1.1.1
Chemical Storage areas in the Central Utility Building (CUB), Hazardous
Production Materials (HPM) Building, NanoFab North (NFN) – HPM
corridor, NanoFab Central (NFC) - HPM corridor, CESTM laboratories
(L126, 128, L135, L136, L233, L237, L324, B101/120, B110) and
NanoFab East (NFE) labs.
8.1.1.2
Chemical storage tanks, (3800 gallon Sulfuric Acid and 3800 gallon
Sodium Hydroxide) in Wastewater Treatment area in NFN.
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8.1.1.3
Chemical storage tanks, (3800 gallon Sulfuric Acid and 5500 gallon
Sodium Hydroxide) in Wastewater Treatment area and 55 gallon drum
quantities in CUB.
8.1.1.4
Deionized Water Rooms in CUB, NanoFab Central (NFC) and NFN.
8.1.1.5
Hydrofluoric Acid treatment system in NFN and the CUB, wastewater
treatment area
8.1.1.6
Copper treatment systems in NFN, wastewater treatment area, and
NanoFab South Annex (NFSX) scrubber room (West end).
8.1.1.7
Acid exhaust neutralization (25% Sodium Hydroxide) tank in NFN, NFX,
and NFC penthouse areas.
8.1.1.8
Base exhaust neutralization (50% Sulfuric Acid) tank in NFN, NFX, and
NFC penthouse areas.
8.1.1.9
Corrosive (Acid and Caustic) liquid drum dispense systems in NFN, NFX
and NFC HPM areas as well as plating solution (copper sulfate, Sulfuric
Acid) in NFSX Dual (55 gal) drum cabinets are used to supply
semiconductor grade acids and caustics, pumped through double
contained plastic lines to various tools in the NFN and NFC cleanrooms.
8.1.1.10
Flammable liquid drum dispense systems in NFN and NFC HPM areas.
Dual (55 gal) drum cabinets are used to supply semiconductor grade
solvents (IPA, QZ, 2M4P etc.), pumped through double contained steel
lines to various tools in the NFN and NFC cleanrooms.
8.1.2
Gas cylinder storage is located in the following areas of the CNSE facility
(Refer to site plans in Appendix A for these locations throughout the
facility):
8.1.2.1
Toxic, corrosive, flammable, pyrophoric and inert gases in cylinders are
stored in segregated storage rooms in the CUB, HPM building, NFN-HPM
corridor and NFC-HPM corridor.
8.1.2.2
Helium gas is stored in cylinders in the gas storage area of CESTM (First
Floor near the NFN Connection).
8.1.2.3
Liquid Nitrogen is stored in bulk (10,000 gal) tanks located on the south
side of CESTM and in the NFN Gas farm.
8.1.2.4
Liquid Oxygen, Liquid Hydrogen, Liquid Argon and gaseous Helium are
stored in separate bulk tanks of various sizes located in the NFN Gas
farm.
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8.1.2.5
Silane gas cylinders are stored in a bunker on the north side of the bulk
gas yard in a separate fenced in area.
8.2
Hazardous and Non-hazardous Waste
8.2.1
Hazardous and non-hazardous wastes are stored in Hazardous Materials
Storage Sheds, located behind the CUB. As a Large Quantity Generator
of hazardous waste, CNSE stores hazardous waste on-site for up to 90
days prior to off-site shipment.
8.2.2
None of CNSE’s hazardous wastes are treated in its on-site wastewater
treatment (WWT) neutralization system. However some hazardous (acidic
and caustic) process effluents from NFS, NFSX, NFN and NFC are
treated in the WWT system and in the fluoride and copper pre-treatment
systems in the NFN building and then discharged to the Albany County
Sewer District.
8.3
In addition to the Primary Coordinator and the two alternates, CNSE has
designated Shift Emergency Response Team (ERT) Leaders to assess
emergency situations immediately during the evening and weekend shifts.
The Shift Emergency Response Coordinator (3rd Alternate) will notify the
Primary Emergency Coordinator immediately in the event of a major spill,
fire, explosions, or other emergencies, such as natural disasters, severe
weather events, utility failures, and other catastrophic events.
9.
HAZARDOUS WASTE CONTAINER TRANSPORTATION/
MOVEMENT
9.1
Wastes from NFE labs and NFC cleanroom are brought to the NFC
loading dock. NFS labs and cleanroom and NFSX cleanroom are brought
to the NFSX tool move in. CESTM labs, NFX cleanroom and NFN
cleanroom containers are combined at the NFN dock.
9.2
Once the materials are collected at the loading docks they are placed on
the fork truck and moved to the hazardous waste storage sheds.
9.3
Materials from the HPM building and the CUB are loaded directly on to the
fork truck and moved to the hazardous waste storage sheds.
9.4
Weekly the waste sheds are properly packed and loaded on a vendor’s
truck and shipped off site.
9.5
Persons required to handle, transport or ship containers of hazardous
waste wear the appropriate Personal Protective Equipment (PPE) as
outlined in EHS-00010 Personal Protective Equipment procedure.
9.6
Persons required to transport containers of hazardous waste shall do so
using a dedicated hazardous waste cart or fork truck only.
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9.7
Containers must have their tops/covers and/or bungs secured firmly in
place whenever being transported from the satellite accumulation areas to
the docks and then to the sheds.
10.
EMERGENCY RESPONSE PERSONNEL ORGANIZATION
10.1
Emergency Coordinators - Duties and Responsibilities
10.1.1
CNSE has designated a Primary Emergency Coordinator and 2 Alternate
Emergency Coordinators to take charge in all emergency response
situations, including spills, fires, explosions, or other emergencies, such as
natural disasters, severe weather events, utility failures, and other
catastrophic events. The Emergency Coordinator is responsible for
coordinating all emergency response measures and has the authority to
commit all resources required to fully implement the contingency plan. The
Emergency Coordinator is also responsible for notifying the necessary
agencies listed on the Emergency Response Contact Telephone List (see
Section 11).
10.1.2
In addition, the Emergency Coordinator must be thoroughly familiar with
the contingency plan, the facility, its layout and operations, and the
location of hazardous waste, hazardous materials, emergency equipment,
and all environmental records; and the nature of the hazards within the
facility.
10.1.3
The Alternate Emergency Coordinators must assume the role of
Emergency Coordinator in his/her absence.
10.1.3.1
Primary Emergency Coordinator
Role
Primary
Emergency
Coordinator
st
1 Alternate
Coordinator
Name
Contact
Information
(518) 437-8627 (w)
(518) 882-1363 (h)
(518) 470-6882 (c)
Work Address
253 Fuller Road,
Albany, New York
12203
253 Fuller Road,
Kara Mackey(518) 925-2944 (w)
Albany, New York
Dopman
(518) 796-3146 (c)
12203
nd
2 Alternate
141 Fuller Road,
Coordinator
Lilia Chen
(518) 795-4689(c)
Albany, New York
12203
Addresses of all coordinators can be obtained by contacting the
Human Resources department at [email protected],
518-956-7317, or 518-320-6489.
Robert Segura
10.2
Emergency Response Team (ERT) - Duties and Responsibilities
10.2.1
CNSE has designated an Emergency Response Team (ERT) to respond
to “controllable” emergency response situations such as small chemical
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spills (<55gallon) and incipient firefighting until the Albany Fire Department
arrives, under the supervision of the acting Emergency Coordinator.
10.2.2
If there is a large (>55 gallons) chemical spill or release, CNSE will contact
Clean Harbors Environmental Services Inc. to clean it up.
10.2.3
In the event of a spill, Security will notify the Emergency Response Team
members via the Desktop SMS Notification System. Proper ERT
Notification Procedures are located in Appendix C of the Life Safety
Standard Operating Procedure, SEC-01001.
10.2.4
Responsibilities of the Emergency Response Team members as well as
additional personnel who may have responsibilities in the event of a fire,
spill or release of hazardous waste/material is detailed in Emergency
Response Team Organization Procedure. Local Agencies Contact
Information
11.
EMERGENCY RESPONSE CONTACT TELEPHONE LIST
11.1
Albany Fire Department
911
University Police Department
(518) 442-3131 / (911)
Department of Health
(518) 447-4580
State Agencies/Spill Response Telephone Number
NYS Department of Environmental
Conservation (DEC) Office of
Incident Response
11.2
(518) 457-7362
Or
1-800-457-7362
Medical Emergency Centers Telephone Number
Albany Medical Center Emergency
(518) 262-3131
St. Peter’s Hospital Emergency
(518) 525-1324
Occupational Health Services
(Access)
(518) 782-2200
Poison Control
(800) 336-6997
Chemtrec 24-hour
(800) 424-9300
For non-emergency chemical
information
(800) 262-8200
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11.3
EHS-00022 R10
Spill Clean Up Contractor Telephone Number
Clean Harbors Environmental
Services, Inc.
24-HR. Emergency Spill Response
Number
(800) 645-8265
Non-emergency
(518) 434-0149
12.
EVACUATION PROCEDURES
12.1
In the event a fire, explosion, chemical release, or any other situation that
may pose a threat to employees and building and or cleanroom
evacuation is necessary, refer to the building and cleanroom evacuation
procedures outlined in the EHS documents EHS-00024 Building
Evacuation Plan and EHS-00049 Toxic Gas Monitoring Evacuation Plan.
12.2
Facility Evacuation Plan (Fire)
12.2.1
When a building fire alarm sounds, all persons must evacuate. As soon as
the fire alarm has sounded, everyone is to place their equipment into a
safe mode as previously instructed by their supervisor, and walk directly to
the nearest safe exit aisle.
12.2.2
Once out of the area all employees shall proceed directly to outside the
building.
12.2.3
If you discover persons injured, remain in the closest safe area,
communicate to Security by calling ext. 78600: the location of the victim
(and your location if different), number of persons and nature of injury.
Security shall inform the ERT leaders who will implement the appropriate
action.
12.2.4
The Supervisor of the area, or his/her designee, should perform the
following:
12.2.5

Direct personnel to the nearest cleanroom exit;

Check to be sure the area is clear of all personnel; and

Close all the doors on the way out.
Personnel not in their normal work area at the time of the evacuation
alarm shall exit with that area and follow the direction of that area
supervisor.
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12.2.6
Once outside the building, everyone shall report to their assigned Rally
Point. Rally Points are numbered light poles located in the parking lot.
STAY CLEAR OF VEHICLE ACCESS WAYS. A head count shall be taken
by each Rally Point Coordinator to ensure that all personnel have been
safely evacuated. The results of the headcount shall be conveyed to the
ERT leader.
12.2.7
Until the facility is determined to be safe to reenter by the ERT leader, only
authorized personnel will be allowed back into the facility. Every effort
shall be made to return employees into the facility, as quickly as possible,
but only after it is safe to do so.
12.3
Facility Evacuation Plan -TGMS
12.3.1
When a Toxic Gas Monitoring System (TGMS) alarm sounds, all persons
must evacuate. As soon as the TGMS alarm has sounded, everyone must
place their equipment into a safe mode as previously instructed by their
supervisor, and walk directly to the nearest safe exit aisle.
12.3.2
Once out of the cleanroom environment all employees shall proceed
directly to their designated regroup area. Do not remove cleanroom
garments.
12.3.3
The Supervisor of the area, or his/her designee, should perform the
following:

Direct personnel to the nearest cleanroom exit;

Check to be sure the area is clear of all personnel; and

Close all the doors on the way out.
12.3.4
Personnel not in their normal work area at the time of the evacuation
alarm shall exit with that area and follow the direction of that area
supervisor.
12.3.5
Once outside the cleanroom, everyone shall report to their assigned
regroup area. Regroup areas are as follows:

NFN - CESTM rotunda

NFX - CESTM rotunda

NFC - CESTM rotunda

CESTM L233 - CESTM rotunda

NFS/NFSX-NFS rotunda
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12.3.6
Until the cleanroom is determined to be safe to reenter by the ERT leader,
only authorized personnel will be allowed back into the evacuated
cleanroom environment. Every effort shall be made to return employees
into the cleanroom, as quickly as possible, but only after it is safe to do so.
13.
EMERGENCY RESPONSE PROCEDURES
13.1
Emergency Response Organization
13.1.1
In the event a fire, explosion, chemical release, or any other situation that
may pose a threat to employees, refer to the emergency response
procedures appended to this document. In the event of a natural disaster,
severe weather event, utility failure, or other catastrophic events not listed
above, refer to the Specific Emergency Response Guidelines for each
type of emergency in the Emergency Response Team Organization
Procedure, EHS-00019.
13.2
First Employee to Discover the Spill/Fire
If an employee discovers a fire, they should sound the fire alarm pull
boxes which are located at all exits. When an employee discovers a spill
or release of hazardous materials or waste, they should call Security at
extension 78600. Security will then notify the Emergency Coordinator and
the ERT. Detailed information regarding ERT notification is provided in the
Emergency Response Team Organization Procedure.
13.3
Emergency Coordinator Actions
13.3.1
The Emergency Coordinator will attempt to immediately identify the
character, exact source, amount, and extent of any released materials,
whenever there is a release, fire, or explosion. He/she may do this through
observation, information received from employees initially on the scene
during the spill, fire, explosion, and review of facility records or through
chemical analysis. Concurrently, the Emergency Coordinator will evaluate
the potential threat to human health and/or the environment. This
assessment must consider both direct and indirect effects of the release,
fire, or explosion that may result in toxic gases released to air, run-off to
surface waters, and run-off to conduits, sewers, and drains.
13.3.2
After completing the initial evaluation, the Emergency Coordinator will
implement the following actions, as appropriate:
13.3.2.1
If it is determined that there is a threat to employees, the Emergency
Coordinator will order the evacuation alarms be activated and all
employees will exit the building, in accordance with the evacuation plans
EHS-00024 Building Evacuation and EHS-00049 Toxic Gas Monitoring
System Evacuation. The Emergency Coordinator will also notify the
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Albany Fire Department in the event of a fire and Clean Harbors
Environmental Services Inc. if there is an uncontrollable release of
hazardous waste/material.
13.3.2.2
If it is determined that the situation poses a threat to human health and/or
the environment outside the facility, the appropriate local, state and
federal authorities will be notified immediately. The Emergency
Coordinator will be available to assist local and state response personnel
in determining if area evacuation is necessary.
13.3.3
In the event that evacuation of the local area is required, the Emergency
Coordinator will immediately notify the NYS DEC. In addition, the
appropriate local, state, and federal authorities will also receive notification
(Refer to Section 12.0 for Notification Procedures).
13.3.4
Control and Containment:
During an emergency, the ERT, under the supervision of the Emergency
Coordinator, will implement the necessary actions to contain, control, and
limit the amount of exposed area. Containment will include the use of
absorbent material, artificial and natural barriers to collect and contain
hazardous materials, removing and isolating containers and, if necessary,
the complete shutdown of processes and operations. If at any time during
the control and containment phase of the emergency response the
Emergency Coordinator deems the emergency response “uncontrollable”,
he/she will instruct the ERT to discontinue containment efforts and leave
the building/area immediately. At that point, Clean Harbors Environmental
Services Inc. will be called in to continue control and cleanup efforts.
13.3.5
Emergency Response Follow Up Actions: The Emergency Coordinator is
responsible for implementing the following emergency response follow up
actions.
13.3.5.1
Where appropriate, all operational equipment will be checked out for
leaks, pressure build-up and gas generation, prior to restarting operations.
13.3.5.2
Hazardous wastes, including contaminated soil and surface water will be
collected and placed in proper containers, stored and disposed of in
accordance with the applicable NYS DEC and Federal hazardous waste
regulations.
13.3.5.3
All emergency response equipment will be decontaminated and/or
disposed of, restocked, and a complete inspection will be performed on
reusable items.
13.3.5.4
Written reports will be submitted to the appropriate agencies in a timely
manner.
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14.
NOTIFICATION PROCEDURES
14.1
Assessment of Spill or Release
14.1.1
Whenever there is a threat or actual release of hazardous waste or
material which could harm public health or the environment, CNSE should
report the release to the appropriate agencies mentioned below. The rule
of thumb is when in doubt REPORT!
14.1.2
If the threat of a release exists or an actual release occurs, CNSE must
determine whether a "reportable quantity" (RQ) will be or has been
released to the environment. A release which equals or exceeds the RQ of
a listed chemical requires reporting to the appropriate agency (as
described below) as soon as there is knowledge of the release or potential
for the release to the environment. For materials listed on the New York
State Department of Environmental Conservation (DEC) List of Hazardous
Substances, a release or threat of release must be reported as soon as
possible but not more than two hours after obtaining knowledge of the
release.
In order to determine whether a spill or release to the environment has
exceeded the reportable quantity designated for a particular chemical,
CNSE must calculate whether a reportable quantity (RQ) of chemical was
released. If a mixture of chemicals was released, CNSE must calculate
the estimated amount of reportable chemical released using chemical
information included on the Safety Data Sheet (SDS) including specific
gravity and percent concentration. Depending on which list the reportable
chemical is listed on, CNSE must notify different agencies of the release.
When a hazardous waste is spilled to the outside environment (e.g.,
D002-corrosive waste), the entire weight of the waste must be calculated
to determine if the RQ was exceeded, percentages of the waste should
not be taken into account.
14.1.3
Reportable quantities (RQs) can fall under the following chemical lists:
14.1.3.1
Extremely Hazardous Substances (EHS) List (Appendix A, 40 CFR 355) this list was developed by the EPA under the Superfund Amendments and
Reauthorization Act (SARA) Title III, Section 302 for approximately 406
chemicals. Spills of RQs of EHSs are reported to the Local Emergency
Planning Committee, which in this case is the Albany Fire Department
(911), and the NYS DEC hotline (800) 457-7362. Spills of RQs of EHSs
must also be reported to the National Response Center (800) 424-8802
(24 Hour Hotline).
14.1.3.2
Comprehensive Environmental Response, Compensation and Liability Act
(CERCLA) Hazardous Substance List (40 CFR 302) - this list was
developed by the EPA for approximately 700 chemicals. Spills of RQs of
Printed copies are considered uncontrolled. Verify revision prior to use.
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CERCLA Hazardous Substances must be reported to the National
Response Center (800) 424-8802 (24 Hour Hotline).
14.2
Notification of Release
Once CNSE determines if an RQ was released to the environment, it will
immediately verbally notify the appropriate agencies as listed above.
14.2.1
14.2.2
During the Verbal Notification the following information will be provided:

Name, address, US EPA ID Number NYR000118562 (for
Hazardous wastes);

Date, time, duration and type of incident;

Quantity and type of hazardous wastes/materials involved;

Any injuries and their extent;

Any known or anticipated acute or chronic risks associated with the
release and, where appropriate, advice regarding medical attention
necessary for exposed individuals;

Proper precautions to take as a result of the release, including
evacuation (unless such information is readily available to the
community emergency coordinator pursuant to the emergency plan
for the community);

Estimated quantity and disposition of recovered materials, if any;
and

Name & telephone number of the person to be contacted for further
information.

Written Notification
Written Reports to NYS DEC for materials listed on the NYS Department
of Environmental Conservation (DEC) List of Hazardous Substances must
be filed with DEC. Written reports for releases of hazardous waste must
also be submitted to the NYS Department of Environmental Protection,
Division of Hazardous Waste within seven days of verbal notification. This
notification should include the information listed below. Written reports to
all other agencies should include the same information.

Name, address, and telephone number of owner or operator;

Name, address, and telephone number of the facility;
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
US EPA ID Number NYR000118562 (for Hazardous wastes);

Date, time and type of incident;

Quantity and type of hazardous wastes/ materials involved;

Any injuries and their extent;

Actions taken to respond to and contain the release;

Any known or anticipated acute or chronic health risk associated
with the release;

Where appropriate, information regarding medical attention
provided to exposed individuals;

An assessment of actual or potential hazards to public health,
safety, welfare, or the environment, when it is applicable;

Estimated quantity and disposition of recovered materials, if any;

All differences between the emergency response activities actually
taken and those prescribed in the contingency plan and the
reasons for each such difference; and

Proposed measures to prevent similar incidents in the future
15.
EMERGENCY EQUIPMENT
15.1
Fire Alarms
15.1.1
Description: White/Red boxes mounted on walls, white light with
intermittent tone.
15.1.2
Capabilities: Notifies ERT; and U.S.A. Central Station Alarm Corp. alarm
monitoring service automatically upon activation of pull boxes, smoke
detectors or sprinkler activation.
15.1.3
Location: Located throughout the CUB, NFS, NFSX, NFN, NFC, NFE,
CESTM, NFX, and HPM buildings.
15.1.4
Maintenance: Inspection and testing performed every six months.
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15.2
Toxic Gas Monitoring System
15.2.1
Toxic Gas Monitoring Alarms
15.2.1.1
Description: These units monitor the distribution and usage points for
toxic, pyrophoric, oxidizing, and corrosive gases.
15.2.1.2
Capabilities: There are two levels of alarms. The warning level (1/4
PEL/TLV) and 1st level alarm automatically pages the ERT. The
evacuation level and 2nd level alarm (1/2 PEL/TLV) activates the
evacuation alarm automatically. Consists of blue lights boxes mounted on
walls, blue light with intermittent tone.
15.2.1.3
Location: Monitors all storage, distribution, and use areas in the facility
utilizing toxic, pyrophoric, oxidizing, and corrosive gases. Located
throughout the NFS, NFSX, NFC, NFX and NFN cleanrooms, and HPM
storage locations in the CUB, NFC, NFX and NFN-HPM corridors, the
HPM building and the CESTM L-233.
15.2.1.4
Maintenance: Sensors are changed out and tested every six months.
15.2.2
Combustible Gas Monitoring Alarms
15.2.2.1
Description: These units monitor the distribution and usage points for
flammable gases.
15.2.2.2
Capabilities: There are two levels of alarms. The warning level (15% of the
LEL) and 1st level alarm automatically pages the ERT. The evacuation
level and 2nd level alarm (20% of the LEL) activates the evacuation alarm
automatically. Consists of blue light boxes mounted on walls, blue light
with intermittent tone.
15.2.2.3
Location: Monitors all storage, distribution, and use areas in the facility
utilizing flammable gases. Located throughout the NFS, NFSX, NFN, NFX
and NFC cleanrooms and HPM storage locations in the CUB, NFX, NFNHPM corridor, HPM building and CESTM L-233.
15.2.2.4
Maintenance: Sensors are changed out and tested every six months.
15.3
Fire Protection Equipment
15.3.1
Automatic Fire Suppression Sprinkler System
15.3.1.1
Description: Heat Activated, wet system
15.3.1.2
Capabilities: Extinguishes fire, sounds alarm at Albany Fire Department
15.3.1.3
Location: Throughout the CNSE facility
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15.3.1.4
Maintenance: Fire pump testing and inspection are performed every week.
Sprinkler flow tests are performed quarterly.
15.3.2
Automatic Fire Suppression Carbon Dioxide System
15.3.2.1
Description: Heat Activated, carbon dioxide system tripped by activation of
an UV/IR detector.
15.3.2.2
Capabilities: Extinguishes fire, sounds alarm at Albany Fire Department
15.3.2.3
Location: Installed in chemical dispense units that store greater than 30
gallons of a flammable liquid in CUB, NFS, NFSX, NFC, NFX and NFN
buildings.
15.3.2.4
Maintenance: Functional testing performed every six months.
15.3.3
Fire Extinguishers
15.3.3.1
Description: Wall mounted fire extinguishers
15.3.3.2
Capabilities: Extinguishing fires using dry chemical/carbon dioxide/Clean
Guard fire portable fire extinguishers
15.3.4
Location: Located throughout the CNSE facility (see Appendix F).
15.3.4.1
Maintenance: Inspections are performed every month.
15.3.5
Smoke Detectors
15.3.5.1
Description: Combination of ceiling mounted units and photoelectric heat
detector units
15.3.5.2
Capabilities: Detect smoke through ionization sensing device. Smoke
particles either block out the light to the photocell or become charged and
alter the characteristics of an electrical circuit, and send an alarm signal at
preset density.
15.3.5.3
Location: Located throughout the CNSE facility. Ceiling units are mounted
on the ceiling; photoelectric units are placed in the air return ducts or
plenum of the cleanroom.
15.3.5.4
Maintenance: Testing performed every six months.
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15.4
Spill Response Equipment
15.4.1
Spill/Emergency Equipment Carts
15.4.1.1
Description: Cart containing emergency and spill containment equipment.
See Emergency Response Team Organization Procedure for detailed list
of contents.
15.4.1.2
Capabilities: Cleaning up small chemical spills
15.4.1.3
Location: NFC Lam pass-through, NFN SubFab Foyer near helmet
storage, NFN SubFab storage area (near WWT), NFE 1st floor chase, ERT
closet NFS, and the ERT closet NFX.
15.4.1.4
Maintenance: Inspections are performed every month.
15.4.2
Spill Control Materials
15.4.2.1
Description: Spill control pillows, Speedi-Dry, spill pads, over pack drums.
See Emergency Response Team Organization Procedure EHS-00019 for
detailed list of emergency equipment.
15.4.2.2
Capabilities: Cleaning up small spills
15.4.2.3
Location: Spill control materials are located in ERT closet NFN, NFC Lam
pass-through, NFN SubFab foyer near helmet storage, NFN SubFab
storage area (near WWT), NFE 1st floor chase, ERT closet NFS, and the
ERT closet NFX.
15.4.2.4
There are 85 gallon spill response drums in the NFC loading dock, NFN
HPM corridor, CUB, and HPM building to be used in the event of a drum
puncture or similar event.
15.4.2.5
Maintenance: Inspections are performed every month.
15.5
Medical Emergency Equipment - First Aid Bags
15.5.1.1
Description: Bags specifically set up to attend to first aid; first aid bag. See
Emergency Response Team Organization Procedure EHS-00019 for
detailed list of contents.
15.5.1.2
Capabilities: Basic first aid and CPR
15.5.1.3
Location: co-located with the spill control materials located in ERT closet
NFN, ERT closet NFS, ERT office NFC, ERT closet NFX, Security (NFE
Rotunda), and CESTM room B110 (Metrology) closet.
15.5.1.4
Maintenance: Inspections are performed every month.
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15.6
Personal Protective Equipment
15.6.1
Self-Contained Breathing Apparatus (SCBA)
15.6.1.1
Description: Scott Air Pack Units
15.6.1.2
Capabilities: 30 minute air supply for ERT to enter IDLH atmospheres in
all buildings other than NFX, NFX has 60 minute air packs.
15.6.1.3
Location: NFS, NFSX loading dock, NFN Fab and SubFab, NFC Fab and
SubFab, NFX Fab and SubFab and CESTM 2nd floor.
15.6.1.4
Maintenance: Inspections are performed every month see Emergency
Response Team Organization Procedure EHS-00019 for inspection
sheets.
15.6.2
Emergency Eyewash/Showers
15.6.2.1
Description: Eyewashes and emergency showers
15.6.2.2
Capabilities: Deluging eyes or skin in case of corrosive chemical splashing
15.6.2.3
Location: Located in chemical use and storage areas throughout the NFC,
NFE, NFS, NFSX, NFN, CESTM, CUB, NFX, and HPM buildings.
15.6.2.4
Maintenance: Inspections and testing are performed every month.
15.7
Emergency Back-Up Systems
15.7.1
Emergency Generators
15.7.1.1
Description: Provide emergency power for NFC, NFE, NFS, NFSX, NFN,
CUB, HPM, NFX, and CESTM buildings.
15.7.1.2
Capabilities: Provide backup energy sources for power outages
15.7.1.3
Location: Seven generators located on site:
1 behind NFSX building- supplies NFS and NFSX;
1 at the southeast corner of Lot A - supplies CESTM;
1 North of the CUB – supplies the CUB;
2 behind the NFN building – 1 supplies NFC and 1 supplies HPM and
NFN;
1 southeast of the intersection of Tricentennial Drive and Jose Martin
Drive - supplies the NFE.
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3 Southwest of NFX building – supplies NFX
15.7.1.4
Maintenance: Inspections are performed every month. These are all diesel
fueled generators and have double-walled storage tanks incorporated into
their bases, ranging in size from 300 to 2000 gallons capacity.
15.7.2
Emergency Lighting
15.7.2.1
Description: Battery powered and generator supplied emergency lighting
in the event of a power failure
15.7.2.2
Capabilities: Emergency lighting system provided in the building by both
battery packs and the emergency generator.
15.7.2.3
Location: Located throughout the CNSE facility. Along emergency
evacuation routes, exit corridors and exit stairwells.
15.7.2.4
Maintenance: Battery powered emergency lighting is inspected every six
months.
15.8
Emergency Shut-Off Switches
15.8.1
Emergency Gas Shut-Offs
15.8.1.1
Description: Emergency shut-off for toxic, pyrophoric, corrosive,
flammable, and oxidizing gases.
15.8.1.2
Capabilities: Immediately shut off gas flow inside a gas cabinet, valve
manifold box, and process tool.
15.8.1.3
Location: Emergency Manual Off (EMO) buttons are red in color and are
located on the front of the gas cabinet, valve manifold box, and process
tool.
NOTE: Emergency Gas Off (EGO) buttons are also located inside the
HPM corridors in NFN, NFC, NFX, and the CUB to automatically shut off
all gases in each of these areas.
15.8.1.4
Maintenance: Functionality is tested on start-up of the gas cabinet, valve
manifold box, and process tool. If signal fails a page is sent to the ERT to
respond to the situation.
15.8.2
Emergency Chemical Shut-Offs
15.8.2.1
Description: Emergency shut-off for toxic, corrosive, flammable, and
oxidizing chemicals.
15.8.2.2
Capabilities: Immediately shut off chemical flow inside a chemical
dispense unit, valve manifold box and process tool.
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15.8.2.3
Location: Emergency Manual Off (EMO) buttons are red in color and are
located on the front of the chemical dispense unit, valve manifold box, and
process tool.
15.8.2.4
Maintenance: Functionality is tested on start-up of the chemical dispense
unit, valve manifold box, and process tool. If signal fails a page is sent to
the ERT to respond to the situation.
15.8.3
Natural Gas Main
15.8.3.1
Description: One shut off handle for shutting off natural gas feeding each
of the CUB, CESTM, NFS, NFSX NFN, NFC, NFX and NFE buildings.
15.8.3.2
Capabilities: Shutting off incoming natural gas to the affected building.
15.8.3.3
Location: See Appendix B
15.8.4
Water Main
15.8.4.1
Description: Several shut off valves located around the site to shut off
water for entire facility. Each building also has a shutoff internally.
15.8.4.2
Capabilities: Shutting off incoming city water
15.8.4.3
Location: See Appendix C
15.8.5
Electrical Main Switch
15.8.5.1
Description: There is one main shutoff for the entire facility the National
Grid Power Substation shutoff. There are also additional shutoffs for each
building in the respective electrical distribution rooms.
15.8.5.2
Capabilities: Shuts down all electricity to the building
15.8.6
Ventilation Off Button
15.8.6.1
Description: Emergency shut-off for ventilation in each of the HPM rooms.
15.8.6.2
Capabilities: Immediately shut off ventilation inside a gas cabinet in each
of the HPM corridors in NFC, NFN, NFX, and the CUB.
15.8.7
Bulk Gas Farm
15.8.7.1
Description: One shut off handle for shutting off each of the bulk gases
(Hydrogen, Oxygen, Nitrogen, Argon and Helium) feeding the CUB,
CESTM, NFS, NFSX, NFN, NFC, NFX and NFE buildings. Not all
buildings have all of these bulk gases. CESTM has liquid and gaseous
Nitrogen only. The CUB has Nitrogen only, while NFS has Nitrogen,
Argon, and high purity Oxygen. NFSX has Nitrogen and Argon only, and
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NFN and NFC have all of the bulk gases. Currently, NFE has Nitrogen
only.
15.8.7.2
Capabilities: Shutting off incoming bulk gases (Hydrogen, Oxygen,
Nitrogen, Argon and Helium) feeding the CUB, CESTM, NFS, NFSX,
NFN, NFC, NFX and NFE buildings.
15.8.7.3
Location: See Appendix D
15.9
On-Site Pollution Control Systems
15.9.1
Wastewater Treatment System
15.9.1.1
Description: Two on-site wastewater treatment systems
15.9.1.2
Capabilities: Systems neutralize wastewater prior to discharge to the
POTW.
15.9.1.3
Location: Wastewater Treatment Area is located in the CUB and NFN
15.9.2
Air Scrubbers
15.9.2.1
Description: Point of use wet scrubbers
15.9.2.2
Capabilities: Designed to scrub acid or caustic exhaust gases from
semiconductor processes in the buildings prior to release to the
environment. Some of these units use an acid or caustic scrubber solution
designed to neutralize caustic or acidic gases and vapor contaminants,
while others just use water to dilute and remove acid and organic vapors.
15.9.2.3
Location: See Appendix A.
15.9.3
Thermal/ Wet Abatement Units
15.9.3.1
Description: Thermal / wet point-of-use air pollution scrubbers
15.9.3.2
Capabilities: Designed to burn all combustible, flammable and pyrophoric
gases coming from gas cabinet purge lines and equipment vacuum pump
systems, and then wet scrub the combustion gases prior to entering the
building ventilation and house scrubber systems.
15.9.3.3
Location: See Appendix A
15.9.4
Thermal / Catalytic Oxidizers
15.9.4.1
Description: Thermal point-of-use air pollution abatement unit
15.9.4.2
Capabilities: Designed to burn non-halogenated organic constituents
mainly from lithography applications using a low temperature electrically
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heated catalyst bed. Combusted gases are discharged to building exhaust
without further scrubbing.
15.9.4.3
Location: See Appendix A
15.9.5
Rotary Concentrator Thermal Oxidizer (RCTO)
15.9.5.1
Description: Thermal oxidizer with pre-concentrating zeolite wheel.
15.9.5.2
Capabilities: Designed to concentrate high volume, but low concentration
organic constituents from multiple process sources using an absorptive
ceramic/zeolite wheel. Organic constituents are first absorbed and then
dislodged and fed into a combustion chamber where they are destroyed at
higher removal efficiency.
15.9.5.3
Location: NFC building rooftop and NFX building rooftop - See Appendix A
15.9.6
House Scrubbers
15.9.6.1
Description: Horizontal or vertical Packed bed scrubbers
15.9.6.2
Capabilities: Designed with acid or caustic injection capabilities and
installed to provide removal of acid and caustic vapor from building level
high volume exhaust streams. Scrubber liquids discharged through site
wastewater treatment plant prior to discharge to the local POTW.
15.9.6.3
Location: NFN, NFX, and NFC building penthouse areas. See Appendix A.
15.9.7
TESTING/MAINTENANCE OF EMERGENCY EQUIPMENT
15.9.7.1
CNSE has preventative maintenance programs that are administered by
the affected departments that ensures all alarms, monitoring systems, fire
protection equipment, spill containment equipment, personnel protection
equipment, and emergency back-up equipment are properly tested and
maintained.
16.
SPECIAL PROCEDURES FOR HAZARD PREVENTION
CNSE has developed the following procedures and uses the following
equipment to prevent hazardous situations form occurring:
16.1
Prevent Uncontrolled Reactions of Incompatible Wastes or Materials:
16.1.1
Proper handling of chemicals and wastes to prevent uncontrolled
reactions of incompatible materials are described in EHS-00005 Chemical
Handling and Storage, and EHS-00009 Hazardous Waste Management.
Waste acids and bases go to acid/base waste drains which are routed to
the appropriate water treatment system. Waste coppers go to copper
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waste drains which are routed to the copper treatment system. Waste
fluorides go to fluoride waste drains which are routed to the fluoride
treatment system. Waste solvents are piped separately to a point-of-use
waste tank and shipped off-site as hazardous waste.
16.2
Prevent Hazards in Unloading Operations:
16.2.1
Employees working in the loading/unloading area have been properly
trained to prevent accidents from happening. There are drain covers and
spill supplies available to cover storm drains and contain the situation in
the event of a spill.
16.3
Prevent Run-off from Hazardous Materials and Hazardous Waste in
Handling Areas:
16.3.1
Hazardous waste and hazardous materials are stored and handled in
accordance with the protocols outlined in EHS-00005 Chemical Handling
and EHS-00009 Hazardous Waste Management procedures, and are
stored in storage rooms (the HPM building and Hazardous waste shed
behind the CUB) that are equipped with leak detection and double
containment.
16.4
Prevent Flooding:
16.4.1
CNSE is not located in a flood zone. There is no history of flooding at this
location. A copy of the Flood Zone Map is included in Appendix E with the
Site Plan. In the event of a flood, specific emergency response guidelines
are included in Life Safety Operating Procedure, SEC-01001 Appendix L.
16.5
Mitigate Effects of Equipment Failure or Power Outages:
16.5.1
CNSE has an emergency generator and emergency lighting in case of a
power outage. All gas monitors, fire alarm system, exhaust and tank
overflow alarms are on a backup emergency system in the event of a
power outage.
16.6
Prevent Hazards to Public Health, Safety or Welfare or the
Environment from Fires, Explosions, Spills, or Any Other Unplanned
or Non-sudden Release of Hazardous Waste or Hazardous Material:
16.6.1
CNSE has established a team of trained emergency response personnel
to respond to emergencies. Under the direction of the Emergency
Coordinator, every attempt will be made to assess and control an
emergency situation. Professional emergency response personnel will be
called in, if necessary.
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16.7
Prevent Undue Exposure of Personnel to Hazardous Waste and/ or
Hazardous Materials:
16.7.1
CNSE has implemented a strong safety training program instructing
employees on how to prevent undue exposure to hazardous chemicals.
Personal Protective Equipment (PPE) is provided to chemical and waste
handlers. In addition, secondary containment, chemical leak detectors,
gas monitors, and exhaust systems have all been installed to help prevent
any undue exposure to employees and the public.
16.8
Prevent Contamination of the Environment Through Containment of
Fire Water:
16.8.1
Anytime that water is used in fighting a fire and the water may have been
contaminated with chemicals used/stored at the CNSE facilities, CNSE’s
ERT (under the direction of the Emergency Coordinator) personnel will
work with the Albany Fire Department to contain the water and prevent it
from entering storm drains, catch basins, and any other environmentally
sensitive areas surrounding the facility. The ERT has been properly
trained in containing releases and has a variety of emergency response
equipment with which this task can be accomplished. Chemical storage
areas have been designed with secondary containment systems so that in
the event water from fighting a fire in this area is contaminated, such
contaminated water in NFN is directed to the facility’s water treatment
plant for treatment before being discharged to the POTW. In the HPM
building, such water is contained in underground storage tanks that are
designed to contain such water and later be pumped out so that such
water could be disposed of in accordance with local and state guidelines.
16.9
Specific Emergency Response Guidelines:
16.9.1
In the event of a natural disaster, severe weather event, utility failure, or
other catastrophic events not listed above, refer to the specific emergency
response guidelines provided in Emergency Response Team Organization
Procedure.
17.
ARRANGEMENTS WITH AUTHORITIES
17.1
Arrangements have been made with the Albany Police Department,
Albany Fire Department, the Local Board of Health and Clean Up
Contractor to familiarize them with the layout of the site, properties of
hazardous wastes/materials handled on-site, hazards associated with
such hazardous wastes/materials, places at the site where personnel
would normally be working, entrances to and roads inside the site, and
possible evacuation routes.
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17.2
EHS-00022 R10
Hospitals
Arrangements have also been made to familiarize local hospitals with the
properties of hazardous wastes/materials handled at the site and types of
injuries or illnesses which could result from fires, explosions, or other
releases at the site.
AGENCY
Albany Fire Department
REQUESTED SUPPORT



Fire Fighting Rescue
Emergency Response
Incident Command
University Police Department




Communications
Area Evacuation Coordination
Crowd Control
Traffic Control
NYS DEC

Coordination and Notification of
Additional Response Agencies
Technical Assistance

St. Peter’s Hospital
Emergency Medical Services
Albany Medical Center
Emergency Medical Services
Clean Harbors Environmental
Services, Inc.
Emergency Spill Response Services
18.
AMENDMENTS TO CONTINGENCY PLAN
18.1
This contingency plan will be reviewed and immediately updated
whenever:
18.1.1
The plan fails in an emergency;
18.1.2
The facility changes in its design, construction, operation, maintenance, or
other circumstances, in a way that materially increases the potential for
fires, explosions, or releases of hazardous waste or hazardous waste
constituents, or changes the response necessary in an emergency;
18.1.3
The list of Emergency Coordinators changes; or
18.1.4
The list of emergency equipment changes
18.2
All additions or deletions to this plan shall be under the document control
system with sign-off required by, but not limited to the EHS Department.
Printed copies are considered uncontrolled. Verify revision prior to use.
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19.
EHS-00022 R10
ASSOCIATED DOCUMENTS
Copies of the following documents are located in the EHS office,
Document Control office and/or on the CNSE Intranet
http://intranet.sunycnse.com/.
19.1
EHS-00005 Chemical Handling and Storage
19.2
EHS-00009 Hazardous Waste Management
19.3
EHS-00019 Emergency Response Team Organization Procedure
19.4
EHS-00024 Building Evacuation Plan
19.5
EHS-00049 Toxic Gas Monitoring System Evacuation Plan
19.6
SEC-01001 Life Safety Standard Operating Procedure
20.
APPENDICES
Appendix A – CNSE Scrubber and Gas cylinder storage locations:
Figure 1.
Site Layout
Figure 2.
CESTM L-Wing 1 Floor - Showing Scrubber, Hazardous Waste Satellite
Accumulation Areas, and Gas Cylinder Locations
Figure 3.
CESTM L-Wing 2 Floor - Showing Scrubber, Hazardous Waste
Satellite Accumulation Areas, and Gas Cylinder Locations
Figure 4.
CESTM L-Wing 3 Floor – Showing Hazardous Waste Satellite
Accumulation Area
Figure 5.
CESTM B-Wing 1 Floor- Showing Hazardous Waste Satellite
Accumulation Areas
Figure 6.
NFE 4 Floor- Showing Hazardous Waste Satellite Accumulation Areas
Figure 7.
NFE 2
Figure 8.
NFE 1 Floor- Showing Hazardous Waste Satellite Accumulation Areas
and Gas Cylinder Locations
Figure 9.
Central Utility Building (CUB) - Showing Gas Cylinder, Universal Waste,
Acid, and Fluoride Waste Treatment, Fluoride Sludge Storage Locations
st
nd
rd
st
th
nd
Floor- Showing Hazardous Waste Satellite Accumulation Areas
st
Figure 10. NFC HPM Corridor - Showing Gas Cylinder and Hazardous Material Storage
Rooms
rd
Figure 11. NFC 3 Floor - Showing Scrubber and RCTO Locations
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Specification for Hazardous Waste Contingency Plan
EHS-00022 R10
Figure 12. NFN Subfab - Showing Scrubber and Gas Cylinder Locations
Figure 13. NFN Penthouse Level - Showing Scrubber Locations
Figure 14. NFN HPM Corridor - Showing Gas Cylinder and Hazardous Material
Locations
rd
Figure 15. NFX 3 Floor (Interstitial) – Showing Exhaust and Scrubber Deck
Figure 16. NFS INVENT Cleanroom - Showing Scrubber and Gas Cylinder
Locations
Figure 17. NFS SEMATECH Cleanroom - Showing Scrubber Locations
Figure 18. NFSX Cleanroom - Showing Scrubber and Gas Cabinet Locations
Figure 19. HPM Building - Showing Gas Cylinder and Hazardous Material Storage
Locations
Appendix B – CNSE Natural Gas Shut-Off Locations
Appendix C – CNSE Water Main Shut-Off Locations
Appendix D – CNSE Bulk Gas Shut-Off Locations
Appendix E – CNSE Flood Zone Map
Appendix F – Fire Extinguisher List
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Specification for Hazardous Waste Contingency Plan
EHS-00022 R10
Appendix A – Figure 1.
Site Layout
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EHS-00022 R10
Appendix A – Figure 2.
CESTM L-WING
st
1 FLOOR – Showing Scrubber, Hazardous Waste Satellite Accumulation Areas, and Gas
Cylinder Locations
=Hazardous Waste
Accumulation Area
= Scrubber
=Gas Cabinet
= Gas cylinder
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Specification for Hazardous Waste Contingency Plan
EHS-00022 R10
Appendix A – Figure 3.
CESTM L-WING
nd
2 FLOOR - Showing Scrubber, Hazardous Waste Satellite Accumulation Areas
and Gas Cylinder Locations
=Hazardous Waste Accumulation Area
= Gas cylinder
= Gas cabinet
= Scrubber
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EHS-00022 R10
Appendix A – Figure 4.
CESTM L-WING
rd
3 FLOOR – Showing Hazardous Waste Satellite Accumulation Area
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Specification for Hazardous Waste Contingency Plan
EHS-00022 R10
Appendix A – Figure 5.
CESTM B-WING
st
1 FLOOR – Showing Hazardous Waste Satellite Accumulation Areas
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Appendix A – Figure 6.
NFE 4 FLOOR - Showing Hazardous Waste Satellite Accumulation Areas
th
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Specification for Hazardous Waste Contingency Plan
nd
NFE 2
EHS-00022 R10
Appendix A – Figure 7.
FLOOR - Showing Hazardous Waste Satellite Accumulation Areas
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Appendix A – Figure 8.
NFE 1st FLOOR - Showing Hazardous Waste Satellite Accumulation Areas
and Gas Cylinder Locations
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Specification for Hazardous Waste Contingency Plan
EHS-00022 R10
Appendix A – Figure 9.
Central Utility Building (CUB) – Showing Gas Cabinets, Universal Waste, Acid and Fluoride
Treatment, Fluoride Sludge Storage and Hazardous Waste Storage Locations
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EHS-00022 R10
Appendix A – Figure 10.
NFC HPM Corridor – Showing Gas Cylinders and Hazardous Material Storage Rooms
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Appendix A – Figure 11.
NFC 3 FLOOR – Showing Scrubber and RCTO Locations
rd
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Appendix A – Figure 12.
NFN SubFab – Showing Scrubber and Gas Cylinder Locations
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Appendix A – Figure 13.
NFN Penthouse Level – Showing Scrubber Locations
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Appendix A – Figure 14.
NFN HPM Corridor – Showing Gas Cylinder and Hazardous Material Locations
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Appendix A – Figure 15.
NFX 3 Floor (Interstitial) – Showing Exhaust and Scrubber Deck
rd
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Appendix A – Figure 16.
NFS INVENT CLEANROOM – Showing Scrubber and Gas Cylinder Locations
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Appendix A – Figure 17.
NFS SEMATECH CLEANROOM – Showing Scrubber Locations
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Appendix A – Figure 18.
NFSX Cleanroom - Showing Scrubber and Gas Cabinet Locations
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Appendix A – Figure 19.
HPM Building – Showing Gas Cylinder and Hazardous Material Storage Locations
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Appendix B
CNSE Site Map – Showing the Natural Gas Shut-Off Location
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EHS-00022 R10
Appendix C
CNSE Site Map – Showing the Water Main Shut-Off Locations
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Appendix D
CNSE Site Map – Showing the Bulk Gas Shut-off Locations
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Appendix E
CNSE Flood Zone Map
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Appendix E
CNSE Flood Zone Map (cont’d)
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EHS-00022 R10
Fire Extinguisher
Number
Extinguisher Type
Building
Appendix F
Fire Extinguisher List
A1
A2
A3
A4
A4A
A4B
A4C
A5
A6
A7
A8
A9
A10
A11
A12
A13
A15
A15A
A15B
A15C
A16
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
10lb CO2
10lb FE36
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
5lb CO2
10lb ABC
10lb CO2
10lb CO2
10lb FE36
10lb ABC
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
Location
1st floor-stair D
B110 hose station
2nd. floor , L-246
1st floor By elevator
1st floor inside Room 130 near the door
1st floor inside Room 129 near the door
1st floor inside Room 131 near the door
1st floor hose station near elevators
1st floor outside L130
1st floor by north stairwell in hose station
1st floor by City water/elevator Room 145
2nd floor by room 250 and stairwell
2nd floor by room 220 in hose station
2nd floor by elevators
2nd floor hall by L244
2nd floor room L237
2nd floor corridor by N210
2nd floor inside Room 236 near the door
2nd floor inside Room 235 near the door
2nd floor inside Room 227 near the door
2nd floor by north stairwell in hose station
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Specification for Hazardous Waste Contingency Plan
A18
A19
A21
A22
A22A
A22B
A22C
A22D
A22E
A23
A24
A26
A27
A27b
A27c
A28
A29
A30
A32
A33
A34
A46
A48
A49
A50
A51
A52
B1
B2
B2-A
B3
B4
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb ABC
10lb ABC
9.5lb FE36
5lb CO2
5lb CO2
10lb ABC
30lb D
10lb ABC
10lb CO2
10lb ABC
5lb CO2
10lb CO2
10lb ABC
20lb ABC
20lb. CO2
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
10lb ABC
10lb ABC
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
CESTM
NFN
NFN
NFN
NFN
NFN
EHS-00022 R10
2nd floor hall by L234
2nd floor hall by L224 in hose station
3rd floor by elevator
3rd floor by L330
3rd floor inside Room 325 near the door
3rd floor inside Room 326 near the door
3rd floor inside Room 327 near the door
3rd floor inside Room 328 near the door
3rd floor inside Room 329 near the door
3rd floor btw Labs 328 and 327
3rd floor by L323/stairwell in hose station
1st floor in L136
1st floor in L136
1st floor in L136
1st Floor in L135 - Brainard Lab
1st Floor in L135 - Brainard Lab
4th floor by elevators
2nd floor in L233
1st floor end of hall
2nd floor in L233
2nd floor in L233
City Water Room
L135 Across from NFN entrance
Top of East Stairwell (stair d)
3rd Floor Atotech entrance pillar
3rd floor Atotech lab exit to hallway
3rd floor Atotech lab entrance
2nd floor rotunda hall near TVs
4th floor roof door stair F
4th floor roof door stair F
3rd floor near room 302
3rd floor inside room 303 (column 1E2)
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Specification for Hazardous Waste Contingency Plan
B5
B6
B7
B8
B9
B10
B11
B12
B13
B14
B15
B16
B17
B18
B19
B20
B21
B22
B23
B24
B25
B25A
B26
B27
B30
B31
B32
B33
B34
B35
B36
B37
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
13.25 FE36
13.25 FE36
13.25 FE36
10lb ABC
10lb ABC
20lb ABC
20lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
20lb ABC
20lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
EHS-00022 R10
shipping storage 278
2nd floor by stairwell F
2nd floor by ramp vestibule south
2nd floor middle of viewing gallery
NFN ROOM 232
2nd floor by room 253 viewing hall
2nd floor by stair D/room 230
4th floor by stair D/top of N230
3rd floor catwalk south side
3rd floor catwalk middle
3rd floor catwalk
2nd floor inside N230 Telecom Room
1st floor by stair D south side
1st floor inside WWT double doors south side
1st floor WWT room middle
1st floor WWT room exit door
1st floor outside stair A
1st floor inside room 139
1st floor inside room 139
1st floor inside DI water room 128
1st floor inside DI water room 128 middle
1st floor dumbwaiter room. 140
1st floor inside DI water room 128
1st floor hall by room 127
1st floor in facilites Tom Evans office
1st floor by room 144 by exit
1st floor inside room 136/electrical room
1st floor inside room 136/electrical room
1st floor inside room 122/elevator room
1st floor inside room 118/chiller room
1st floor inside room 118/chiller room exit
1st floor inside room 118/chiller room exit
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Specification for Hazardous Waste Contingency Plan
38-A
B38
B39
B41
B43
B44
B44b
B45
B46
B51
B52
B53
53-A
B55
B60
B61
B62
B63
B64
B65
B66
B67
B68
B69
B70
B71
B72
B72b
B73
B74
B75
B76
10lb D
10lb ABC
10lb ABC
10lb ABC
20lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
10lb ABC
20lb ABC
10lb ABC
13.25 FE36
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
EHS-00022 R10
1st floor inside room 141 HVAC on floor
1st floor inside room 141 HVAC
1st floor inside room 141 HVAC
1st floor hall near room 115
1st floor inside room 116 process support
1st floor inside room 116 process support
1st floor inside N119- Control room
1st floor inside room 124 facilities
1st floor inside room 124 facilities storage
1st floor inside room 135 electrical room E exit
1st floor inside room 135 electrical room
1st floor inside room 135 electrical room entrance
1st floor inside room 135 electrical room west
1st floor east end corridor
1st floor room 103 elevator room
1st floor by elevator L101 vestibule
1st floor lower vestibule
1st floor near room 107 computer room
1st floor room 101 vestibule north wall
1st floor inside room 111 telecom room
1st floor north hall near room 113
Inside room 113
2nd floor inside locker room 202
2nd floor next to entrance to NFN link
2nd floor inside link on NFN side
2nd floor inside link on NFS side
4th floor near stair C
4th floor near to freight elevator
4th floor near stair A
3rd floor near stair A
3rd floor by freight elevator
3rd floor interstitial by gowning area
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Specification for Hazardous Waste Contingency Plan
B77
B78
B79
B80
B81
B82
B83
B85
B86
B87
B88
B89
B90
B91
B92
B93
B93B
B94
B96
B97
B101
B102
B103
B105
B106
B107
B109
B109b
B110
B111
B112
B112b
13.25 FE36
20lb ABC
13.25 FE36
10lb ABC
10lb ABC
11lb halon
13.25 FE36
13.25 FE36
11lb halon
9.5 FE36
10lb ABC
10lb ABC
11lb halon
9.5 FE36
10lb ABC
10lb ABC
20lb CO2
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
20lb ABC
20lb ABC
10lb CO2
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
EHS-00022 R10
3rd floor by N302
3rd floor east in N300
3rd floor in clean area
2nd floor hallway near room 209
2nd floor in room 211
2nd floor gowning room
2nd floor cleanroom by gowning door
227 old gowning room
281 cleanroom 2/M22
281 cleanroom by gowning door (227)
2nd floor north side hallway 210
2nd floor outside room 223 EHS office
Cleanroom 2/M24
SW corner of Cleanroom M3
2nd floor room N225 passthrough
2nd floor room 212 HVAC support
2nd floor room 212 HVAC support
2nd floor room 214 boiler room
2nd floor room 216 Electric room
2nd floor room 216 Electric room
2nd floor room 224 outside purifier room WWT2
2nd floor room N220 chem mix room
2nd floor exit opposite room 216 Electric room
2nd floor room N222 dock
2nd floor room N218 shipping packaging room
Loading dock Comm Room N235
2nd floor outside shipping and receiving office
2nd floor rear of shipping and receiving office
2nd floor HPM corridor near N236
2nd floor HPM corridor opp rms. 242 & 243
2nd floor HPM corridor inside room 243
2nd floor HPM corridor inside rm. 243
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Specification for Hazardous Waste Contingency Plan
B114
B115
B116
B117
B118
B119
B120
B121
B122
B122b
B123
B124
B125
B126
B127
B128
B129
B130
B131
B132
B133
B134
B135
B136
B137
B138
B139
B140
B144
B146
B147
B148
20lb ABC
20lb ABC
20lb ABC
20lb ABC
20lb ABC
20lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
20lb ABC
20lb ABC
20lb ABC
20lb ABC
10lb ABC
9.5 FE36
13.25 FE36
9.5 FE36
13.25 FE36
13.25 FE36
9.5 FE36
9.5 FE36
9.5 FE36
13.25 FE36
9.5 FE36
13.25 FE36
10lb ABC
10lb ABC
10lb ABC
9.5 FE36
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
EHS-00022 R10
2nd floor HPM corridor inside rm. 242
2nd floor HPM corridor inside rm. 242
2nd floor HPM corridor inside rm. 241
2nd floor HPM corridor inside rm. 241
2nd floor HPM corridor inside rm. 240
2nd floor HPM corridor inside rm. 240
2nd floor HPM corridor opp. rms. 240 & 241
2nd floor hall outside room 226
2nd floor room 226 HVAC support
2nd floor room 226 HVAC support
2nd floor hall near room 226 north exit hall
2nd floor WWT2 near room 272 end of corridor
2nd floor WWT2 near room 250 near overhead door
2nd floor WWT2 inside room 250-service lift room
2nd floor room 224 inside purifier room
2nd floor room 224 inside purifier room
1st floor room N143 fire riser room
subfab @ column 1F5 gowning room door
subfab @ column 1P5
subfab @ column 1P10
subfab @ column 1F13
subfab @ column 1P16
subfab @ column 1P20
subfab @ column 1F14
subfab @ column 1F26
subfab @ column 1P25- Sematech space
subfab @ column 1P27- Sematech space
subfab @ column 1F27- Sematech space
2nd floor inside room 215 Cleanroom Managers office
1st floor office 115
2nd floor inside N219 (ERT SUPPLY RM.)
2nd floor N280 cleanroom M8
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Specification for Hazardous Waste Contingency Plan
B149
B150
B151
B152
B153
B154
B155
B155A
B156
B157
B158
B175
B176
B189
B190
B190A
B191
B192
B193
B194
C1-A
C1
C2
C2-A
C2-B
C3
C4
C4-A
C5
C6
C7
C8
9.5 FE36
9.5 FE36
9.5 FE36
9.5 FE36
9.5 FE36
9.5 FE36
9.5 FE36
9.5 FE36
10lb ABC
10lb Ansul
9.5 FE36
5lb CO2
5lb ABC
11lb Halon
9.5 FE36
9.5 FE36
9.5 FE36
10lb ABC
10lb ABC
10lb ABC
20lb CO2
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFN
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
EHS-00022 R10
2nd floor N280 cleanroom M4
2nd floor N280 cleanroom exit col 4
2nd floor N280 cleanroom, control room
2nd floor N280 cleanroom M13
2nd floor N280 cleanroom, outside control room
2nd floor N280 cleanroom
2nd floor N280 cleanroom M12
2nd floor N280 cleanroom M10
1st floor inside rm.127-A near UPW Office
clean parts room 1st floor fog hallway N114
Near sub-fab stairwell door in cleanroom
2nd floor room 233 south
2nd floor room 244
Sub-Fab Gowning Rm by WWT 1
Cleanroom 2/M16
Cleanroom 2/M18
Cleanroom 2/M21
Inside N-208, outside Labs
Cleanroom Gowning 227
4th floor across from elevator
4th floor stairwell C
3rd floor hall near room 307
3rd floor hall near room 302
3rd floor inside ATOTECH Lab
3rd floor room 381 Commerce Hub
3rd floor hall near room 353
3rd floor hall near room 372
3rd floor addition inside door
3rd. Floor near lab 380
2nd floor hall near room 299
2nd floor hall near stairwell D/bathrooms
2nd floor hall near room 214
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 61 of 74
Specification for Hazardous Waste Contingency Plan
C9
C10
C10A
C10B
C10C
C10D
C10E
C11
C12
C14
C15
C16
C20
C25
C26
C27
C27A
C27B
C26-A
C28
C30
C32
C38
C39
C40
C41
C42
C43
C44
C45
C46
C46-A
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
5lb CO2
10lb FE36
20lb ABC
10lb ABC
10lb ABC
20lb CO2
10lb ABC
10lb ABC
10lb ABC
10lb FE36
5lb CO2
10lb Ansul
10lb Ansul
10lb Ansul
10lb Ansul
10lb Ansul
10lb Ansul
5lb CO2
5lb CO2
5lb CO2
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFSX
NFSX
NFSX
NFSX
NFSX
NFSX
NFSX
NFSX
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
NFS
EHS-00022 R10
2nd floor hall near room 213
2nd floor hall near room 206/stair B
2nd TEL Near 235
2nd floor TEL By storage
2nd floor TEL Breakroom
2nd floor TEL 244
1st floor TEL by entrance
1st floor hall near exit by 109
1st floor hall near room 106
Outside room 103 NFS Auditorium
1st floor hall near room 159
1st floor hall near room 169
Inside room 161- ERT storage room
NFSX Tool Wipedown Bootie Area
NFSX 2nd Floor Electrical room
NFSX 3rd floor stairway outside boiler room
NFSX 3rd floor boiler room
Outside boiler room
NFSX Electrical room
NFSX 2nd floor stairway outside electrical room
NFSX 1st floor stairway at exit
Spill response
1st floor in Elevator room 116
NFS Cleanroom A9
NFS Cleanroom D9
NFS Cleanroom E9
NFS Cleanroom TEL
NFS Cleanroom Sematech A5
NFS Cleanroom Sematech E6
NFS Cleanroom Sematech Booth
NFS Cleanroom Sematech Booth
NFS Laser Booth
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 62 of 74
Specification for Hazardous Waste Contingency Plan
C47
C48
C49
C50
C51
C52
C53
D1
D3
D4
D5
D7
D8
D9
D11
D15
D16
D17
D18
D20
D21
DE-1
DE-2
DE-3
DE-4
DE-5
DE-6
DE-7
DE-8
D-22
D-23
D-24
10lb Ansul
10lb Ansul
10lb Ansul
10lb Ansul
5lb CO2
5lb CO2
10lb ABC
20lb CO2
20lb CO2
20lb ABC
20lb CO2
20lb CO2
10lb ABC
10lb ABC
20lb CO2
20lb CO2
20lb CO2
20lb CO2
10lb ABC
20lb CO2
20lb CO2
20lb ABC
20lb ABC
20lb ABC
20lb ABC
20lb ABC
20lb ABC
10lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
NFS
NFS
NFS
NFS
NFS
NFS
NFS
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
EHS-00022 R10
SX Cleanroom B6
SX Cleanroom B5
SX Cleanroom B4
SX Cleanroom B3
SX Viewing area
SX Boot Cleaner by Gowning Room
RM. 259
Rm 110 Silane Room
Gas Corridor Front Door
Garage Door By UPW Polishers
Flammable Liquid Room 113
Gas Corridor Rear Door
Bulk storage rm. east end Column A-2
Bulk storage rm. west end
By CUB entrance overhead door
Fire Pump Room
Fire Pump Room
Hydrogen Room - 112
New work room/Old boiler rm
Electrical Room By Emergency Panel
Electrical Room By Exit
NEAR SOUTH EXIT DOOR Stair 1
Near south west exit(WEIR BOX)Column F-3
Near filter press Column F-4
BTW Heat exchanger and carbon beds Column F-6
NEAR NW OVERHEAD DOOR Column F-9
NEAR NE EXIT (CITY WATER INLET)Column D-9
ELECTRIC ROOM North Exit
ELECTRIC ROOM South door
1ST FLOOR COLUMN H-9
1ST FLOOR NE EXIT COLUMN J-5
1ST FLOOR COLUMN F.2-3
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 63 of 74
Specification for Hazardous Waste Contingency Plan
DE-9
DE-10
DE-11
DE-12
DE-13
DE-14
DE-15
DE-16
E1
E2
E3
E4
E5
H1
H2
H3
4C-01
4C-02
4C-03
4C-04
4C-05
4A-01
4A-02
4A-03
4A-04
4A-05
4A-06
4A-07
4A-07A
4A-08
4A-09
20lb ABC
20lb ABC
20lb ABC
10lb ABC
10lb ABC
20lb ABC
20lb ABC
10lb ABC
2.5lb ABC
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
20lb ABC
20lb ABC
10lb CO2
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb CO2
10lb ABC
10lb ABC
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
CUB
HPM
HPM
HPM
HPM
HPM
Electrical Substation
Electrical Substation
Electrical Substation
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
EHS-00022 R10
2ND FLOOR SE EXIT
2ND FLOOR SE ROOF EXIT DOOR C.2-3
2ND FLOOR NE ROOF EXIT DOOR C.2-7
2nd Floor SW side of middle wall Column F.2-3
2ND FLOOR NW DOOR TO ROOF H-9
2ND FLOOR NE OUTSIDE STAIR 2 D-9
2ND FLOOR MIDDLE OF CENTER WALL F-5
2ND FLOOR WEST EXIT J-5
Fire Pump Room
HPM building @ overhead door
HPM building in corrosives storage
HPM building in corrosives room @ exit
HPM building in Room 102
HPM building in flammable storage room
Electrical room
Electrical room
Office Area
4th flr East side Elevator
4th flr OFFICE 4235
4th flr EAST STAIR
4th flr OFF 4255
4th flr RECEP DESK
4th flr SE HALLWAY
4th flr LAB 4905
4th flr LAB 4906
4th flr LAB 4907
4th flr LAB 4908
4th flr OPPOSITE 4325
4th flr SW ELEVATORS
4th flr SW STAIRWELL ROOF ACCESS
4th flr LAB 4902
4th flr LAB 4903
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 64 of 74
Specification for Hazardous Waste Contingency Plan
4A-10
4A-11
4A-12
4A-13
4A-14
4A-15
3A-01
3C-01
3C-02
3C-03
3C-04
3C-05
3C-05A
3C-06
3C-06A
3C-07
3C-08
3C-08A
3C-09
3C-10
3C-11
3C-12
2C-01
2C-02
2C-03
2C-04
2A-01
2A-01-B
2A-02
2A-03
2A-04
2A-05
10lb ABC
10lb ABC
10lb ABC
13lb FE36
10lb ABC
10lb ABC
9.5 FE36
9.5 FE36
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
9.5 FE36
10lb ABC
9.5 FE36
20lb ABC
9.5 FE36
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
EHS-00022 R10
4th flr LAB 4904
4th flr N HALLWAY BY 4410
4th flr End of north hallway
4th flr Electrical near bathrooms
4th flr West end service corridor
4th flr East end service corridor
3RD FLR ELEVATORS WEST END
3RD FLR ELEVATORS EAST END
3RD FLR BEHIND BREAK RM
3RD FLR ALL NFE3
3RD FLR LAB 1
3RD FLR LAB 2
3rd flr East end service corridor near rm. 3910
3RD FLR LAB 3 3904
3rd flr Electrical rm btw.3910 and bathroom
3RD FLR A23 COLUMN
3RD FLR A20
3rd flr W.E.service corridor (BTW column A21 /A22)
3RD FLR OFFICE 3212
3RD FLR AREA 3312
3RD FLR STAIRS & 3324
3rd flr ELECTRICAL ROOM EAST
2ND FLR EAST ELEVATORS SEMATECH
2ND FLR BY BREAK AREA SEMATECH
2ND FLR AT STAIR CASE SEMATECH
2nd flr ELECTRICAL RM. NEAR 2015
2ND FLR ELEVATOR AT LINK
2ND FLR SERVICE CORRIDOR (WEST)
2ND FLR L 2901
2ND FLR L 2902
2ND FLR HALLWAY AT L 2903
2ND FLR L 2903
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 65 of 74
Specification for Hazardous Waste Contingency Plan
2A-06
2A-07
2A-08
2A-09
2A-09-A
2A10A
1A-01
1A-01B
1A-02
1A-03
1A-04
1A-05
1A-06
1A-07
1A-08
1A-09
1A-10
1A-11
1A-12
1A-13
1A-14
1A-15
1A-16
1A-17
1A-18
1A-19
1A-19A
1A-19B
1A-20
1A-23
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
9.5 FE36
10lb ABC
10lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb
CO2
20lb
CO2
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb Halo
10lb ABC
EHS-00022 R10
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
2ND FLR L 2904
2ND FLR HALL AT BATHROOMS
2ND FLR AT CUBE 2W A71 SEMATECH
2ND FLR 2W C2404 SEMATECH
2ND FLR SERVICE CORRIDOR (EAST)
2nd flr EAST ELECTRICAL RM. BY BATHROOMS
1ST FLR ELEVATOR/EXT DOOR
1ST FLR SERVICE CORRIDOR (WEST)
1ST FLR L 1901 Laser Lab
1ST FLR L 1902
1ST FLR L 1903
1ST FLR HALLWAY AT L 1903
1ST FLR L 1904
1ST FLR L 1904 BACK
1ST FLR AT BATHROOMS
1ST FLR HALLWAY OPPOSITE 1905
1ST FLR L 1905
1ST FLR L1906
1ST FLR L 1907
1ST FLR L 1908
1ST FLR L 1909
NFE
1ST FLR LOADING DOCK
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
1ST FLR FIRE PUMP ROOM
1ST FLR ELECTRICAL ROOM
1ST FLR HALLWAY OPPOSITE L 1909
1st flr EAST SERVICE CORRIDOR
1st flr ELEVATOR MACHINE ROOM WEST
1ST FLR.(EYP) ACROSS FROM MICRO ROOM
1st flr BOILER ROOM
1st flr ELECTRIC RM. NEAR NANO KITCHEN
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 66 of 74
Specification for Hazardous Waste Contingency Plan
1B-01
1B-02
1C-01
1C-02
1C-03
1C-04
1C-05
1C-05A
NC1
NC2
NC3
NC4
NC5
NC5A
NC5B
NC14
NCC1
NCC2
NCC3
NCC4
NCC5
NC6
NC-6A
NC7
NC8
NC9
NC10
NC11
NC12
NC13
NC14-A
10lb ABC
6L K
10lb ABC
10lb ABC
10lb ABC
20lb ABC
13.25 FE36
9.5 FE36
20lb ABC
13.25 FE36
13.25 FE36
9.5 FE36
9.5 FE36
13.25 FE36
13.25 FE36
13.25 FE36
13.25 FE36
13.25 FE36
13.25 FE36
13.25 FE36
13.25 FE36
10lb ABC
20lb ABC
10lb ABC
10lb ABC
20lb ABC
20lb ABC
13.25 FE36
10lb ABC
13.25 FE36
20lb
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
EHS-00022 R10
1ST FLR ROTUNDA AT SECURITY
1ST FLR NANO CAFÉ
1ST FLR ELEVATOR OFF ROTUNDA
1 ST. FLOOR COMPUTER ROOM
1st flr ON WALL BY EYP IT ROOM
1st flr NEAR SE STAIRS
1st flr ELECT. RM. NEAR TELCOM
1st flr ELEVATOR MACHINE ROOM
N146 PVAC/CDA ROOM
SUB FAB COLUMN T-14
SUB FAB COLUMN T-17
SUB FAB COLUMN S-20
SUB FAB COLUMN S-24
SUB FAB COLUMN S-9 outside gown room
SUB FAB COLUMN V-11
CLEANROOM COLUMN R-9
CLEANROOM COLUMN R-13
CLEANROOM COLUMN R-18
CLEANROOM COLUMN R-21
CLEANROOM COLUMN W-20
CLEANROOM COLUMN T-24 Outside Gown Room
N150 WWT/DIW COLUMN U7
N150 WWT/DIW Door to cleanroom
TOOL MOVE IN/PASS THRU
N151 ELECTRICAL VESTIBULE
OUTSIDE FREIGHT ELEVATOR)
N155 FIRE RISER ROOM
N135 EXPANDED ELECTRICAL RM
GOWNING ROOM
VIEWING GALLERY
IN CLEAN RM BY VIEWING GALLERY EXIT W24
N-290 ELEVATOR MECHANICAL ROOM
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 67 of 74
Specification for Hazardous Waste Contingency Plan
NC16
NC17
NC18
NC18A
NC18B
NC18C
NC19
NC20
NC21
NC22
NC23
NC23A
NC24
NC25
NC26
NC27
NC28
NC29
NC29A
NC30
NC31
NC31A
NC32
NC33
NC34
NC35
NC36
ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
11lb Halo
30lb B
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb ABC
10lb ABC
20lb
ABC
13.25 FE36
20lb
ABC
10lb ABC
20lb
ABC
13.25 FE36
13.25 FE36
20lb
ABC
13.25 FE36
13.25 FE36
10lb ABC
10lb ABC
10lb ABC
EHS-00022 R10
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
N-253 VIEWING GALLERY/COLUMN R-18
N-253 VIEWING GALLERY
N-252 CLEAN SUPPORT
RM -252 CLEAN SUPPORT 2ND EXT.
MOCVD
MOCVD
N-249 FAC. MECH SUPPORT
N-255 CLEAN SUPPORT
2 SB-G SW STAIRS 1ST FLOOR
2 SB-G SW STAIRS 1.5 FLOOR
2 SB-G SW STAIRS 2ND FLOOR
NEAR N-262
N-265 LOADING DOCK
N-264 FAC/MECH SUPPORT
NFC
NFC
N311 SERVICE ISLE
N317 SOLVENT ROOM
NFC
NFC
N318 GAS ROOM
N319 CORROSIVE LIQUID ROOM
NFC
NFC
NFC
NEAR N-335
N411 SCRUBBER SERVICE ISLE
N417 SCRUBBER ROOM
NFC
NFC
NFC
NFC
NFC
NFC
NEAR 3RD FLOOR STAIRWELL
N418 SCRUBBER ROOM
N419 SCRUBBER ROOM
N307 MAIN SCRUBBER ROOM
N308 MAU COLUMN Q17
N308 MAU COLUMN Q14
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 68 of 74
Specification for Hazardous Waste Contingency Plan
NC37
NC37A
NC38
NC38A
NC39
NC39A
NC41
NC40
NC40
4--1
4--2
4--3
4--4
4--5
4--6
4--7
4--8
4--9
4--10
4--11
4--12
4--13
4--14
4--15
4--16
3--1
3--2
3--3
3--4
3--5
3--6
3--7
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
11lb Halo
30lb B
30lb B
30lb B
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
13.25 FE36
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
9.5lb FE36
9.5lb FE36
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFC
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
EHS-00022 R10
N308 MAU COLUMN Q18
N308 MAU COLUMN Q24
N308 MAU COLUMN Q9
SE CORNER( STAIRWELL) OUTSIDE NFC
N310 B BOILER ROOM
BOILER ROOM EAST WALL
Pyrophoric cabinet outside MOCVD
Pyrophoric cabinet SUBFAB column
Pyrophoric cabinet Cleanroom outside gowning
4TH FLOOR COLUMN M-4
4TH FLOOR COLUMN M-7
4TH FLOOR COLUMN M-11
4TH FLOOR COLUMN L-16
4TH FLOOR OUTSIDE RM. 418
4TH. OUTSIDE WOMENS ROOM
4TH FLOOR NEAR STAIR 2 (410)
4TH FLOOR COLUMN D-15
4TH FLOOR COLUMN F-12
4TH FLOOR Mechanical ROOM (406) Column F-9
4TH FLOOR Data Center 444 ITS
4TH FLOOR ACROSS FROM STAIR 1 (402)
4TH FLOOR COLUMN B-5
4TH FLOOR ACROSS FROM ROOM (403)
4TH FLOOR COLUMN H-3
4TH FLOOR COLUMN K-3
3RD FLOOR Data Center COLUMN K-2
3RD FLOOR Data Center COLUMN D-2
3RD FLOOR COLUMN M-4
3RD FLOOR COLUMN M-7
3RD FLOOR COLUMN M-10
3RD FLOOR COLUMN M-13
3RD FLOOR COLUMN M-16
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 69 of 74
Specification for Hazardous Waste Contingency Plan
3--8
3--9
3--10
3--11
3--12
3--13
3--14
3--15
3--16
3--17
3--18
2--1
2--2
2--3
2--4
2--5
2--6
2--7
2--8
2--9
2--10
2--11
2--12
2--13
2--14
2--15
2--16
2--17
2--18
2--19
2--20
2--21
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
13lb FE36
13lb FE36
13lb FE36
13lb FE36
13lb FE36
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
EHS-00022 R10
3RD FLOOR OUTSIDE RM.(313)
3RD FLOOR ACROSS FROM COLUMN G-18
3RD FLOOR OUTSIDE STAIR 2 (310)
3RD FLOOR INSIDE SCRUBBER DECK (305)
3RD FLOOR COLUMN D-14
3RD FLOOR COLUMN D-11
3RD FLOOR HALL OUTSIDE (303)
3RD FLOOR ACROSS FROM COLUMN B-5
3RD FLOOR NEAR COLUMN D-3
3RD FLOOR ACROSS FROM COLUMN H-3
3RD FLOOR OUTSIDE WOMENS ROOM
2ND FLOOR COLUMN M-4
2ND FLOOR COLUMN M-7
2ND FLOOR COLUMN M-10
2ND FLOOR COLUMN M-13
2ND FLOOR COLUMN M-16
2ND FLOOR ACROSS FROM COLUMN J-17
2ND FLOOR ACROSS FROM COLUMN H-18
2ND FLOOR ACROSS FROM COLUMN D-18
2ND FLOOR ACROSS FROM STAIR 2 (210)
2ND FLOOR ACROSS FROM COLUMN A-14
2ND FLOOR ACROSS FROM COLUMN A-11
2ND FLOOR OUTSIDE ROOM (209)
2ND FLOOR ACROSS FROM COLUMN B-5
2ND FLOOR COLUMN D-3
2ND FLOOR ACROSS FROM COLUMN H-3
2ND FLOOR ACROSS FROM COLUMN K-3
2ND FLOOR (CLEANROOM) COLUMN F16
2ND FLOOR (CLEANROOM) COLUMN F13
2ND FLOOR (CLEANROOM) COLUMN F10
2ND FLOOR (CLEANROOM) COLUMN F7
2ND FLOOR (CLEANROOM) COLUMN F4
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 70 of 74
Specification for Hazardous Waste Contingency Plan
2--22
2--23
2--24
2--25
2--26
2--27
2--28
2--29
2--30
2--31
2--32
2--33
2--34
2--35
2--36
2--37
2--38
1--1
1--2
1--3
1--4
1--5
1--6
1--7
1--8
1--9
1--10
1--11
1--12
1--13
1--14
1--15
13lb FE36
13lb FE36
13lb FE36
13lb FE36
13lb FE36
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
10lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
13lb FE36
13lb FE36
13lb FE36
13lb FE36
13lb FE36
13lb FE36
13lb FE36
13lb FE36
13lb FE36
13lb FE36
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
EHS-00022 R10
2ND FLOOR (CLEANROOM) COLUMN L-4
2ND FLOOR (CLEANROOM) COLUMN L-7
2ND FLOOR (CLEANROOM) COLUMN L-10
2ND FLOOR (CLEANROOM) COLUMN L-13
2ND FLOOR (CLEANROOM) COLUMN L-16
2ND FLOOR CHEMICAL DOCK
2ND FLOOR CHEMICAL DOCK
2ND FLOOR CHEMICAL MIX RM.
2ND FLOOR CHEMICAL MIX RM.
2ND FLOOR SOLVENT CHEMICAL RM.
2ND FLOOR SOLVENT CHEMICAL RM.
2ND FLOOR NON- FLAMMABLE GAS RM.
2ND FLOOR NON- FLAMMABLE GAS RM.
2ND FLOOR FLAMMABLE GAS RM.
2ND FLOOR FLAMMABLE GAS RM.
2ND FLOOR TOOL DOCK
2ND FLOOR Chemical Dock by Overhead door
NEAR FIRE CONTROL PANEL (1ST.FLOOR)
OUTSIDE RM. 118 (1ST. FLOOR)
OUTSIDE RM. 116 (1ST. FLOOR)
OUTSIDE RM. 115 (1ST. FLOOR) SEM
ACROSS FROM RM.112 (DRY ETCH)1ST.FL
1ST FLOOR COLUMN D-16
1ST FLOOR COLUMN E-13
1ST. FLOOR COLUMN D-10
1ST. FLOOR COLUMN E-7
1ST. FLOOR COLUMN D-4
1ST. FLOOR OUTSIDE ELE. ROOM 139
1ST. FLOOR OUTSIDE WOMANS RM. 128
1ST. FLOOR COLUMN L-4
1ST. FLOOR COLUMN L-7
1ST. FLOOR COLUMN L-10
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 71 of 74
Specification for Hazardous Waste Contingency Plan
1--16
1--16-A
1--17
1-18.
1-19.
1--20
1--21
1--22
1--23
1--24
1--25
TVHS-1
TVHS-2
TVHS-3
TVHS4
TVHS-5
TVHS-6
TVHS-7
TVHS-8
TVHS-9
B187
B188
13lb FE36
13lb FE36
13lb FE36
20lb CO2
20lb CO2
20lb CO2
20lb CO2
10lb ABC
10lb ABC
10lb ABC
20lb CO2
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
20lb. CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
20lb CO2
15lb CO2
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFX
NFN
NFX
NFX
TVHS
TVHS
TVHS
TVHS
TVHS
TVHS
TVHS
TVHS
TVHS
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
EHS-00022 R10
1ST. FLOOR COLUMN L-13
1ST FLOOR COLUMN K-15
1ST. FLOOR COLUMN K-17
1ST FLOOR PCW TANK
1ST FLOOR VESTIBULE RM 104
1ST FLOOR CHEMICAL/GAS AREA
1ST FLOOR CHEMICAL/GAS AREA
1ST FLOOR Passenger Elevator mechanical room
1ST FLOOR Chemical Elevator Mechanical room
1ST FLOOR Tool Elevator mechanical room
1ST FLOOR Facilities shop 144
1st floor East stair
1st floor outside maintenance area
1st floor Middle of hallway
1st floor west stair
1st floor Elevator room
2nd floor West stair
2nd floor middle west
2nd floor middle east
2nd floor east stair
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 72 of 74
Specification for Hazardous Waste Contingency Plan
B84
C6
C8
C9
C10
C1
C2
C3
C4
C5
C11
C12
C14
C15
C16
B177
C17
C22
C24
C18
C21
B185
B195
DE 12
B138
B182
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
10lb CO2
5lb CO2
5lb CO2
5lb CO2
5lb CO2
5lb CO2
5lb CO2
20lb ABC
20lb ABC
20lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
10lb ABC
11lb Halo
11lb Halo
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
EHS-00022 R10
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 73 of 74
Specification for Hazardous Waste Contingency Plan
B85
B184
B131
B156
B140
B83
B134
B133
B46
B77
B79
B76
B180
B183
EHS-00022 R10
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
11lb Halo
9.5lb FE36
9.5lb FE36
13.25 FE36
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFE
NFC
NFE
NFE
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire Pump Room Spares
Fire riser room
Fire Pump Room Spares
Fire Pump Room Spares
NFE
Fire Pump Room Spares
13.25 FE36
NFE
Fire Pump Room Spares
13.25 FE36
NFC
Fire riser room
13.25 FE36
NFE
Fire Pump Room Spares
Printed copies are considered uncontrolled. Verify revision prior to use.
DCN1135
CNSE Confidential
Page 74 of 74