Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks®
SLA58xx/SLAMfxx EtherCAT®
EtherCAT® Supplemental Manual for Brooks®
SLA58xx and SLAMf Series
Mass Flow Controllers and Meters
Brooks® SLA5851 Series
with EtherCAT® Communications
Brooks® SLA58xx/SLAMfxx
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
EtherCAT®
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks®
SLA58xx/SLAMfxx EtherCAT®
Dear Customer,
We recommend that you read this manual in its entirety as this will enable efficient and proper use of the
EtherCAT® thermal mass flow controllers and meters. Should you require any additional information concerning the
EtherCAT thermal mass flow controllers and meters, please feel free to contact your local Brooks Sales and Service
Office; see back cover for contact information, or visit us on the web at www.BrooksInstrument.com. We appreciate
this opportunity to service your fluid measurement and control requirements, and trust that we will be able to provide
you with further assistance in future.
Yours sincerely,
Brooks Instrument
Brooks® SLA58xx/SLAMfxx
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
EtherCAT®
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Installation and Operation Manual
Contents
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Paragraph
Number
Brooks® SLA58xx/SLAMfxx EtherCAT®
Page
Number
Section 1 General Information
1.1
Introduction ................................................................................................................................... 1-1
Section 2 Definition of Terms
2.1
Definition of Terms ........................................................................................................................ 2-1
Section 3 Before Starting
3
Before Starting ............................................................................................................................... 3-1
3.1
Background & Assumptions ........................................................................................................... 3-1
3.2
Numbers ........................................................................................................................................ 3-1
Section 4 Quick Start
4
Quick Start .................................................................................................................................... 4-1
4.1
Master Hardware ............................................................................................................................ 4-1
4.2
Physical Interfaces ........................................................................................................................ 4-1
4.2.1 Power Supply and Analog I/O ........................................................................................................ 4-1
4.2.2 RUN and MOD LEDs ..................................................................................................................... 4-3
4.2.3 EtherCAT MFC Slave Hardware ..................................................................................................... 4-3
4.3
EtherCAT Theory ............................................................................................................................ 4-4
4.4
Frames (EtherCAT vs Ethernet) ..................................................................................................... 4-4
4.5
Speed ............................................................................................................................................ 4-4
4.6
EtherCAT Examples ...................................................................................................................... 4-5
4.7
EtherCAT Explained ....................................................................................................................... 4-7
Section 5 Slave Configuration
5.1
Introduction .................................................................................................................................... 5-1
5.2
Outputs (Master Side) .................................................................................................................... 5-1
5.3
Inputs (Master Side) ...................................................................................................................... 5-2
5.4
COE Online Attributes.................................................................................................................... 5-3
5.4.1 Device Attributes ............................................................................................................................ 5-3
5.4.2 Flow Sensor ................................................................................................................................... 5-4
5.4.2.1 Flow Sensor Zero Adjust ................................................................................................................ 5-5
5.4.2.2 Flow Sensor Status ........................................................................................................................ 5-5
5.4.3 Temperature Sensor ....................................................................................................................... 5-6
5.4.3.1 Temperature Sensor Status ........................................................................................................... 5-7
5.4.4 Setpoint Controller ......................................................................................................................... 5-8
5.4.4.1 Setpoint Controller Status .............................................................................................................. 5-9
5.4.5 Valve Actuator Attributes ................................................................................................................ 5-9
5.4.6 Service Transfer Attributes ............................................................................................................ 5-10
5.4.7 Calibration Object Attributes ......................................................................................................... 5-10
5.4.8 Exceptions ................................................................................................................................... 5-11
5.4.8.1 Alarm- and Warning Details .......................................................................................................... 5-11
5.4.8.2 Exception Status .......................................................................................................................... 5-12
5.4.9 PDC (Product Description Code): I/O and Model Code ................................................................. 5-12
5.4.10 Tables ........................................................................................................................................... 5-13
Section 6 TwinCAT® Master
6
Beckhoff Automation: TwinCAT® (A PC Master Option) .................................................................. 6-1
6.1
Establishing a PC Ethernet Master (TwinCAT) ............................................................................... 6-1
6.1.2 AUTO SETUP - PC Ethernet Master (TwinCAT) ............................................................................. 6-1
6.2
MANUAL SETUP - PC Ethernet Master (TwinCAT) ........................................................................ 6-3
6.3
COE Online Attributes - MAking Changes (Beckhoff Automation: TwinCAT) ................................... 6-4
Warranty, Local Sales/Service Contact Information ...................................................................... Back Cover
i
Contents
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
Brooks® SLA58xx/SLAMfxx EtherCAT®
Figure
Number
Figure
Number
4-1
4-2
4-3
4-4
EtherCAT Top Cover ....................................................................................................................... 4-1
M8 Male Device Connector Pin Layout, Pin Side View .................................................................. 4-2
M8 Female Mating Cable ............................................................................................................... 4-2
M8 Female Mating Cable Connector Pin Layout ............................................................................ 4-2
5-1
5-2
5-3
5-4
5-5
5-6
5-7
5-8
5-9
5-10
5-11
5-12
5-13
5-14
Output PDOs ................................................................................................................................. 5-1
Input PDOs .................................................................................................................................... 5-2
Device Attributes ............................................................................................................................ 5-3
Flow Sensor Attributes ................................................................................................................... 5-4
Flow Sensor Zero Adjust Attribute .................................................................................................. 5-5
Flow Sensor Status Attributes ....................................................................................................... 5-5
Temperature Sensor Attributes ....................................................................................................... 5-6
Temperature Sensor Status Attributes ............................................................................................ 5-7
Setpoint Controller Attributes ......................................................................................................... 5-8
Setpoint Controller Status Attribute ................................................................................................ 5-9
Valve Actuator Attributes ................................................................................................................ 5-9
Valve Actuator Status Attributes .................................................................................................... 5-10
Service Transfer Attributes ............................................................................................................ 5-10
Calibration Object Attributes ......................................................................................................... 5-10
6-1
6-2
6-3
6-4
6-5
6-6
6-7
6-8
AUTO SETUP - PC Ethernet Master, Scanning for Compatible Devices ........................................ 6-1
AUTO SETUP - PC Ethernet Master, I/O Devices Found ............................................................... 6-1
AUTO SETUP - Pop-Up Screens ................................................................................................... 6-2
AUTO SETUP - Proper Communications: Master and Slave (Beckhoff Automation: TwinCAT) ....... 6-2
MANUAL SETUP - PC Ethernet Master, Scanning for Compatible Devices ................................... 6-3
MANUAL SETUP - Pop-Up Screen ................................................................................................ 6-3
COE Online: Changing the Active Gas Page (and other devices) ................................................... 6-4
COE Attributes - Pop-Up Screen ................................................................................................... 6-4
Table
Number
ii
June, 2016
Table
Number
4-1
4-2
4-3
4-4
Pin Labeling of M8 Male Device and Female Mating Cable Connector ........................................... 4-2
Wire Labeling of M8 Female Mating Cable Connector .................................................................... 4-3
M8 Female Mating Cable Part Numbers ........................................................................................ 4-3
MOD LED Specification ................................................................................................................. 4-3
5-1
5-2
5-3
5-4
5-5
Valve Override Values (vdOverride) ................................................................................................ 5-13
Flow Data Units (fmUnits) ............................................................................................................. 5-13
Temperature Data Units (tmUnits) ................................................................................................. 5-13
Setpoint Control Mode (fcControlMode)......................................................................................... 5-13
Valve Drive Data Units (vdUnits) .................................................................................................... 5-13
Section 1 Introduction
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
1.1 Introduction
Many applications of Flow Controllers/Meters are moving to increase the
use of automation. Automation comes in many forms: PLC’s (Programmable
Logic Controllers, such as the Siemens S7 300/4000), DCS’s (Distributed
Control Systems, such as Emerson’s Digital V), PC based solutions
(National Instruments Labview TM), and Ethernet based field buses. Digital
communications from these varied systems and the devices they measure
and control, are a very effective means of not only accomplishing more
effective and rapid system integration, but also providing greatly improved
system diagnostics and maintainability. EtherCAT is an Ethernet based
communication system and is known for its high cycle time and cost
efficient cabling and master application solutions. Brooks Instrument now
introduces the EtherCAT interface on its SLA Enhanced Series platform.
1-1
Section 1 Introduction
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
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Section 2 Definition of Terms
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
2.1 Definition of Terms
Abbreviation
Byte
CoE
CRC
Cycle
EEPROM
ESC
ESI
EtherCAT
Frame
Header
LSB
MAC
Master
MFC/MFM
MSB
MTU
NIC
OSIModel
PDO
PDU
RO
RT
RW
SDO
SII
Slave
Stack
Topology
WO
Description
AByterefersto8consecutivebits.
CANOpenoverEtherCAT
Checksum
Acycleisdefinedastheprocessofsendingacommand,waitingfora
response,andprocessingitinordertobereadytosendanewcommand.
ElectricallyErasableProgrammableReadͲOnlyMemory.
EtherCATSlaveController
EtherCATSlaveInformationfile.(DevicedescriptioninXMLformat)
EthernetforControlandAutomationTechnology
Thetransportationunitinanetwork,alsoknownasapacket.(Containsa
Headerfollowedbythedatatobesent).
TheHeaderispartoftheFrameandcontainsallprotocoldefined
constructsforaddressing,size,etc.
LeastSignificantBit
MediaAccessControlisresponsibleforaddresscheckingandismostoften
doneinthehardwareofaNIC.
AMasterisaunitwhichcontrolstheSlaves,feedingthemcommandsand
receivingstatusreportsinexchange.
MassFlowController/MassFlowMeter
MostSignificantBit
MaximumTransmissionUnit.Themaximumpayloadthatastandard
EthernetFramecanhold.TheMTUissetat1500bytes(Notconsidering
theHeaderandChecksum).
NetworkInterfaceController.Ahardwarecomponentthatconnectsa
computertoanetwork.
Astandardizedrepresentationforhowacommunicationsystemcanbe
organized.(e.g.,aprotocolstack)Themodelisdividedintolayers,each
responsibleforapartofthecommunication.
ProcessDataObject
ProtocolDataUnit.ASlavecommand
ReadOnly
RealͲtime.Asystemthatadherestostricttimingdemands.
Read/Write
ServiceDataObject
SlaveInformationInterface.DatastoredonanEEPROMintheSlave,
containinginformationaboutitanditsoperation.
ASlaveisaunit(node)ontheEtherCATnetwork(e.g.,anMFC).TheSlave
isconnectedtoaMaster.
Asynonymfortheimplementationofthelayersofaprotocol.(e.g.,a
Master)
Thewayanetwork(Master&Slaves)isconnected.Theoveralllayout.
(e.g.,Star,Tree,LineTopology)
WriteOnly
2-1
Section 2 Definition of Terms
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
Brooks® SLA58xx/SLAMfxx EtherCAT®
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Section 3 Before Starting
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
3 Before Starting
3.1 Background & Assumptions
This manual is a supplement to the Brooks SLA Enhanced Series
installation and operation manual. It is assumed that the owner of this
EtherCAT MFC/MFM is thoroughly familiar with the theory and operation of
this device. If not, it is recommended that the owner read the installation and
operation manual first before continuing with this supplement.
This manual assumes basic knowledge and understanding of EtherCAT (its
topology and its method of logically accessing the data or parameters within
this device). This manual is not intended to be a replacement to the
EtherCAT specifications. It is recommended but not required, for the
purposes of this manual, that the user obtains a copy of the EtherCAT
specifications (www.ethercat.org).
This manual does not make any assumptions about any particular
manufacturer of equipment or custom software used by the user to
communicate with the Brooks device, but assumes that the user has
thorough understanding of such equipment and any configuration software.
Application Notes and FAQ’s are available at the Brooks Instrument web
site (www.BrooksInstrument.com).
3.2 Numbers
Numeric values used throughout this manual will be clearly denoted as to
the base numeric system it represents. All hexadecimal numbers (base 16)
will be prefixed with a 0x, like “0xA4”. All binary numbers (base 2) will be
suffixed with a b, like “1001b”. All other numbers not annotated this way will
be assumed decimal (base 10).
3-1
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Section 4 Quick Start
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Brooks® SLA58xx/SLAMfxx EtherCAT®
4 Quick Start
This section assumes that the owner of the Digital Series device has a fully
operational and trouble-free communications network with appropriate power
supplies. This section also assumes that an EtherCAT master application is
connected to the network capable of PDO and mailbox data communication.
Both types of data communication modes are supported by the
Brooks SLA 5800 ‘E’ Series EtherCAT device
4.1 Master Hardware
Various companies provide EtherCAT master applications, e.g. TwinCAT
from Beckoff, or offer EtherCAT master stacks to develop a master
application, e.g. Acontis. A P.C. can be used to run most EtherCAT master
applications but needs dedicated EtherCAT hardware to support the high
cycle times and kernel mode operations of the master applications, see
www.beckoff.com. Screen dumps of master applications used in this manual
are taken from the EtherCAT Configurator tool or TwinCAT 3® applications
from Beckoff Inc.
4.2 Physical Interfaces
The available physical interfaces on the EtherCAT device are listed below:
• 5 pin M8 threaded male connector for power and Analog I/O, indicated by pwr.
• In and Out ports with RJ-45 connectors.
• 2.5mm female jack for RS485 diagnostic port indicated by ‘DIAG’, refer to
the SLA 5800 Series installation and operation manual for more details.
4.2.1 Power Supply and Analog I/O
Power needs to be supplied via the M8 connector. This connector also
provides access to analog I/O signals, see Table 4-1.
SLA58xx Top Cover
Figure 4-1 EtherCAT Top Cover
SLAMfxx Top Cover
4-1
Section 4 Quick Start
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Brooks® SLA58xx/SLAMfxx EtherCAT®
SLA58xx
Figure 4-2 M8 Male Device Connector Pin Layout, Pin Side View
Table 4-1 Pin Labeling of M8 Male Device and Female Mating Cable Connector
Pin Label
P_COM
+VPWR
V_AUX_OUT
AGND
V_AUX_IN
Function at Remote Connector
Power Supply Common
Positive Power Supply Voltage
Flow Output 0-5V
Analog I/O Common
Auxiliary Input 0-5/10V for Future Use
M8 mating cables can be purchased as a second line item, details given below.
Figure 4-3 M8 Female Mating Cable
Mating Side Female Cable Connector
SLA58xx
Figure 4-4 Female Mating Cable Connector Pin Layout
4-2
SLAMfxx
Section 4 Quick Start
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
Table 4-2 Wire Labeling of M8 Female Mating Cable Connector
Wire Color
Blue
Brown
Black
White
Grey
Wire Label
P_COM
+VPWR
V_AUX_OUT
AGND
V_AUX_IN
Function at Remote Connector
Power Supply Common
Positive Power Supply Voltage
Flow Output 0-5V
Analog I/O Common
Auxiliary Input 0-5/10V for Future Use
Table 4-3 M8 Female Mating Cable Part Numbers
Supplier
Part Number
Description
Brooks
Instrument
124X049AAA
124X050AAA
124Z170AAA
M8 Mating Cable 2m
M8 Mating Cable 5m
ECAT to DB15 Male
4.2.2 RUN and MOD LED's
The MOD LED indicates that the device is supplied sufficiently with power.
The MOD LED will indicate the following:
Table 4-4 MOD LED Specification
Flash Code
Flashing
Red/Green
Solid Green
Flashing Red
Flashing Green
Solid Red
Description
The device is in the Self-Test mode.
All Self-Tests have passed. No faults have been detected.
A recovering alarm has been detected.
A recovering warning has been detected.
An unrecoverable fault has occured.
4.2.3 EtherCAT MFC Slave Hardware
The main parts of the EtherCAT MFC are:
• Standard Ethernet Physical Layer Components
• EtherCAT Slave Controller (ESC) and EEPROM (ESC configuration data
and application specific data)
• For intelligent slaves with an application controller: Host controller
4-3
Section 4 Quick Start
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Brooks® SLA58xx/SLAMfxx EtherCAT®
4.3 EtherCAT Theory
Ethernet for Control and Automation Technology
• Uses standard Ethernet hardware, Cat 5 cabling, and Network Interface
Cards (NIC).
• Streamlines Ethernet communication at the hardware level.
• Data processing on Slave devices is handled “on-the-fly” via FPGA or
ASIC, minimizing latency.
• Initial setup and configuration is required.
4.4 Frames (EtherCAT vs Ethernet)
Ethernet Header:
• Ether type 0x08A4 specifies EtherCAT
EtherCAT Header:
• Data Length: 11bits
• Reserved: 1bit
• Protocol type: 4bits (0x01 indicates CoE/Can over EtherCAT)
EtherCAT Data:
• 46 – 1496 bytes
Working Counter:
• 2 Bytes
CRC (Checksum):
• 4 Bytes
EthernetFrame
14bytes
46Ͳ1500bytes
4bytes
EtherCATFrame
14bytes
2bytes
46Ͳ1496bytes
2bytes
4bytes
4.5 Speed
• The EtherCAT protocol reduces the addressing overhead by letting a
Master communicate with all Slaves using a single frame, instead of one
frame per device.
• This One Frame holds messages to any or all slaves on the network.
4-4
Section 4 Quick Start
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X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
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Brooks® SLA58xx/SLAMfxx EtherCAT®
4.6 EtherCAT Examples
Header
Analogy: Fast Train.
• “Train” (EtherCAT Frame) does not stop.
• Even when watching “Train” through narrow window one sees the entire “Train”
• “Car 27” (Sub-Telegram) has variable length. (46-1496 bytes)
• One can “extract” or “insert” single “persons” (Bits) or entire “groups”
(Bytes) – even multiple groups per train… This is done without the train
ever having to stop!
• An EtherCAT Master initially maps out the location and addresses of all of
the slaves.
• The single EtherCAT Frame (the train) has instructions loaded on-board for
some or all of the slaves.
• Only the instructions that are specifically addressed to a specific slave are
delivered to that slave.
• So, for example, if there is a specific instruction on-board the EtherCAT
Frame for a slave (node) with the Station ID, then only that slave with that
address, will receive that specific instruction. The slave (node) will ignore all
instructions on the EtherCAT frame Except for those instructions that are
specifically addressed to it.
4-5
Section 4 Quick Start
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
Brooks® SLA58xx/SLAMfxx EtherCAT®
June, 2016
Another Example of the EtherCAT process...
• Each cubicle is an EtherCAT slave containing an engineer (a SLA58xx).
• Each engineer is told where to sit by its hardware address (Station ID).
• The Engineer is assigned specific tasks (by SDO’s).
• The Boss (Master) identifies each engineer by first and last name, what
they look like, and where exactly they are sitting.
• The Boss is the EtherCAT Master, sending instructions (PDO’s) out to the
engineers each morning and picking up their work at the end of the day.
4-6
Section 4 Quick Start
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Brooks® SLA58xx/SLAMfxx EtherCAT®
4.7 EtherCAT Explained
1. EtherCAT Communication
• Each slave on the network has a unique address, set by hardware.
• Master/Slave configuration with the EtherCAT Master sending and
requesting data from the Slave.
• Data not addressed to a particular slave are forwarded along to the
network.
• Minimal processing time can provide cycle update rates of up to 32kHz.
• Network physical layout is limited only by the allowable lengths of CAT5
Ethernet cable, up to 100m.
• Increased noise immunity due to reliance on Ethernet physical
components.
2. SDO’s and PDO’s
Data is moved along an EtherCAT network using two protocols: SDO’s and PDO’s
SDO: Service Data Object
• SDO’s can be sent at any time… before, after or during real time operation
of the network but require additional communication overhead.
• As a result, SDO usage is typically only used for Network Setup
Commands.
PDO: Process Data Object
• PDO’s contain the raw operational data with minimal overhead and thus
are used for real time processes, like motion and I/O control.
• PDO’s can only be used once they have been mapped using SDO’s.
• Mapping sets up which byte in each PDO goes to which memory address
on the slave.
3. EtherCAT Master
• Can be software and or hardware configured to assemble, send and
receive EtherCAT datagrams.
• Requires only standard Ethernet physical layer components for
communication.
• Facilitates coordination between EtherCAT slaves, writing and receiving
data from each slave in an EtherCAT frame.
• In motion control applications, the relevant data sent to the drives are
profiling data.
• The data requested are position and input status.
4. EtherCAT Slave
• Reads and processes profiling data.
• Can be configured for multiple modes of operation.
• All slaves contain specific spaces in memory where data can be written
• These spaces are called Objects… The entire memory space is called the
Object Dictionary.
• Each Object has its own address, specified as an index/sub index.
4-7
Section 4 Quick Start
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
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Brooks® SLA58xx/SLAMfxx EtherCAT®
5. SDO vs PDD Summary
SDO
PDO
TransferConfirmation
NoTransferConfirmation
Client/ServerModel
PeerͲtoͲpeerModel
DeviceConfiguration,PDOMapping
HighprioritytransferofsmallamountsofData.
Canbesentatanytime
CanonlybeusedafterconfigurationusingSDO’s
Significantcommunicationoverhead
Noadditionalprotocoloverhead.
6. The EtherCAT Slave State Machine
STATE
MASTER(PC)
X607A
AllowedCommunication
INIT
NoUserCommunication
PreͲOP
SDOCommunicationOnly
SafeͲOP
SDO,PDOCommunicationAllowed
OutputPDOInfoignored
OP
SDO&PDOCommunicationAllowed
X6060
X6040
PDOEXCHANGEEXAMPLE
X6041
X6062
X6061
IncomingPDO
Location
Function
X607A
TargetSetpoint
X6060
ModeofOperation
X6040
ControlWord
OutgoingPDO
Location
4-8
Function
X6041
Statusword
X6062
SetpointDemandValue
X6061
ModeofOperation
X6064
SetpointActualValue
X60FD
DigitalInputStatus
X60FD
SLAVE(MFC)
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
5.1 Introduction
Based on the information provided by the EtherCAT Slave Information File
(ESI, device description in XML format) and/or the EEPROM, master
applications are able to configure the EtherCAT network
For the EtherCAT network configuration of the SLA 5800 Series devices, the
following ESI file is provided on the Brooks Instrument website.
(www.BrooksInstrument.com):
• ‘Brooks SLA Enh.xml’ – SLA5800 Series Mass Flow Controller/Meter
5.2 Outputs (Master Side)
The request message, sent from master to slave, consists of the fields
indicated in Figure 5-1, these fields will be described in the sections below.
Figure 5-1 Output PDOs
OutputPDO
FlowControllerSetpoint(Real)
ActuatorOverride
PressureController
Setpoint(Real)
ActInstController
Setpoint(Real)
DataUnits
SpecifiedbySetpointController
DataUnits
vdOverride
Table5Ͳ1ValveOverrideValues
(vdOverride)
SpecifiedbySetpointController
DataUnits
TBD
Description
Setpointspecifiedinthe
selectedDataUnits
ValveOverride
Setpointspecifiedinthe
selectedDataUnits
TBD
5-1
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
5.3 Inputs (Master Side)
Figure 5-2 Input PDOs
InputPDO
SensorAIͲMF(Flow,Real)
Temperature(Real)
ActuatorDriveValue(Real)
FlowControllerSetpoint(Real)
SensorAIͲMFFlowTotalizer
ActuatorOverride
Pressure(Real)
PresControllerSetpoint(Real)
5-2
DataUnits
SpecifiedbyFlowSensorData
Units
SpecifiedbyTemperature
SensorDataUnits
%
SpecifiedbySetpointController
DataUnits
cmद
vdOverride
Table5Ͳ1ValveOverrideValues
(vdOverride)
SpecifiedbyPressureSensor
DataUnits
SpecifiedbyPressureController
DataUnits
Description
FlowspecifiedinFlowSensor
DataUnits
Temperaturespecifiedin
TemperatureSensorDataUnits
Valvedrivevalue
SetpointspecifiedinSetpoint
ControllerDataUnits
Flowtotalizervalue
ValveOverride
DataUnits
Description
InputPDO
ActiveInstanceSetpoint(Real)
ExceptionStatus
TBD
BitMask
AlarmDetail
WarningDetail
BitMask
BitMask
PressurespecifiedinPressure
SensorDataUnits
PressurespecifiedinPressure
ControllerDataUnits
TBD
SummaryofAlarmandWarning
detail
Alarms
Warnings
Installation and Operation Manual
Section 5 Slave Configuration
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4 COE Online Attributes
5.4.1 Device Attributes
Figure 5-3 Device Attributes
5-3
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4.2 Flow Sensor
Figure 5-4 Flow Sensor Attributes
Flowsensorattributes
AlarmEnable
AlarmSettlingTime
DataUnits
Enable(1)
Disable(0)
Enable(1)
Disable(0)
Tobespecifiedinselectedflow
dataunits
Tobespecifiedinselectedflow
dataunits
Tobespecifiedinselectedflow
dataunits
Tobespecifiedinselectedflow
dataunits
Real(202)
fmUnits
Table5Ͳ2FlowDataUnits
(fmUnits)
Time:ms
WarningSettlingTime
Time:ms
ResetFlowTotalizer
0
WarningEnable
AlarmTripPointHigh
AlarmTripPointLow
WarningTripPointHigh
WarningTripPointLow
DataType
DataUnits
5-4
Description
Enable/Disablethehighandlow
flowAlarm
Enable/Disablethehighandlow
flowWarning
Flowalarmhighlimit
Flowalarmlowlimit
Flowwarninghighlimit
Flowwarninglowlimit
DatatypeisfixedtoReal
FlowDataUnits
Timeinmillisecondsthatthe
alarmconditionneedstobe
presentbeforeanalarmis
raised
Timeinmillisecondsthatthe
warningconditionneedstobe
presentbeforeanwarningis
raised
Writingthevalue0tothis
attributewillresettheflow
totalizer
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4.2.1 Flow Sensor Zero Adjust
Figure 5-5 Flow Sensor Zero Adjust Attribute
ServiceTransferAttribute
PerformZero
DataUnits
1
Description
TheFlowSensorcanbezero
adjustedbywritinga1tothis
attribute.Refertothe
instructionmanualforproper
instructions
5.4.2.2 Flow Sensor Status
Figure 5-6 Flow Sensor Status Attributes
Flowsensorstatusattributes
Status
DataUnits
B00000001(0x01)
B00000010(0x02)
B00000100(0x04)
B00001000(0x08)
ZeroingStatus
0
1
Description
Flowsensorstatusbitmask
indicatinghighorlowflow
alarmsandwarnings
HighFlowAlarm
LowFlowAlarm
HighFlowWarning
LowFlowWarning
0=Idle
1=ZeroAdjustinProcess
5-5
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
Brooks® SLA58xx/SLAMfxx EtherCAT®
June, 2016
5.4.3 Temperature Sensor
Figure 5-7 Temperature Sensor Attributes
Temperaturesensorattributes
TemperatureAlarmEnable
AlarmSettlingTime
DataUnits
Enable(1)
Disable(0)
Enable(1)
Disable(0)
Tobespecifiedinselected
Temperaturedataunits
Tobespecifiedinselected
Temperaturedataunits
Tobespecifiedinselected
Temperaturedataunits
Tobespecifiedinselected
Temperaturedataunits
Real(202)
Table5Ͳ3TemperatureData
Units
(tmUnits)
Time:ms
WarningSettlingTime
Time:ms
TemperatureWarningEnable
AlarmTripPointHigh
AlarmTripPointLow
WarningTripPointHigh
WarningTripPointLow
DataType
DataUnits
5-6
Description
Enable/Disablethehighandlow
temperatureAlarm
Enable/Disablethehighandlow
temperatureWarning
Temperaturealarmhighlimit
Temperaturealarmlowlimit
Temperaturewarninghighlimit
Temperaturewarninglowlimit
DatatypeisfixedtoReal
TemperatureDataUnits
Timeinmillisecondsthatthe
alarmconditionneedstobe
presentbeforeanalarmis
raised
Timeinmillisecondsthatthe
warningconditionneedstobe
presentbeforeanwarningis
raised
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4.3.1 Temperature Sensor Status
Figure 5-8 Temperature Sensor Status Attribute
Temperaturesensorstatus
attributes
Status
DataUnits
b00000001(0x01)
b00000010(0x02)
b00000100(0x04)
b00001000(0x08)
Description
Temperaturesensorstatusbit
maskindicatinghighorlowflow
alarmsandwarnings
HighTemperatureAlarm
LowTemperatureAlarm
HighTemperatureWarning
LowTemperatureWarning
5-7
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
Brooks® SLA58xx/SLAMfxx EtherCAT®
June, 2016
5.4.4 Setpoint Controller
Figure 5-9 Setpoint Controller Attributes
SetpointControllerattributes
AlarmEnable
WarningEnable
AlarmSettlingTime
AlarmErrorBand
Tobespecifiedintheselected
flowdataunits
WarningSettlingTime
Time:ms
WarningErrorBand
Tobespecifiedintheselected
flowdataunits
DataType
DataUnits
Real(202)
fmUnits
Table5Ͳ2FlowDataUnits
(fmUnits)
fcControlMode
Table5Ͳ4SetpointControl
Mode
(fcControlMode)
Time:ms
ControlMode
RampTime
5-8
DataUnits
Enable(1)
Disable(0)
Enable(1)
Disable(0)
Time:ms
Description
Enable/DisabletheSetpoint
errorbandAlarm
Enable/DisabletheSetpoint
errorbandWarning
Timeinmillisecondsthatthe
alarmconditionneedstobe
presentbeforethewarningis
raised
ErrorbandinfmUnitswherean
alarmwilloccurwhenthepv
(output)isoutsideofthisband
Timeinmillisecondsthatthe
warningconditionneedstobe
presentbeforethewarningis
raised
ErrorbandinfmUnitswherea
warningwilloccurwhenthepv
(output)isoutsideofthisband
DatatypeisfixedtoReal
Setpointcontrollerdataunits
Thesetpointcontrolisfixedto
thedigitalEtherCATinterface
(futureenhancement:analog
setpointsource)
Timeinmillisecondstoreacha
newlyconfiguredsetpoint
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4.4.1 Setpoint Controller Status
Figure 5-10 Setpoint Controller Status Attribute
SetpointControllerstatus
attributes
Status
DataUnits
b00000001(0x01)
b00000010(0x02)
Description
SetpointControllerstatusbit
mask
SetpointErrorBandAlarm
SetpointErrorBandWarning
5.4.5 Valve Actuator Attributes
Figure 5-11 Valve Actuator Attributes
ValveActuatorattributes
AlarmEnable
WarningEnable
DataType
DataUnits
AlarmTripPointHigh
AlarmTripPointLow
WarningTripPointHigh
WarningTripPointLow
DataUnits
Enable(1)
Disable(0)
Enable(1)
Disable(0)
Real(202)
vdUnits
Table5Ͳ5ValveDriveDataUnits
(vdUnits)
Tobespecifiedinselected valve
drivedataunits(percent)
Tobespecifiedinselected valve
drivedataunits(percent)
Tobespecifiedinselected valve
drivedataunits(percent)
Tobespecifiedinselected valve
drivedataunits(percent)
Description
Enable/Disablethehighandlow
ValveDriveAlarm
Enable/Disablethehighandlow
ValveDriveWarning
DatatypeisfixedtoReal
ValveDriveDataUnits,fixedto
percent.
ValveDrivealarmhighlimit
ValveDrivealarmlowlimit
ValveDrivewarninghighlimit
ValveDrivewarninglowlimit
5-9
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
Figure 5-12 Valve Actuator Status Attributes
SetpointControllerstatus
attributes
Status
DataUnits
b00000001(0x01)
b00000010(0x02)
b00000100(0x04)
b00001000(0x08)
Description
ValveActuatorstatusbitmask
indicatinghighandlowvalvedrive
alarmsandwarnings.
HighValveDriveAlarm
LowValveDriveAlarm
HighValveDriveWarning
LowValveDriveWarning
5.4.6 Service Transfer Attributes
Figure 5-13 Service Transfer Attributes
ServiceTransferattributes
PerformZero
1
DataUnits
SelectFlowGasTable
FlowFullScaleRange
1…6
Real
FlowFullScaleRangeUnits
Table5Ͳ2FlowDataUnits
(fmUnits)
Description
Refertosection5.3.2.1
FlowSensorZeroAdjust
SelectedprocessGasPage
Fullscalerangebeingtheflowat
100%
Dataunitofthefullscalerange
5.4.7 Calibration Object Attributes
Figure 5-14 Calibration Object Attributes
5-10
CalibrationObjectattributes
LastCalibrationDate
Date
DataUnits
NextCalibrationDueDate
Date
RunHours
Time:Hours
Description
Dateatwhichthedevicewas
calibrated
Dateatwhichthedeviceneededto
becalibrated
Timethatthedevicehasobserved
flowintherangeof0Ͳ100%
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4.8 Exceptions
5.4.8.1 Alarm- and Warning Details
The device, flow, temperature, setpoint controller and valve actuator related
exceptions are collected in the alarm and warning detail byte sequences.
Access to the Bit-Map data requires Terminal Access through ‘cal204’
or ‘checkMFC’ applications via the AWE Engine.
The Bitmasks are shown below:
Common
Exception
Detail
Size
Common
Exception
Detail1st
byte
Common
Exception
Detail2nd
byte
Device
Exception
Detail
size
Device
Exception
Detail
size
Manuf.
Exception
Detail
Size
Manuf.
Exception
Detail1st
byte
Manuf.
Exception
Detail2nd
byte
ByteNR
Bit7
Bit6
Bit5
Bit4
Bit3
Bit2
Bit1
Bit0
0
0
0
0
0
0
0
1
0
1
0
0
0
0
0
0
0
0
2
0
0
0
0
0
0
0
0
3
0
0
0
0
0
0
1
0
Valve
Alarm/
Warning
Low
Flow
Control
Alarm/
Warning
Pressure
Control
Alarm/
Warning
Flow
Alarm/
Warning
High
Pressure
Alarm/
Warning
High
Flow
Alarm/
Warning
Low
Pressure
Alarm/
Warning
Low
Flow
Sensor
Reading
notvalid
Pressure
Sensor
Reading
notvalid
4
0
0
Valve
Alarm/
Warning
High
5
0
0
0
0
6
0
0
0
0
0
0
0
1
0
Temp
Alarm/
Warning
High
Temp
Alarm/
Warning
Low
0
0
7
0
0
0
5-11
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4.8.2 Exception Status
The device, flow, temperature, setpoint controller, and valve actuator related
exceptions are collected in the alarm and warning detail byte sequences.
The Bitmasks are shown below:
Bit7
Bit6
Bit5
Bit4
Bit3
Bit2
Bit1
Bit0
Exception
Status
0
Manuf
specific
warning
Device
specific
warning
Common
exception
warning
0
Manuf
specific
alarm
Device
specific
alarm
Common
exception
alarm
5.4.9 PDC (Product Description Code): I/O and Model Code
CommunicationsI/O:
EtherCAT
DeviceNET*
RSͲ485
Profibus*
Foundation
Fieldbus*
None
E
D,J,K,L,V
S
P,R,T
F,M,N,Q
A
*I/Oletterdesignationisdependentonthetypeofconnector
ExampleModelCode(PDC):
SLA5850E1BAB1A2A1 •••
V V
V
•BaseModelNumber(Deltaclass)•
•Certification
•ModelRevisionLevel•
•OutputEnhancements
•Package/Finishspecs.•
•PowerSupplyInputs
•Function(MFC,MFM,PC,etc.)•
•AnalogI/OCommunications
•BodySize•
•ValveType
•DigitalI/OCommunications•
•ValveSeatMaterial
•MechanicalConnections•
•OͲRingMaterial
Please see the SLA 5800 Series Instruction/Operators manual for a complete and
comprehensive breakdown of the Product Description Code.
5-12
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4.10 Tables
Table 5-1 Valve Override Values (vdOverride)
Table 5-2 Flow Data Units (fmUnits)
Table 5-3 Temperature Data Units (tmUnits)
Table 5-4 Setpoint Control Mode (fcControlMode)
Table 5-5 Valve Drive Data Units (vdUnits)
5-13
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
Brooks® SLA58xx/SLAMfxx EtherCAT®
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
5-14
June, 2016
“
Section 6 TwinCAT® Master
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
“
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
6 Beckhoff Automation: TwinCAT® (A PC Master Option)
“
6.1 Establishing a PC Ethernet Master (TwinCAT)
“
“
6.1.2 AUTO SETUP - PC Ethernet Master (TwinCAT)
x
x
x
IntheSolutionExplorer,RightͲclickon
“Devices”,undertheI/OIcon.
FromthedropͲdownmenuselect
”Scan”toautomaticallyscanyourPC
forEtherCATcompatibleEthernet
Adapters.
ApopͲupboxappearsremindingthe
userthat“Notalldevicescanbe
foundautomatically”.Select“OK”.
Figure 6-1 AUTO SETUP - PC Ethernet Master, Scanning for Compatible Devices
Figure 6-2 AUTO SETUP - PC Ethernet Master, I/O Devices Found
6-1
Section 6 TwinCAT® Master
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
Figure 6-3 AUTO SETUP - Pop-Up Screens
“
“
x
IntheTwinCATSolutionExplorerdisplaytotheright,“Device2”
representstheEtherCATMaster.
x
“Box1(GF04xSPIͲSlave)”representstheSlavedevice.(Inthis
exampletheslaveisasingleGFͲ40device).
Inputs: Attribute(s)reportedfromtheSlavedevicetothe
Master.(e.g.“SensorFlowAIͲMF”)
Outputs:
AnexplicitattributechangesentfromtheMaster
totheSlavedevice.(e.g.“ControllerSetpoint”)
AddtoWatch:
Putsthedatastreamintoaseparatewindow
whichprovidestheuserwithrealͲtimemonitoring
capability.
Master
Slave
Figure 6-4 AUTO SETUP - Proper Communications: Master and Slave (Beckhoff Automation: TwinCAT)
6-2
Section 6 TwinCAT® Master
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks® SLA58xx/SLAMfxx EtherCAT®
“
6.2 MANUAL SETUP - PC Ethernet Master (TwinCAT)
x
x
x
SometimeswhenyouRightͲclickon
“Devices”andselect“Scan”,you
mayreceivearesponseof:“NoNew
I/ODevicesFound”.
Ifyoureceivethisreplyfrom
TwinCAT,youmustsetupthe
Ethernetconnectionmanuallyby
installingit.
Fromthe‘TwinCAT’dropͲdowntab
locatedinthemaintoolbar,select
“ShowRealtimeEthernet
CompatibleDevices”.
Figure 6-5 MANUAL SETUP - PC Ethernet Master, Scanning for Compatible Devices
x
x
ApopͲoutscreenappears(similarto
thisone)thatdisplaysallofthe
EthernetAdaptersthatwerefoundby
TwinCATonyourPC.
Someoftheadaptersarelistedunder
“Compatible”andothersmaybe
listedunder“Incompatible.The
differenceisthecurrentstatusofthe
EthernetDeviceDriver.
x
ClickontheEthernetAdapterthat
representsaLANconnectionforyour
PC.Thenclickonthe“Install”button
andfollowonͲscreeninstructions.
x
Note:EtherCAToperatesonan
availableLANconnectionandisnot
currentlysuitableforwirelessinternet
operation.SelectingtheWireless
EthernetAdapterwouldnotworkin
thiscase.
Figure 6-6 MANUAL SETUP - Pop-Up Screen
6-3
Section 6 TwinCAT® Master
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
Brooks® SLA58xx/SLAMfxx EtherCAT®
“
“
6.3 CoE Online Attributes - Making Changes (Beckhoff Automation: TwinCAT)
x
x
x
Assumingthatyouarealready
connectedtothedeviceusingeither
TwinCATorEtherCATconfigurator,
clickonceonthegfͲ40boxsothat
thereisadisplayscreenontheright
withmenutabs(General,EtherCAT,
ProcessData,Startup,CoEͲOnline,
Online).
Thetabweareinterestedinis“CoEͲ
Online”….Pleaseclickonthattab.
Youarepresentedwithatablethat
listsallofthedeviceattributeswitha
titleheaderof:“Index”,“Name”,
“Flags”,and“Value”.
Figure 6-7 CoE Online: Changing the Active Gas Page (and other device attributes)
x
x
Youwillnoticethatunderthe“Flags”
title:RWisRead/Write.ROisRead
Only.Onlythoseattributeswithan
RWflagcanbechanged.
Youchangetheattribute‘Value’by
doubleͲclickingontheattribute.You
willgetapopͲupwindowtoenterthe
newinformation.Afteryouclick‘OK’,
verifythattheattributedidindeed
change.
x
TheattributeforgaspageisIndex:
B000:03“SelectGasTable”(with
Bechhoff“EtherCATConfigurator”)
x
Justenterinthenewgaspage
numberhereandclick‘OK’.
Figure 6-8 CoE Attributes - Pop-Up Screen
6-4
June, 2016
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
Brooks®
SLA58xx/SLAMfxx EtherCAT®
Brooks® SLA58xx/SLAMfxx
Installation and Operation Manual
X-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016
EtherCAT®
LIMITED WARRANTY
Visit www.BrooksInstrument.com for the terms and conditions of our limited warranty.
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Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and
reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the
relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
START-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or
(re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the
results will be traceable to the relevant international quality standards.
CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance
persons.
Please contact your nearest sales representative for more details.
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+31 (0) 318 549 290
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Asia
+81 (0) 3 5633 7100
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