Further Details
Chamber
Large effusion cell capacity from 10 cm3 up to 80 cm3 for layer growth
Smaller effusion cell volumes from 1.5 cm3 to 5 cm3 for doping applications
EBV, EBVV or EBVM type e-beam evaporators
Rotary shutters for the effusion cells
Optional linear shutter ports
LN2 cooling shroud
Further ports on the chamber: viewports for good visibility during sample transfer, two
tilted flanges for ellipsometry, flanges for a beam flux monitor, a quartz micro balance, a
RGA, for venting, for pressure measurement, for a RHEED electron gun and a flange for
a RHEED screen
Large pumping port
One flange perpendicular to the sample for optical measurements
General Design Aspects:
The distance between the source flanges on the cluster flange and the support frame bottom is
optimized for very good accessibility to all effusion cells. All shutter blades are operated from softacting shutter modules. The increasing / decreasing shutter movement speed follows a sinusoidal
speed curve to avoid particles being flinged away by the shutter blades. The customer can
choose for special effusion cells with user adjustable tradeoff between thickness uniformity and
material consumption by using the crucible insert technology. In addition all sources are usually
mounted into water cooling shrouds and therefore reduce the LN2 consumption significantly.
Special care has been taken to allow safe operation using interlocks and convenient system
control. The bakeout tent ensures homogeneous heat distribution for ultimate vacuum conditions
and cleanest environment.
The system comes completely assembled and fully tested as a turn-key system.
The EVO MBE-Systems can be easily extended with Omicrons Multiprobe analysis systems
providing various analysis techniques such as SPM, AFM, XPS, UPS, AES, SEM and many
others without compromising the performance.
© scientaomicron 2017
http://www.scientaomicron.com/products/evo-25-50-mbe-systems/further-details/292
2017-06-17 - Page 1 of 2
EVO-25/50 MBE Systems
2017-06-17 - Page 2 of 2
List of figures
Chamber
© scientaomicron 2017
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