SAFC Hitech®
Enabling your current and
future technologies
Abbreviations used in the Electronics and Chemical Industries
AAS
Atomic Absorption Spectroscopy
AES
Auger Electron Spectroscopy
AFM
Atomic Force Microscopy
ALD
Atomic Layer Deposition
ALE
Atomic Layer Epitaxy
amu
Atomic Mass Unit
APCVD
Atmospheric Pressure Chemical Vapor
Deposition
AR
Aspect Ratio
BiCMOS
Bipolar Complementary Metal Oxide
Semiconductor
BiFET
Bipolar Field Effect Transistor
CBE
Chemical Beam Epitaxy
CL
Cathodoluminescence
CMOS
Complementary Metal Oxide
Semiconductor
CVD
Chemical Vapor Deposition
CW
Continuous Wave
dec.
Decomposes
DI
Deionised
DID
Discharge Ionisation Detector
DRAM
Dynamic Random Access Memory
DSC
Differential Scanning Calorimetry
EAA
Electrically Active Anions
EAC
Electrically Active Cations
EL
EPROM
Electronically Programmable Read Only
Memory
FET
Field Effect Transistor
FIB
Focused Ion Beam
FinFET
Fin Structure Field Effect Transistor
FTIR
Fourier Transform Infrared Spectroscopy
FTNMR
Fourier Transform Nuclear Magnetic
Resonance
GCMS
Gas Chromatography Mass Spectroscopy
CG-AED
Gas Chromatograph Atomic Emission
Detector
HRTEM
High Resolution Transmission Electron
Microscope
ICP-MS
Inductively Coupled Plasma Mass
Spectroscopy
ICP-OES
Inductively Coupled Plasma Optical Emission
Spectroscopy
IMD
Inter-Metal Dielectric
ITRS
International Technology Roadmap for
Semiconductors
I-V
Current Voltage
K
Degrees Kelvin
LED
Light Emitting Diode
LDL
Lower Detection Limit
LICVD
Liquid Injection Chemical Vapour Deposition
LOD
Limit of Detection
LPCVD
Low Pressure Chemical Vapour Deposition
Electroluminescence
MBE
Molecular Beam Epitaxy
eRAM
Embedded DRAM
MIM
Metal Insulator Metal
EDAX
Energy Dispersive X-ray Analysis
mmHg
Millimeters of mercury
ENC
Electrically Neutral Contaminants
MO
Metalorganic
EOT
Equivalent Oxide Thickness
MOCVD
Metalorganic Chemical Vapor Deposition
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SAFC Hitech®
Enabling your current and
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Abbreviations used in the Electronics and Chemical Industries (continued)
MOMBE
Metalorganic Molecular Beam Epitaxy
RMM
Relative Molecular Mass
MOSFET
Metal Oxide Semiconductor Field Effect
Transistor
RPN
Remote Plasma Nitridation
RTA
Rapid Thermal Anneal
MOVPE
Metalorganic Vapor Phase Epitaxy
R&D
Research and Development
MRAM
Magnetic Random Access Memory
SEM
Scanning Electron Microscopy
MS
Mass Spectroscopy
SIMS
Secondary Ion Mass Spectroscopy
MQW
Multi Quantum Well
SOG
Spin on Glass
MS
Mass Spectroscopy
SOI
Silicon on Insulator
NMR
Nuclear Magnetic Resonance
SPC
Statistical Process Control
NVM
Non-Volatile Memory
SRAM
Static Random Access Memory
OSG
OrganoSilicate Glass
STEM
Scanning Transmission Electron Microscopy
PCM
Phase Change Memory
TEM
Transmission Electron Microscope
PECVD
Plasma Enhanced Chemical Vapour
Deposition
TGA
Thermal Gravimetric Analysis
PL
Photoluminescence
VFB
Flatband Voltage
PMD
Pre-Metal Dielectric
VP
Vapor Pressure
ppb
Parts per billion
VCSEL
Vertical Cavity Surface Emitting Laser
ppm
Parts per million
XPS
X-ray Photoelectron Spectroscopy
PSG
PhosphoSilicate Glass
XRD
X-Ray Diffraction
PVD
Physical Vapour Deposition
XRF
X-Ray Fluorescence
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