Photos of MEMS Devices
Spring 2010
ELEC 5820/6820
MEMS Gear
G
D
Drive
i
Courtesy: Sandia
C
Complex
l Gear
G
S
System
Sandia
S di MEMS 66-Gear
G
D
Drive
i TTrain
i
Importance of Cleanliness During
Microfabrication
Photo of a dust
mite on a
MEMS gear
drive
Device needs to be
debugged!
Courtesy: Sandia
MEMS Rotary
R
Motor
M
A hid on a Mi
Aphid
Micromotor D
Drive
i
Courtesy: Sandia
Cl h d MEMS A
Clutched
Actuator
Movable
M bl Micromirror
Mi
i
MEMS Gyroscope (Micromachined
Si)
Courtesy: Morgan Research Corporation
Bulk Micromachined Vibration
Isolation Platform
Device Photograph
Typical Frequency Response
Measured Filter Response vs.
Frequency
Magnitud
de, dB
40
30
20
10
0
-10
600
800
1000
1200
-20
Frequency, Hz
Vibration sensitive MEMS device
A MEMS springspring-massmass-damper mechanical low pass filter
1400
Micromachined MicroMicro-Bolometer
Courtesy: LETI
MEMS Capacitive
C
ii A
Accelerometer
l
P f
Proof
mass
Spring
Courtesy: Litton G&C
Gap for
p
y
capacitively
measuring
displacement
MEMS Accelerometer Packaged
on Ti
Tiny C
Ceramic
i C
Cube
b
Hygrometrix HMX2000 MEMS
Humidity Sensor
Front side
Courtesy: Hygrometrix, Inc/
Back side
Mi
Micromachined
hi d Si Fuel
F lA
Atomizer
i
Courtesy: Surface Technology Systems, Ltd
Mi fl idi Flow
Microfluidics
Fl Channels
Ch
l in
i Si
MEMS Micromirror
Mi
i
chip
hi
An Array of
over 300
parallel plate
micromirror
actuators
t t
Designed for
distortion
correction in
optical
ti l
systems
Courtesy: SY Technology, Inc.
MEMS Gas
G Flow
Fl Sensor
S
iin LTCC
Courtesy Gongora-Rubio et al
LIGA MicroMi -Gears
Micro
G
Courtesy: Karlsruhe Nuclear Research Center
LIGA MicroMicro-Gear on Ant’s Leg
Courtesy: Karlsruhe Nuclear Research Center
Working Micromachined Electric
Car
World’s
smallest
working
car
Powered
by a
remote
magnetic
field
Courtesy: Denso Corp
MEMS Wankel
W k l EEngine
i
Courtesy: UC Berkeley
MEMS Rocket
R k Engine
E i
Courtesy: UC Berkeley
Si Neural
N
l Probe
P b Array
A
Courtesy: Cal Tech and JPL
Chip Scale Micromachined Helical
Antenna
Courtesy: SY Technology, Inc.
Mi
Micromachined
hi d RF Switch
S i h Array
A
Laminated
micromachined
i
hi d
polyimide
layers
y
Electrostatic
actuators
t t turn
t
switches on
and off
P i i Laser
Precision
L
C
Cutting
i
I Cutting into or through materials with a
high--precision, computer controlled laser
high
Dime
A HighHigh-G Accelerometer Made in
Printed Circuit Board Laminate
Top Layer Removed
Spring
Proof mass
Capacitive position
detection
Integrated with Electronics
Micromachined H2-O2 Fuel Cell in
Laminate
Courtesy: Stanford
Mi
Micro
Optics
O i D
Devices
i
Positive and
negative
microlens arrays
arra s
Arrayy of micro
corner cube
reflectors
Arbitrary
surfaces to
generate various
optical effects
Courtesy: MEMS
Optical