Applied Surface Science 349 (2015) 970–982 Contents lists available at ScienceDirect Applied Surface Science journal homepage: www.elsevier.com/locate/apsusc Electronic and surface properties of Ga-doped In2 O3 ceramics A. Regoutz a,∗ , R.G. Egdell a , D.J. Morgan b , R.G. Palgrave c , H. Téllez d,1 , S.J. Skinner d , D.J. Payne d , G.W. Watson g , D.O. Scanlon e,f a Department of Chemistry, Inorganic Chemistry Laboratory, University of Oxford, South Parks Road, Oxford OX1 3QR, UK Cardiff Catalysis Institute (CCI), School of Chemistry, Cardiff University, Park Place, Cardiff, CF10 3AT, UK Department of Chemistry, University College London, 20 Gordon Street, London WC1H 0AJ, UK d Department of Materials, Imperial College London, Exhibition Road, London SW7 2AZ, UK e University College London, Kathleen Lonsdale Materials Chemistry, Department of Chemistry, 20 Gordon Street, London WC1H 0AJ, UK f Diamond Light Source Ltd., Diamond House, Harwell Science and Innovation Campus, Didcot, Oxfordshire OX11 0DE, UK g School of Chemistry and CRANN, Trinity College Dublin, Dublin 2, Ireland b c a r t i c l e i n f o Article history: Received 25 September 2014 Received in revised form 15 April 2015 Accepted 15 April 2015 Available online 22 April 2015 Keywords: Transparent conducting oxide Band bending Dopant solubility Ceramic a b s t r a c t The limit of solubility of Ga2 O3 in the cubic bixbyite In2 O3 phase was established by X-ray diffraction and Raman spectroscopy to correspond to replacement of around 6% of In cations by Ga for samples prepared at 1250 ◦ C. Density functional theory calculations suggest that Ga substitution should lead to widening of the bulk bandgap, as expected from the much larger gap of Ga2 O3 as compared to In2 O3 . However both diffuse reflectance spectroscopy and valence band X-ray photoemission reveal an apparent narrowing of the gap with Ga doping. It is tentatively concluded that this anomaly arises from introduction of Ga+ surface lone pair states at the top of the valence band and structure at the top of the valence band in Gasegregated samples is assigned to these lone pair states. In addition photoemission reveals a broadening of the valence band edge. Core X-ray photoemission spectra and low energy ion scattering spectroscopy both reveal pronounced segregation of Ga to the ceramic surface, which may be linked to both relief of strain in the bulk and the preferential occupation of surface sites by lone pair cations. Surprisingly Ga segregation is not accompanied by the development of chemically shifted structure in Ga 2p core XPS associated with Ga+ . However experiments on ion bombarded Ga2 O3 , where a shoulder at the top edge of the valence band spectra provide a clear signature of Ga+ at the surface, show that the chemical shift between Ga+ and Ga3+ is too small to be resolved in Ga 2p core level spectra. Thus the failure to observe chemically shifted structure associated with Ga+ is not inconsistent with the proposal that band gap narrowing is associated with lone pair states at surfaces and interfaces. © 2015 Elsevier B.V. All rights reserved. 1. Introduction Transparent conducting oxides (TCOs) combine the usually orthogonal properties of optical transparency in the visible region with a high electrical conductivity [1,2]. In2 O3 doped with Sn to give so called indium tin oxide or ITO is a prototype TCO with important applications as a transparent electrode in solar cells and display devices. Despite the enormous technological importance of ITO many of the basic physical properties of In2 O3 have aroused controversy. For example the band gap of In2 O3 was for many years ∗ Corresponding author. Present address: Department of Materials, Imperial College London, 20 Gordon Street, London SW7 2AZ, UK. Tel.: +44 0 2075940976. E-mail address: [email protected] (A. Regoutz). 1 Present address: Hydrogen Production Division, International Institute for Carbon-Neutral Energy Research, Kyushu University, Fukuoka 819-0395, Japan. http://dx.doi.org/10.1016/j.apsusc.2015.04.106 0169-4332/© 2015 Elsevier B.V. All rights reserved. presumed to be 3.75 eV or thereabouts [3–5], even though a weak optical onset at 2.69 eV in single crystals of In2 O3 was observed in 1966 [6]. Recent work has established that In2 O3 has a direct but dipole forbidden fundamental gap and the onset of strong optical absorption is shifted by almost 1 eV to higher energy [7]. The lowest forbidden gap for In2 O3 therefore lies within the visible region and bulk powder or ceramic samples have a bright yellow or yellowish green colouration, whilst pronounced absorption in the blue and green regions of the electromagnetic spectrum limits the possible thicknesses of transparent ITO thin films to around 200 nm–300 nm [8]. There has therefore been an increasing interest in In2 O3 -Ga2 O3 solid solutions as materials with potentially enhanced visible region transparency. Roy et al. [9] proposed that Ga2 O3 itself exists in at least 5 different polymorphs labelled ␣ to , amongst which monoclinic -Ga2 O3 is the most stable [9,10]. However the existence of a cubic ␦ phase with the bixbyite structure has recently been A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 called into question and an additional metastable phase with the orthorhombic -Al2 O3 structure has been identified [11]. The optical onset in bulk single crystals of -Ga2 O3 is at 260 nm, corresponding to a band gap of around 4.8 eV [12]. Thus thin films of -Ga2 O3 are fully transparent across a window extending well into the ultraviolet regime of the electromagnetic spectrum [10,13–15]. On the other hand Ga2 O3 is intrinsically less dopable than In2 O3 and it is not possible to achieve conductivities comparable with those of ITO. Ternary phases within the In Ga O system were first investigated by Goldschmidt et al. [16] and later by Schneider et al. [17], MacDonald et al. [18] and Shannon and Prewitt [19]. Indium doping in Ga2 O3 is achieved with retention of the parent  structure. A ternary compound GaInO3 with the -Ga2 O3 structure was identified in a number of the earlier papers, although more recent investigation of the phase diagram has established that the -Ga2 O3 phase extends only to a limiting composition of (Ga0.52 In0.48 )2 O3 in samples prepared by chemical transport in sealed quartz tubes [20]. A stoichiometric hexagonal Ga1.00 In1.00 O3 phase may however be prepared at high pressures [19]. The solid solution range for -Ga2 O3 was somewhat narrower in samples prepared by conventional solid state synthesis, with limiting In doping levels of 44.0% at 1000 ◦ C and 41.4% at 1400 ◦ C [21]. On the In2 O3 side of the phase diagram the solubility limit for Ga in the cubic bixbyite phase is much more limited, increasing from 4.8% in samples prepared at 1000 ◦ C to 10.5% for samples prepared at 1400 ◦ C [21]. In the composition range between the two doping limits bulk samples are biphasic, consisting of a mixture of cubic Ga-doped In2 O3 and monoclinic In-doped -Ga2 O3 . Ternary Ga In O oxide thin films (Gax In1−x )2 O3 have been prepared by a wide range of techniques including direct current magnetron sputtering onto glass substrates (0 < x < 0.4) [22]; metallo-organic chemical vapour deposition onto cubic Y-stabilised ZrO2 (100) (0.1 < x < 0.9) [23] and MgO(1 0 0) substrates (0.63 < x < 1.00) [15]; O-plasma assisted molecular beam epitaxy on -Ga2 O3 (x = 1.00) [24] and Al2 O3 (0 0 0 1) substrates (0.65 < x < 1.00) [25]; and by sol-gel spin-coating of Al2 O3 (0 0 0 1) substrates (0 < x < 1) [26]. Most attention has been devoted to the Ga-rich end of the phase diagram where it is clear that the band gap decreases with increasing In doping [15,23,25,26]. However, the variation of band gap with In doping level is not linear [26]. Rather less is known about the effects of Ga doping within the cubic bixbyite phase of In2 O3 , especially with respect to the low energy forbidden absorption onset. The present study of the electronic and surface properties of Gadoped In2 O3 is partly motivated by our recent work on Sn-doped rutile TiO2 where it is found that “alloying” wider gap SnO2 into narrower gap TiO2 leads at low Sn doping levels to a small but significant reduction in the band gap [27,28]. So-called band bowing effects of this sort (i.e. an initial reduction in band gap when a wider gap material is alloyed into a narrower gap material at low doping levels) are very well established in III–V semiconductor systems [29] but have been less studied in oxides. In the few cases treated by first principles calculations band bowing effects were predicted to be small or non-existent [30,31]. On the other hand Chun et al. [32] reported a small decrease in the band gap of In2 O3 nanowires upon doping with 7% Ga. The present work is also motivated by our recent interest in growth of In2 O3 on cubic Y-stabilised ZrO2 substrates by oxygen plasma assisted molecular beam epitaxy [33,34]. The face centred cubic fluorite structure of Y-stabilised ZrO2 (YSZ) belongs to the space group Fm3̄m. For the minimum Y concentration of around 17% required to stabilize a cubic phase, the lattice parameter is given by a = 5.142 Å [35]. In2 O3 adopts a bodycentered cubic bixbyite structure belonging to space group Ia 3̄ and with lattice parameter ae = 10.1170 Å [36]. The structure is 971 derived from a (2 × 2 × 2) superstructure of fluorite with ordered removal of ¼ of the oxygen ions. The mismatch m between 2as for the YSZ and ae for the In2 O3 epilayer as defined by the expression: m = (ae − 2as )/2as has a value m = −0.016 i.e. the mismatch is −1.6% [35]. Moreover the two structures involve very similar cation arrays and thus YSZ is an ideal substrate for epitaxial growth of In2 O3 films. However, the epilayers are subject to significant tensile strain [37] which leads in (1 1 1) oriented films to pronounced reduction in the band gap as compared to bulk material [38,39]. On (0 0 1) and (1 1 0) oriented substrates, strain coupled with large anisotropies in surface energies helps to drive formation of highly oriented island-like nanostructures on (0 0 1) oriented substrates [34,40,41] or rod-like nanostructures on (1 1 0) oriented substrates [41]. The anticipated reduction in lattice parameter upon doping Ga onto In sites provides a simple means of increasing the lattice mismatch, thereby enhancing strain at the interface and providing a way of tuning the size of the nanostructures. The organisation of the paper is as follows. The solubility limit of Ga in the cubic bixbyite phase of In2 O3 is investigated by X-ray diffraction and Raman spectroscopy. The band gaps in the doped material are then studied by diffuse reflectance spectroscopy and Xray photoemission spectroscopy (XPS) and compared with results from density functional theory calculations. This latter technique provides evidence for pronounced segregation of Ga to the surface of the doped material, and this segregation is further studied by low energy ion scattering (LEIS). Finally, the mechanism for segregation is studied with reference to photoemission measurements on Ga2 O3 itself. 2. Experimental Samples of (Gax In1−x )2 O3 with (0.00 < x < 0.10) were prepared by reaction between Ga2 O3 (Strem Chemicals 99.999%) and In2 O3 (Sigma–Aldrich 99.99%) supplied by Sigma–Aldrich Inc.). Stoichiometric mixtures of the oxide powders were ground in an agate mortar for 30 min until the mixture was homogeneous. The powder mixtures were then pressed into pellets with a diameter of 1 cm and a thickness of approximately 1 mm under a loading of 5 tons for 5 min. The samples were placed into recrystallised alumina crucibles and sintered in a muffle furnace at 1250 ◦ C for 72 h. The resulting pellets had a pale yellow colour. Reference pellets of In2 O3 and Ga2 O3 were prepared in a similar fashion. X-ray diffraction patterns were measured using a Phillips PANanalytical X’Pert PRO diffractometer equipped with a Cu K␣ X-ray source, which is monochromated with a curved Ge (1 1 1) crystal. Raman spectra were recorded using a PerkinElmer RamanStation 400F dispersive Raman spectrometer. This incorporates a near infrared (NIR) laser with a wavelength of 785 nm, which delivers a maximum of 100 mW at the sample with a laser spot size of 100 m. It has a spectral range of 95–3500 cm−1 Raman shift with a pixel resolution of 1 cm−1 across the entire range. A high sensitivity open electrode CCD detector with a 1024 × 256 pixel sensor is used, which is air-cooled to −50 ◦ C during operation. The samples were mounted on microscope slides and aligned with the help of a CCD camera. Diffuse reflectance measurements were conducted on a PerkinElmer Lambda 750S instrument incorporating double holographic grating monochromators and a 60 mm integrating sphere and teflon reference samples. Most of the high resolution X-ray photoemission spectra (XPS) were recorded on a Scienta ESCA 300 spectrometer located in the NCESS facility at Daresbury Laboratory, UK. This incorporated a 972 A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 rotating anode Al K␣ (h = 1486.6 eV) X-ray source, a seven crystal X-ray monochromator, a 300 mm mean radius spherical sector electron energy analyser and a parallel electron detection system. The X-ray source was run with 200 mA emission current and 14 kV anode bias, while the analyzer operated at 150 eV pass energy with 0.8 mm slits. The effective instrument resolution was about 400 meV as defined by the full width at half maximum height of the derivative of the Fermi edge for a silver sample. Photoelectron spectra were charge calibrated relative to a very weak but distinct Fermi edge cut off observed for all Ga-doped In2 O3 samples. Further spectra were measured using a Kratos Axis Ultra DLD system using a fixed anode monochromatic Al K˛ X-ray source operating at 120 W and 125 mm mean radius spherical sector analyser. Data were collected with pass energies of 160 eV for survey spectra, and 40 eV for the high resolution scans. The system was operated in the hybrid mode, using a combination of magnetic immersion and electrostatic lenses with spectra acquired over an area approximately 300 × 700 m2 . All spectra were taken with a 90◦ take off angle. Magnetically confined charge compensation was used to minimize sample charging and the resulting spectra were calibrated to the C 1s line at 284.7 eV. A rastered Kratos minibeam-I ion source was used for argon etching. The etch conditions were a 5 × 5 mm2 raster area with the gun operating at 4 keV, 15 mA emission and an argon pressure of 10−6 Torr. The experimental energy resolution in this instrument was about 500 meV. A base pressure of ∼1 10−9 Torr was maintained during collection of the spectra in both systems. Low energy ion scattering spectra were measured in a Qtac100 spectrometer (ION-TOF GmbH), located at Imperial College, London. The base pressure was 3 × 10−10 mbar, with a working pressure in the range of 10−8 mbar. This instrument is fitted with a double toroidal energy analyzer which collects backscattered ions at an angle of 145◦ from all azimuth angles. Before the LEIS measurements, sample surfaces were cleaned using Ar+ sputtering at 500 eV and 60◦ incidence angle, sputtered over an area of 2000 × 2000 m2 . After cleaning, the surface was analysed with a 3 keV He+ beam at normal incidence to confirm the removal of any surface contamination. For the actual analysis Ne+ ions at 5 keV normally incident on the surface were used. The Ne+ analysis beam was rastered over the center of the sputtered area during depth profiling, using an analysis area of 1000 × 1000 m2 to avoid crater-edge effects. An electron flood gun was employed for charge compensation during the analysis. 4. Results and discussion 4.1. X-ray diffraction and Raman spectroscopy The –2 X-ray diffraction profile of 1% Ga-doped In2 O3 is shown in Fig. 1. All peaks can be indexed as belonging to the cubic bixbyite phase of In2 O3 . Comparable data were obtained for doping levels up to 6%, beyond which extra reflections characteristic of new phases were observed, as shown in Fig. 2 for a 9% Ga-doped sample. Cubic lattice parameters a for samples with doping levels up to 7% Ga were obtained by Rietveld refinement of the diffraction profiles using GSAS software. Beyond this doping level the Rietveld refinements did not converge satisfactorily although there was no indication of further shifts in the In2 O3 reflections to higher angle. As shown in Fig. 3, incorporation of Ga into the bulk of the samples leads to a contraction in lattice parameters, as expected from the smaller size of Ga3+ (rGa3+ = 0.62 Å) as compared to In3+ (rIn3+ = 0.79 Å). This trend in a can be compared with both a Vegard plot and with a line derived by interpolation between values of lattice parameters for pure and Ga-doped In2 O3 from DFT calculations (see Fig. 3). Vegard’s law states that a linear relationship between a of an alloy solid solution and its constituents exists [52]. This usually requires both constituents have the same crystal structure. However, this method can still be adopted for the present case by using cell volumes rather than lattice parameters for In2 O3 and Ga2 O3 . Fig. 1. –2 X-ray diffraction profile of 1% Ga-doped In2 O3 with all peaks indexed to reflections characteristic of bixbyite phase of In2 O3 . 3. Computational methods All our DFT calculations were performed using the VASP code [42] with interactions between the cores (In:[Kr], Ga:[Ar] and O:[He]) and the valence electrons described using the PAW method [43]. The calculations were performed using the HSE06 hybrid functional as proposed by Krukau et al. [44] In the HSE06 approach, a value of exact nonlocal exchange, ˛, of 25%, and screening parameter of ω = 0.11 bohr−1 are added to the PBE formalism. The HSE approach has been proven to result in structural and band gap data in better agreement with experiment than standard DFT functionals [45–48] and, importantly, to provide an excellent description of the electronic structure of In2 O3 [49]. A planewave cutoff of 400 eV and a k-point sampling of Gammacentered 3 × 3 × 3 for the primitive cell of In2 O3 was used, with the structure deemed to be converged when the forces on all the atoms were less than 0.01 eV Å−1 . The optical transition matrix elements and the optical absorption spectrum were calculated within the transversal approximation [50]. Within this methodology, the adsorption spectrum is summed over all direct VB to CB transitions and therefore ignores indirect and intraband adsorptions [51]. Fig. 2. Expanded –2 X-ray diffraction profile of 1%, 6% and 9% Ga-doped In2 O3 in the region between (2 1 1) and (2 2 2) reflections showing appearance of reflections due to an impurity phase (highlighted with *) for the 9% doped sample. A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 In2 O3 (222) (a) 0% 3% 5% 7% 30.4 30.6 973 30.8 31.0 2θ (degrees) Cubic lattice parameter (A) 10.12 (b) o 10.10 10.08 Fig. 4. Raman spectrum of polycrystalline In2 O3 with the peaks labelled following the assignments of Garcia-Domene et al. [53]. 10.06 10.04 0 2 4 6 8 Ga doping level (%) Fig. 3. (a) XRD scans across (2 2 2) diffraction peak of 3%, 5% and 7% Ga-doped In2 O3 in comparison with scan for undoped material. (b) Variation of cubic lattice parameter of Ga-doped In2 O3 as a function of Ga doping level derived from Rietveld refinements of X-ray powder patterns in the range of Ga doping levels up to 7%. The two lines represent a Vegard plot (top, red) and values from DFT calculations (bottom, blue), the latter scaled such that the lattice parameter for In2 O3 itself coincides with the experimental value (correction factor of 0.995). (For interpretation of the references to color in this figure legend, the reader is referred to the web version of this article.) The decrease in a observed from X-ray diffraction lies in between the variation derived from computed values and from Vegard’s law applied as described above. This provides strong evidence that Ga is incorporated onto In sites up to the solubility limit discussed above and that the composition of the sintered ceramic material matches that of the starting mixture. The range of phase stability was also studied by Raman spectroscopy. The body centred cubic structure of In2 O3 belongs to the space group Ia 3̄ with Z = 16 and the primitive cell contains 8 formula units or 40 atoms. The 120 vibrational modes span irreducible representations in the Th factor group as follows: = 4Ag + 4Eg + 14Tg + 5Au + 5Eu + 17Tu The Au and Eu modes are silent. One of the Tu modes corresponds to acoustic vibrations. The remaining 16 Tu modes are infrared active whilst all 22 gerade modes are Raman active. It is possible to identify 17 of these modes in the experimental Raman spectrum (Fig. 4), with the frequencies in excellent agreement with those identified by Garcia-Domene et al. [53]. Corresponding Raman spectra of the Ga-doped samples are shown in Fig. 5. The vibrational frequencies of all of the modes increase with increasing Ga doping level up to around 7%, beyond which the frequencies remain constant. Fig. 6 shows representative data for the strong Ag mode close to 307 cm−1 . At the same time additional peaks appear at 171 cm−1 and 429 cm−1 for doping levels beyond 6%, again signalling the appearance of a second phase. The Raman spectrum of a reference sample of -Ga2 O3 was measured for comparison with the data for the Ga-doped In2 O3 samples and is shown in Fig. 7. The Fig. 5. Raman spectra of polycrystalline Ga-doped In2 O3 samples for the doping levels indicated. Peaks related to an impurity phase for higher Ga-doping levels are highlighted with *. monoclinic structure of this oxide belongs to the monoclinic space group C2/m with two formula units per cell. The 30 vibrations span the following irreducible representations of the group C2h [54,55]: = 10Ag + 5Bg + 5Au + 10Bu The acoustic modes are Au + 2Bu leaving 12 IR active ungerade modes and 15 Raman active gerade modes. As is evident in Fig. 7 the strongest vibrational mode for -Ga2 O3 is found close to 200 cm−1 . All modes for -Ga2 O3 could be identified with the frequencies in excellent agreement with those identified by Dohy et al. [53]. The absence of an obvious peak close to this frequency in samples beyond the doping limit suggests that the phase that co-exists with the Ia3̄ In2 O3 phase is not the -Ga2 O3 phase as has been suggested elsewhere [20,21]. It is beyond the scope of this paper to identify the new phase. 974 A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 309.0 -1 Raman shif t (cm ) 308.5 308.0 307.5 307.0 0 2 4 6 8 Ga doping level (%) 10 Fig. 6. Variation in frequency of Ag vibrational mode near 307 cm−1 as a function of Ga doping level. Fig. 7. Raman spectrum of -Ga2 O3 with the peaks labelled following the assignment of Dohy et al. [54,55]. 4.2. Diffuse reflectance spectra. Fig. 8(a) shows plots of (F(R)h)2 against photon energy h for pellets of In2 O3 and Ga2 O3 , where the Kubelka-Munk function F(R) is derived from diffuse reflectance spectra. Linear fits to the absorption edge give band gaps of 2.95 eV for In2 O3 and 4.60 eV for Ga2 O3 . The former value corresponds to the direct but dipole forbidden absorption onset for In2 O3 , as discussed recently [7]. The larger gap for Ga2 O3 is in agreement with values determined elsewhere [13]. Fig. 8(b) shows corresponding data for 1%, 6% and 9% Ga-doped In2 O3 samples in comparison with an expanded scan of the absorption edge for In2 O3 itself. The band gap decreases with 1% and 6% Ga doping but this trend does not extend to 9% doping. The gaps derived from the complete series of samples studied in the present work are shown in Fig. 8(c). It can be seen that the decrease in band gap with doping does indeed level off at about 6%. Clearly then the band gap at low Ga doping levels does not follow the trend expected from interpolation between In2 O3 and Ga2 O3 . The behaviour is not expected from previous work on In2-2x Ga2x O3 thin films, although in most previous work relatively coarse steps in x of about 0.1 have been investigated [23,25,26]. On the other hand Fig. 8. (a) Plots of (F(R)h)2 against photon energy for Ga2 O3 and In2 O3 where the Kubelka-Munk function F(R) is derived from diffuse reflectance spectra. (b) Corresponding plots on expanded scale for undoped In2 O3 and 1%, 6% and 9% Ga-doped In2 O3 . (c) Variation of band gap with Ga doping level. The solid curve is for guidance only. band bowing effects at low Sn doping level in Ti1-x Snx O2 have been recently observed leading to a narrowing of the gap when wider gap SnO2 is alloyed with narrower gap TiO2 [27,28]. 4.3. Apparent band gap variations from valence band XPS. Valence band XPS for undoped In2 O3 and a 5% Ga-doped sample are shown in Fig. 9. In each case binding energies may be referenced to weak structure at the Fermi energy associated with occupation of conduction band states. The figure also shows expanded scans around the valence band edges and a plot of difference in spectral intensity between the two samples. It can be seen that Ga doping leads to a broadening of the valence band edge and to increased intensity in the bandgap region above the valence band edge where weak structure extends down to the conduction band feature. Similar features are found in spectra of the other doped samples. A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 975 3.00 (a) 2.95 x15 2.90 Eg (eV) x = 0.00 x = 0.05 10 (b) 8 6 4 2 0 2.85 2.80 2.75 x15 2.70 0 3 2 1 0 -1 (c) 3 2 1 0 -1 Binding energy (eV) Fig. 9. (a) Overlaid valence band XPS of In2 O3 and (In0.95 Ga0.05 )2 O3 (b) Expanded view of valence band edge and conduction band structure in an energy range extending to 3.5 eV binding energy. Note broadening of the valence band edge and the appearance of enhanced intensity above the valence band edge as a consequence of Ga doping. (c) Difference spectra between (In0.95 Ga0.05 )2 O3 and In2 O3 over the same range as in (b). 2 4 6 8 Ga doping level (%) 10 Fig. 10. Variation in position of valence band edge in XPS of Ga-doped In2 O3 as a function of Ga doping level. The error bars correspond to the step size used in measurement of photoemission spectra. The data point show a wide scatter with a Pearson correlation coefficient r = −0.59 for the linear regression shown in the figure. the band gap from photoemission are susceptible to these effects, it is nonetheless the case that changes in the position of the valence band edge are qualitatively consistent with a decrease in band gap with doping similar to that found in the diffuse reflectance spectra, despite the large scatter in the data. XPS provides important information about the change in shape of the valence band edge and how this influences the magnitude of the apparent bandgap. The new structure straddling the valence band edge and extending into the bandgap contributes to broadening at the band edge. However other effects such as broadening due to disorder in the Ga dopant sites and modification of phonon broadening at the band edge may also contribute to the broadening and thus lead to a reduction in the bandgap determined by a simple linear extrapolation. This will be discussed further in Section 5. 4.4. HSE06 calculated fundamental and optical band gap Using a simple linear extrapolation procedure it is possible to identify the positions of the valence band onsets relative to the Fermi energies discussed above. The results of this analysis for the complete series of samples are shown in Fig. 10. The error bars are rather large as the step size in the XPS experiments is 0.05 eV and the scatter in the data points is large, with a Pearson correlation coefficient r = −0.59 in the linear regression. Nonetheless the separation between the Fermi level and the position of the valence band edge follows the same downward trend as in the optical measurements of the bandgap. A complication in interpreting these changes in terms of a reduction in band gap that the position of the band edge may be influenced by band bending at the surface [56–58]. Downward band bending leads to carrier accumulation at the surface over a length range which may be comparable with the electron inelastic mean free path (20 Å in photoemission measurements) with partial occupation of the conduction band leading to the valence band edge lying further below the Fermi level than in the bulk. This effect is cancelled to some extent by experimental and phonon broadening of the valence band edge shifting the valence band edge to lower binding energies. Even if the absolute value of We have tested the effects of incorporation of one Ga into 40 atom primitive cell of In2 O3 (i.e. replacing 6.25% of the In atoms) on both the 8b and 24d sites. Ga is 0.096 eV more stable on the 8b site, indicating that it will have a strong preference at room temperature for taking up this site. The HSE06 calculated fundamental band gap and optical band gaps for In2 O3 and In1.875 Ga0.125 O3 are shown in Fig. 11. It is immediately obvious that the incorporation of Ga causes the fundamental band gap to increase slightly from 2.75 eV to 2.81 eV, which is not in agreement with the experimental results. The optical band gap is also increased. Clearly, the incorporation of the much smaller Ga onto an In site is not sufficient to break the symmetry of the disallowed VB to CB transitions, and so does not hugely alter the optical properties. We have trialled many symmetry distortions with the Ga ion placed off-centre from both distinct In sites, and without fail the Ga returns to the In lattice site. In summary then density functional theory calculations do not predict a reduction in bandgap at low bulk Ga doping levels and we must consider other possible reasons for apparent narrowing of the bandgap. 976 A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 replacement of a host cation by a dopant cation of a different size incurs a penalty of elastic strain energy which may be relieved to some extent if the dopant cation segregates to the surface. Following Bataille et al. [60] the elastic strain energy per dopant Ga3+ cation may be estimated as: Eelastic = 24KGa2 O3 GIn2 O3 rGa3+ r 3 3+ In 3KGa2 O3 rGa3+ + 3GIn2 O3 rIn3+ × 2 rGa3+ −1 rIn3+ where KGa2 O3 is the bulk modulus of Ga2 O3 , GIn2 O3 is the shear modulus of In2 O3 and the r are ionic radii. We take KGa2 O3 = 228 GPa [61] and estimate GIn2 O3 from the bulk modulus KIn2 O3 = 194 GPa [62] through the relationship: GIn2 O3 = KIn2 O3 × 3 (1 − 2) 2 (1 + ) where the Poisson ratio has been measured to be 0.31 [37,63]. In this way GIn2 O3 is found to be 84 GPa, leading to an elastic strain energy of 0.185 eV/Ga ion. This is sufficient to drive pronounced surface segregation. Alternatively, segregation of post transition metal dopants may be driven by a change in valence state at the surface, as found in systems such as Sn-doped TiO2 [27,28], Sb-doped SnO2 [64,65] and Sn-doped In2 O3 [66]. In these systems the dopant ion substitutes into bulk sites in the group oxidation state N where the dopant ion has an electron configuration 5s0 5p0 . However, the segregated ions are in the N-2 oxidation state where the free ion would have an electron configuration 5s2 5p0 . The non-centrosymmetric crystal field necessarily present at surface sites allows mixing between 5s and 5p states mediated by mutual interactions with O 2p valence band states [67], thus lowering the internal electronic energy of the segregated ions and providing a driving force for segregation. This mechanism may drive segregation even when the ion in the group N oxidation state in the bulk does not induce strain. However the two mechanisms may obviously operate in tandem with strain leading to surface enrichment and the necessarily asymmetric coordination environment associated with surface sites facilitating reduction from the N to the N-2 valence state. Extending these ideas to Ga-doped In2 O3 segregation could be understood in terms of occupation of surface sites by Ga+ ions. If Fig. 11. HSE06 calculated optical absorption spectra for (In1−x Gax )2 O3 for x = 0.0000 and 0.0625. Dashed lines indicate fundamental band gap, full lines indicate optical absorption. 4.5. Core level XPS and Ga surface segregation In 4d In 4s Ga 3p In 4p Ga 3s x 10 C 1s 10% Ga-doped In2 O3 Ga LMM O 1s In 3p In 3s O KLL Ga 2p In MNN In 3d Widescan XPS of 1% and 10% Ga-doped In2 O3 are shown in Fig. 12. The strong Ga 2p core lines at high binding energy and the associated Ga LMM Auger structure provide the most obvious signatures of Ga doping. Weaker Ga 3p core level peaks are observed in the dip between the very broad In 4p and In 4s structure characteristic of In2 O3 itself, but the Ga 3d core line overlaps the In 4d and O 2s peaks of the host material. Fig. 13(a) shows the Ga 2p core level structure in greater detail, with intensities normalised relative to the In 3d peaks of the host material. The apparent surface Ga content ratio obtained by correction of Ga 2p3/2 and In 3d5/2 intensities with the relevant atomic sensitivity factors (Ga 2p3/2 5.4; In3d5/2 3.9) are shown in Fig. 13(b). There is pronounced surface enrichment in Ga, especially at low doping levels. There are two possible driving forces for Ga surface segregation in this system. As recognised by Friedel [59], substitutional x 10 1% Ga-doped In2 O3 1200 1000 800 600 400 Binding energy (eV) Fig. 12. Widescan XPS of 1% and 10% Ga-doped In2 O3 . 200 0 A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 977 10% Ga-doped In2 O3 Ga 2p3/2 1% Ga-doped In2 O3 1124 1122 1120 1118 1116 1114 Binding energy(eV) Fig. 14. Curve fits to Ga 2p3/2 core level for 1% Ga-doped In2 O3 and 10% Ga-doped In2 O3 . Table 1 Parameters from curve fits to Ga 2p3/2 core lines of 1% and 10% Ga doped In2 O3 . The curve fits were performed using pseudo-Voigt functions consisting of the product of Gaussian and Lorentzian components. Fig. 13. (a) Ga 2p core level spectra of Ga-doped In2 O3 for the doping levels indicated. The intensities have been normalised to the In 3d intensity. (b) Apparent surface doping level as a function of bulk doping level derived from In 3d5/2 and Ga 2p3/2 XPS intensities. The solid line is for guidance only. this situation does indeed pertain one might expect to observe a chemical shift between surface and bulk substituted Ga ions with a greater contribution from surface segregated ions at the lower doping level. However as shown in Fig. 14 the Ga 2p3/2 core lines for 1% and 10% Ga-doped In2 O3 are well fitted by single pseudoVoigt functions with characteristics as given in Table 1. It should be noted that attempts to introduce further components in the curve fits generally led to the second peak converging toward zero intensity or zero chemical shift from the first peak, while constrained fits using two peaks with fixed separation invariably gave two peaks of roughly equal intensity, which has no obvious physically meaningful interpretation. We thus conclude that either there is no measurable chemical shift between bulk Ga3+ and surface Ga+ ; or that this mechanism does not pertain. We explore this topic further in the next section. 4.6. Influence of ion bombardment on valence and core XPS of Ga2 O3 Ga2 O3 was found to be highly insulating and satisfactory spectra could not be obtained in the Scienta spectrometer. However, Sample Binding energy (eV) FWHM (eV) % Lorentzian 1% Ga-doped In2 O3 10% Ga-doped In2 O3 1118.69 1118.56 1.73 1.65 71 71 meaningful data were obtained in the Kratos XPS system, which employs a superior flood gun charge neutralisation system coupled into the magnetic immersion lens. In contrast to the doped In2 O3 samples, no conduction band features were observed in the experimental spectra and the Fermi level was apparently pinned mid gap around 3 eV above the valence band edge. The valence band X-ray photoemission spectrum of “as-presented” -Ga2 O3 is shown in Fig. 15, along with spectra obtained after two successive periods of ion etching for 20 min as described in the experimental section. The spectrum of the sample before ion bombardment contains two main features: a broad band at lower binding energy apparently corresponding to bands I-III in the spectrum of In2 O3 and a sharper band labelled IV. By analogy with the spectrum of In2 O3 discussed earlier, band IV must correspond to O 2p states hybridised with Ga 4s states to give strongly bonding states at the bottom of the valence band, whilst II and III relate to similar states involving hybridisation between Ga 4p and O 2p states. The top of the valence band will be dominated by states of more purely O 2p character but with some interaction with shallow core Ga 3d states. After ion bombardment new intensity appears above the top of the O 2p valence band. This gap state structure labelled GS in Fig. 15 grows in intensity with more prolonged ion bombardment. The gap state structure is very similar to that found in valence band XPS of vacuum annealed or otherwise reduced SnO2 [68] or indeed in the valence band spectrum of SnO [69]. Here the structure is assigned to Sn2+ states arising from new occupied antibonding states of mixed O 2p–Sn 5s character above the top of the valence band of SnO2 , which further hybridise with Sn 5p states to give a directional lone pair [67,70,71]. By analogy with this earlier work we take the appearance of the gap state structure to be the definitive signature of reduction of Ga2 O3 under ion bombardment by preferential sputtering of O to give reduced Ga+ . In agreement with this idea the O 1s/Ga 2p3/2 intensity ratio falls from a value of 0.235 for the as-presented sample to 0.221 after 40 min of ion bombardment. Assuming that the topmost ionic layer contributes about 978 A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 GS (d) (c) GS GS I-III IV (b) (a) 12 10 8 6 4 2 0 -2 Binding energy (eV) Fig. 15. (a) Valence band XPS of as-presented Ga2 O3 (b) valence band spectrum after ion bombardment for 20 min (c) valence band spectrum after ion bombardment for 40 min (d) difference spectrum between (c) and (a) emphasising growth of gap-state (GS) structure above the valence band edge as a consequence of ion bombardment. The spectra have been aligned with the valence band edge of Ga2 O3 set at 0.0 eV. Spectra measured in Kratos XPS system. 10% of the total XPS intensity, this change suggests that around 75% of the Ga ions in this layer are reduced from Ga3+ to Ga+ . If (as is probable) removal of oxygen extends beyond the first ionic layer, the degree of chemical reduction within each layer would obviously be lower. The emergence of the gap state structure GS is not accompanied by growth of structure to low binding energy on the Ga 2p3/2 core peak as might be expected if a lower oxidation state were present. In fact after the initial tranche of ion bombardment there is small shift to higher binding energy with very little change in the peak width (Table 2) which remains roughly constant with a full width at half maximum height (FWHM) of just over 1.7 eV. Dealing first with the linewidth, our peaks are slightly narrower than in earlier studies of bulk Ga2 O3 powders and crystals [72,73] and Ga2 O3 oxide films on GaN [74] and GaAs [75]: the large width of this comparatively deep core level must include significant contributions from phonon broadening [76] and lifetime broadening [77]. Thus phonon broadening for the Mg 1s core hole state in MgO has been estimated as 0.84 eV [76], and even greater broadening is expected for the comparably deep Ga 2p levels for Ga2 O3 owing to the higher phonon frequencies. Lifetime broadening for the L3 core level in atomic Ga is around 0.76 eV [77]. The analyser and X-ray source contributions to the core linewidth are negligible, although experimental broadening in XPS of insulators can arise from imperfections in charge neutralisation using a flood gun. In agreement with the idea that this last effect may make a significant contribution to the linewidth it is noticeable that the Ga core lines are narrower for Ga-doped In2 O3 which is much less effected by sample charging. The curve fitting procedure used in the current manuscript used pseudo-Voigt functions where a product of Gaussian and Lorentzian contributions is used. Further analysis of core levels using true Voigt functions which are a convolution of the Gaussian and Lorentzian components would be interesting but is beyond the scope of the current paper. Turning to the apparent shift, this is most likely due to graphitisation of the carbon contamination used as the energy reference. In the raw C 1s spectra a shift to low binding energy is in fact observed (supplementary data) so that if other peaks are referenced to a C 1s position assumed to be constant, a spurious shift to high binding energy will be found. Moreover the Ga 2p3/2 peak shape and the separation from the O 1s line remain essentially unchanged between the first and second cycles of ion bombardment (Fig. 16 and Table 2) even though the structure linked to Ga+ in the valence band grows markedly in intensity. This therefore suggests that there is no measurable chemical shift between Ga3+ in Ga2 O3 and the Ga+ species responsible for the gap state structure. Similar analysis of the Ga 3p core levels (where the measurements are less surface sensitive) lead to the same conclusion. There was no significant change in the core line as a result of ion bombardment. The issue of chemical shifts between the group N valence states and reduced N-2 states in post transition metal oxides has aroused widespread discussion over many years. For example the NIST data base [78] lists 18 values for the Sn 3d5/2 binding energy in SnO2 ranging between 486.10 eV and 487.13 eV, with an average of 486.6 eV. For SnO there are 5 values ranging between 485.60 eV and 487.00 eV with an average of 486.4 eV i.e. there is a shift in the average of only 0.2 eV. On the other hand Themlin et al. report a chemical shift of 0.7 eV between Sn 3d5/2 binding energies in Ga 2p3/2 (c) Table 2 Parameters from curve fits to Ga 2p3/2 core lines of as-presented and ion bombarded Ga2 O3 . The curve fits were performed using pseudo-Voigt functions consisting of the product of Gaussian and Lorentzian components. Sample Binding energy (eV) O 1s–Ga 2p3/2 shift (eV) FWHM (eV) % Lorentzian Ga2 O3 as-presented Ga2 O3 after 20 min ion bombardment Ga2 O3 after 40 min ion bombardment 1118.10 587.30 1.74 68 1118.44 587.00 1.75 56 (b) (a) 1124 1122 1120 1118 1116 1114 Binding energy 1118.57 587.10 1.77 57 Fig. 16. (a) Ga 2p3/2 core XPS of as-presented Ga2 O3 , (b) after 20 min ion bombardment, and (c) after 40 min ion bombardment. Spectra measured in Kratos XPS system. A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 In Ga 10% Ga-doped In 2 O3 1% Ga-doped In 2 O3 1000 1500 2000 2500 3000 Energy (eV) Fig. 17. Low energy ion scattering spectra of 1% and 9% Ga-doped In2 O3 measured with 5 keV Ne ions after removal of initial carbon contamination layer. 10% Ga-doped In2 O3 LEIS 979 SnO2 and SnO [79]. However it is clear from valence band spectra in this paper that the shift is strongly influenced by a shift in the Fermi level from just below the conduction band minimum in SnO2 to just above the valence band edge in p-type SnO. In agreement with the idea that the shift here is not a chemical state effect but reflects a change in Fermi energy it was found that the O 1s level experienced almost the same shift as the Sn 3d5/2 level so the separation between the two core lines in SnO2 (48.77 eV) is essentially the same as in SnO (48.68 eV). This agrees with earlier work by Wertheim [69]. Moreover where the N and N-2 oxidation states exist within the same oxide matrix chemical shifts are always small or unobservable, as in the mixed valence oxide Pb3 O4 where despite the structurally characterised existence of Pb4+ and Pb2+ unsplit and symmetric Pb 4f peaks are observed [80]. Similarly in reduced SnO2 showing the clear signature of Sn2+ in valence band XPS sharp and symmetric Sn 3d peaks are observed [68]. The absence of a chemical shift between N and N-2 oxidation states can be understood in terms of a cancellation of the changes in the free ion potentials and the changes in Madelung site potentials associated with the fact that whereas the N ions occupy 6-coordinate centrosymmetric sites, the N-2 cations occupy asymmetric 3- or 4-coordinate sites [81,82]. We do note, however, that it has been suggested that there is a pronounced chemical shift of around 1.5 eV between Ga2 O3 and Ga2 O [83]. This large shift is completely out of line with other “N versus N-2” systems as discussed above and not consistent with our current results. Elsewhere a smaller shift of 0.65 eV between Ga2 O and Ga2 O3 present in native oxide layers on GaAs has been reported [84]. Attempts to fit our own data with two components constrained to be 0.65 eV apart did not lead to any significant improvements in the curve fits as compared to a single component fit. In particular these fits did not reveal an increase in the intensity of the lower binding energy component with increasing ion bombardment, as expected from the growth in In In Ga Ga 1555 s 55 s 0s 1400 1600 1800 2000 115 s 2200 2400 2600 1400 1600 1800 2000 2200 2400 2600 Energy (eV) Fig. 18. Low energy ion scattering spectra of 10% Ga-doped In2 O3 measured with 5 keV Ne ions as a function of etching time. Left hand panel: spectra measured at 5 s intervals between 0 s and 55 s. Right hand panel: spectra measured at 120 s intervals between 115 s and 1555 s. 980 A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 100 In 80 60 1% Ga -doped In2 O3 40 20 Ga 0 0 100 200 300 400 500 100 80 Atomic % In 60 6% Ga -doped In2 O3 css of the samples were derived. Surface segregation was found in all samples as presented with cis values bigger than the nominal bulk concentration with Ga fractions of 0.050, 0.221 and 0.290 for nominal doping levels of 0.010, 0.060 and 0.100. However the steady state concentrations after prolonged etching had respective values of less than 0.001, 0.014 and 0.031 that were significantly less than nominal bulk values. Taken in conjunction with the evidence that the variation in lattice parameters is consistent with the nominal bulk doping level, these observations suggest that in the steady state established in a LEIS experiment the surface is depleted of the lighter Ga atoms. Comparing XPS and LEIS data it is apparent that the initial surface Ga concentration seen with the latter technique is higher than with the former. LEIS is sensitive to atomic composition in the topmost ionic layer, whereas XPS probes atomic concentrations over a length range determined by the inelastic electron mean free path. Taken together these observations suggest that segregation is strongly enhanced in the topmost ionic layer. However when dealing with rough polycrystalline samples of the sort studied here it is difficult to quantify these ideas further. 40 Ga 20 5. Concluding discussion 0 0 100 200 300 400 500 400 500 100 80 In 60 10% Ga -doped In2O3 40 Ga 20 0 0 100 200 300 Etch time (seconds) Fig. 19. Variation of In and Ga surface atomic composition for 1%, 6% and 10% Ga-doped In2 O3 with etching time as determined by low energy ion scattering spectroscopy. intensity of the gap state feature in the valence band. Overall we must therefore conclude that it is not possible to establish the existence of two different oxidation states using our Ga 2p3/2 core level data. 4.7. Low energy ion scattering spectroscopy Ion scattering spectra of 5 keV Ne ions for 1% and 10% Ga-doped In2 O3 are shown in Fig. 17. Both spectra were taken after mild argon ion bombardment for 10 s, which is sufficient to remove surface carbon contamination, followed by analyses with the probe ion beam. The scattering peak associated with collision with the lighter Ga is found to low energy of the peak associated with scattering from In. Fig. 18 shows a series of spectra for 10% Ga-doped In2 O3 measured as a function of etching time. A progressive attenuation of the Ga peak is observed. Fig. 19 shows the variation with etch time in the relative surface Ga and In concentrations. From these data the initial surface and steady state surface concentrations cis and Both diffuse reflectance spectroscopy and X-ray photoemission spectroscopy reveal an apparent narrowing of the band gap of In2 O3 with Ga doping up to the solubility of limit of Ga in the cubic bixbyite phase of In2 O3 . Taken at face value the results suggest an unusually large band bowing effect. However, state of the art hybrid density functional theory calculations on bulk Ga-doped In2 O3 fail to reproduce a narrowing of the band gap with doping and instead predict a monotonic increase of gap with increasing Ga content, as expected from the respective band gaps of the parent compounds. One cannot rule out the possibility that DFT fails in some way to capture the essential physics of this system. However, the observation that there is pronounced Ga surface segregation leads us to consider whether the effects observed could be attributed to surface segregated Ga because experiments on Ga2 O3 reduced by in situ ion bombardment demonstrate that surface Ga+ introduces new “lone pair” electronic states above the top of the valence band in XPS. Similar but weaker structure is found in valence band XPS of Ga-doped In2 O3 . The lower intensity of the structure in the bandgap seen for 5% Ga doped In2 O3 in Fig. 9 as compared to that of ion bombarded Ga2 O3 seen in Fig. 15 is to be expected as we estimate that 75% of the surface Ga ions in the latter are reduced to Ga+ . The surface Ga/In percentage as probed by XPS for the doped sample is only around 15% and we cannot assume that all surface segregated Ga is reduced to the univalent state as size mismatch without reduction can also drive segregation. No direct evidence for Ga+ can be found in core XPS of Ga-segregated In2 O3 . However, the core lineshape for pure Ga2 O3 changes little after ion bombardment, despite the change in surface stoichiometry and the emergence of the bandgap structure characteristic of Ga+ . This leads us to conclude that the chemical shift between Ga+ and Ga3+ in this oxide system is too small to allow reliable curve fitting to Ga+ and Ga3+ components in the Ga 2p core spectra and so the absence of chemically shifted components for the doped In2 O3 samples does not rule out the hypothesis of surface Ga+ . Structure associated with Ga+ overlapping the valence band edge contributes to broadening of the edge. However other effects such as disorder associated with random occupation of In sites by Ga and enhanced phonon broadening at the band edge may also contribute to the broadening and associated apparent reduction in bandgap. These effects are not included in the periodic calculations but phonon broadening in particular is important for materials such as oxides with high phonon frequencies and provides the mechanism for the isotope changes in A. Regoutz et al. / Applied Surface Science 349 (2015) 970–982 bandgaps that have now been characterised recently for a number of systems [85]. The local Ga O stretching frequencies will be higher than In-O frequencies owing to the smaller size of Ga as compared with In. Further theoretical work is needed to explore these issues in more detail. Acknowledgements The work at TCD was supported by SFI through the PI program (06/IN.I/I92). Calculations at TCD were performed on the Lonsdale and Kelvin clusters as maintained by TCHPC, and the Stokes and Fionn clusters as maintained by ICHEC. The UCL/Diamond work presented here made use of the UCL Legion HPC Facility, the IRIDIS cluster provided by the EPSRC funded Centre for Innovation (Grants No. EP/K000144/1 and No. EP/K000136/1), and the ARCHER supercomputer through support by the UK’s HPC Materials Chemistry Consortium, which is funded by EPSRC Grant No. EP/L000202. RGP acknowledges EPSRC Grant EP/K014099/1. 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