LUMINOUSGARD™ GAS PURIFIERS
For hydrocarbons, acids and amines
removal in lithography applications
Overview
Luminousgard™ point-of-use, in-line gas purifiers
effectively remove hydrocarbon in gases, as well as
organic matter, basic and acid impurities and particles. These ultrapure activated and precision gas
filters are especially effective for purifying purge
gases in lithography applications in the semiconductor manufacturing process.
Applications
• Clean dry air (CDA)
• Lens purge gas line for exposure equipment
• Purge gas line for laser generator
• Inert gas supply line
Luminousgard Gas Purifier
Features and Benefits
• Effectively removes the following impurities in
purge gas: CDA, N2, Ar and He
• Maintains high retention in the following volatile
impurities:
– Hydrocarbons (>C6)
– Acids: SO2, SO3, NO2, HCI, HF CH3COOH, H2S
– Amines: NH3, CH3NH2, (CH3)3N
• Excellent initial cleanliness
– Less than 1 ppb of hydrocarbons (>C6)
degassing at 1 SLPM
• Effectively removes particles in gas stream
Luminousgard 1000 Gas Purifier
Luminousgard 2000 Gas Purifier
Luminousgard Gas Purifier
Specifications
Materials:
Retention:
Adsorbent
Ultrapure activated carbon
Filter
Nickel
Housing
Electropolished 316L/304 stainless steel
Gaseous organic
>99.9% (>C6 hydrocarbon)
Gaseous acid
>99.9% (ex. SO2, SO3, NO2, HCI, H2S)
Gaseous basic
>99.9% (ex. NH3, CH3NH2, [CH3]3N)
Particles
>99.9999999% removal of all particles >0.01 µm
Downstream cleanliness:
Volatiles
<1 ppb (more than C6 number of gaseous organic
hydrocarbon at 1 l/min.*
Particle
<0.03 particles/L >0.01 µm at 30 l/min.
Operating conditions:
Connection
6.35 mm gasket seal (1⁄4” VCR® compatible)
male connector
Recommended flow rate
<30 l/min.*
Maximum operating pressure
0.97 MPa (9.7 bar/140.7 PSIG)
Maximum differential pressure
0.97 MPa (9.7 bar/140.7 PSID)
Maximum operating temperature
60°C (inactive gas)
* 20°C, 101 kPa
Performance Data
Differential Pressure (kPa)
100
80
0.3 MPa inlet
0.1 MPa inlet
0.2 MPa inlet
60
40
0.5 MPa inlet
20
0
0
5
10
15
20
Flow Rate (l/min.) Air at 25°C
25
30
Ordering Information
Lifetime Curves
Acid
Description
LPDN ACR R2
Luminousgard gas purifier 1⁄4” VCR
Lifetime (hrs.)
1.E+05
Dimensions
1.E+04
5
10
1.E+03
50
100
Ø 48 mm
(1.89”)
Contamination Level (ppb)
Part Number
1.E+06
1.E+02
0
5
10
15
20
25
30
Flow Rate (0°C, 101 kPa)
192 mm (7.56”)
Amine
Lifetime (hrs.)
1.E+05
1.E+04
5
10
1.E+03
50
100
Contamination Level (ppb)
1.E+06
1.E+02
0
5
10
15
20
25
30
Flow Rate (0°C, 101 kPa)
Hydrocarbon
Lifetime (hrs.)
1.E+05
1.E+04
100
200
500
1.E+03
1000
Contamination Level (µg/m3)
1.E+06
1.E+02
0
5
10
15
20
25
30
Flow Rate (0°C, 101 kPa)
Note: Purifier lifetime is dependent upon operating conditions.
Luminousgard 1000 Gas Purifier
Specifications
Materials:
Retention:
Downstream cleanliness:
Adsorbent
Ultrapure activated carbon
Filter
PTFE/PFA
Housing
Electropolished 316L/304 stainless steel
Gaseous organic
>99.9% (>C6 hydrocarbon)
Gaseous acid
>99.9% (ex. SO2, SO3, NO2, HCI, H2S)
Gaseous basic
>99.9% (ex. NH3, CH3NH2, [CH3]3N)
Particles
>99.9999999% removal of all particles >0.01 µm
Volatiles
<1 ppb (>C6 hydrocarbon at 1 SLPM)
Particles
<0.03 particles/L >0.01 µm at 30 SLPM
Connection:
Inlet/outlet
1⁄2”
Attachments:
1⁄2”
Operating conditions:
Gas type
Inert gases**
Recommended flow rate
<200 SLPM
Maximum operating pressure
0.9 MPa (9 bar/130.5 PSIG)
Maximum forward differential pressure
0.7 MPa (7 bar/101.5 PSID)
Maximum reverse differential pressure
0.25 MPa (2.5 bar/36.3 PSID)
Maximum operating temperature
50ºC (122ºF) – inert gas
Approximate product weight
3.21 kg (7.08 lbs)
gasket seal (1⁄2” VCR compatible )
male connector
VCR cap and gasket*, 2 sets on unit
* No reuse
** Please contact Entegris for other gases
Performance Data
Differential Pressure (kPa)
40
30
0.3 MPa inlet
20
0.1 MPa inlet
10
0.5 MPa inlet
0
0
50
100
Flow Rate (l/min.) Air at 25°C
150
200
Lifetime Curves
Ordering Information
Acid
Part Number
Description
LPDF 10R R4
Luminousgard 1000 gas purifier
1.E+05
5
1.E+04
10
50
1.E+03
302.2 mm (11.90”)
100
1.E+02
0
50
100
150
200
Flow Rate (SLM)
Amine
Lifetime (hrs.)
1.E+05
5
10
1.E+04
Contamination Level (ppb)
1.E+06
50
100
1.E+03
0
50
100
150
200
Flow Rate (SLM)
Hydrocarbon
1.E+06
Lifetime (hrs.)
1.E+05
100
1.E+04
200
Contamination Level (µg/m3)
Ø 101.6 mm
(4.00”)
Lifetime (hrs.)
Dimensions
Contamination Level (ppb)
1.E+06
500
1000
1.E+03
0
50
100
150
200
Flow Rate (SLM)
Note: Purifier lifetime is dependent upon operating conditions.
Luminousgard 2000 Gas Purifier
Specifications
Materials:
Retention:
Adsorbent
Ultrapure activated carbon
Filter
PTFE/PFA
Housing
Electropolished 316L/304 stainless steel
Gaseous organic
>99.9% (>C6 number of hydrocarbon)
Gaseous acid
>99.9% including SO2, SO3, NO2, HCI, H2S
Gaseous basic
>99.9% including NH3, CH3NH2, (CH3)3N
Particles
>99.9999999% removal of all particles >0.003 µm
Downstream cleanliness: Volatiles
Connections:
<1 ppb (hydrocarbon >C6) at 1 SLPM
Particles
<0.03 particles/L >0.01 µm at 30 SLPM
Inlet/outlet
12.7 mm gasket seal (1⁄2” VCR compatible) male
12.7 mm compression seal (1⁄2” Swagelok®
compatible)
Attachment:
Operating conditions
VCR type
Cap and gasket* for 1⁄2” VCR attached to inlet/outlet
Swagelok type
Cap for 1⁄2” Swagelok attached to inlet/outlet
nut and ferules for 1⁄2” Swagelok, 2 set bundled
Gas type
Inert gases**
Recommended flow rate
<500 NL/min.
Maximum operating pressure
0.9 MPa (9 bar/130.5 PSIG)
Maximum forward differential pressure
0.7 MPa (7 bar/101.5 PSID)
Maximum reverse differential pressure
0.25 MPa (2.5 bar/36.3 PSID)
Maximum operating temperature
50°C (122°F) – inert gas
Product weight
4.17 kg (9.19 lbs)
* Gasket is non-reusable
** Please contact Entegris for other gases
Performance Data
Differential Pressure (kPa)
100
80
0.1 MPa inlet
60
0.3 MPa inlet
40
20
0.5 MPa inlet
0
0
100
200
300
Flow Rate (l/min.) Air at 25°C
400
500
Ordering Information
Lifetime Curves
1.E+06
LPDF 20R R4
Luminousgard 2000 gas purifier
12.7 mm gasket seal
(1⁄2” VCR compatible) male
1.E+05
LPDF 20S S4
Luminousgard 2000 gas purifier
12.7 mm compression seal
(1⁄2” Swagelok compatible)
Lifetime (hrs.)
Description
Dimensions
1.E+04
5
10
50
1.E+03
Contamination Level (ppb)
Acid
Part Number
100
LPDF 20R R4
1.E+02
Ø101.6 mm
(4.00”)
0
100
200
300
400
500
Flow Rate (SLPM)
Amine
392.2 mm (15.44”)
1.E+06
5
10
1.E+04
50
379.0 mm (14.92”)
100
1.E+03
1.E+02
0
100
200
300
400
500
Flow Rate (SLPM)
Hydrocarbon
1.E+06
Lifetime (hrs.)
1.E+05
100
1.E+04
200
500
1.E+03
1000
Contamination Level (µg/m3)
Ø 101.6 mm
(4.00”)
Lifetime (hrs.)
1.E+05
Contamination Level (ppb)
LPDF 20S S4
1.E+02
0
100
200
300
400
500
Flow Rate (SLPM)
Note: Purifier lifetime is dependent upon operating conditions.
For More Information
Please call your Regional Customer Service Center
today to learn what Entegris can do for you. Visit
www.entegris.com and select the “Customer Service”
link for the center nearest you.
Terms and Conditions of Sale
All purchases are subject to Entegris’ “Terms
and Conditions of Sale.” To view and print
this information, visit Entegris’ website at
www.entegris.com and select the Legal Notices
link from the footer found on the home page.
Entegris®, Luminousgard™ and Mykrolis® are trademarks of Entegris, Inc.
VCR® and Swagelok® are registered trademarks of Swagelok Company.
ENTEGRIS, INC.
Corporate Headquarters / 3500 Lyman Boulevard / Chaska, Minnesota 55318 USA
Customer Service Tel. +1 952-556-4181 / Customer Service Fax +1 952-556-8022
www.entegris.com
©2008 Entegris, Inc.
Printed in USA
All Rights Reserved
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