L-611 Precision Rotation Stage High Travel Accuracy Unlimited travel range Ultrahigh resolution Maximum velocity 200°/s Direction-sensing reference point switch Reference-class rotation stage High-precision positioning due to low-play preloaded worm gear. Preloaded pivot bearings for high travel accuracy. Clear aperture with Ø 35 mm. Unlimited travel range in both directions of rotation. Noncontact reference point switch. Compact multi-axis positioning systems with L-511 linear stages and L-310 Z stages possible. Vacuum versions available on request. Versions − Low-vibration stepper motor − DC motor with ActiveDrive − Additional high-resolution optical angle measuring system Option: Measurement of the travel accuracy and positioning accuracy Individual measurement logs for wobble, axial, and radial creep available on request. Please specify when ordering. 20.03.2017 13:20 R1 Specifications L-611.90SD L-611.9ASD L-611.90AD L-611.94AD Active axes Unit Tolerance θZ With integrated angle measuring system θZ θZ With integrated angle measuring system θZ Motion and positioning Rotation range >360 >360 >360 >360 Integrated sensor – Rotary encoder Design resolution 3.5 (0.0002) Angle measuring system 0.035 (0.000002) Minimum incremental motion 21.8 (0.00125)* 0.17 (0.00001)** 43.6 (0.0025)* 0.34 (0.00002)** Angle measuring system 0.35 (0.00002) 0.7 (0.00004) 35 (0.002) 0.7 (0.00004) Backlash 350 (0.02) – 350 (0.02) – Unidirectional repeatability 35 (0.002) 3.5 (0.0002) 35 (0.002) 3.5 (0.0002) Bidirectional repeatability Wobble (bearings) – ±3.5 (±0.0002) ±175 (±0.01) ±3.5 (±0.0002) ±15 ±15 ±15 ±15 µrad (°) µrad Flatness (bearings) ±1 ±1 ±1 ±1 µm Eccentricity (bearings) Velocity ±2.5 ±2.5 ±2.5 ±2.5 µm 50 50 200 200 °/s max. Mechanical properties Worm gear ratio 90:1 90:1 90:1 90:1 Motor resolution 200 200 – – Load capacity / axial force 100 100 100 100 Full steps/r ev. N max. Permissible torque Mx in θX, θY Permissible torque Mz in θz Tip/tilt stiffness of the platform kα Drive properties 40 40 40 40 Nm max. 3 3 3 3 Nm max. 30 30 30 30 µrad/N m ° µrad (°) µrad (°) µrad (°) µrad (°) typ. typ. typ. 20.03.2017 13:20 R1 Motor Type Reference point switch Miscellaneous Material Mass Recommended controllers/drivers 2-phase stepper motor*** Hall effect 2-phase stepper motor*** Hall effect DC motor with PWM control Hall effect DC motor with PWM control Hall effect Aluminum, black anodized, stainless steel, red bronze 2.6 Aluminum, black anodized, stainless steel, red bronze 2.6 Aluminum, black anodized, stainless steel, red bronze 2.6 Aluminum, black anodized, stainless steel, red bronze 2.6 C-663.11 C-663.12 (single axis) SMC Hydra (double axis) C-863 C-863 kg * with C-663.11 Mercury Step Controller ** with C-663.12 Mercury Step Controller *** 200 full steps/rev., max. 1.2 A/phase Specifications for vacuum versions can differ. 20.03.2017 13:20 R1 Drawings and Images L-611.90SD rotation stage, dimensions in mm 20.03.2017 13:20 R1 L-611.9ASD rotation stage, dimensions in mm 20.03.2017 13:20 R1 L-611.90AD and L-611.94AD rotation stages, dimensions in mm 20.03.2017 13:20 R1 Direction of the axes and torques for rotation stages 20.03.2017 13:20 R1 Ordering Information L-611.90SD Precision Rotation Stage, Stepper Motor, Aperture with 35 mm Diameter L-611.9ASD Precision Rotation Stage, Stepper Motor, Aperture with 35 mm Diameter, Angle Measuring System with Sin/Cos Signal Transmission L-611.90AD Precision Rotation Stage, DC Motor, Aperture with 35 mm Diameter, Rotary Encoder L-611.94AD Precision Rotation Stage, DC Motor, Aperture with 35 mm Diameter, Angle Measuring System with A/B Quadrature Signal Transmission Accessories L-500.AV1 Adapter Bracket for Vertical Mounting of Stages with up to 120 mm Width and 400 mm Length L-500.AV3 Adapter Bracket for Vertical Mounting of Stages with up to 100 mm Width and 300 mm Length Ask about custom designs! 20.03.2017 13:20 R1
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