Datasheet Template - Physik Instrumente

L-611
Precision Rotation Stage
High Travel Accuracy
 Unlimited travel range
 Ultrahigh resolution
 Maximum velocity 200°/s
 Direction-sensing reference point switch
Reference-class rotation stage
High-precision positioning due to low-play preloaded worm gear. Preloaded pivot bearings for high travel
accuracy. Clear aperture with Ø 35 mm. Unlimited travel range in both directions of rotation. Noncontact
reference point switch. Compact multi-axis positioning systems with L-511 linear stages and L-310 Z stages
possible. Vacuum versions available on request.
Versions
− Low-vibration stepper motor
− DC motor with ActiveDrive
− Additional high-resolution optical angle measuring system
Option: Measurement of the travel accuracy and positioning accuracy
Individual measurement logs for wobble, axial, and radial creep available on request. Please specify when
ordering.
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Specifications
L-611.90SD
L-611.9ASD
L-611.90AD
L-611.94AD
Active axes
Unit
Tolerance
θZ
With integrated
angle measuring
system
θZ
θZ
With integrated
angle measuring
system
θZ
Motion and positioning
Rotation range
>360
>360
>360
>360
Integrated sensor
–
Rotary encoder
Design resolution
3.5 (0.0002)
Angle measuring
system
0.035 (0.000002)
Minimum incremental motion
21.8 (0.00125)*
0.17 (0.00001)**
43.6 (0.0025)*
0.34 (0.00002)**
Angle measuring
system
0.35 (0.00002)
0.7 (0.00004)
35 (0.002)
0.7 (0.00004)
Backlash
350 (0.02)
–
350 (0.02)
–
Unidirectional
repeatability
35 (0.002)
3.5 (0.0002)
35 (0.002)
3.5 (0.0002)
Bidirectional
repeatability
Wobble (bearings)
–
±3.5 (±0.0002)
±175 (±0.01)
±3.5 (±0.0002)
±15
±15
±15
±15
µrad
(°)
µrad
Flatness (bearings)
±1
±1
±1
±1
µm
Eccentricity (bearings)
Velocity
±2.5
±2.5
±2.5
±2.5
µm
50
50
200
200
°/s
max.
Mechanical properties
Worm gear ratio
90:1
90:1
90:1
90:1
Motor resolution
200
200
–
–
Load capacity / axial
force
100
100
100
100
Full
steps/r
ev.
N
max.
Permissible torque
Mx in θX, θY
Permissible torque
Mz in θz
Tip/tilt stiffness of
the platform kα
Drive properties
40
40
40
40
Nm
max.
3
3
3
3
Nm
max.
30
30
30
30
µrad/N
m
°
µrad
(°)
µrad
(°)
µrad
(°)
µrad
(°)
typ.
typ.
typ.
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Motor Type
Reference point
switch
Miscellaneous
Material
Mass
Recommended controllers/drivers
2-phase stepper
motor***
Hall effect
2-phase stepper
motor***
Hall effect
DC motor with
PWM control
Hall effect
DC motor with
PWM control
Hall effect
Aluminum, black
anodized, stainless steel, red
bronze
2.6
Aluminum, black
anodized, stainless steel, red
bronze
2.6
Aluminum, black
anodized, stainless steel, red
bronze
2.6
Aluminum, black
anodized, stainless steel, red
bronze
2.6
C-663.11
C-663.12
(single axis)
SMC Hydra (double axis)
C-863
C-863
kg
* with C-663.11 Mercury Step Controller
** with C-663.12 Mercury Step Controller
*** 200 full steps/rev., max. 1.2 A/phase
Specifications for vacuum versions can differ.
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Drawings and Images
L-611.90SD rotation stage, dimensions in mm
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L-611.9ASD rotation stage, dimensions in mm
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L-611.90AD and L-611.94AD rotation stages, dimensions in mm
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Direction of the axes and torques for rotation stages
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Ordering Information
L-611.90SD
Precision Rotation Stage, Stepper Motor, Aperture with 35 mm Diameter
L-611.9ASD
Precision Rotation Stage, Stepper Motor, Aperture with 35 mm Diameter, Angle Measuring System
with Sin/Cos Signal Transmission
L-611.90AD
Precision Rotation Stage, DC Motor, Aperture with 35 mm Diameter, Rotary Encoder
L-611.94AD
Precision Rotation Stage, DC Motor, Aperture with 35 mm Diameter, Angle Measuring System with
A/B Quadrature Signal Transmission
Accessories
L-500.AV1
Adapter Bracket for Vertical Mounting of Stages with up to 120 mm Width and 400 mm Length
L-500.AV3
Adapter Bracket for Vertical Mounting of Stages with up to 100 mm Width and 300 mm Length
Ask about custom designs!
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