Catalog №M-10
ISHIHARA
CHEMICAL
Etching solution
automatic controller
H3PO4,HNO3,C2H4O2
METIS‐7000
Features
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Metis-7000 H3PO4, HNO3, C2H4O2 is an etching solution automatic controller. It can analyze phosphoric
acid (H3PO4), nitric acid (HNO3) and acetic acid(C2H4O2) concentration which are active components of
process solution used for etching process at production line of flat panels and replenish (output signals for
replenishment) supply solution automatically.
Can maintain high analysis accuracy by washing sensors every after analysis cycle ends.
Can perform the optimum control of analysis and replenishment by simple parameter change.
Easy to integrate into specification of production line.
Contribute to cost down by reducing amounts of use of process solution and labor costs for analysis and
replenishment.
Specification
■Function
Control items/
analysis method
1. H3PO4 concentration/ neutralization titration
2. HNO3 concentration / neutralization titration or
absorptiometry
3. C2H4O2 concentration / neutralization titration
* Analysis accuracy needs separate consultation.
Controlling replenishing pumps from analysis result.
Replenishing
※Replenishing system needs mutual consultation about
conditions at processing line.
Analysis reagents
Titration solution, anti-scumming solution, electrode
detergent, pH7 calibration solution, pH4 calibration
solution
Cycle time
About 40 minutes
Image picture
■Specification
Dimension / Weight
(body)
Dimension / Weight
(Footstool)
W385×H470×D455(mm) / 30kg
W465×H930×D425(mm) / 20kg
Power supply
AC100V（±10％）、60/50Hz、3P Plug+ Ground （separated ground line needed for equipped computer）
Power dissipation
200VA(max)
■Option （Below is just some example for your consideration. If you have requests, please feel free to contact us.）
Replenishing unit
Replenishing pump, tank, replenishing hose , liquid level sensor, etc.
Alarm
Patrol light, various signal towers.
Data communication
CC-Link、ＲＳ-232C、ＲＳ-485、4-20mA communication、external control, etc.
System summary
Outside control signal
Data communication
Monitoring computer
Signal tower
Signal （line (non-voltage contact or photo-coupler)
Sampling line
Supply line
Controller
( Less
ｍ than 10m
Monitor
Transfer
analysis
data to
USB
memory
Treatment bath
DI water supply unit
Supply solution tank
Control panel
Automatically analysis flow
Start
Starts analysis flow every after user- fixed time elapses.
Samples chemical solution by equipped pump.
Sampling
Analyzes chemical solution concentration with chemical reagent .
Analyzing
Prints out and saves analysis data, and transfers it to USB memory.
(External data communication is available as optional choice.）
Calculating
Replenishment
Cleaning
Calculates necessary replenishment to correct the processing solution
concentration to preset value on the basis of analysis result.
Replenishes supply solution into treatment tank by controlling replenishing
pump with output signal from the controller.
Cleans reaction cell and sensors and stands-by till next analysis
flow begins.
Note1）Please use our designated genuine parts or reagents for maintenance and running in order to prevent unexpected
troubles.
Note2）Please be notified that we may change the specification or appearance of the controller for improvement without
notice.
Note3）So as to maintain analysis accuracy, we recommend periodical maintenance or adjustment by our skilled engineer.
(out of warranty)
For inquiry contact
ISHIHARA CHEMICAL CO.,LTD
Head office
5-26,Nishi-yanagiwara-cho, Hyogo-ku, Kobe, 652-0806, Japan
+81-78-682-2307（Direct）
Tokyo branch
2-26-11, Taito, Taito-ku, Tokyo, 110-0016, Japan
+81-3-3832-8037（Direct）
Shiga plant
Kono, Kitaumi, Imazu-cho, Takashima city, Shiga, 520-1642 Japan
+81-740-24-0151（Main line）
Kobe plant
1-6-2, Murotani, Nishi-ku, Kobe, 651-2241, Japan
+81-78-275-3031(Main line)
Shanghai office
Room1904, City tower center A,100Zun Yi Road, Shanghai 200051
+86-21-6237-2150 (Main line)
Bangkok office
Ramaland Building, 18th Floor, 952, Rama Ⅳ Road, Bangrak, Bangkok 10500
+66-2-266-5616 (Main line)