Materials Transactions, Vol. 52, No. 3 (2011) pp. 547 to 553 #2011 The Japan Institute of Metals EXPRESS REGULAR ARTICLE Comparison of Theoretical Models of Electron-Phonon Coupling in Thin Gold Films Irradiated by Femtosecond Pulse Lasers Jae Bin Lee, Kwangu Kang and Seong Hyuk Lee* School of Mechanical Engineering, Chung-Ang University, Seoul 156-756, Korea This study reports on a comparison of theoretical models for electron-phonon coupling that is substantially associated with nonequilibrium energy transport in thin gold films irradiated by femtosecond pulse lasers. Three published electron-phonon coupling models were analyzed with the use of a well-established two-temperature model to describe non-equilibrium energy transport between electrons and phonons. Based on the numerical results, at lower fluence, all models showed nearly similar tendencies, whereas at higher fluence, constant electronphonon coupling forced unrealistically long electron-phonon equilibration times and spatially long diffusive regions as it failed to intrinsically consider the effect of a high number density of excited d-band electrons. Even at higher fluence, however, both Lin’s and Chen’s models yielded physically reasonable results, showing converging electron-phonon equilibration times and steep gradients in the spatial lattice temperature profiles at higher laser fluence. In particular, Lin’s model predicts nonlinear characteristics of heat capacity and lattice temperature with respect to laser fluence better than Chen’s model. Moreover, the electron-phonon relaxation time increased with laser fluence, whereas at laser fluence greater than 0.05 J/cm2 , the thermal equilibrium time was nearly independent of the laser fluence. Thus, it was concluded that Lin’s model better predicted the electron-phonon coupling phenomena in thin metal films irradiated by ultra-short pulse lasers. [doi:10.2320/matertrans.M2010396] (Received November 24, 2010; Accepted December 14, 2010; Published February 2, 2011) Keywords: nonequilibrium energy transfer, femtosecond pulse laser, two-temperature model (TTM), electron-phonon coupling factor (G-factor) 1. Introduction Ultra-short pulse lasers (<10 ps) have been regarded as powerful tools for material modification (e.g., surface cleaning and heating) and precise micro machining,1–3) and their applications are rapidly growing. Unlike the nanosecond pulse lasers which have been widely used in industry, the ultrashort pulse lasers can minimize laserplume interaction and reduce the heat-affected zone because of the time scale difference. Such applications of ultra-short pulse lasers require the fundamental investigation of non-equilibrium processes between electron and phonons, fast phase transition, theoretical predictive modeling and non-linear effects under the high fluence laser pulses. In this study, we investigated non-equilibrium energy transport in metallic films under ultra-fast laser irradiations. For years, considerable effort has been devoted to the theoretical and experimental study of non-equilibrium energy transport in metallic thin films.4) Nevertheless, the detailed physics behind opto-energy phenomena in thin metal films under femtosecond pulse laser irradiation are still debated and poorly understood because it is very difficult to directly measure the carrier and lattice temperatures. For this reason, numerical models may be useful in the analysis of energy transport in materials under pulsed laser irradiations.2) For the analysis of femtosecond pulse laser interactions with metals, the two-temperature model (TTM) has been widely used to describe electron-phonon interactions and non-equilibrium heat transfer in metallic thin films.5–11) Because the electron-electron interaction time (the order of hundred femtoseconds) is shorter than the electron-phonon interaction time (on the order of picoseconds), a strong nonequilibrium occurs between the electrons and phonons under *Corresponding author, E-mail: [email protected] the irradiation of femtosecond laser pulses. The thermal equilibrium among the excited electrons is reached within a few hundred femtoseconds, depending on the excitation energy above the Fermi level.12) Cooling of the electrons occurs because of the electron-phonon energy transport and the electronic diffusive motion. In TTM, the average energy levels of hot electrons and cold lattices are described by two separate temperatures, Te and Tl ,12) respectively. Energy transport in time and space can be modeled by two coupled diffusion equations describing the heat conduction of electrons and lattices.13) For modeling the electron-phonon energy transfer, both equations include an energy exchange term that is proportional to an electron-phonon coupling factor G and to the temperature differences between electrons and lattices. In femtosecond laser material processing applications, the temperature dependence of electron-phonon coupling is very crucial in estimating an accurate ablation depth. Nevertheless, less attention has been paid to investigate the electron-phonon coupling characteristics associated with the temperature dependency of the G-factor. Assuming a relatively weak non-equilibrium state, most TTMs have previously used a constant G-factor that is estimated using the electron-phonon relaxation time.14) Otherwise, the G-factor has been taken as a parameter fitted for agreement between calculated results and experimental values for the ablation threshold in gold.13) For example, Gfactors acquired through fitting to experimental data showed broad variation from 3:6 1017 to 10:5 1017 Wm3 K1 for Ni, and ð2:2 0:3Þ 1017 Wm3 K1 for Au.13,15–17) However, there is growing experimental evidence that the applicability of the constant G-factor is limited to a low intensity laser pulses.18–20) Kaganov et al.21) proposed a theoretical model of the G-factor with electron relaxation time that is defined as the inverse of the electron-phonon collision frequency and usually assumed to be proportional to 1=Te , forcing the 548 J. B. Lee, K. Kang and S. H. Lee G-factor to be constant. For consideration of temperature dependency, Chen et al.22) modified the electron relaxation time in Kaganov’s model by involving electron-phonon scattering and electron-electron scattering.22) Recently, Lin et al.12) performed computational analysis based on firstprinciples electronic structure calculations of the electron density of states (DOS),12) showing large deviations from the linear temperature dependence of the electron heat capacity and a constant electron-phonon coupling. According to these results, under irradiation with high power, thermal excitation of the electrons below the Fermi level begins to contribute to the energy transfer between electrons and phonons. The main objective of this study is to compare three different theoretical models such as Kaganov’s model, Chen’s model, and Lin’s model to investigate the effects of each G-factor on the non-equilibrium energy transport in thin gold films. In this article, we analyze the transient evolution of electron and phonon temperatures and examine detailed physics behind energy relaxation process in thin films. Finally, the performance and applicability of various electron-phonon coupling models were discussed. 2. Mathematical Representation and Computational Details This study used TTM to compare the effects of electronphonon coupling on the energy transfer between electrons and the lattice, and the subsequent temperature changes under irradiation from femtosecond pulse lasers. Since a focused laser beam diameter is usually much larger than the penetration depth of the metal, the energy transport can be safely assumed to be a one-dimensional (1D) problem. The spatial and temporal evolutions of the electron and lattice temperatures are written as follows:11,23) @Ce ðTe ÞTe @ @Te ð1Þ ke ðTe Þ ¼ GðTe Tl Þ þ Sðz; tÞ @z @t @z @Cl ðTl ÞTl ð2Þ ¼ GðTe Tl Þ @t 0:939Fð1 RðtÞÞ Sðz; tÞ ¼ tp ! Zz t2 exp ðz; tÞdz exp 2:773 2 ; ð3Þ tp 0 where C is the heat capacity with respect to the temperature, subscripts e and l are the electron and lattice, respectively, ke ðTe Þ is the electron thermal conductivity, G is the electronphonon coupling factor, and Sðz; tÞ is the laser heating source term.23) In eq. (3), RðtÞ, F, tp , and ðz; tÞ represent the reflectivity at the surface, laser fluence, pulse duration, and absorption coefficient, respectively. Electron heat capacity is commonly expressed as a linear function of the electron temperature, Ce ðTe Þ ¼ Te , where ¼ 2 ne kB2 =2"F .24) Because this Sommerfeld expansion is no longer valid for high electron temperatures, the electron heat capacity needs to be calculated from the following equation;12) Z1 @ f ð"; ; Te Þ Ce ðTe Þ ¼ gð"Þ"d"; ð4Þ @Te 1 where gð"Þ is the electron DOS, is the chemical potential at Te , and f ð"; ; Te Þ is the Fermi distribution function. The electron thermal conductivity in eq. (1) based on Drude theory can be expressed as follows:25) ke ðTe Þ ¼ 1 Ce ðTe ÞVe2 ðTe Þe ðTe Þ; 3 ð5Þ where Ve denotes the electron velocity, and e means the electron-electron relaxation time with respect to the electron temperature.25) It is noted that for e related to the collision frequency, there are three different regimes; the cold solid regime, hot plasma regime, and intermediate regime, depending on the melting temperature and Fermi temperature as follows:26) 1=2 me Ji Tl ðiÞ v ¼ ks ðTe < Tmelt Þ ð6Þ M h TD Zne ln ðiiÞ v ¼ ks ðTe TF Þ ð7Þ Te3=2 Ve ðiiiÞ v ¼ ks ðTmelt < Te < TF Þ; ð8Þ r0 where Z is the ionization degree and ne is the electron number density, ln is the Coulomb logarithm, M is the ion mass, me is the electron mass, Ji the is ionization potential, h is the reduced Planck constant, TD is the Debye temperature, r0 is the ion sphere radius, and Ve is the electron velocity. Here, the empirical constant ks can be obtained from experimental data using the interfacial condition.26) To precisely calculate the reflectivity and absorption coefficient, the dielectric function and complex refractive index are determined by the Drude model.26,27) The dielectric function of metal consists of a real part "1 and an imaginary part "2 . The two parts are expressed by "1 ¼ 1 ð!P2 =ð!P2 þ 2 Þ and "2 ¼ !P2 =ð!L3 þ 2 !L Þ, respectively.26,27) Here, !P is the plasma frequency, !L is the laser frequency, and is the collision frequency suggested by Eidmann et al.26) The complex refractive index can be expressed by n ¼ ðð"1 þ ð"21 þ "22 Þ1=2 Þ=2Þ1=2 and k ¼ ðð"1 þ ð"21 þ "22 Þ1=2 Þ=2Þ1=2 , where n and k represent the refractive index and the extinction coefficient, respectively.27) The reflectivity and the absorption coefficient are determined as follows:27) ðn 1Þ2 þ k2 ð9Þ ðn þ 1Þ2 þ k2 4k ; ð10Þ ¼ where means the wavelength of the incident laser. Kaganov et al.21) suggested that the electron-phonon coupling factor was calculated from the approximation of a free-electron metal with a Debye phonon spectrum.21) For Te and Tl much greater than the Debye temperature, the electron-phonon coupling factor can be expressed as follows:21,22) R¼ 2 me Cs2 ne ðTl TD ; Te Tl Tl Þ ð11Þ 6 ðTl ÞTl 2 me Cs2 ne G¼ ðTe TD ; Tl Te Þ; ð12Þ 6 ðTe ÞðTe Tl Þ where me is the effective electron mass, Cs is the speed of sound, ne is the number density of electrons, and ðTe Þ is the electron relaxation time. Under conditions for which the G¼ Comparison of Theoretical Models of Electron-Phonon Coupling in Thin Gold Films Irradiated by Femtosecond Pulse Lasers electron relaxation time is proportional to the inverse of the lattice temperature, Tl and the electron temperature and lattice temperature are equal, ðTe Þ 1=Te , Te ¼ Tl , the coupling factor given by eqs. (11) and (12) are independent of temperature, i.e., constant.21) The constant model using a constant electron-phonon coupling has been widely used in TTM, despite a large temperature difference between the electron and lattice. Chen et al.22) showed that electron thermal relaxation was closely associated with electron-electron and electron-phonon scattering, and presented the electron relaxation time as e ¼ ðe-e þ e-p Þ1 where e-e and e-p are electron-electron and electron-phonon collision rates, respectively.22) According to Chen’s model, when Tl > TD and Te TF , the electron-electron and electron-phonon collision rates are expressed by e-e ¼ eo ðTF =Te Þ2 and e-p ¼ po ðTF =Tl Þ, respectively, where eo and po are empirically determined for metals.22) Thus, the electron-phonon coupling of Chen’s model can be written as follows:22) Table 1 549 Physical properties of gold used in this study. Property Value Reference 23 Boltzmann constant 1:3806503 10 [m2 kg s2 K1 ] 25) Mass of electron 9:1 1031 [kg] 25) Mass of ion 196.97 [a.m.u] 25) Debye temperature 170 [K] 25) Melting temperature 1337 [K] 25) Fermi temperature 6:39 104 [K] 11) First ionization potential 9.22 [eV] 11) Laser wavelength 1053 [nm] Speed of sound 1:9 103 [ms1 ] 23) 2 me Cs2 ne ð13Þ ½Ae ðTe þ Tl Þ þ Bl ; 6 where Ae ¼ ðeo TF2 Þ1 and Bl ¼ ðeo TF2 Þ1 . For gold films, constants Ae and Bl are 1:2 107 and 1:23 1011 K1 s1 , respectively.22) Lin et al.12) proposed a new theoretical model of electronphonon coupling to consider the scattering of electrons away from the Fermi surface at high electron temperatures. The rigorous form of temperature-dependent electron-phonon coupling can be expressed as:12) Z h kB h!2 i 1 2 @f d"; ð14Þ GðTe Þ ¼ g ð"Þ gð"F Þ @" 1 G¼ where h is the reduced Planck constant, kB is the Boltzmann constant, and gð"Þ is the electron DOS at the energy level ". The above equation is considered a major variation of the Gfactor at high electron temperatures, whereas it requires some difficult procedures for the electronic structure calculation of the electron DOS. Numerically, the finite difference method (FDM) was used with a fully-implicit scheme for one-dimensional transient diffusion equations of electron and lattice temperatures (see eqs. (1) and (2)). Von Neumann boundary conditions were used at the top and bottom surfaces of a thin gold film. With a constant electron number density of 5:9 1028 m3 ,8,28) it was assumed that the electron and lattice temperatures (300 K) were initially in thermal equilibrium. The film thickness was 300 nm and the laser pulse was 100 fs for the calculation at a fixed wavelength of 1053 nm. The physical properties of thin gold film are summarized in Table 1. 3. Results and Discussion Figure 1 compares the estimated electron-phonon coupling G-factors from the three different models assuming constant electron-phonon coupling values. At room temperature, the G-factors predicted from all models are in the range of 1:9{3:9 1016 Wm3 K1 , which shows good agreement with experimentally reported values of 0:8{4:0 1016 Wm3 K1 .29–32) It should be noted that the G-factors Fig. 1 The G-factor with respect to the electron temperature for different G-factor models. estimated by Kaganov’s model became nearly constant in the range of the electron temperature, indicating that this model fails to describe the temperature dependency of the electron-phonon coupling. Hence, Kaganov’s model is excluded from further discussion. Chen’s model shows a linear increase in the G-factor with the increase of Te , because electron-electron scattering strengthens the G-factor with the increase of Te found in Chen’s model. However, the role of electron-electron scattering on the G-factor is not yet fully understood. In Lin’s model, the G-factor remains constant below 3000 K, while it starts to increase significantly above 3000 K. The strong increase of the G-factor in Lin’s model is attributed to the large number of excited d band electrons while only s electrons were excited below 3000 K.12) Numerical predictions from each model are compared with experimental measurements13) in Fig. 2. The irradiated sample is a 300 nm gold thin film and the incident laser fluence was F ¼ 0:001 J/cm2 (low laser fluence). The change in normalized electron temperature was defined as ðTe Teq Þ=ðTe Teq Þmax , which is analogous to the change in normalized reflectivity.14) Because each model shows a small difference in the G-factor at low temperature in Fig. 1, the reflectivity values predicted from the models were similar as 550 J. B. Lee, K. Kang and S. H. Lee Fig. 2 Comparisons of the predicted electron temperatures with experimental data at low fluence (F ¼ 0:001 J/cm2 , tP ¼ 100 fs, df ¼ 300 nm). in Fig. 2 and all showed fairly good agreement with the experimental data. This agreement assures that the constant G-factor that is commonly used in TTM is available at low fluences. Figure 3 shows the transient evolution of the electron and lattice temperatures at the top surface as predicted by Chen’s model and Lin’s model. For calculation, the Au film depth is 300 nm and the laser fluence used was 0.2 J/cm2 (high fluence case). The peak of the electron temperature in all cases reached 10000 K, regardless of G-factor model. The optical constants can be indirectly changed by different Gfactor models because the optical constants are functions of electron and lattice temperatures, as shown in eqs. (6)–(8). However, the effect of differences in the optical constants of G-factors on electron and lattice temperature can be neglected because the laser pulse duration is too short to yield any significant changes in the electron and lattice temperature. The peak values of the electron temperature from each model were estimated to be similar, but the values for electron-phonon thermal equilibration time differ. When using a constant value for electron-phonon coupling, the electron-phonon equilibration time was approximately 25 ps, which is much longer than the equilibration times predicted by Lin’s and Chen’ models as shown in Fig. 3. As a result, electron-phonon coupling is considered a very important factor affecting thermal equilibrium. As previously noted, most research has used a constant value of 2:2 1016 Wm3 K1 , suggesting a very low electron-phonon energy exchange rate, even at a maximum electron temperature of 10000 K, which results in very slow increase in the lattice temperature. Alternatively, at a maximum electron temperature, Lin’s model and Chen’s models predicted G-factors values much greater than the constant, indicating that the lattice temperatures for both models reached steady state conditions within a few picoseconds due to faster energy exchange rates between electrons and phonons. The electron energy was excited by laser pulse decay through electron-electron and electronphonon scattering. The electron-electron collision time was Fig. 3 Predicted electron and phonon temperatures at high fluence (F ¼ 0:2 J/cm2 , tP ¼ 100 fs, df ¼ 300 nm): (a) constant model; (b) Chen’s model; (c) Lin’s model. approximately 1 fs and electron-phonon collision time was approximately 100 fs.24) Since a thermal equilibrium requires 5–20 collisions between energy carriers, the electron-phonon relaxation time is 1012 s.24,33) Thus, at a high laser fluence, the use of a constant electron-phonon coupling is no longer valid, but Chen’s and Lin’s models are appropriate for predicting energy transport between electrons and phonons. Comparison of Theoretical Models of Electron-Phonon Coupling in Thin Gold Films Irradiated by Femtosecond Pulse Lasers 551 Fig. 4 The lattice temperature rises with respect to the laser fluence (0.001–0.2 J/cm2 ) at t ¼ 1 ps for different G-factor models. Fig. 5 The predicted electron-phonon relaxation time, which is defined as the time required for the lattice temperature to reach 95% of the equilibration temperature for different G-factor models. Figure 4 represents the predicted lattice temperature with respect to laser fluence at 1 ps after irradiation. When using a constant value, very little change in the lattice temperature was observed, even if the laser fluence increased. Alternatively, in Lin’s and Chen’s models, the lattice temperature increased with the increase in laser fluence. One picosecond was sufficient for building up electron-phonon relaxation, and within the electron-phonon relaxation time, the electrons transferred their energy to phonons. Thus, it is important to examine the effects of laser fluence on electron-phonon relaxation time. Figure 5 illustrates electron-phonon thermal relaxation time with respect to laser fluence. The thermal electronphonon relaxation time was numerically determined using the time required for 95% steady-state lattice temperature. When a constant G value was used, the predicted electronphonon relaxation time increased continuously with laser fluence. Alternatively, Lin’s and Chen’s models predicted that the electron-phonon relaxation time converges to 5 ps approximately. Considering that average electron-phonon relaxation time was a few picoseconds,24,33) both models showed good agreement in predicting the relaxation time, and the use of constant electron-phonon coupling was no longer appropriate. Figure 6 presents electron and phonon temperatures at different times (0.1, 1, 5, 10, and 15 ps after irradiation). In the simulation, the Au film depth was 300 nm and the laser fluence was fixed at 0.2 J/cm2 . As shown in Fig. 6(a), even if all the electron-phonon coupling models predicted nearly the same electron temperature, the prediction of the lattice temperature depends on electron-phonon coupling. This demonstrates traditional non-equilibrium characteristics resulting from scale differences between the energy relaxation time and pulse duration. With increasing time, electron energy is transferred to the lattice phonon, showing the increase in lattice temperature and highly dependency on the electron-phonon coupling. The higher G-factors in Lin’s and Chen’s models impel larger lattice temperature excursions. Because the energy diffusion of electrons at t ¼ 1{5 ps was much greater than the energy transferred to the lattice phonon, as shown in Fig. 6(e), the electron temperatures estimated by different models at t ¼ 5 ps differ less than the lattice temperatures. It should be noted that the diffusion time of the phonon 0:1 ns, which is a time scale one order of magnitude greater than our calculation time. Therefore, lattice thermal conduction is safely ignored in eq. (2). At t ¼ 15 ps, the electron temperatures and lattice temperatures in Lin’s and Chen’s models almost reached the equilibrium state as time progressed. 4. Conclusions The present study numerically investigated electronphonon coupling characteristics that substantially affected non-equilibrium energy transport in thin gold films heated by femtosecond pulse lasers. Theoretical models were compared and discussed regarding the physical interpretation of the cooling rates of hot electrons in thin gold films. Based on the numerical results, at lower laser fluence, Lin’s and Chen’s models yielded nearly the same predictions, compared to the results of a model that assumed a constant G factor (ð2:2 0:3Þ 1016 Wm3 K1 ) because only s-band electrons were excited for a relatively low electron temperature (below 3000 K), and consequently, G-factor did not show much influence. Alternatively, at high laser fluence, constant electron-phonon coupling cannot consider the effects of the increase in excited d-band electrons on the energy transfer, whereas Lin’s and Chen’s models accurately predicted the energy transport between energy carriers in metallic thin films irradiated by a femtosecond pulse laser. Thus, the Gfactor should be carefully determined when describing nonequilibrium energy transport. Moreover, the electron-phonon relaxation time increases with laser fluence up to 0.05 J/cm2 . 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Nomenclature Ce electron heat capacity Cl lattice heat capacity Cs speed of sound F laser fluence G electron-phonon coupling constant h reduced Planck constant Ji first ionization potential k extinction coefficient ke electron thermal conductivity ks numerical correction constant M ion mass me electron mass ni ion number density ne electron number density n refractive index r0 ion sphere radius R reflectivity S laser heating source term t time tp pulse duration time TD Debye temperature TF Fermi temperature Te electron temperature Tl lattice temperature Tmelt melting temperature of gold Ve electron velocity Z ionization degree Greek symbols absorption coefficient optical penetration depth electron heat capacity constant laser wavelength ln Coulomb logarithm electron-phonon relaxation time collision frequency !L laser frequency !p plasma frequency Subscripts e electron l lattice 553
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