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Page 601
Precision Clean Regulator
Series SRP
ARJ
AR425
to 935
AMR
ARM
ARP
IR
IRV
VEX1
SRH
SRP
SRF
ARX20
VCHR
ITV
IC
PVQ
VEF
VEP
VER
VEA
VY2
VBA
VBAT
AP100
601
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Page 602
Precision Clean Regulator
Series
SRP
High precision, low
flow consumption
stainless steel
regulator
Achieves flow
consumption
"under a liter"
Precision
Setting sensitivity: 0.3%F.S.
Repeatability: 1%F.S.
Bleed volume
0.5 l/min (ANR) or less
(Outlet pressure at 0.2 MPa)
Bleed
Oil free
Parts composition with no
use of oils.
All wetted parts degrease
washing
IN
OUT
Excellent
corrosion resistance
Stainless steel 316 is used for all metal parts
in contact with the fluid.
Applications
Consistent clean
room production
Cleaned, assembled, inspected, and
sealed in double packaging in a Class
10,000 environment
Manufacturing process
Pressure feed of chemicals
Precision clean regulator
Parts assembly
SRP
Degrease cleaning
Clean
air
Super
mist
separator
N2 blow
Odor
removal
filter
Clean
gas
filter
Assembly
Inspection
Precision clean regulator
SRP
Interior purge
N2
gas
Packaging
Clean
gas
filter
Class
10,000
602
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Page 603
Precision Clean Regulator
Series SRP
How to Order
SRP 1 1 0 1
ARJ
AR425
to 935
01
AMR
Made to Order
(Refer to page 606 for details.)
Nil
Set pressure
0
1
Standard
Machined bleed port
M5 thread
With bleed port fittings
(Applicable tube O.D.: ø4)
X201
0.005 to 0.2 MPa
0.01 to 0.4 MPa
X206
Port size
Nil: Standard
IN
IR
VEX1
OUT
SRH
Knob
Gauge port
JIS symbol
ARP
IRV
Gauge port orientation
Symbol Piping port size
M5 x 0.8
M5
Rc 1/8
01
ARM
SRP
R: R specifications
SRF
Gauge port
IN
ARX20
OUT
VCHR
∗ Gauge port positions are
indicated with the knob
on the top side.
ITV
IC
Options
Description
Model
Material
Bracket
B21-1-T1
Rolled steel plate
(electroless nickel plated)
PVQ
VEF
VEP
VER
VEA
Specifications
1.5
Proof pressure MPa
1.0
Maximum operating pressure MPa
Regulating pressure Low pressure type
0.005 to 0.2
High pressure type
0.01 to 0.4
Ambient and fluid temperature (°C)
Fluid consumption l/min (ANR)
Note 1)
AP100
0 to 60
0.5 or less
0.3% of full span
Sensitivity
± 1% of full span
Repeatability
Metal
Fluid-contact parts
VBA
VBAT
Air, N2, CO2, Ar
Fluid
range MPa
VY2
M5, Rc 1/8
Connection port size
Resin
Rubber
Other
Assembly environment
Parts cleaning
Stainless steel 316
Fluororesin
Fluoro rubber
Ceramics
Clean room class 10000
All wetted parts degrease washing
Note 1) At set pressure of 0.2 MPa
603
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Page 604
Series SRP
Flow Characteristics (Representative value)
Fluid: Air
Conditions/Inlet pressure: 0.5 MPa
SRP1111-M5
0.25
0.50
0.20
0.40
Outlet pressure MPa
Outlet pressure MPa
SRP1101-M5
0.15
0.10
0.05
0.00
0
10
20
30
40
50
60
70
80
90
0.30
0.20
0.10
0.00
100
Conditions/Inlet pressure: 0.7 MPa
0
20
40
Flow rate l/min (ANR)
Conditions/Inlet pressure: 0.5 MPa
SRP1111-01
0.25
0.50
0.20
0.40
0.15
0.10
0.05
0.00
0
20
40
60
80
80
100
120
140
Flow rate l/min (ANR)
Outlet pressure MPa
Outlet pressure MPa
SRP1101-01
60
100
120
0.30
0.20
0.10
0.00
140
Conditions/Inlet pressure: 0.7 MPa
0
20
40
60
Flow rate l/min (ANR)
80
100
120
140
160
180
200
Flow rate l/min (ANR)
Pressure Characteristics (Representative value)
Fluid: Air
SRP1101
Initial setting/Inlet pressure: 0.7 MPa
Outlet pressure: 0.1 MPa
SRP1111
0.220
0.110
Outlet pressure MPa
Outlet pressure MPa
0.120
Set point
0.100
0.090
0.080
0.2
Initial setting/Inlet pressure: 0.7 MPa
Outlet pressure: 0.2 MPa
0.3
0.4
0.5
0.6
0.7
Inlet pressure MPa
0.8
0.9
1.0
0.210
Set point
0.200
0.190
0.180
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1.0
Inlet pressure MPa
604
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Page 605
Precision Clean Regulator
Series SRP
Construction
!4
t
y
!3
ARJ
AR425
to 935
Component parts
Description
No.
!2
r
!1
e
o
i
q
!0
w
u
Treatment
Material
1
Body
Stainless steel 316L
2
Valve guide
Stainless steel 316
3
Spacer
PPS
4
Bonnet
PPS
5
Knob
PBT
6
Set nut
7
Valve spring
8
Main valve
AMR
ARM
ARP
Electroless nickel plated
ZDC
IR
Stainless steel 316
IRV
Ceramics
9
Valve seat
10
O-ring
Fluororubber
11
Diaphragm
Fluororubber
12
Gasket
Fluororubber
13
Pressure regulator spring
Steel wire
14
Pressure regulator screw assembly
—
PTFE
VEX1
SRH
SRP
SRF
ARX20
VCHR
Dimensions
ITV
40
5
0.
ø3
IC
Bracket
PVQ
VEF
VEP
SMC
36
51
P
US
K
H LOC
1
VER
30
ø3
Panel mounting hole
VEA
40
VY2
Port size
28
20
28
AP100
1.6
6.5
Bleed exhaust hole
VBA
VBAT
B
41
IN
OUT
A
72.5 (when set = 75.5)
8.5
C
D
Model
Port size
A
B
C
D
SRP111-M5
M5 x 0.8
14
23.5
30
30
SRP111-01
Rc 1/8
15
22.5
40
40
605
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Page 606
Series SRP
Made to Order Specifications:
Contact SMC for detailed dimensions, specifications and delivery.
q Machined Bleed Port M5 Thread
X201
Regulator with a M5 thread machined on the relief port in order to connect it to the bleed port.
Standard model no.
X201
Machined bleed port M5 thread
Dimensions
Other dimensions are the same as the standard type.
Bleed port M5 thread
IN
OUT
w With Bleed Port Fittings (Applicable Tube O.D.: ø4)
X206
Regulator with a fitting in order to connect it to the bleed port.
Standard model no.
X206
With bleed port fittings
Dimensions
Other dimensions are the same as the standard type.
17.1
Applicable tube O.D. ø4
Fitting: KQH04-M5-X17
IN
OUT
≅ 13.8
606
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Page 607
Series SRP
Specific Product Precautions
Be sure to read before handling.
Refer to front matters 42 and 43 for Safety Precautions and pages 287 to 291 for
Precautions on every series.
Design and Selection
Pressure Adjustment
Warning
Warning
1. Types of fluid
This product is designed for use with air, N2, CO2 and Ar as
fluids. Consult SMC if it will be used with any other fluids.
Since this product uses a bleed mechanism and fluid is
released from the bleed hole, poisonous or corrosive gases
cannot be used.
2. Fluids containing solids cannot be used.
Since this can cause malfunction, install a mist separator, etc.,
upstream from the regulator.
3. For air containing a large amount of
drainage, install an air dryer or after cooler,
etc., upstream from the regulator.
This can otherwise cause malfunction.
4. Do not use in locations subject to vibration or
impact.
5. Avoid direct sunlight by providing a
protective cover, etc.
6. When sources of heat are located nearby,
block off any radiated heat.
Caution
1. It is recommended that the outlet pressure be
set in the range of 25 to 85% of the inlet
pressure.
2. Depends on operating conditions, oscillation
(buzz) may occur even when used within the
specification range detailed in this catalog.
Consult SMC for details.
1. Do not use tools when operating the
ARJ
pressure regulator knob.
If tools, etc., are used to operate the pressure regulator knob,
damage can occur. Operate this knob only by hand.
AR425
to 935
2. Perform settings while confirming inlet and outlet AMR
pressure indicators.
Turning the knob more than necessary can cause damage to
internal parts.
ARM
ARP
Caution
IR
1. Perform pressure adjustments only after
releasing the lock.
IRV
When the pressure regulator knob will not turn, it is locked.
Release the lock by pulling the pressure regulator knob out. If
the knob is turned by force damage will occur.
After adjusting the pressure, lock the knob again by pressing it
back down.
2. Adjust pressure in an upward direction.
VEX1
SRH
SRP
A correct pressure setting cannot be achieved by adjusting the
pressure downward. The outlet pressure is increased by
turning the pressure regulator knob to the right, and decreased
by turning the knob to the left.
3. Confirm the inlet pressure.
Set the outlet pressure to no more than 85% of the inlet
pressure. If the inlet pressure is too low, a correct set pressure
cannot be attained.
SRF
ARX20
VCHR
ITV
4. A small volume of fluid will be expended from
the bleed hole.
IC
The bleed mechanism is used to perform high precision
pressure adjustment. Therefore, it is not abnormal for a small
volume of fluid to be expended from the bleed hole.
Mounting
PVQ
VEF
VEP
Caution
VER
1. Open the sealed package inside a clean room.
VEA
This product is packaged in sealed double packaging in a clean
room. It is recommended that the inside packaging be opened in a
clean room or other clean environment.
VY2
2. Flush out the piping.
VBA
VBAT
Connect this product to piping only after the piping has been
flushed or washed, etc. If debris or scale, etc., remains in the
piping, this can cause malfunction or failure.
AP100
3. Keep sealing material from getting inside the
piping.
When screwing in pipes and fittings, etc., take care that chips from
the pipe threads, sealing material, and other debris do not get
inside the piping. If debris or scale, etc., remain inside the piping,
this can cause malfunction or failure. Also, when pipe tape is used,
leave 1.5 to 2 threads ridges exposed at the end of the threads.
4. Confirm the mounting orientation of the product.
The side marked IN is the fluid inlet, and the side marked OUT
is the fluid outlet. If mounted backwards, the product will not
operate properly.
5. Do not block the bleed hole.
If the bleed hole is blocked, the product will not operate properly.
607
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