UZM Series
Motorized Vertical Translation Stages
UZM160CC.05
UZM80PE.1
The UZM Series vertical translation stages offer high-precision
vertical translation for applications
requiring submicron resolution
accuracy. High-resolution vertical
motion is achieved with a precision
inclined-plane design, consisting of
two opposing wedges which move
past each other by means of inclined, ball-bearing races. A precision
leadscrew translates the lower edge
horizontally, and this motion is
converted into vertical translation
by the inclined ball races between
the two wedges. For automatic
return to a pre-determined height,
all UZM Series stages include a center home position.
UZM-DS (03/98)
Unlike vertically-mounted translation stages, UZM Series stages
center the mass of the payload
directly over the bearings, avoiding positioning errors caused by
cantilever loads. The low-profile
design of these stages make them
particularly suited for space-limited XYZ positioning applications.
Key Features
The modular design of UZM stages
brings you the flexibility to choose
the drive configuration that best
matches your specific application
requirements: manual, DC motor
or stepper motor driven versions,
with mini-step or full-step drive
options.
encoder standard
• Steel construction, travel of 4
and 9 mm
• Stepper motor and DC motor
driven with resolution to 50 nm
• Origin and limit switches and
For optimum positioning performance and seamless compatibility,
we recommend our Motion-Master
family of motion controllers for
these devices. The UZM Series
stages are supplied with a 3-meter
cable for connection to the
MotionMaster controllers.
1
• Low profile design
Stepper Drive Versions
Stepper-motor-driven stages are
offered in two variants:
Driver Module Options
Driver modules for our
MotionMaster (MM) Series
controllers are available for each
of the UZM Series stages. They
are referenced as 2-digit coded
options to be used in the motion
controller part number.
• One mini-step drive version with
resolutions of 0.1 µm
(UZM80PP.1) and 0.05 µm
(UZM160PP.05). This combine
accurate positioning from stepper motor technology and smooth displacement from decistep/encoder driving mode.
Stepper Drive Specifications
Resolution (µm)
MM2000
Module Option
(M-)UZM80CC.1
05
• One full-step version with resolutions of 0.1 µm (UZM80PE.1)
and 0.05 µm (UZM60PE.05).
This is primarily designed for
those applications requiring the
direct positioning accuracy to be
maintained to within the stage’s
mechanical resolution when the
power is switched off, such as
operations in vacuum (vacuum
preparation on request).
(M-)UZM80PP.1
(M-)UZM80PE.1
(M-)UZM160PP.05
(M-)UZM160PE.05
0.1
0.05
Speed (mm/sec)
2
0.2
1
0.1
Motor
UE41PP
UE31PP
UE41PP
MM3000
DC-Servo Drive Versions
Module Option
(M-)UZM80PP.1
12
(M-)UZM80PE.1
04
(M-)UZM160PP.05
12
(M-)UZM160PE.05
05
(M-)UZM80CC.1
63
(M-)UZM160CC.05
72
MM4005
Module Option
(M-)UZM80PP.1
12
(M-)UZM80PE.1
05
(M-)UZM160PP.05
12
(M-)UZM160PE.05
1H
(M-)UZM80CC.1
64
(M-)UZM160CC.05
7G
One DC-motor-driven configuration is available, with resolutions
of 0.1 µm (UZM80CC.1) and
0.05 µm (UZM160CC.05). The
UZM80CC may be directly connected to our MotionMaster 2000
controller board, with no need for
extra power/driver units, while the
UZM160CC feature a built-in
tachometer that brings you the
required motion control accuracy
in higher dynamics applications.
DC-Servo Drive Specifications
(M-)UZM80CC.1
(M-)UZM160CC.05
Resolution (µm)
0.1
0.05
Speed (mm/sec)
0.25
1
Motor
UE31CC
UE404CC
Manual Drive Versions
ESP6000
The UZM Series vertical translation
stages are also available with
manual drive. These are offered in
resolutions of 0.1 µm (UZM80MS)
and 0.05 µm (UZM160MS). In
addition to the vernier scale on the
manual drive, position may be
determined using an output from
an incremental shaft encoder. A
connector for the CV1000 display is
provided for ease of use.
Manual Drive Specifications
(M-)UZM80MS.1
(M-)UZM160MS.05
2
Resolution (µm)
0.1
0.05
mm/rev.
0.2
0.1
UZM-DS (03/98)
Specifications
Travel Range
(mm)
On Axis Accuracy (µm)
Repeatability
(µm)
Hysteresis
(µm)
αy
Pitch
(µrad)
αz
Yaw
(µrad)
(M-)UZM80
4
4
0.2
3
100
200
•Q
D
: Off-center load
: Cantilever distance in
millimeters
Cz : Normal center load
capacity on bearings
Q x D: Max. torque
(M-)UZM160
9
8
0.5
5
100
200
Z
Y
D
Q
y
Off-center Load Characteristics
Travel Range
(mm)
Cz
(N)
QxD
(N.m)
Cx et Cy
(N)
kαx
(µrad/N.m)
kαy
(µrad/N.m)
(M-)UZM80
4
±30
0.75
±150
25
100
(M-)UZM160
9
-200, +300
20
±200
0.13
0.65
kα y
Dimensions in millimeters.
kα z
X
• –Cx, Cy: Inverse load capacity
on X or Y axis
• +Cx, Cy: Direct load capacity
on X or Y axis
• kαx : Angular stiffness (Roll)
• kαy : Angular stiffness (Pitch)
accessed to by unscrewing and
removing the upper and lower
plates of the stages (see dimension
drawings, next page).
(M-)UZM160 Interface
(M-)UZM80 Interface
4 holes M4 thd on h 34,
on carriage and stage
Carriage -> depth: 5
Stage -> depth: 6
4 holes M6 thd on h 63,
depth: 6
4 holes M4 thd on h 63,
on carriage and stage
Carriage -> depth: 6
Stage -> depth: 4
UZM-DS (03/98)
x
kα
+Cz
±Cx
Assembly Pattern
Stacking UZM Series stages with
other Newport’s stages is easily
accomplished. Below are example
schematics of the assembly patterns used. These interfaces are
±C
-Cz
4 holes M6 thd on h 128,
depth: 6
4 clearance holes for M6 screw on ` 192 x 128
3
Dimensions
Ordering Information
6
The UZM Series translation stages are numbered as follows:
Model Series
M-
UZM
Carriage
(mm)
Drive Resol.
PP
PE
CC
MS
80
160
80
49.5 ±2
H max.
25.5
.1 (1)
.05 (2)
6
75
L
7
158
Model shown: UZM80PP.1.
Dimensions in millimeters.
M-: Metric version – PP: Mini-step – PE: Full-step –
CC: DC-Servo – MS: Manual.
UZM80: 9 holes 1/4-20 thd,
depth: 5, 25.4 spacing
M-UZM80: 9 holes M6 thd,
depth: 5, 25 spacing
Notes:
1)
Resolution for UZM80.
2)
Resolution for UZM160.
120 81
76
Example
The M-UZM80PP.1 is
a UZM translation stage,
metric version, with a
80 mm-wide plate and a
0.1 µm resolution (ministep) stepper motor drive.
4 holes Ø 7.5
on ` 101 x 50.4
(M-)UZM80 L
PP.1
78.5
PE.1
129
CC.1
106.5
MS.1
90.5
80
9.5
9.5
160
H
42
32
32
32
10
105 ±4.5
H
10
52.5
130
4 slots Ø 6.5
on ` 250 x 135.5
126
L
UZM160: 25 holes 1/4-20 thd,
depth: 9, 25.4 spacing
M-UZM160: 25 holes M6 thd,
depth: 5, 25 spacing
(M-)UZM160 L
PP.05
177
PE.05
218
CC.05
237.5
MS.05
230
4 slots Ø 6.5
on ` 290.5 x 101.6
H
60
60
61
60
175 168 155
25-pin Sub-D
Connector
Model shown: UZM160PE.05.
Dimensions in millimeters.
330
France: MICRO-CONTROLE – P.A. de Saint Guénault – 3 bis, rue Jean Mermoz – BP 189 – 91006 Evry Cedex – France
Tel: 33-1.60.91.68.68 – Fax: 33-1.60.91.68.69
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NEWPORT
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Tel: 30-1.82.15.190
Fax: 30-1.82.32.744
Norway
W. TVERDAL A/S
Tel: 47-31.28.47.33
Fax: 47-31.28.60.18
Switzerland
NEWPORT INSTRUMENTS AG
Tel: 41-1.744.50.70
Fax: 41-1.744.50.77
Denmark
BBT BENNY LARSEN APS
Tel: 45-45.41.20.40
Fax: 45-45.41.20.70
Israel
LAHAT TECHNOLOGIES LTD.
Tel: 972-4.9990151
Fax: 972-4.9990826
Poland - Hungary - Czech Rep.
RBM BRAUMANN GMBH
Tel: 49-8761.61041
Fax: 49-8761.70797
United Kingdom
NEWPORT LTD.
Tel: 44-1.635.521.757
Fax: 44-1.635.521.348
Finland
CHEOS OY
Tel: 358-9.8870.340
Fax: 358-9.8870.3410
Italy
NEWPORT/MICRO-CONTROLE
Tel: 39-2.924.55.18
Fax: 39-2.923.24.48
Portugal
MT BRANDAO
Tel: 351-2.83.02.709
Fax: 351-2.83.02.710
USA
NEWPORT CORPORATION
Tel: 714-863.3144
Fax: 714-253.1680
Germany
NEWPORT GMBH
Tel: 49-6151.3621.0
Fax: 49-6151.3621.52
Netherlands - Luxembourg
NEWPORT B.V.
Tel: 31-30.65.92111
Fax: 31-30.65.92120
Spain
INNOVA INSTRUMENTACION
Tel: 34-1.710.56.50
Fax: 34-1.710.56.51
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UZM-DS (03/98)