IOP PUBLISHING NANOTECHNOLOGY Nanotechnology 19 (2008) 455608 (7pp) doi:10.1088/0957-4484/19/45/455608 Growth and process conditions of aligned and patternable films of iron(III) oxide nanowires by thermal oxidation of iron P Hiralal1,5 , H E Unalan1 , K G U Wijayantha2 , A Kursumovic3, D Jefferson4, J L MacManus-Driscoll3 and G A J Amaratunga1 1 Electrical Engineering Division, Department of Engineering, University of Cambridge, 9 J J Thomson Avenue, Cambridge CB3 0FA, UK 2 Department of Chemistry, University of Loughborough, Loughborough LE11 3TU, UK 3 Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge CB2 3QZ, UK 4 Department of Chemistry, University of Cambridge, Lensfield Road, Cambridge CB2 1EW, UK E-mail: [email protected] Received 9 July 2008, in final form 10 September 2008 Published 9 October 2008 Online at stacks.iop.org/Nano/19/455608 Abstract A simple, catalyst-free growth method for vertically aligned, highly crystalline iron oxide (α -Fe2 O3 ) wires and needles is reported. Wires are grown by the thermal oxidation of iron foils. Growth properties are studied as a function of temperature, growth time and oxygen partial pressure. The size, morphology and density of the nanostructures can be controlled by varying growth temperature and time. Oxygen partial pressure shows no effect on the morphology of resulting nanostructures, although the oxide thickness increases with oxygen partial pressure. Additionally, by using sputtered iron films, the possibility of growth and patterning on a range of different substrates is demonstrated. Growth conditions can be adapted to less tolerant substrates by using lower temperatures and longer growth time. The results provide some insight into the mechanism of growth. (Some figures in this article are in colour only in the electronic version) In particular, the use of vertically aligned nanowires and nanotubes is currently being explored for field emission [2], photovoltaics [3], batteries [4], light-emitting diodes [5] and sensing [6] applications, amongst others. Hematite (α -Fe2 O3 ), an n-type semiconductor, has a bandgap of about 2.1 eV [7], is environmentally friendly, nontoxic (in bulk form), corrosion-resistant and low cost. The use of α -Fe2 O3 has been demonstrated as a photoanode for the photoassisted electrolysis of water in tandem cells [8], an active component of gas sensors [9], a photocatalyst [10], magnetic coating for data storage devices [11] and as electrodes in Li-ion batteries [4]. Lindgren et al showed that hematite nanorod films yielded an enhanced photoconversion efficiency as compared to thin films [12]. A range of methods exist for the fabrication of nanowire arrays. Growth can be achieved by using precursors from 1. Introduction A large number of quasi-one-dimensional (1D) semiconductor materials are currently under extensive investigation (ZnO, Si, GaN, In2 O3 and CuO, for instance) [1] on the promise of enhanced electronic and optical properties for future nanoscale electronics. 1D nanostructures provide not only a framework for enhancing devices by increasing surface area, but also a means by which to probe the fundamental quantum properties of semiconductors. An enhanced performance compared to their bulk counterparts has been shown in several cases. Even though complete control of positioning and orientation of individual wires may be some distance away, an ensemble of aligned nanowires of controlled size on a substrate is sufficient for the realization of certain electronic and photonic devices. 5 Author to whom any correspondence should be addressed. 0957-4484/08/455608+07$30.00 1 © 2008 IOP Publishing Ltd Printed in the UK Nanotechnology 19 (2008) 455608 P Hiralal et al the liquid phase (hydrothermal growth, electrodeposition), from the gas phase (chemical vapor deposition) and from the solid phase (thermal oxidation). In general, low temperature methods (liquid phase) result in lower quality wires, with lower aspect ratios. However, high temperature methods, such as chemical vapor deposition (CVD), usually use catalysts (normally Au) which may alter the properties of the wire and render them incompatible with current CMOS processes. There is also a limited number of substrates suited for the high temperatures required (∼600–1100 ◦ C). To the best of our knowledge, hematite nanowire growth from the gas phase has not been reported, and reports from the liquid phase have been limited. Growth from solid precursors, in which NWs are formed as a result of the oxidation or sulfurization of metals at high temperature, is less commonly explored, despite resulting in the first observation of artificial 1D crystal growth [13]. Reports on the growth of iron oxide ‘whiskers’ by thermal oxidation of iron are few, and most date back to the 1950s and 1960s [14]. It is believed that whiskers grow from the tip while reactants (metal) diffuse via the surface from the metal substrate. However, the exact mechanism of growth is far from clear. More recently, with the advent of nanotechnology, various groups have revisited the spontaneous growth of oxide NWs by the thermal oxidation of metallic substrates (Zn [15], Fe [16] and Cu [17]), although a detailed systematic study is lacking. In this work, a detailed parametric study of the growth of hematite nanowires and needles from the simple oxidation of iron under an oxygen atmosphere is reported. The effects of growth temperature, time and O2 partial pressure are presented. This approach leads to a dense array of α -Fe2 O3 wires with a very high aspect ratio growing directly on the iron substrate. Growth temperature can be tuned from 300–900 ◦ C, resulting in wire densities from ∼1.6 to 200 μm−2 . Wires are grown both from iron foils and from sputtered iron films deposited on various substrates, which is more versatile for device fabrication. The method is simple, has no foreign elements involved (e.g.catalysts), is patternable and very easily scalable. Table 1. Summary of growth parameters presented on iron foil. Temp. (◦ C) (time = 10 h, flow = 30 sccm, O2 = 1%) Time (h) (flow = 30 sccm, O2 = 1%, temp = 530 ◦ C) %O2 (flow = 30 sccm, time = 10 h, temp = 530 ◦ C) 175 300 450 620 1 4 10 1 15 30 45 60 100 system allowed to cool down to room temperature under argon. The resulting foils had a deep red color which varies with O2 partial pressure and temperature. Table 1 above summarizes the growth conditions tested. For the growth of hematite NWs onto different materials, iron was sputtered onto cleaned substrates using radiofrequency-magnetron sputtering at a power of 100 W until the desired thickness was achieved. Oxide growth on the sputtered films was then carried out in the same manner as above. A similar procedure was conducted for patterned growth, where the patterns were set photolithographically before sputtering. For the lower temperature range (∼300 ◦ C) it was possible to grow NWs by placing the sample on a hotplate, further demonstrating the simplicity of this method. 3. Results The morphology and size of the nanostructures was investigated by field emission scanning electron microscopy (FESEM) (Philips XL30, operated at 5 kV). Figure 1(a) shows a micrograph of a typical growth, at a substrate temperature of 620 ◦ C. Resulting nanostructures can be divided into two types, thin long nanowires with lengths ∼8–10 μm and diameters under 50 nm (sometimes below 10 nm) and needle-shaped elongated platelets which are wider at the base than the tip. High resolution transmission electron microscopy studies (HRTEM) (JEOL 3011 running at 300 kV) confirmed the hematite phase. The thinner wires (∼<50 nm) and not the needles are shown to be a bicrystal, split in the middle with a twin plane in the middle along the entire longitudinal axis (figure 1(b)). A similar bicrystalline structure has been observed before for the growth of CuO wires by thermal oxidation [17]. Annealing twins are known to form as a consequence of growth accidents during recrystallization of deformed cubic close packed metals. Peak positions of the Raman spectrum in figure 1(c) (Renishaw In vivo Raman microscope with a laser line of 785 nm) match perfectly with previous reports of hematite [7]. X-ray diffraction (XRD) patterns were taken with a Philips PW1730 diffractometer (Cu Kα radiation 1.540 60 Å). Figure 1(d) shows the resulting pattern. The peaks match the hematite phase ( R 3̄c group), which crystallizes in a rhombohedral crystal structure with lattice parameters a = b = 5.03 Å and c = 13.73 Å. A strong preferential orientation is observed in the (1 1 0) direction, in agreement with other reports of thermal oxidation of iron [16]. The (1 1 0) 2. Growth of wires The system for growth consists of a 1 inch (approx. 2.54 cm) diameter ceramic tube furnace with a temperature controller (carbolite-MTF12/38B), a gas flow control system with oxygen and argon on the input and a bubbler at the output. Iron foils (Advent, 0.25 mm thick, temper annealed) were cut into flat ∼5 × 5 mm2 , degreased and cleaned by ultrasonication in acetone and isopropanol for 15 min. The foil was placed in the tube furnace on a ceramic boat at 6 cm from the furnace edge. NW growth was possible in a fairly large window of temperature (300–700 ◦ C) and gas conditions from air to 1% O2 . The furnace was flushed with 150 sccm of Ar for 10 min to remove the air already present in the tube. The flow was then adjusted to the desired setting, typically with a total flow (argon + oxygen) of 50 sccm, and the furnace heated to the desired temperature at a rate of 1600 ◦ C h−1 . Once the growth was complete, the oxygen supply was switched off and the 2 Nanotechnology 19 (2008) 455608 P Hiralal et al Figure 1. Structural and morphological characteristics of hematite NWs grown at 620 ◦ C. (a) SEM and (b) TEM images where the bicrystalline nature and amorphous edges can be observed. (c) Raman spectrum and (d) XRD of the same sample. The phase is confirmed to be hematite and there is a strong preferential orientation in the (1 1 0) direction. peak for Fe2 O3 matches with the (3 1 1) peak for Fe3 O4 . However, any ambiguity is cleared by the rest of the peaks and the Raman spectrum. Some peaks from the iron substrate are also present. be used as a first-order estimation of oxidation depth. Both straight wires and tapered needles occur at all temperatures, with the largest fraction of NWs occurring at around 400– 500 ◦ C. At 620 ◦ C the fraction of needles with a large base increases considerably. 3.1. The effect of temperature 3.2. The effect of O2 partial pressure Figure 2 shows the effect of temperature on the growth of NWs. A series of samples were prepared, and heated for 10 h at 30 sccm flow of Ar with 1% O2 . Substrate temperature was set to 175, 300, 450 and 620 ◦ C. Oxidation occurs readily at 175 ◦ C, but nanostructured features become noticeable only at temperatures above 300 ◦ C. SEM micrographs also show the strong effect of temperature on nanowire density and size distribution. The histograms in figure 2 show the size distributions of the nanowires. The diameter of the needles is measured at half-height. The modal size increases from 25 nm at 300 ◦ C to 90 nm at 620 ◦ C. Both the average size and density of the NWs increased with temperature. This is further supported by normalized XRD spectra in the insets. The relative sizes of the hematite peaks with respect to the iron background increase, owing to the greater degree of oxidation with temperature. Note that at 620 ◦ C all the hematite peaks become more intense. This is particularly so for the (1 1 0) peak, and hence the remaining peaks appear smaller as a result of normalization. In fact, given that the relative increase in intensity of the (1 1 0) peak is greater than all others, the relative size of the (1 1 0) with respect to the other peaks can A set of samples grown under different O2 partial pressures, at a temperature of 530 ◦ C, is shown in figure 3. A growth time of 10 h and a flow rate of 35 sccm was used for all samples. SEM micrographs show no obvious difference in morphology and size. Size distribution plots show an approximately constant distribution over the whole PO2 range, with a modal size of 15– 20 nm. However, the XRD patterns do show a varying degree of oxidation up to 45% O2 , beyond which the difference is negligible. Similar to the temperature study, the relative size of the (1 1 0) hematite peak and the first Fe peak provides a qualitative measure of the degree of oxidation as a result of the penetration depth of x-rays. O2 partial pressure provides another route to control the degree of oxidation. 3.3. The effect of growth time Figure 4 shows the effect of growth time on the nanowires. This set of samples was grown at 530 ◦ C and 1% oxygen at 30 sccm flow. In this case, instead of the furnace cooling naturally, the samples were removed from the furnace at the end of the growth period, i.e. at 1, 4 and 10 h. Growth starts 3 Nanotechnology 19 (2008) 455608 P Hiralal et al Figure 2. XRD patterns, SEM images and size distribution histograms showing the effect of temperature on growth. An increase in density and size of nanowires is observed with increasing temperature. at an early stage. After 1 h, an array of triangular needles can be observed, between 0.5 and 1 μm in length, presumably nucleated on surface defects. As time progresses, the needles appear to evolve to form thin, long wires, ∼5–15 μm in length and a few nm in width, often keeping a needle-shaped base. The FWHM of the (1 1 0) peak decreases from 0.236◦ at 1 h to 0.197◦ at 10 h, indicating either an increase in crystallite size or an improvement of crystallinity. 3.4. Growth and patterning of NWs on different substrates So far, we have demonstrated that hematite wires can be grown from iron foils at temperatures as low as ∼300 ◦ C. However, the applications of this are fairly limited unless the wires can be grown directly on other functional substrates in a controlled fashion. In fact, by depositing a thin film of iron by rf sputtering, and then oxidizing that film, it was possible to grow wires on a range of substrates such as glass, Si, SiO2 4 Nanotechnology 19 (2008) 455608 P Hiralal et al Fe (a) 15% Fe2O3 (1 1 0) 500 nm (b) 30% 500 nm a.u. (c) 45% 500 nm (d) 60% Figure 4. SEM surface micrographs of NWs grown for different times. Inset shows side view. Scale bar is 2 μm. The samples were grown at 530 ◦ C under 1% O2 . 500 nm 300 ◦ C influence its conductivity. For more tolerant substrates such as Si, differences in thermal expansion coefficients lead to stresses which can crack the film. Figure 5(a) shows growth on an SiO2 substrate at 325 ◦ C in air. At this low temperature, growth was carried out for 24 h, due to the slower oxidation rate. The process can be implemented on a simple hotplate in air as well as in a furnace. It is desirable to pattern the sputtered iron film not only to give growth on selected locations but also to reduce thermal stresses in the film for higher temperature growth. Figure 5(b) shows a pattern of lines where wires have been grown on ITO. Patterning was done by using a standard photolithographic process. In brief, AZ5214 photoresist was spin-coated and baked. After exposure to the desired pattern, the film was developed and then the iron film sputtered. After sputtering, lift-off was conducted in acetone, leaving an iron film with the desired pattern. This film was subsequently oxidized to produce the iron oxide nanowires. The possibility of growth on different substrates opens up possibilities for different applications such as photoelectrochemical cells, field emission devices, etc. The generalization (e) 100% 500 nm 20 30 40 50 60 70 2θ Figure 3. XRD patterns and SEM images showing the effect of %O2 concentration on nanowire growth. and indium–tin oxide (ITO). It was found that a minimum iron film thickness of around 400 nm is required for the oxidation to result in nanowire growth. On these substrates, growth at as low as possible a temperature is desirable for several reasons. On ITO, for instance, temperatures much above 5 Nanotechnology 19 (2008) 455608 P Hiralal et al Figure 5. SEM micrographs of growth from thin films sputtered on (a) SiO2 and (b) patterned on ITO. of this process for different oxides also opens the possibility of integration into a CMOS process as gold is not involved. Hematite is a rarely used semiconductor due to poor carrier mobility. However, it should be noted that mobility of hematite is strongly anisotropic and has been reported to be up to four orders of magnitude larger in the (1 1 0) crystal direction than in others [18]. 4. Discussion and conclusions Results from a parametric study conducted on the thermal oxidation of iron to produce hematite nanowires and nanoneedles are reported. Variation in wire crystallinity and morphology were studied as a function of growth conditions. The roles of temperature, O2 partial pressure and growth time were clarified. The possibility of starting with sputtered iron and growing hematite nanowires on a wide range of substrates which do not tolerate high temperatures was demonstrated, for example, growth on ITO at as low as 325 ◦ C. The potential of this simple and general process for the growth of oxide nanowires and the degree of control that can be achieved is shown. The mechanism for growth cannot be vapor–liquid–solid (VLS) or vapor–solid (VS) as the source of the iron is the substrate itself. Iron has a melting point of 1538 ◦ C [19], so it is unlikely that the iron melts to form the wire. It is believed that the tip growth occurs by iron diffusion to the tip, possibly via surface diffusion, and reaction with the O2 from the gas phase. Some evidence for this is present in the growth at 618 ◦ C, where bulbs can be observed on the tips of the wires (see figure 6). The occurrence of these bulbs is more obvious the higher the growth temperature. A possible explanation for the bulb-shaped tip can be obtained from evidence obtained by Wang et al [20], who observed a higher Fe to O ratio in these bulbs than the rest of the wire. This may be a mark of the end of growth due to unbalanced mixing. Oxidation rate is expected to decrease during cooling, resulting in a less oxidized part at the active growth point. More so, this would be strong evidence for tip growth. Regarding the mechanism for the iron to reach the tip, we hereby propose a model similar to the quasi-liquid layer on the surface of ice, where even at temperatures well below Figure 6. Schematic of the mechanism of growth, where Fe is supplied from the substrate and O2 from the surroundings. Insets show rhombohedral tip and amorphous edge of the wires, which provide some hints on the growth mechanism. 0 ◦ C, a thin surface layer of water is always present [21]. In curved surfaces, the energy of dissociation may be lower than that in the bulk, allowing for more rapid diffusion. Increasing temperature would hence increase the mobility of the surface layer and allow for faster growth. This hypothesis is further supported by the fact that many wires are wider at the base than the tip. However, the bicrystalline nature of the wires and the observation that most form at the tip of small needle-shaped blades opens further questions on the growth mechanism, which seems to be general for many metal oxides. The thermal oxidation mechanism of metals has been studied a few times in the last 40–50 years. It is known that, under typical conditions of NW growth a layered oxide scale is usually formed on the surface of iron, consisting of hematite as an outer layer, magnetite as an intermediate layer and wustite as a layer in direct contact with the iron substrate. A model proposed by Gulbransen and coworkers [22] assumes that an internal diffusion of iron atoms and/or ions along axial screw dislocations or twins combined with surface diffusion in grain boundaries of magnetite are responsible for the growth. Although the issue of the mode of transportation of material to 6 Nanotechnology 19 (2008) 455608 P Hiralal et al the growing site is important, a bigger insight into the growth mechanism may be provided by clarifying the nature of the sites of growth (the positions at which the wires grow) and that of the growing sites (the action occurring at the tip from where the wire grows). Unfortunately no data is available concerning these, so the growth mechanism is speculative. 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