United States Patent O’ lCC 3,268,783 Patented August 23, 1956 1 2 3,268,783 addition of the additive are set forth below Equation A Examples of this manner of controlling valence by the CAPACITOR COMPRISING AN N-TYPE SEMICON representing the situation where the alkaline earth ma DUCTOR METALLIC UXIDE AND A LAYER 0F terial E is the host element and Equation B representing COMPENSATED MATERIAL 5 the situation where the metal material is the host element. ()samu Saburi, Kyoto-fir, Japan, assigner to Murata Manufacturing Co., Ltd., Otokuni-gun, Kyoto-fa, Japan, a corporation of Japan Filed Oct. 5, 1%5, Ser. No. 493,008 5 Claims. (Cl. 317-237) This application is a continuation-in-part of my ap plication Serial No. 123,054, ?led July 10, 1961 which has become abandoned. This invention relates to ceramic capacitors utilizing dielectric ?lms formed on controlled valency type semi Where the ceramic material is barium titanate and the additive materials for valence control are lanthanum or tantalum, Equations A and B can be written as follows: conductor metal oxides by a method in which the con trolled valence is compensated by the addition of ‘an ele ment thereto so as to change the semiconductor to a dielectric, and to the methods of manufacturing the said capacitors. I The invention will be understood more fully by refer ence to the following speci?cation and claims, taken to gether with the accompanying drawings, in which: 20 The Equations A and A’ illustrate the case where some sites of the alkaline earth material, e.g. the barium ions in barium titanate, are occupied by the ions of the addi— tive A having a valance a higher than that of the host ions, so that in the valence controlled material, which can has one surface which has a valence compensated layer 25 be represented by the right hand side of the equations, a part of the metal, e.g. titanium ions, of valence four thereon; change to those of valence three to maintain the electric FIG. 2 is a view similar to FIG. 1 of a capacitor hav FIG. 1 is a cross sectional view of a capacitor which ing opposite surfaces which have valence compensated layers thereon; FIG. 3 is a sectional view of a speci?c form of a ca pacitor body having a valence compensated layer on the outer surface thereof; and FIG. 4 is a schematic view, on a greatly enlarged scale, of a part of the capacitor of FIG. 3. It is known that the resistivities of barium-titanates which are usually higher than 1011 ohm-cm. can be greatly reduced by introducing proper additives. This phenom enon is understood to be caused because the additives cause titanium having a valence of three to be produced neutrality of the crystals. The Equations B and B’ illus trate the case where some sites of the metal material ions, 30 e.g. the titanium ions in barium titanate, are occupied by the ions of the additive B having a valence 1) higher than that of the host ions, so that the valence controlled ma terial, which can be represented by the right hand side of the equations, a part of the metal, e.g. titanium ions, of valence four change to those of valence three to maintain the electric neutrality of the crystals. Each of three valent metal material, e.g. titanium, ions thus produced consists of a trapped electron and a four valent metal material, e.g. titanium, ion. The trapped from the titanium ions in the titanate. Hence, the semi 40 electrons can easily move to other metal material, e.g. titanium, ions when excited ‘with a low voltage electric conductive barium titanates produced by the above treat ?eld. The controlled valency type ceramic materials are ment are called controlled valency semiconductive bar thus semiconductive due to the available electrons thus ium titanates. produced. The production of semiconductive ceramic material It has now been discovered that this semiconductive by this type of valency control can be carried out with 45 material can be made highly dielectric by compensating all the members of the family of materials which can be for the controlled valence by the addition of a com generically designated E2+M4+O32*, one of which is bar pensating material. ium titanate, where E is an alkaline earth element ma As the additives for compensating the controlled valence terial taken from the group consisting of barium, magne sium, calcium, strontium, lead ‘and mixtures thereof, and there can be used at least one material C having a M is a metal element from the group consisting of tita valence c less than the valence of the alkaline earth nium, tin, zirconium and solid solutions consisting of at least two of the above mentioned substances, and in sodium, potassium, copper, rubidium, silver, cesium, gold, material E .and taken from the group consisting of which 0 is oxygen. and mixtures thereof or at least one material D having As the additives for controlling valence there can be 55 a valence a’ less than the valence of the metal material and taken from the group consisting of aluminum, scan used at least one material A having a valence a greater dium, chromium, molybdenum, manganese, iron, cobalt, than 2 and an ionic radius close to that of the material nickel, magnesium, and mixtures thereof. E and taken from the group consisting of yttrium, actini Because there are two types of valence controlled um, thorium, antimony, bismuth, the members of the rare earth elements, and mixtures thereof, or at least one 60 material, depending on which of the parts of the original ceramic material acts as the host element, there are four material B having a valence b greater than'4 and an ionic possible ways in which compensation of the semicon radius close to that of the metal material M and taken ductive valence controlled material can be carried out. from the group consisting of vanadium, niobium, tanta Where the valence compensating additive has a valence lum, selenium, tellurium, tungsten and mixtures thereof. 65 less than the alkaline earth material, it can be substituted The total quantity of the additive is from 0.01 atomic in the alkaline earth material E, which is the host element percent to 0.5 atomic percent of the host material. The therefor, in the material which has either a valence con additive A is substituted in the alkaline earth material E, trol additive substituted in the alkaline earth material and in this case the material E is considered the host ma E or in ‘the metal material M. Equations C and D rep terial, and the additive B is substituted in the metal ma 70 resent these situations, and can be written as follows: terial, and in such case the metal material M is considered the host material. 3,268,783 3 titanates, when a compound containing at least one of the above mentioned valence compensating elements is placed on the surface of the semiconductive barium tita nates by an appropriate method, such as coating, plating, Where the ceramic material is barium titanate and the additive materials for valence control are lanthanum or vaporizing, spraying, or electrolytically, and then the semi tantalum, and the valence compensating additive is conductive body is ?red at a temperature of from 700° sodium, Equations C and D can be written as follows: C. to 1300° C. FIG. 1 shows a semiconductive plate 3 which has one surface thereof treated by the above method to form a 10 layer 2 of valence compensated material, and FIG. 2 shows a semiconductive plate 3 which ‘has both surfaces treated to form valence compensated layers 2. Elec trodes 1, 4 and 5 in FIGS. 1 and 2 are applied by conven tional methods of ?ring, brushing, sputtering, or spray Where the valence compensating additive has a valence less than the metal material, it can be substituted in the metal material M, which is the host element therefor, in 15 mg. If the resisitivity of the semiconductive body is suffi the material which has either a valence control additive ciently low, the device shown in FIG. 1 works as a capaci substituted in the alkaline earth material E or in the metal tor consisting of a thin ceramic ?lm of high dielectric con material M. Equations E and F represent these situ stant. And the device shown in FIG. 2 works as two The thickness of the thin ?lm of compensated barium titanate can be con ations, and can be Written as follows: 20 capacitors which are series connected. trolled by controlling the quantity of the valence com pensating compound applied to the surface of the body 25 Where the ceramic material is barium titanate and the 2,000. This capacity is twenty times that of conventional additive materials for valence control are ‘lanthanum or tantalum, and the valence compensating additive is alum inum, Equations E and F can be written as follows: when the valence compensating method is carried out. Capacitors whose capacity is more than 0.15 micro farad/cm.2 can be produced when the thickness of the ?lm is 10 microns and the dielectric constant of the ?lm is ceramic capacitors. 30 Much higher capacity per unit volume is obtainable with the form of capacitor shown in FIG. 3. In FIG. 3, the element 13 denotes a porous semiconductive titanate which is treated by the valence compensation method of the present invention; 12 denotes an inner lead which is 35 ohmicly connected to the porous semiconductive titanate, The foregoing equations show that the controlled va lence material is compensated when ions of a material and 14 denotes the outer can which forms an outer elec trode connected to the treated surface of the semiconduc tive barium titanate. having a valence lower than either the alkaline earth ma A detail of FIG. 3 is shown schematically in FIG. 4 terial, such as barium, are substituted for a part of the 40 on an enlarged scale. alkaline earth material, or when ions of a material hav The porous semiconductive material has numerous ing a valence lower than that of the metal material, such bubbles 18 like a sponge. Each bubble, which is called as titanium, are substituted for ‘a part of the metal ma “a cell” has a wall with a certain area. In the present terial. When the materials have had their controlled valence compensated, they turn from semiconductors to‘ insulating dielectrics because they no longer have available free elec embodiment, the wall surface is treated according to the above described compensation method, and then, conduc tive material 17 such as silver paint is impregnated to form an electrode which covers and connects the wall surfaces. trons. It follows that in order to achieve this state the The semiconducting barium titanate body forms the amount of valence compensating additive material C or opposing electrode as shown schematically in FIG. 4, D which is added must correspond to the amount of va 50 when the wall surface of each cell is compensated in lence control additive material A or B which has been valence, there is formed a thin dielectric ?lm 15. A added to make the material semiconductive in the ?rst capacity of 50 microfarads can be achieved with a porous place. For example, when the valence of material A is three and "the valence of material C is one in Equation C, the amount of valence compensation additive is the 55 same as the amount of valence control additive; when the valence of material A is four and the valence of ma terial C is one in Equation C, the amount of valence com semiconducting barium titanate block of 1 cm.3 treated according to the present invention. I claim: 1. A capacitor, comprising a body of controlled valence n-type metallic oxide semiconductor of the general formula pensation additive is twice of the amount of valence E2+M4+O32_ control additive; when the valence of material A is three 60 where E is an alkaline earth material taken from the and the valence of material D is two in Equation E, the group consisting of barium, magnesium, calcium, stron amount of valence compensation additive is one half of tium and lead, and mixtures thereof, M is a metal material the ‘amount of valence control additive. As the amount taken from the group consisting of titanium, tin, and zir of valence control additive ranges from 0.01 atomic per cent to 0.5 atomic percent, the amount of valence com 65 conium, and mixtures thereof, and O is oxygen, one of the positive valence elements of said semiconductor being pensation additive thus ranges from 0.005 atomic percent a host element and having therein a valence controlling to 1.0 atomic percent. additive material which when the alkaline earth material The electric properties of the compensated material are E is the host element is taken from the group consisting similar to those of the usual barium titanate ceramics, as they have high dielectric strength and a dielectric constant 70 of yttrium, 'actinium, thorium, antimony and bismuth, the rare earth elements, and mixtures thereof, and which as high as one to ten thousand. when the metal material M is the host element is taken A practical use of this valence compensated material from the group consisting of vanadium, niobium, an is in the making of capacitors. A thin insulating layer of, for example, valence compensated, barium titanate is timony, tantalum, bismuth, selenium, tellurium, tungsten, formed on a valence controlled semiconductive barium 75 and mixtures thereof, for making said semiconductor semi 5 3,268,783 6 conductive, said additive material being present in an material E and is a material taken from the group con amount of x atomic percent of the host element, x having a value of from 0.01 to 0.5, at least one surface layer of sisting of sodium, potassium, copper, rubidium, silver, cesium, gold, and mixtures thereof, and an electrode on said body having therein x atomic percent of a compensat~ ing material which when the alkaline earth material E is said one surface layer and a further electrode on a sur face layer of said body which is spaced from said one the host element therefor is taken from the group consist surface layer. ing of sodium, potassium, copper, rubidium, silver, cesium, 4. A capacitor, comprising a body of controlled valence n-type metallic oxide semiconductor of the general formula gold, and mixtures thereof, and which when the metal material M is the host element therefor is taken from the group consisting of aluminum, scandium, chromium, molybdenum, manganese, iron, cobalt, nickel, magnesium, 10 where E is an alkaline earth material taken from the and mixtures thereof, which compensating material makes the surface layer highly resistive by compensating the group consisting of barium, magnesium, calcium, stron tium and lead, and mixtures thereof, M (each occurrence) semiconductive effect of said additive material, and an electrode on said one surface layer and a further elec is a metal material taken from the group consisting of trode on a surface layer of said body which’ is spaced from said one surface layer. 2. A capacitor, comprising a body of controlled valence n-type metallic oxide semiconductor of the general titanium, tin, and zirconium, and mixtures thereof, A is formula a material having a valence a greater than 2 and an ionic radius close to that of the alkaline earth material E, and is taken from the group consisting of yttrium, actinium, 20 thorium, antimony, bismuth, the members of rare earth elements, and mixtures thereof, and the material A being present in an amount of x atomic percent of element E and x lies between 0.01 and 0.5, and O is oxygen, at least where E is an alkaline earth material taken from the one surface layer of said body being a highly dielectric group consisting of barium, magnesium, calcium, stron tium and lead, and mixtures thereof, M (each occurrence) 25 material having a composition of the general formula is a metal material taken from the group consisting of titanium, tin, and zirconium, and mixtures thereof, A is a material having a valence a greater than 2 and an where E, A, M and O are the same materials as in the ionic radius close to that of the alkaline earth material E, ?rst-mentioned general formula and D is a material hav and is taken from the group consisting of yttrium, actin 30 ing a valence d lower than the valence of the metal ium, thorium, antimony, bismuth, the members of rare earth elements, and mixtures thereof, and the material A material M and is a material taken from the group con being present in an amount of x atomic percent of ele manganese, iron, cobalt, nickel, magnesium, and mixtures sisting of aluminum, scandium, chromium, molybdenum, ment E and x lies between 0.01 and 0.5, and O is oxygen, , thereof, and an electrode on said one surface layer and a at least one surface layer of said body being a highly di 35 further electrode on a surface layer of said body which electric material having a composition of the general formula is spaced from said one surface layer. 5. A capacitor, comprising a body of controlled valence n-type metallic oxide semiconductor of the general formula where E, A, M and O are the same materials as in the ?rst mentioned general formula and C is a material hav 40 ing a valence lower than the valence of the alkaline earth where E is an alkaline earth material taken from the group material E and is a material taken from the group con consisting of barium, magnesium, calcium, strontium and sisting of sodium, potassium, copper, rubidium, silver, lead, and mixtures thereof, M is a metal material taken from the group consisting of titanium, tin, and zirconium, cesium, gold, and mixtures thereof, and an electrode on said one surface layer and a further electrode on a sur 45 and mixtures thereof, B is a material having a valence b face layer of said body which is spaced from said one surface layer. greater than 4 and an ionic radius close to that of the metal M, and is taken from the group consisting of vana 3. A capacitor, comprising a body of controlled valence n-type metallic oxide semiconductor of the general formula tellurium, tungsten, and mixtures thereof, and the material dium, niobium, antimony, tantalum, bismuth, selenium, 50 B being present in an amount of x atomic percent of ele where E is an alkaline earth material taken from the group ment M and x lies between 0.01 and 0.5, and O is oxygen, at least one surface layer of said body being a highly di consisting of barium, magnesium, calcium, strontium and electric material having a composition of the general lead,, and mixtures thereof, M (each occurrence) is a metal material taken from the group consisting of 55 titanium, tin, and zirconium, and mixtures thereof, B is where E, M, B and O are the same materials as in the ?rst mentioned general formula and D is a material having a valence d lower than the valence of the metal material M group consisting of vanadium, niobium, antimony, tanta lum, bismuth, selenium, tellurium, tungsten, and mixtures 60 and is a material taken from the group consisting of alu thereof, and the material B being present in an amount of minum, scandium, chromium, molybdenum, manganese, x atomic percent of element M and x lies between 0.01 iron, cobalt, nickel, magnesium, and mixtures thereof, and an electrode on said one surface layer and a further elec and 0.5, and O is oxygen, at least one surface layer of trode on a surface layer of said body which is spaced from said body being a highly dielectric material having a composition of the general formula ' 65 said one surface layer. a material having a valence b greater than 4 and an ionic radius close to that of the metal M, and is taken from the E1-(b-4)x2+C(b-4)x1+M1-x4+Bxb+032_ No references cited. where E, M, B and O are the same materials as in the JOHN W. HUCKERT, Primary Examiner. ?rst-mentioned general formula and C is a material hav ing a valence lower than the valence of the alkaline earth 70 J. D. KALLAM, Assistant Examiner.
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