Surface structure of f selenium-treated GaAs (001) studied by yf field ionon Sur f aces t r uct ur eo sel eni um・ t r eat edG aAs( 001 ) St udi edb i el di scanning tunneling microscopy Scannmgt unnel i ngmi cr oscopy H.HShigekawa .Shi gek awa Institute of Materials Science, University of・o Tsukuba, Tsukuba Science City 305,0 Japan l n s t i t ut eo fMat e 7 ・ i al sSc i e nc e ,t T ni v e r s i o fT s ukub a ,Ts ukub aSc i e nc eCE ' t y3 5 ,Ja pan .Hashi zume T.T Hashizume Institute for Materiais Research, Tohoku University, Katahira, Aoba-ku, Sendai 980, Japan L n s t z . l ut efo rMat e r E ' al sRe s e ar c h ,To ho kut T t u ' u e 7 Ti t y ,Kat ahi f l a ,Ao b aku ,Se nda i980 ,Ja pan H.HOigawa .Oi gawa Institute of Materials Science, University of fT Tsukuba, Tsukuba Science City 305, Japan L n s t i t ut eo fMat e r z ' al sSc L ' e nc e ,t T ni u e f l S i t yo s ukub a ,Ts ukub aS c i e nc eCi O , 30 5 ,J a pan K.KMotai .Mot ai Institute for Materials Research, Tohoku University, Katahira, Aoba-ku, Sendai 980, Japan L n s t i t ut ef o rMat e r i al sRe s e ar c h ,To ho kut T ni v e t T i t y ,Kat ahi r a ,Ao baku ,Se nda i980 ,J a pan Y.YMera .Mer a Department ofto Applied Physics, The University of fT Tokyo, Hongo, Bunkyo-ku, Tokyo Japan De par t me n fAppI L ' e dP h ys L ' cs ,Th et r nE ' U e Y S i t yo o k yo ,Ho n go ,Bunk yo ku ,To k y113, oII 3 ,Ja pan .Nanni chj Y.YNannichi Institute of Materials Science, University of fT Tsukuba, Tsukuba Science City 305,0 Japan hs t i t ut eo fMat e r i al sSc i e nc e ,Uni z J e r s i t yo s ukub a ,Ts ukub aSc i e nc eCi t y3 5 ,Ja pan T.T Sakurai .Sakur ai Institute for Materials Research, Tohoku University, Aoba-ku, Sendai 980, Japan l T n s t L ' t ut efo rMat e 7 ・ i al sRe s e ar c h ,To ho kuU ni u e r s i OKatahira, T ,Kat ahi r a ,Ao b aku ,Se nda i980 ,Ja pan (Received 7 June 1991; accepted for o publication 10 0S September 1991) ( Re c e i v e d7J u ne1 991 ;a c c e pt e df rpubl i c a t i on1 e pt e mbe r1 9 91 ) For aras selenium-treated GaAsAs (001) surface followed by yh heate treatment at -530 3 “C, have ( 001 ) s ur f a c ef o1 l owe db a tt r e a t me n ta t-5 0c cwe ,we ha ve Fo e l e iumm t r e a t e dGa observed using fielde ionons scanning tunneling microscopy ordered arrays with regular o bs e r v e du s i ng丘 l di c a ml ngt un ne l i ngmi c r os c opyo r de r e da r r a ys wi t hr e gul a r intervals of 4Xperiodicity in nt theheL [ilO] direction ( 1.6 nm)m) to t linei upupi in nt thehel [l lo] direction. i nt e r v a l so f4×pe iodi r c i t yi TI O 】di r e c t i on (1 . 6n ol ne 11 0 ]di r e c t i on. These ordered arrays are in good agreement with the 4X 1 structure previously The s eor de r e da r r a ysa r eh gooda g r e e me ntwi t t lt he4×1s t r uc t ur epr e v i ous l y observed by yo other methods. In a closer view, 4~structure was found to ob be e formed by y o bs e r v e db t he r me t hods .I nac l os e r v i e wthe ,t he 4×s t uc r t ur e wa sf oundt f or me db closely placed double rows. c l os e l ypl a c e ddoubl er ows . Formation of surface/interface states within thehe band arer rather complex compared to ot thehes structuresFor ma t i ono fs ur f a c e /i nt e r f a c e s t a t e s wi hi t nt ba nd mentally me nt a l l ya er a t he rc ompl e xc ompa r e dt t r uc t ur e s for o the theoretical calculations; the interfaces are notnot gaps-of compound semiconductors hasa been a persistent us e df rt he t he or e t i c l a c a l c ul a t i ons ;t he i nt e r f a c e sa r e g a psof c ompounds e mi c onduc t or sh sb e e nap e r s i s t e nt used and important problem in i developing ana advanced technolbut ut involved at a thet a br upt ,b i nv ol v e da afew f e wlayers l a y e r s t heinterface i nt e r f a c e a nd i mpor t a n tpr obl e m n de v e l opi ng na dv a nc e dt e c hnol - abrupt, 5-‘ 75 ogy in semiconductors. Thus, passivation of compound In order to pinpoint the models y・ 5 , 1 1 71 no r de rt op l nPOi n tt hstructural es t uc r t ur a lmode l s bounda r og y帆 s e mi c onduc t o r s .Thus ,pa s s i v a t i onorc ompo und boundary.5*‘ to ou understand thehe passivation mechanism, it i isti impor semiconductor surfaces has been studied extensively.“ ’y・ Rel ・ 2Re - and s e mi c onduc t o rs ur f a c e sha sbe e ns t udi e de x t e ns i v e l a ndt nde r s t a ndt pa s s i v a t i onme c ha ni s m, si mpor . . and urgently needed to oc characterize thei structure of f cently, sulfur and selenium treatments have been attracting c e nt l y , s ul f u ra nds e l e ni umt r e a t me nt sha v ebe e na t t r a c t ng tant i t a nt a ndu r g e nt l yn e e de dt ha r a c t e r i z et l eS t r uc t ur eO c ons i de r a bl ea t t e nt i onb e ca us eo ft he i rbe ne 丘c i a le qe c t son thet terminal layers on an na atomic scale. considerable attention because of their beneficial effects on he t e r mi na ll a ye r sona t omi c s c a l e . improving the electronic properties of compound semiconIn this letter, we report the surface structure of f Se-; i mpr ov mgt hee l e c t r oni cpr ope r t i e sorc ompounds e mi c onI nt hi sl e t t e r ,wer e por tt hes ur f a c es t uc r t ur eo Se j treated GaAs( 001) observed by a field ion scanning tunductor surfaces.3-9 Understanding the passivation mechaduc t ors ur f a c e s ・ 3 9Unde r s t a ndi ngt hepa s s i v a t i onme c ha - t r e a t e dGa As ( 001 )ob s e r ve dbya丘e l di ons c a nni ngt un・ ・ microscope (FI-STM) .I8. nism employed by yt those materials is very important from ni s m e mpl oy e db hos e ma t e ia r l si sv e r yI mpor t a n tf r om neling ne l i ngmi c r os c ope( FI STM) l S GaAS (001) surfaces, oriented to ow within l/2” of thet both fundamental and practical points of view. ur f a c e s ,or i e nt e dt i t hi n 1 /2 oof hC l GaAS( 001)s bot hf unda me nt a la ndp r a c t i c a lpoi nt so fv ie w. l]ol direction andndS Si doped at -t-1 1 X ×1 lOI*01 cm - s, were pre.. The surface/interface gap states have been considered The s ur f a c e /i nt e r f a c e ga ps t a t e sha v e be e nc ons i de r e d [00l o ]di r e c t i ona idope da 8c m 13 ,we r epr e ・ to t beb caused byby thet of surface/interface defects.’ by yt thermal cleaning. Selenium was evaporated ontont o ec a us e d hformation ef or ma t i ono fs ur f a c e /i nt e r f a c ede f e c t s . I pared pa r e db he r ma l c l e nl a ng .Se l e n i um wa se v a por a t e do o GaAsA surface using a Knudsen celle with a Se e However, recently, Feenstra et al. showed byby scanning l y ,Fe e ns t r ae tal .s howe d s c a nni ntungt un- thet Howe v e r , r e c e nt heGa s(001). ( 001 ) S ur f a c eu s i ngaKn uds e nc l lwi t haS ' of -f∼1 1 X 汰1 10 -06-Torr. The thicknesses of the Se neling spectroscopy on nme metal/GaAs that, for cerne l i ngs pe c t r os c opyo t a l /Ga ssurfaces A s ur f a c e st ha t ,f o rc e r - backpressure 6To r r ・ Th et hi c kne s s e so ft h eSc ; ba c kpr e s s ur eo tain metals such as sAu Au, the metal-GaAs bonding states thus deposited weree estimated to ob be e1 100-300 nm.m.t a i nme t a l ss uc ha ,t heme t a l -Ga Asb ondi ngs t a t e s films 氏l ms t hu sde pos i t e dw r e e s t i ma t e dt 00 -3 00n For theheo observation by yt thel STM, thet samples weree themselves arer responsible for b∫t theheg gapa states rather than t he ms e l ve sa er e s pons i bl ef ps t a t e sr a t he rt ha n Fort bs e r v a t i onb l eS TM, hes a mpl esw r e from preparation chamber to o thet STM defects.*@-i2 Therefore, in n such cases, theheme metal-GaAs de f e c t s . 1 0 1 2T he r e f or e ,i s uc h c a s e s ,t t a l 」ユa s transferred A t r a ns f e r r e d f r omthet hep r e pa r a t i on c ha mbe rt heS TM bonds at tt thehei interfaces must s be er replaced by ys some other through air.ir Heat treatments weree given in nt theh: bo ndsa nt e r f a c e smu tb e pl a c e db omeo t he r chamber c ha mbe rt hr oug ha ・He a t t r e a t me nt sw r eg l V e ni t structures in n addition to t thehef formation of ort theheo ordered s t r uc t ur e si a ddi t i on ot わr ma t i on r de r e d STM chamber, the base pressure of which wasa -4X lo- 0-l ‘I l STM c ha mbe r , t h eba s epr e s s ur eo rwhi c hw s -4×1 surface/interface without defects. Since thet electronic Tungsten tips were prepared byby electrochemical etchs ur f a c e /i nt e r f a c e wi t houtd e f e c t s .S nc i e he e l e c t r oni c Torr. Tor r . Tungs t e n t i p swe r epr e pa r e d e l e c t r oc he mi c a le t c h・ ・ properties of the Au-GaAs interface are improved by the ing, and the surface condition of the tips was characterized ng ,a ndt hes ur f a c ec ondi t i onoft het i pswa sc ha r a c t e iz r e d pr ope r t i e soft heAu -Ga s i A nt e r f a c ea r ei mpr ov e dbyt he l manipulated byby means of fa a field ioni microscope S/Se treatments,4’ 7, thet structures of ft thehet terminal layers s 4 , 7 hes t uc r t ur e so e mi r na l l a ye r s and s/set r e a t me nt a nd ma nl Pul a t e d me a nso 丘e l d on mi c r os c opt ∋ formed by S or Se atoms are expected to satisfy the require(FIM) mounted in the STM chamber.‘ *,t9 ( FI M)mou nt e di nt heS TM c ha mbe r . 1 8 , 1 9 f or me dbySorSea t omsa r ee xpe c t e dt os a t i s f yt her e qulr eAccording to t thet diffraction measurements on ments given above. me nt sg l V e na bove . Ac c or di ng o helectron ee l e c t r ond i 駄a c t i onme a s ur e me nt sOI T According to ot thehe丘 first-principle study of ft theheGa GaAsAs thet GaAsAs (001) surface, a,a stable 4X 1 structure hSe-treated eSe t r e a t e dGa ( 001 )s ur f a c e s t a bl e4×1 s t r uc t ur e Ac c or di ngt r s t pr inc i pl es t udyo (001)-l X1×1 1 surfaces adsorbed withi a monolayer of o sulfur upon heate treatment at 500-600 ( 001 ) s ur f a c e s a ds or be dw t hamo nol a ye r fs ul ur appears f C・ 5 ・ 8 7 2 0 ap pe a r suponh a tt r e a t me n ta t5 00 二6 0oC.5*8,20 0。 Figure 1 shows a STM (404 nmX40 nm)m)o of f oror selenium, thet surface gapa state density is s markedly re- e s e l e ni um, hes ur f a c eg ps t a t e de ns i t yi ma r ke dl yr Fi g ur e1s howsaS TMimage i ma g e( 0n mx40n duced by yt thehef formation of S/Se-Ga bondings.i3,” Recent GaAs (001) withi heate treatment at a -S30 3 “C. Se t r e a t e dG a As( 001 )w t hh a t t r e a t me nt t-5 0c c. duc e db or ma t i ono fS /Se -Gab ondi ngs ・ 1 3 , 1 4Re c e nt Se-treated bias was kept at - 2.0 . V throughout the experimental results support the bond formation ondf わr ma t i on The Thsample es a mpl ebi a swa sk e p ta t-2 0Vt hr oughou tt hmeaeme a ・ e x pe r i me nt a lr e s ul t ss uppor tt hS/Se-Ga eS/SトGab at a the interfaces; however, the structures observed experiand STM imaging was performed in nt thehconstant tt he i nt e r f a c e s ;howe v e r ,t he s t r uc t ur e so bs e ve r de xpe r i - surement S ur e me n ta ndS TM i ma g l ng Wa sPe r f om e di ec ons t nt a 2986 Phys. Lett. 59 (23), 2, December 1991 19919 American Institute of Physics 6951/ 91/ 48298603$02. 00 @ @1 9 1Ame r i c a nI n s t i t u t eo fP h y s k : S 2986 2 9 8 6 2 9 8 6 Appl. Ap p LP h y s ・ L e t t ・ 5 9 ( 2 3 ) 2De c e mb e r1 9 9 1 0003-6951/91/482986-03$02.00 0 0 0 3 Downloaded 30 Jan 2008 to 130.158.131.51. Redistribution subject to AIP license or copyright; see http://apl.aip.org/apl/copyright.jsp [ii01 [i 101 rwl < ~1101 05 2 0 - ( Eu)uO竃 的nLtOU FIG. STM image of the Se-treated GaAsa surface after heat FI G1..I .S TM i ma g eo ft h eS e ・ t r e a t e dG s(001) A ( 0 0 1 )s u r f a c ea f t e rh e a t treatment att -53O’ C3 ( Vs =5--2 - 2.0 ・ V, I,= 20 pA, 40 nmx40 nm). V OV ,75-2 0p A ,4 0n mx4 0n m) ・ t r e a t me n a t∼5 0℃ ( 0.05 DID D2 2 … DI A B ↓ l 門 門 7 1 門 I p i㌣ \ P i㌣ ヽ Icurrent mode (setting current: Is:Z =s= 2020p PA).A) As in n c ur r e n tmode( s e t t i ngc ur r e nt .A sshown S howni Fig. the surface is s rather rough at an atomic level and Fi g1, .1 ,t hes u血 c ei r a t t l e rr ougha ta na t omi cl e ve la nd there are many islands which arer considered to o bebSe overt he r ea r ema ny i s l a nd swhi c ha ec ons i de r e dt eS eove r layers remaining on nt thehes surface. This roughness may yb be e 1 a ye r sr e ma l nl ngO ur f a c e ・Thi sr oug h ne s sma responsible for ort thehed diffuse low-energy electron diffraction r e s po ns i bl ef i f f us el o we ne r g ye l e c t r ond i qr a c t i on I patterns have been reported concerning this surface. pa t t e nwhich r swhi c hh a v ebe e nr e por t e dc onc e r ni ng t hi ss ur f a c e ・ However, the ordered linear arrays are clearly seen lining Howe ve r ,t heo r de r e dl i ne a ra r r a y sa r e c l e a r l ys e e nl i ni r 唱 cc> upupi in nt theh[le【 lo] direction in nt thehflat area of the The 1l o ョdi r e c t i o ni ena ta r e ao ft hsurface. es ur f ac e ・ The distance between thehrows 1.6 nm and is very close to the di s t a nc ebe t we e nt er owis si s1 . 6mm a ndi sv e r y c l os et ot i l e 4Xperiodicity of the GaAsA in nt theheL [ilO] di( 001surface )s ur f a c ei TI O 】di 4×pe iodi r c i t yo ft heGa s(001) rection. This 4Xstructure thus observed in nt thei STM r e c t i on .Thi s 4×S t r uc t ur et hus obs e r ve di l eS TMim-i mages is in good agreement with theh4eX4×1 1 structure reported a ge si si ng ooda g r e e me n twi t ht s t r uc t ur er e por t e d bybyC Chambers et aL5’ * tal ・ 5 ・ 8 ha mbe r se Figure 2e(a) shows image of the treated surface Fi gur 2( a )s howanother sa not he ri ma g eo ft h et r e a t e ds ur f a c e (25( nmX 25 5 nm), and a cross section is drawn along A-B -B 25 nmX2 nm) ,a nda c r os ss e c t i oni sdr a wna l ongA in i Fig.i 2(b). The ordered arrays observed in nF Fig.i 1 arer nF g .2( b) ・Theo r de r e da r r a yso bs e r v e di g.ia e -0.1 resolved in nt thishi figure to have aedouble-row structure; each r e s ol v e di sf igur et o ha v adoubl e r ows t uc r t ur e ;e a c h array which appears to be es single in i Fig. 1・consists of two a r r a yw hi c ha ppe a r st ob i ngl e n Fi g 1c ons i s t so ft wo FIG. FI G 2 ,( a )S TMi ma g eo ft h eS e t r e a t e dGa s(001) A ( 0 0 1 )s u r f a c ea f t e rh e a t 2.. (a) STM image of the Se-treated GaAs surface after heat closely placed rows shown in nF Fig.i 2.・2 The c l os e l yp l a c e dr o was sa ss howni g ・Th4Xperiodicity e4×pe r i odi c i t y treatment 0V 0p A ,2 5血1 ×2 5n m) ・( b) t r e a t me n a t5 3 0o C att 530 “C ( V,(V =s--2 - 2.0 . V, Is,Z=s-2 20 pA, 25 rimx25 nm). (b) of of1 1.6. nm m is i formed by yt twowok kinds alternating distances Cr o s ss e c t i o na lo n gABi n a ) , n o r ma l d i ne ra n db u c k l e dd i ne rs t uc r 6n sf わr me db i ndof so fa l t e ma t i ngd i s t a nc e s Cross section along A-B in (a),( normal dimer and buckled dimer struc・β 1 t u r e sa r ed r a w nt o g e t h e r . ( C )Cr o s ss e c t i o na l o n gCDi n( a ) are drawn together. (c) Cross section along C-D in (a). D, =1- -1 1.1 ・ between thehrows, i.e., Dt 1.11 nm and D,D=2-0.5 nm. be t we e nt er ows ,i . e . ,D=1-- . 1nm a nd -0・ 5nm・ tures ,D . 5n m. m Dz =2--0.5 0 run. When a - 0.25. monolayer of aluminum is deposited on n nm,n Whe na-0 2 5monol a ye ro ra l umi numi sde pos i t e do thet 1) -2) X2×4s 4 surface, a,a 4 X4×i 1 symmetry appears.21 s(00( A 0 01 1 ur f a c e s ymme t r ya p Re a r S・ 21 hGaAs eGa Dormer et al. interpreted theh4Xstructure in thehel [ilO]11 didepend on nt thehea amount of of SeSea atoms included in nt thehe l lde pe ndo mount t omsi nc l ude di Donne re tal .i nt e r pr e t e dt e4xs t r uc t ur ei nt 0 ]di - willwi rection as st thehep pairing of the As-dimer rows, which they s ur f a c e di ne rl a y e r . dimer layer. r e c t i ona a l nngO ft heA sdi ne rr ows ,whi c ht he y surface considered to o occur through Al adsorption between thehe Since a dip i structure around thehea adsorption sites be- e Si nc ead ps t r uc t ur ea r oundt ds or pt i ons i t e sb c ons i de r e dt oc c u rt hr oug hthet h eAl a ds or pt i onb e t Oe e nt dimer rows. A similar model is proposed for the GaAs l y,s uc h t we e nthet he di ne r s wa s o bs e r ve dexperimentally, e xpe r i me nt a l dimers was observed such di ne rr ows .A s i mi l a rmode li spr opos e df b∫t heGa As tween (001)-4X 1 structure bybyDa Daweritz.22 In order to t compare transfer appearing in nt theheGa GaAsAs( (011) surface or r c ha r get r a ns f e ra ppe a ingi r 011 )s ur f a c eo . 2 21 no r de r oc ompa r e charge ( 001 ) 4×1 s t r uc t ur e we it r z such models withi ouroure experimental results, thehed dimer modi 丘e da ds or ba t ec on8gur a t i onmu tb nt r oduc e di adsorbate configuration must s be ei introduced in n s uc h mode l sw t h xpe ime r nt a lr e s ul t s ,t i ne r modified structure is i drawn schematically in nt thehe lower part of Fig. to oi interpret theheS Se-GaAs (001) surface structure or de rt nt e r pr e tt e -Ga As ( 001 )S ur f a c es t uc r t ur e s t r uc t ur e sdr a wns c he ma t i c a l l yi l owe rpa r to fFi g・ order 2(b) consideration of the of o the section. this model. For example, the peaks, which arer wi t h血i smode l .Fo re x a mpl e ,t hdouble edoubl epe a ks ,whi c ha e 2( bin )i nc ons i de r a t i ono ft hsymmetry es y mme t r y ft hcross ec r os ss e c t i on・ with Adsorption sites in thehe models are indicated by ya arrows. by yt thehed dip i structure as s shown in nt thehec cross secs e pa r a t e db ps t r uc t ur ea s howni r os ss e c Ads or pt i ons i t e si nt mode l sa r e i ndi c a t e db r r ows ・ separated Taking theher recent results intont considermay correspond to ot thehtwo adsorbates on the,dimers. t i on ,ma yc or r e s pondt et woa ds or ba t e sont he' di me r s ・ Ta ki ngt e c e nexperimental te xpe r i me nt a lr e s ul t si oc ons i de r - tion, ation, As atoms at a the Se-treated surface may yb be partially at the asymmetric positions theheb bridge Ads or pt i ona tt he a s ymme t r i cp os i t i onon sont r i dgsite es i t e a t i on ,As a t oms tt he Se t r e a t e ds ur f a c ema epa r t i a l l y Adsorption replaced by yS Se e atoms. If・ the states of the 1 surface very likely because of the effect.23 The covcovsve r yl i ke l vb e c a us eo ft hJahn-Teller eJ a hn-Te l l e re fe c t ・ 2 3The I ft hgap ega ps t a t e so ft h4X e4×1 s ur f a c e is i r e pl a c e db a t oms area removed by y thet bond formation, as is calculated becomes equal to or rh higher than 0.5 ・ monolayer in n e r a g eb e c ome se qua lt oo i ghe rt ha nO 5mo nol a y e ri r er e mov e db hGa-Se eGa -S ebondf or ma t i on ,a si sc a l c ul a t e d erage t hi sc a s e . onont thehGaAs X1×1 1 surface,13Z14 the effect case. s(001)-l A ( 001 ) s ur f a c e , 1 3 , 1 4t hpassivation epa s s i v a t i one f f e c t this eGa 0 18 O*m -0.05 t p999P4ps 0 5 千 ( t uu)t10P払 nJJu o 2 0.1 ‘82 sz O 2987 Phys. Lett., Vol. 59, No. 23, 2, December 1991 2987 Appl. Ap p l . P h y s . L e t t . . Vo l . 5 9 , No . 2 3 2 De c e mb e r1 9 9 1 Sh i g e k a wet ae t a l . 2887 2987 Shigekawa al. Downloaded 30 Jan 2008 to 130.158.131.51. Redistribution subject to AIP license or copyright; see http://apl.aip.org/apl/copyright.jsp Some of f the authors (H.S., H.O., and Y.N.) wish to o Someo t hea ut hor s( H. S. , H. 0. , and Y. N. ) wi s ht thank Dr. T. and Dr. K. Akimoto of Sony Corp. t hankDr .TMiyajima .Mi ya j i ma n dDr a .K. Aki mot oo fSonyC or p. forf their help withi thehes sample preparation. alsol thankor t he i r hel pw t ht ampl ep r e par at i onWe .Wea s ot hankt Dr. T. and Professor A.A. Ichimiya forf their interest.Dr .TUtsumi .Ut s umi andP r of e s s or I chi mi ya or t he i r i nt e r e s t . This workor wasass supported in n part bybyaGr a Grant-in-Aid foror Thi sw kw uppor t e di par t ant i ni df A Scientific Research from Ministry of fE Education, Sci; Sc i e nt i 丘cRe 岳 e ar chf r omthe t heMi ni s t r yo ducat i on, Sc i . i ence andndC Culture, Japan. e nc ea ul t ur e ,J apan. FIG. 3.・ STM image of the Se-treated GaAs surface after complete FI G 3 ・ S TMi ma g eo ft h eS e t r e a t e d Ga s(001) A ( 0 01 )s u r f a c ea 托e rc o mp l e t e ‘W.l E.E Spicer, Z. E. N. T. w・ ・S p i c e r ,ZLiliental-Weber, ・Li l i e n t a l We b e r ,EWeber, ・We b e r ,NNewman, ・Ne wma n ,TKen..-・Ke r L ・ / removal ofl Se overlayers (s( VsV =s- -2 2.0 . V, Is, =s-2 20 pA, 6.0 nm X 3.53 nm). r 0V I 0p A ,6 . 0nmx . 5n m) . delewicz, R. Cao, C. McCants, P. Mahowald, K. Miyano, and I. Linr e mo v a o fS eo v e r l a y e d e l e wi c z ,R.Ca o ,C.Mc Ca nt s ,P.Ma ho wa l d ,K.Mi y a n o ,a n dI .Li n d a u J .Va c .S c i . Te c hn o l B6 ,1 2 4 5 ( 1 9 8 8) . dau, J., Vat. Sci. Technol. B. 6, 1245 (1988). L .Br il l s o n ,RE. .E ・Vi t ur r o ,C .Ma ihi o t ,J .L .S h a wN. ,NTache, .Ta c h e ,I . “L.2 J.・J Brillson, R. Viturro, C. Maihiot, J. L. Shaw, 4, AsAs is i mentioned above, according to ot theher recent s me nt i one da bove ,ac cor di ngt e ce nexperte xpe r G. J. M. Woodall, P. D. G. Mc k i n l e y ,GMargaritondo, .Ma r g a r i t o n d o ,J .M. Wo o d a1 l ,P .DKirchner, .Ki r c hn e r ,GD. .D. imental results, the Se/GaAs (001)-4x 1 surface hasast thehe Mckinley, i me nt l a r es ul t s ,t heS e /GaAs( 001) 4x1s ur f ac eh and S. S S. Wright, J., Vat. Sci. TechnoL B B6 6, 1263 (1988). Pe t t i t ,a n d .S .Wr i ht g I .Va c .S c i . Te c mo l L ,1 2 6 3( 1 9 8 8) . I’ GaAsr structure oververaf a fewewlayers.5’ 85 Therefore thehe Pettit, e x s t r uct ur eo l aye r s ・ ・ 8 The r e f or et Gas A -,$e, 1_xS ‘C 3 J. J Sandroff, R.R N. J., C. BischoK and R. Bhat, Appl. c _S nd a r o 杭 .NNottenburg, .No t t e n b u r g I _C .Bi s c h o f r .a n dR .Bha t ,Ap p l_ reconstruction such dimer pairing may yb be caused by yt thehe r e cons t r uc t i ons udasa sdi ne rpal r l ngma ecaus e db Phys. Lett. 51, 33 (1987). Phy s .Le t t .5 1 ,3 3日 9 8 7) . partial replacement As atoms bybyS Se in thehe surface layers par t i a lr e pl ac e me nof to fAs at oms ei nt s ur f ac e l aye r s 4H.4 Oigawa, J., F.・ Fan, Y. Nannichi, H. Sugahara, and M.M・ Oshima, Jpn 托 ・ Oi g a wa J F ・ Fa n ,Y ・ Na n n i c h i , H ・ S u g a ha r a , a n d Os hi ma , J p n rather than the血e adsorbate-induction A r at l l e rt hanbyby ads or bat e i nduct i onmechanism. me cl l ani s m.A J. I Appl. Phys. 30, 322 (1991). . Ap p l .Ph y s .3 0 ,3 2 2日 9 91). buckling dimer may y produce thet 4xperiodicity in i thet A. andn V. S. Sundaram, Phys. Lett. 57, 2342 buc kl i ng di ne rma pr oduc e he4 ×pe r i odi c i t y n he ‘S.5 S ・AChambers ・Cha mb e r sa dV ・S ・S u n d a r a mAppI. ,Ap p LP h y s ・Le t t ・5 7 ,2 3 4 2 ( 1 9 9 0) . [TlO] in ns such a case, as shown schematically in n (1990). L TI Odirection 】di r e ct i oni uc hac as e ,ass howns c he mat i c al l yi “C.6 J.・ Sandroff, M. S. S Hegde, L.,LA A. Farrow, J., P.・ Harbison, R., Bhat, and C J ・ S a n d r o H , M・ , He g d e ・ Fa r r o w J P ・ f l a r b i s o n R ・ Bh a t , a n d Fig. 2(b) for or comparison.24 Fi g .2( b)f c ompar is on. 2 4 C. C Chang, J. Appl. Phys. 67, 586 (1990). C ・ a C h a n g , I . A p p l , P h y s . 6 7 , 5 8 6 ( 1 9 9 0 ) . Overlayers withi certain orderings cananb be es seen in mF Fig.i 0Ve r l ayer sw t hc e r t ai no r de r i ngsc e eni g. ‘J. 7 R. Waldrop, J., Vat. Sci. Technol. B 3, 1197 (1985). J .R .Wa l dr o p I .Va c .S c i . Te c mo l LB3 ,1 1 9 7( 1 9 8 5) , 2 (a). Domain labeled RR seems to t have a structure similar 2( a) .Domai nl abe l e d s e e ms oh aveas t r uct ur es i mi l ar ‘F.8 S.・ Turco, C,a J. J Sandrotf, M. S. S Hegde, and C. C Tamargo, J., Vat.=・ S nd a r o l f ,M・ ・He g d e ,a nM. dM・ ・Ta ma r g o J ・Va c F S ・ Tu r c o to t theh4ex4×l layer below, rotated by y9 90”.00 A.A cross section is s Sci.S ot aye rbe l owbut ,bu tr ot at e db c r os ss e ct i oni c i .Te c h n o l .B8 ,8 5 6( 1 9 9 0) . Technol. B 8, 856 (1990). drawn along C-D 2(c). The corrugations of ft thehe ‘J. 9 C-Din i nFig. Fi g .2( C) .Thec or ugat r i onso dr awna l ong Lee, L.,L Wei, S. Tanigawa, H., Oigawa, and Nannichi, Appl. Phys. ・ We i , S I Ta n i g a wa H 1 0i g a wa , nY. a dY ・ Na n n i c h i , Ap p l ・ Phy s ・ J ・Le e double rows botho血 layers are -0.05 . nm.m. The of doubl er owin si nb l aye r sar e-0 05n Ththickness et hi ckne s sof Lett. Le t t .5 S ,1 1 6 7( 1 9 91). 58, 1167 (1991). thet overlayer, determined by yt theheh heights of both edges of Martensson and R. M. Feenstra, Phys. Rev. B. 39, 9 7744 (1989). l o p .Ma r t e n s s o na n dR .M. Fe e n s t r a ,Ph y s .Re v B3 ,7 7 4 4( 1 9 8 9) . heo ve r l aye r ,det e r mi ne db e i ght so rbot he dge sor ‘OP. M. Feenstra, Phys. Rev. Lett. 63, 1412 (1989). l R .M_ Fe e n s t r a ,Phy s .Re v .Le f t . 6 3 ,1 41 2( 1 9 8 9) . thet cross section in nFig. 2(c), is,i -0.15 . nm,m, which correC ) s∼0 1 5n whi c hc or r e - “R.l hec r os ss e ct i oni Fi g .2( B.・ Mclean, M.・ Feenstra, A., Talev-Ibragimi, Ludeke, Phys. 2 A B ・ Mc l e nR., a R M・ Fe e n s t r a A I Ta l e v I b r a g i mand i , nR. a dR ・ Lu d e k e , Ph y s ・ sponds a single atomic layer of GaAs (001). Comparis pondto st oas i ngl ea t omi cl aye ro rGaAs( 001) .Compad- “A.1 R e v , B3 9 , 1 2 9 2 5( 1 9 8 9 ) . Rev. B 39, 12925 (1989). son of those cross sections show that, the layer consists ono ft hos ecr os ss e ct i on ss howt hat ,t h4ex4×l aye rcons i s t 13T. Ohno and K. Shiraishi, Phys. Rev. B. 42, 2 11194 (1990). 1 3 T _Ohn oa n dK S h i r is a h i ,Ph y s .Re v B4 ,1 1 1 9 4( 1 9 9 0) . ingl of Ord double rows is sp probably aa single atomic layer. ng oubl e r owsi r oba bl y s i ngl e at omi c l aye r . 14T. Ohno (private communication). 1 4 T.0l mO( p iv r a t ec o mmu n i c a t i o n) . Therefore, such a as structure as sab a buckling dimer modeldel “H.Ⅰ The r ef わr e ,s uch t r uct ur ea uckl i ng di ne rmo Sugahara, M., Oshima, H., Oigawa, H., Shigekawa, and Y. Nannichi, 5 H ・ S u g a h a r a M・ Os hi ma H ・ Oi g a wa H ・ S h i g e k a wa , a n dY ・ Na ic m h i 、 without adsorbates is more probable. wi t l l Ou tads or bat e si smor epr obabl e. J. ∫ Appl. Phys. 69, 4349 (1991). . Ap p l .Ph y s .6 9 ,4 3 4 9( 1 9 91 ) . Figure 3 shows a STM of the treated surface Katayama, Aono, H., Oigawa, Y., Nannichi, H. Sugahara, and M. Fi gur e3s howsaS TMimage m ageo l ft het r e at e d s ur f ac e ‘6M. 1 6 M・ Ka t a y a mM. a , MI Ao n o H ・ Oi g a wa Y ・ Na n n i c h i , H ・ Su g a h a r a , a n dMl Jpn. J.. Appl. Phys. 30, 315 (1991). after complete removal of the (6.06. nmx3.5 0s hi ma ,J p n I .Ap p l ・Ph y s ・3 0 ,31 5( 1 9 91)・ af t e rc ompl e t er e mova lo ft hSe eSoverlayers eover l aye r s( 0n mx3. 5 Oshima, Hirayama, Matsumoto, H., Oigawa, and Y. Nannichi, Appl. Phys. 7 H ・ f hr a y a mY. a , Y ・ Ma t s u mo t o H ・ Oi g a wa , a n dY ・ Na n n i c h i , Ap p l . Ph y s L nm, V,Vis,Z =s2020p PA).A) The units consistnmVs ,V=s - 2.02. 0 .Th4x2 e4×2u ni t sc ons i s t - “H.1 54, 2565 (1989). et L t .5 4 ,2 5 6 5( 1 9 8 9) . ingmgo of three Ga dimers are resolved well.em The rt hr e eGad i ne r sar er e s ol ve dw ThSTM eSTMimage i mage L&t. Sakurai, T., Hashizume, I.,Ⅰ Kamiya, Y., Hasegawa, N. Sano, H., W. S T ・S a k u r i a T ・Ha s h i z u me ・Ka iy m a Y ・Ha s e g a wa ,N ・S a n ° H .W. is i similar theheAs As-rich GaAsAs( (001)-2x 4 structure ob- b- “T.l ss m li l ato rt ot ichGa r 001) 2×4s t r uc t ur eo Pickering, and A. Sakai, Progr. Surf. Sci. 33, 3, (1990). Pi c k e in r g ,a n dA . S a k i a ,Pr o g r .S u r f ・S c i . 3 3 3( 1 9 9 0) , tained by yP Pashley et e al. except a 90”0rotation of the t ine a db as hl e y ial lexce pfor tf ora9 0r ot at i ono ft he 19T. Hashizume, Y. Hasegawa, I. Kamiya, T. Ide, I. Sumita, S. Hyodo, T. ordering.“ ‘g -”. Since the GaAs (001) surfaces wereer pre-r a As( 001)s u血 c esw ep e - Sakurai, or der i n 2 52 7s i nc e血eG S a ku r i a H . To c hi h a r a ,M. Ku b o t a ,a n dY .Mu r a t a J .Va c .S c i .Te c h H., Tochihara, M. Kubota, and Y. Murata, J., Vat. Sci. Tech.. pared by cleaning, the surfaces before the treatpar e dbthermal yt he r ma lc l e ni a ng ,t h es ur f ac e sbe f or et hSe eS et r e at - nol.n o ,A8 ,2 3 3( 1 9 9 0) . Al 8, 233 (1990). ment are thought to have similar Ga-rich structures. zcRecently structures such as the 2X and 4X3 reported for 2 0 Re c e n t l ys t uc r t u r e ss u c ha st h e21,2x3, XI , 2×3 , a n d4×were 3we r er e p o r t e df o l ・ me n tar et hough tt oh av es i il m a rGaic r hs t uct r ur e s . h eS e t r e a t e dGa A(001) s( 0 01 )s u r f a c e s .Ta k a t a n i ,T .Ki k a w aa n dM_ Se-treated GaAs surfaces, S.,S Takatani, T. Kikawa and M. In I order to o complete thehes structural analysis andnd to t n or dert c ompl e t et t mc t ur a lanal ys i sa o thet Na k a z a wa ,Ex t e n d e dAb s t r a c t ft h e2 3 r dCo n f e r e n c eo nS o l i dS t a t e Extended Abstracts ofso the 23rd Conference on Solid State-~ understand thehep passivation mechanism, a aw well-controlled unde r s t a ndt aS S i vat i onme cI l ani s m, e l l cont r ol l e d Nakazawa, Devices &s& Materials, Yokohama, 1991, p. 299; S.; A.. Chambers and V. Ma t e ia r l s ,Yo k o h a ma ,1 9 9 1 ,p .2 9 9 S A . Cha mb e r sa n dV_ De v i c e surface preparation technique is necessary, and a proces u血 c ep r epar at i ont e chni quei sne ce s s a r y ,andap r oc e . S u n d a r a m J .Va c . S c i . Te c h n o . B9 ,2 2 5 6( 1 9 91 .げt es t r u c t u f a iS. S Sundaram, J., Vat. Sci. Technol. Bl 9, 2256 (1991). If) the h structural dure for isti currently being under consideration. Precise dl l r ef わitri scur r e nt l yb e i ngu nde rcons i de r at i on Pr e c i s e change from 2 X 1 to 4X 1 is caused by the dimer row pairing upon heat c h a n g ef r o m2xIt o4×Ii sc a u s e db yt hedi ne rr o wp a l nn gu p o nh e a t measurements of the of the treated surface meas ur e me nt so ft hstoichiometry es t oi c hi ome t r yo ft het r e at e ds ur f ac e treatments, surface/interface electronic structure may be designable. ,s u r f ac e / i nte r fa c ee l e c t r o n i cs t uc r t t l r ema yb ede s i g n a b l e . t r e a t me n t s forf structures must be performed, together with de-de - *‘S2 othe rt hes t uct r ur e smus tbep e r f or me d ,t oge t he rw it h s Do n n e r ,R .Bl u me J l t h l a J L He r ma n .Tr e h a n .Fu r ma . .l .K K. Donner, R. Blumenthal, J., L.. Herman, R.,R Trehan, E.,E Furman. -n t ai l e dc al cul at i ons . tailed calculations. anda N. Winograd, Appl. Phys. Lett. 55, 1753 (1989). n dN .Wi n o g r a d ,Ap p LPh y s .Let t .5 5 ,1 7 5 3( 1 9 8 9) . 2 L Da we it r z ,Sur f .S c i .1 1 8 ,5 8 5( 1 9 8 2) . Daweritz, Surf. Sci. 118, 585 (1982). In I conclusion, for the GaAs (001) surface a As( 001 )S ur f ace “L. 2 nc oncl us i on ,f o rt hSe-treated eSe t r e at e dG Uchida and M. (private communication). .Ok a z a k i( p iv r a t ec o mmun i c a t i o n) . 2 3 H .Uc h i d aa n dMOkazaki with heat treatment at -530 OC!, arrays with wi 血 he a tt r e at me n ta t-53 0℃the ,t hordered eor de r e da r r ay swi t h 23H. “‘E.2 Kaxiras, Phys. Rev. B, 43, 6824 (1991). 4 E . K a x i r a s , P h y s . R e v B4 3 , 6 8 2 4( 1 9 9 1 ) . regular intervals of 4Xperiodicity in the [TlO] direction r e gul ari nt e r val sof4×pe iodi r c i t yi nt heL TI O】di r e ct i on 25M. D. D Pashley, K.,K W. Haberem, anda J.dJ M. Gaines, Appl. Phys. Lett. 7t 2 5 M・ TPa s h l e y IW・ Ha b e r e m, n ・M・ Ga i n e s ,Ap p l ・Ph y s ・L et ・ _ 7 ( 1.6 nm) were observed by to t line up the [1 lo] (1. 6mm) we r eobs e Ⅳe dbFI-STM yFI STM ol i n euin pi nt h e【 11 01 6( 1 9 91) . 58, 406 0 (1991). direction, which is insi good with the 4x 1 strucdi r e c t i on ,whi c l li ngooagreement dagr e e me n twi t ht h e4×1 s t rc 26D K. Biegelsen, L. E. E Swartz, and R. D.・ Bringans, Vat. Sci. Technoi. ;m i e g e l s e n, L ・ S wa r t z , a n dR D ・ Br in g nJ.S a , J ・ Va c I Sc i ・ Te c hno l ・_ ture observed by the previous methods. In.I anac close-up view, t ur eobs er ve db yt h epr e vi ou sme t hods l os e u pvi e w, A’8,A8 , 2 8 0( 1 9 9 0) し 280 (1990), a 4Xstructure was found to be formed by the ada4×S t r uct ur ewa sf oundt ob ef or me db yt hclosely ecl os e l yad- “M.ヱ D. D Pashley, K.,K W.I Haberern, W. Friday, J. M. Woodall, and P. D..D. 7 M・ ,Pa s h l e y W. Ha b e r e r n , W. Fr id a y , J .M. Wooda l l ,a n dP jacent double rows. Kirchner, Phys. Rev. Lett. 60, 2176 (1988). Ki r c h n e r ,Ph y s .Re v .Le t t .6 0 ,21 7 6( 1 9 8 8) . j ace n tdoubl er ows . - ・= - -- 5 u 2 6 2988 Phys. Let, Vol. 59, No. 23,2 December 1991 29 88 Appl. Ap p LPh y s .L e t t . , Vo l .5 9 ,No .2 3, 2Dec embe r1 991 8 , 4 - D ・ K ・ B Shigekawa et al. 2988 Downloaded 30 Jan 2008 to 130.158.131.51. Redistribution subject to AIP license or copyright; see http://apl.aip.org/apl/copyright.jsp
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