Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 26 (2002) 412–424 A novel technique for calibration of polygon angles with non-integer subdivision of indexing table T. Yandayan a,∗ , S.A. Akgöz a , H. Haitjema b a The National Metrology Institute of Turkey (UME), TÜBITAK Ulusal Metroloji Enstitüsü, P.K.21, 41470 Gebze-Kocaeli, Turkey b Precision Engineering Section, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands Received 13 June 2001; received in revised form 8 March 2002; accepted 27 March 2002 Abstract Polygons are basic angle standards for angle measurement, particularly used for calibration of rotary angular indexing, and for measuring equipment such as dividing heads and tables. A main application in daily life is in bar-code readers. Calibration of such angle standards is required for traceability and at the highest accuracy it is a responsibility of national metrology institutes. In order to investigate uncertainty parameters on polygon calibration and to establish the capabilities of national metrology institutes, intercomparision measurements in the name of EUROMET project 371 “angle calibration on precision polygons” between 12 European countries have been carried out. Two precise polygons with 7 and 24 faces have been calibrated by the participants. Difficulties arose for precise calibration of seven-sided polygon for those institutes, which do not have a high-resolution angle comparator or two autocollimators. UME, the National Metrology Institute of Turkey, has applied an alternative technique for precise calibration of seven-sided polygon without using high-resolution angle comparators (i.e., indexing tables or angle dividers) or two autocollimators. The technique is based on the circle closure principle. The pitch and cumulative angles of the polygon are extracted from the angle measurement between some polygon faces (such as one and four (1/4), analogous 2/5, 3/6, 4/7, 5/1, 6/2 and 7/3) the angle of which can be generated close enough by the indexing table. This means that the polygon can be regarded as unfolded in seven 3-pitch angle intervals of 3 × 360◦ /7 ≈ 154◦ 17 , making up 1080◦ in total. The method gives the differences between these seven intervals; with the closure condition (the sum must be zero) this gives all absolute angles. A full uncertainty evaluation is given that is based on the model function which relates the measured values to the polygon angles. For the calibration actually carried out, this yielded an uncertainty of 0.24 . Within this uncertainty the measured polygon angles corresponded very well with the reference values of the intercomparison. The method is of use for laboratories which do not have a high-resolution angle comparator (i.e., an indexing table or angle divider) or two autocollimators for the calibration of such angle standards. © 2002 Elsevier Science Inc. All rights reserved. Keywords: Polygon; Angle standards; Angle measurement 1. Introduction Apart from dimensions, form and roughness, angle measurements are important in manufacturing. It is required to use some kind of angular measuring instrument during the manufacturing of angular parts, e.g., a dividing head, a rotary table or a polygon. Precise manufacturing is also affected by angle components. For instance, positional accuracy in a machine tool can be affected by any small angular motion of the moving carriage, giving an Abbe offset. The unwanted angular motion in a measuring machine can also contribute ∗ Corresponding author. Tel.: +90-262-646-6355; fax: +90-262-646-5914. E-mail address: [email protected] (T. Yandayan). to positional errors when probing components. It is, therefore, essential to measure these angular error components, which are sometimes among the largest errors related to positioning accuracy in a machine tool or measuring machine. The SI unit of the plane angle (the radian) is, in practice, established by appropriate subdivision of a full circle. This enables an error-free standard as the full circle is 360◦ . However, in the case of practical angle measurement, reference and working angle standards, which are mainly angle gauge blocks, indexing tables, circular scales and polygons, are used. The polygons are the most robust and precise angle standards used by laboratories for transferring angular measurements. They are discs made of steel or glass and have equally inclined and optically flat reflecting faces. They may have up to 72 faces but 6, 8, and 12 faces are most 0141-6359/02/$ – see front matter © 2002 Elsevier Science Inc. All rights reserved. PII: S 0 1 4 1 - 6 3 5 9 ( 0 2 ) 0 0 1 2 3 - X T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 common. For precise calibration of such angle standards, two accepted measuring methods are the cross-calibration and the two-autocollimator technique [1–7]. For the cross-calibration technique the rotary table must have an angular indexing or measuring capability, whereas for the two-autocollimator technique this is not necessary. There are several possibilities for the number of measurements to be taken and their evaluation. Since all these techniques use complete closure (i.e., completing to 360◦ to eliminate the errors), they are free from bias. In the case of having one autocollimator and one rotary table with an angular indexing or measuring capability, which is the case for most laboratories, an applicable technique is the cross-calibration technique. The calibration capability for polygon types in this case depends on the smallest increment of the indexing table. Most common indexing tables (such as MOORE precision indexes [8]) have a smallest increment of 15 of arc or 10 of arc. This is not sufficient for polygons such as seven-sided ones as the interval angle cannot be generated by the indexing table accurate enough to remain in the range of common autocollimators. In order to calibrate such polygons, a novel technique has been applied by UME, the National Metrology Institute of Turkey, during intercomparison measurements carried out between European countries. In this paper the applied technique is presented with intercomparison measurement results and evaluation of the uncertainty components. 2. Angle measurements 2.1. Units of angle There are two kinds of angle definitions: plane angle and solid angle [9]. Whilst plane angle is the ratio of two lengths, 413 solid angle is the ratio of an area to the square of a length. Solid angle is used in theoretical calculations and is not treated in this paper. Plane angle is generally expressed using one of the two systems. 2.1.1. Sexagesimal system This system dates from the Babylonians. The (◦ )-sign is a hieroglyph of the sun, and is still in daily use, also for engineering applications. The angle units in this system are as follows: 1◦ = 1/360 of a full circle 1 = 1/60 of a degree 1 = 1/60 of a minute 2.1.2. Radian system (the SI unit of the plane angle) This system is used generally in mathematics and for more theoretical applications (as SI unit: 1 m/m), 1 rad is the angle subtended at the center of a circle by an arc of length equal to the radius. 2 rad equals 360◦ . 2.2. Angle calibration and generation 2.2.1. Subdivision of a circle Suppose that one full circle is divided in to seven nominal angle intervals, A, B, C, D, E, F, G and each has small error such as a, b, c, d, e, f, g (Fig. 1(a)). Although each of these errors may be different, the circle closure demands that the sum of all angles be 360◦ , from this it follows that the sum of errors must be zero, i.e., the average deviation is zero. These seven unknown errors can be determined by comparing eight intervals with angle interval of α i having small error α i on the other circle in turn and measuring Fig. 1. Explanation of the complete closure principle. (a) Circle 1. (b) Circle 2. 414 T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 the seven differences x1 , x2 , x3 , x4 , x5 , x6 , x7 as shown in Fig. 1(b). Seven equations are obtained: αi −a = x1 , αi −b = x2 , αi −c = x3 , αi −d = x4 , αi −e = x5 , αi −f = x6 , αi − g = x7 (1) Using the fact that the sum of seven intervals on the same circle is a complete circle (Fig. 1(a)), and thus the sum of the seven errors must be zero, we can write: a+b+c+d +e+f +g =0 (2) summing Eq. (1) gives, 7αi − (a + b + c + d + e + f + g) = x 1 + x 2 + · · · + x7 (3) since a + b + c + d + e + f + g = 0, α i is given by αi = x1 + x2 + · · · + x7 7 (4) with this, all deviations are known: a = αi − x1 b = αi − x2 .. . (5) g = αi − x7 This is called the complete closure principle and this can be applied to angle calibration standards. 2.2.2. Trigonometrical method It is also possible to calibrate and generate an angle by using the sine or tangent principle. Here the angle is calculated from two known lengths. However, it is only recommended for angles up to 45◦ . It is considered a very precise method for small angles particularly less than 1◦ . In the two autocollimator technique, α i angles as described in Section 2.2.1. are obtained by fixing the angle between two autocollimators, which are positioned around the circle, at a nominal angle of the polygon. Polygon intervals are compared with these angles and the results are calculated with the aid of the complete closure principle. In an extended version of this method, the autocollimators are positioned at all angles of the polygon and the results for each full circle are averaged. In the cross-calibration technique, α i angles are obtained from an indexing table. The important issue here is the repeatability of the indexing table. Polygon intervals are compared with indexing table’s intervals by autocollimator measurements. The polygon is positioned at all angle intervals α i on the indexing table, and by combining these measurements the errors of both the polygon and the indexing table are calculated using the complete closure principle. Apart from these two methods, direct comparison, which is the direct comparison of polygon intervals against indexing table intervals, can also be applied. However, it requires pre-calibration of either the polygon or the indexing table by one of the above mentioned methods. In all methods, comparison of angle intervals is made by optically probing the polygon faces using an autocollimator. Fig. 2 illustrates the polygon calibration and angle intervals, which must be determined [5]. The pitch angles of the polygon, α i are the angles between adjacent normals of the n measuring faces. The pitch angle deviations α i are the deviations values of the pitch angles from the nominal angle value αn = 360◦ /n. The angles between the normal N1 of the first face and the other faces are the cumulative pitch angles β i . The cumulative angle deviations β i are the deviations of the cumulative pitch angles from their nominal values. Determination of either α i or β i will be sufficient since they are related to each other as shown in the equation given in Fig. 2. As already stated, the closure principle demands that the sum of all pitch angle deviations be zero. 2.3. Calibration of angle standards Indexing tables, angle gauge blocks and polygons can be considered as the most precise angle standards. Application of the complete closure principle in the calibration of indexing tables and polygons produces a bias-free result. The repeatability of measurements is essential for the final uncertainty which can be obtained, together with the traceability of the measured deviations. Also the quality of the indexing mechanism for tables and the flatness of the reflecting faces of the polygon are of importance for such calibration process. Considering transfer, stability and use of the standards, the polygons are the most suitable angle standards. There are two techniques commonly available for polygon calibration: cross-calibration and two-autocollimator technique [1–7] as mentioned before. They both use the complete closure principle for the calibration. 3. European Collaboration in Metrology (EUROMET) project 371 A main objective of this project was to provide information about the uncertainty parameters of measurement for the calibration of precision polygons according to the document “ISO guide to the expression of uncertainty in measurement” [10]. For this reason, it was recommended to measure the circulated polygons in their inverted as well as in their normal position. Later, it was aimed by Consultative Committee for Length (CCL) in Bureau International des Poids et Measures (BIPM) to establish and confirm the capability of National Measurement Institutes (NMIs) for Mutual Recognition Arrangement (MRA), carrying out ‘key comparisons’ which establish measurement capabilities in essential (‘key’) fields T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 415 Fig. 2. Definitions for polygon calibration. and techniques [11]. EUROMET has declared the EUROMET project 371 as one of these “key comparison” with the identifier EUROMET.L-K3.PREV in the BIPM key comparison database. The project covered an international comparison of angle calibrations to be carried out on two precision polygons with 7 and 24 faces, respectively. It was completed between 1996–2000. PTB (National Metrology Institute of Germany) was the pilot laboratory. The participating countries (and institutions) were: Germany (PTB), Switzerland (OFMET), The Netherlands (NMi), Finland (VTT), UK (NPL), Italy (IMGC), Slovakia (SMU), France (LNE), Spain (CEM), Poland (GUM), Turkey (UME), Czech Republic (CMI).The used seven-sided polygon has the following specifications: Pitch angle Mirror size Diameter Material Weight (including case) Manufacturer Identification number 360◦ /7 = 51◦ 25 42.857. . . 15 mm in diameter (limited by the aperture of the case) 60 mm Glass 495 g Rank Taylor Hobson SP LE 5997 The following measurement results were reported for the normal and inverted position of the polygon: • The pitch angle deviations α i . • The cumulative angle deviations β i . 416 T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 Either one of two well-known method, one autocollimatorangle measuring tables or two autocollimators-rotary table were recommended by the Pilot Lab. (PTB) for measurement of these parameters [5]. A mounting device delivered with the polygon has been used for adjustments. 4. Alternative approach for calibration of seven-sided polygon The following equipment was available at the laboratory of UME for calibration of the polygon: Autocollimator Type-model Manufacturer Range Resolution Accuracy Serial no. Möller-Wedel Elcomat HR 2-axis Möller-Wedel Optical GmbH ±150 arc seconds 0.005 arc seconds 0.02 arc seconds with uncertainty of 0.03 arc seconds. 161 Indexing table Type-model Manufacturer Resolution Reproducibility Serial no. Moore 1440 precision indexing with mechanical lift Moore Tool Company 15 ±0.1 arc second 281 It was impossible to apply the cross-calibration or the direct comparison method to the seven-sided polygon for UME using the existing equipment. This is because the smallest angle which can be obtained by a Moore precision index with 1440 teeth is 0.25◦ (i.e., 15 or 900 arc seconds) and does not allow to probe all seven polygon faces directly within the autocollimator range. However, it is possible to probe some faces such as face one and four (1/4), analogous 2/5, 3/6, 4/7, 5/1, 6/2 and 7/3. This is achieved by shifting the autocollimator X-axis to accommodate both faces in the autocollimator range (±150 arc seconds). The pitch angles between the polygon faces were compared with the indexing table interval by rotating the indexing table between 0 and 154◦ 15 (always these two nominal angular positions only) and measuring the rest of the angle difference by the autocollimator. No intermediate or subsidiary table was used. The polygon setting was performed by manually positioning the polygon faces on its mounting device (Fig. 3) to the autocollimator axis. For each probing of the faces, the following setting and leveling procedure was carried out. 4.1. Preliminary adjustments The recommended mounting device delivered with the polygon (by the Pilot Laboratory, PTB) has been used in order to facilitate the polygon adjustments and to exclude measurements which may occur due to using different mounting devices by the NMI’s. The mounting device is positioned on the indexing table and adjusted by probing the mounting shaft with a precision indicator as shown in Fig. 3. It was aimed to adjust the mounting device to the axis of rotation of the table. The eccentricity of the mounting shaft to the axis of rotation of the table was about ±30 m. After the base plate of the mounting device is clamped tightly to the measuring Fig. 3. Preliminary adjustments for the calibration of polygon. T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 417 table, the polygon is placed on the mounting shaft and manually fastened by slightly tightening the securing screw. The autocollimator has been adjusted as close as possible with its optical axis perpendicular and in true alignment to the indexing table’s axis of rotation. It was also aligned to probe the center of the polygon faces. Then the polygon is adjusted using the adjusting screws of the mounting device in a plane perpendicular to the indexing table’s axis of rotation so that pyramid errors of all measuring faces are at least within ±10 arc seconds as recommended in the instructions [5]. This was achieved by probing the faces of the polygon and recording the Y-axis values from the autocollimator display. Adjustment using the screws has been carried out until the readings became within ±6 arc second. Later, the optical path length between autocollimator and polygon, which was kept as small as possible was shielded against air turbulence and thermal effects with the aid of prolongation tube made of paper. Finally, the polygon faces were measured in normal and inverted position using our new method. The measurement conditions are as follows: Laboratory conditions Number of repeated measurements Number of polygon positions relative to indexing table in the seven intervals of the polygon (20 ± 0.5)◦ C, 50% humidity 10 (in each position of the polygon) 7 4.2. Measurement procedure The nominal pitch angle α n is 360/7 = 51◦ 25 42.857. . . . The Moore table is rotated over nominal 51◦ 15 with a very high reproducibility. The rest of the angle, about 10 42.857. . . (642,8 arc seconds) cannot be measured by the Elcomat HR autocollimator as its range is ±150 arc second. However, if the faces 1/4, 2/5, 3/6, 4/7, 5/1, 6/2 and 7/3 are probed (i.e., about 154◦ 17 08.57 ), 154◦ 15 can be generated by the indexing table and the nominal difference 2 08.75 = 128.57 can be measured by the Elcomat HR autocollimator. This was the measurement approach of UME which enabled the calibration of the seven-sided polygon (Fig. 4). Fig. 4. Explanation of the novel technique for calibration of seven-sided polygon. The polygon faces were set such that the nominal autocollimator reading would be half of 128 which is ±64 . Thus, where the autocollimator is used at similar nominal readings all the time where in the end only differences are relevant, the calibration errors of the autocollimator in the range of 128,57 are minimized. After the adjustments and leveling were performed, the readings for faces were taken as given in Table 1. Fig. 5 illustrates the measurements on the first pair of faces 1/4. The same procedure follows with the pairs 2/5, 3/6, 4/7, 5/1, 6/2 and 7/3 after rotation (shift) of the polygon on the indexing table face-by-face. Thus, the used angle interval 154◦ 15 of the table is the same for all pairs of faces and the indexing table error is eliminated (see Eqs. (6)–(14)). For each face pair measurement, the deviation from nominal difference 128.57 was calculated. As each face of the polygon is probed twice and the circle is closed to complete 360◦ in this method, the average of the deviations shown in Table 1 The readings taken from the autocollimator (in arc second) Face 1 Face 4 Difference Mean of differences Standard deviation of difference values over 10 measurements 64.120 64.110 – – 64.125 −64.760 −64.760 – – −64.705 128.880 128.870 – – 128.830 128.857 0.06 Deviation from nominal value = 128.857 − 128.571408 = 0.286 418 T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 Fig. 5. Measurement of a seven-sided polygon with the novel technique. (a) First measurement: Face 1. (b) Second measurement: Face 4. Table 2 is the error of indexing table for that certain interval. Mathematically this is derived as follows. The 3-pitch angle intervals γ i (shown in Fig. 4) are measured by readings Mi of the autocollimator difference: γi = Mi + θ (6) where θ is the unknown, but constant (can vary in repeated operations due to random errors of the indexing table and the manipulation) angle between the two positions of the indexing table of 154◦ 15 nominal. Summation over all angles and γi = 1080◦ (closure condition 3 × 360◦ ) gives from Eq. (6) 7 1080◦ j =1 Mj − (7) θ= 7 7 This is replaced in Eq. (6) and gives: 7 1080◦ j =1 Mj γ i = Mi − + 7 7 Finally, the deviations of the cumulative pitch angles β i between the faces were calculated using the γ i values. Angle 1/4 (=β 4 ) was directly taken as γ 1 and the other cumulative angles were calculated as following (Fig. 6): β1 = γ1 + γ2 + γ3 + γ4 + γ5 + γ6 + γ7 − 1080◦ = 0◦ (trivial case) (8) β2 = γ1 + γ2 + γ3 + γ4 + γ5 − 720◦ β3 = γ1 + γ2 + γ3 − 360◦ (9) (10) Table 2 Processing of the readings taken from the autocollimator (in arc second) Mi Faces Deviation Deviation − average (Mi − M1 M6 M4 M2 M7 M5 M3 1/4 2/5 3/6 4/7 5/1 6/2 7/3 0.286 0.805 0.216 −0.421 0.371 −1.455 −0.388 0.370 0.888 0.300 −0.337 0.455 −1.372 −0.304 Seven times indexing table error −0.587 (sum) Indexing table error −0.084 (average) 0.000 (sum) 7 j =1 Mj /7) γi γ1 γ6 γ4 γ2 γ7 γ5 γ3 T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 419 Fig. 6. Determination of cumulative pitch angles β i . β 4 = γ1 (11) β5 = γ1 + γ2 + γ3 + γ4 + γ5 + γ6 − 720◦ (12) β6 = γ1 + γ2 + γ3 + γ4 − 360◦ (13) β7 = γ1 + γ2 (14) The pitch angles α i and their deviations can easily be calculated using the cumulative pitch angles β i and their deviations (Fig. 2). Another way of describing this method is as follows: The polygon is regarded as unfolded in seven 3-pitch angle intervals of 3 × 360◦ /7 ≈ 154◦ 17 , making up 1080◦ in total. The method gives the differences between these seven intervals, and with the closure condition (the sum must be zero) this gives all absolute angles. 4.3. Evaluation of uncertainty Earlier, uncertainties of angle calibration using circle closure were analyzed by Tyler Estler [12]. The uncertainty of the measurement has been calculated according to “ISO Guide to the expression of uncertainty in measurement (GUM)” [10]. The ISO Guide states: “The uncertainty in the results of a measurement generally consists of several components which may be grouped into two categories according to the way their numerical value is estimated; Type A: those which are evaluated by statistical methods; Type B: those which are evaluated by other means”. It also states that “imported values” or single results from equipment or techniques, which have had prior evaluations of uncertainty, should be treated as Type B uncertainty contributions. 4.3.1. Uncertainty budget For setting up an uncertainty budget according to the GUM, first the model function is needed which relates measurements Mi to the measurements γ i and β i . In the general case, taking n as the number of polygon faces, and ρ as the number of pitch angle intervals measured in once, Eq. (7), describing the special case n = 7 and ρ = 3 can be generalized as: n ρ × 360◦ j =1 Mj γi = Mi − + n n M 1 ρ × 360◦ j =i j = Mi 1 − − + (15) n n n assuming uncorrelated measurements Mi with standard uncertainty uM , it follows for the standard uncertainty in γ i : n ∂γi 2 2 2 (16) uM uγ = ∂Mj j =1 n j =1 (∂γi /∂Mj ) 2 can be calculated as follows. 420 T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 Mi is one of the Mj starting from j = 1 to j = n. With, 1 ∂γi =− , ∂M1 n 1 ∂γi =1− , ∂Mi n = 1 ∂γi =− , ∂M2 n = − (n−1) times 2 + (n − 1) n2 1 u2M = 1 − u2M n (17) This shows that the uncertainty uγ in the 3-pitch angle intervals γ (n = 7) are slightly less than the uncertainties uM in the measurements M. However, when summing up these angles to obtain the cumulative pitch angles β i , the uncertainties uγ can not just be added quadratically as the quantities γ i are correlated. To relate the cumulative pitch angles to the uncorrelated measurements, the model function for a summation of angles γ i is written according to Eqs. (8)–(14) (disregarding the constants 360◦ , 720◦ and 1080◦ ) generally up to ρ × 360◦ as: γ i = γ1 + γ 2 + · · · + γ m i=1 (in Eqs. (8) − (14), m = 1 . . . 7) (18) considering γ i = Mi − n Mj j =1 n β= m mρ × 360◦ = 1− Mj n n + ρ × 360◦ n n m mρ × 360◦ Mj + n n (19) j =1 n j =1 (∂β/∂Mj ) 2 can be calculated using: m ∂ ∂β 1− = (M1 + M2 + · · · + Mm ) ∂Mj ∂Mj n m (Mm+1 + Mm+2 + · · · + Mn ) n mρ × 360◦ + n − ∂β m m ∂β ∂β = 1− = 1− , ,..., ∂M1 n ∂M2 n ∂Mm m = 1− n ∂β m ∂β m m ∂β =− , = − ,..., =− ∂Mm+1 n ∂Mm+2 n ∂Mn n Some book-keeping on the appearance of these terms yields: from Eq. (15), j = 1 to m → m times, j = m + 1 to n → (n − m) times β can be calculated as follows: m j =m+1 For the uncertainty in β the partial derivatives to the measurements Mi must be taken: n ∂β 2 2 uM (20) u2β = ∂Mj Now m j =1 j =m+1 1 2 1 2 1 2 1 2 2 = 1− + − + − + ··· + − u n n n n M 1 n m n m m Mj − Mj n n j =1 j =1 1− Mj − m n ∂γi 2 2 = uM ∂Mj = m mρ × 360◦ Mj + n n j =1 j =1 we find that β = m + n Mj − j =1 ∂γi ∂γi 1 1 = − ,..., =− ∂M3 n ∂Mn n uγ 2 m thus we obtain: n ∂β 2 2 uM ∂Mj j =1 m 2 m 2 m 2 = 1 − + 1 − + · · · + 1 − n n n u2β = γi i=1 (M1 + M2 + · · · + Mn ) ρ × 360◦ = M1 − + n n (M1 + M2 + · · · + Mn ) ρ × 360◦ + + M2 − n n + · · · + Mm − (M1 +M2 + · · · +Mn ) + n ρ×360◦ n m times m 2 m 2 m 2 u2 + − + − + ··· + − M n n n n−m times T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 421 Fig. 7. The characteristic graph showing the uncertainties of cumulative angles uβ against the face number m. m 2 m2 = 1− m + 2 (n − m) u2M n n m2 = m− u2M n (21) so for n = 7 and m = 1, . . . , 7 this gives uncertainties of respectively 0.92, 1.20, 1.31, 1.31, 1.20, 0.92 and 0 times the uncertainties in measurements uM . This means that the uncertainty values for each β value will be different. The characteristic graph given in Fig. 7 explains this. It shows that uβ is maximum for m = n/2 in the case of largest separation between two faces, m = 0 and m = n are the trivial cases referring to differences between the same face (no. 1). As can be clearly seen in Table 2, the M values are used to calculate the corresponding γ values using Eq. (15) and then Eq. (19) is used to calculate the β values (e.g., Eqs. (8)–(14)). Uncertainty values for each β value can be calculated using Eq. (21). In Table 3 the uncertainty values for each β value are also given. Note that the uncertainty in the pitch angles uα = 1.20 × uM . It is apparent that m = 5 and m = 2 are valid for β 2 and β 7 (see Eqs. (9) and (14)), respectively. uα can be calculated as u2α = 1.43 × uM and uα ≈ 1.20 × uM using Eq. (21). As β2 = α2 , (β7 = 360◦ −α 1 ), β 2 and β 7 are in fact pitch angles (Fig. 6) and their uncertainty values are equal to each other as shown in the Table 3. It can be concluded that Eq. (21) is generally valid for the variance of the accumulated angle in a divided circle. Below we list the contributions to the uncertainty in the pitch angle uα . 4.3.1.1. Type A. Repeatability: The standard deviation of readings over 10 measurement results is 0.1 , so uMi = 0.1 . This means that the standard deviation of the mean of √ this value M = Mi /n is 0.1 / 10 = 0.03 . In α the standard uncertainty will be 1.2 × 0.03 ≈ 0.04 and the degrees of the freedom is 10 − 1 = 9. 4.3.1.2. Type B. 1. Autocollimator errors (specified in its calibration certificate): The maximum deviation is 0.02 according to the calibration certificate. Considering that it is rectangular distribution the degrees of the freedom is νi → ∞ and the standard uncertainty uAC in α is: uAC = 1.2 × 0.02 /31/2 = 0.02 2. Uncertainty of the autocollimator error: The uncertainty associated with the calibration result is declared as 0.03 in the calibration certificate with coverage factor k = 2 (95% confidence level). Considering that it is normal distribution the degrees of the freedom ν i is 400 and the standard uncertainty uCE in α is: uCE = 1.2 × 0.03 = 0.02 2 3. Contribution from polygon pyramidal errors: The reflected faces of the polygon are in practice not in the square position in relation to the measuring plane by small tilts referred as pyramid errors. In that case, the measuring plane is the plane in which the sum of the squares of the pyramid errors of all measuring faces is Table 3 The uncertainty values for each β value Mi γi βi 1 2 3 4 5 6 7 γ1 γ2 γ3 γ4 γ5 γ6 γ7 β4 β7 β3 β6 β2 β5 β1 Note: β1 = 0◦ is the trivial case, which explains that uβ = 0. uβ = γ1 = γ 1+ γ 2 = γ1 + γ2 = γ1 + γ2 = γ1 + γ2 = γ1 + γ2 = γ1 + γ2 + γ3 + γ3 + γ3 + γ3 + γ3 − 360◦ + γ 4 − 360◦ + γ 4 + γ 5 − 720◦ + γ 4 + γ 5 + γ 6 − 720◦ + γ 4 + γ 5 + γ 6 + γ 7 −1080◦ 0.92 1.20 1.31 1.31 1.20 0.92 0.00 × × × × × × × uM uM uM uM uM uM uM 422 T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 a minimum. Due to 10 arc seconds pyramidal error, the cross-talk between X- and Y-axes is experimentally verified as 0.1 arc second. This is also taken as rectangular distribution which makes the standard uncertainty upy due to this error in α: upy = 1.2 × 0.1 = 0.07 31/2 and the degrees of the freedom ν i is 100. 4. Resolution of the autocollimator: The resolution of the autocollimator is 0.005 . Considering that it is rectangular distribution this gives a standard uncertainty ur in α of: ur = 1.2 × 0.005 = 0.004 31/2 and the degrees of the freedom is νi → ∞. 5. Estimated uncertainty introduced by non-centrality of beam on the polygon face: This is about 0.05 . Considering that it is rectangular distribution this gives for the standard uncertainty uC in α: uC = 1.2 × 0.05 = 0.04 31/2 and the degrees of the freedom is νi → ∞. 6. Difference between the normal and inverted polygon position: The standard deviation of differences between the normal and inverted position for α is measured as uni = 0.05 and the degrees of the freedom is νi = (7 − 1) = 6. 4.3.2. Combined and expanded uncertainty The combined standard uncertainty, being the root sum square of the all uncertainty contributions, is given by: Uc(α) = [(0.04 )2 + (0.02 )2 + (0.02 )2 + (0.07 )2 + (0.004 )2 +(0.04 )2 + (0.05 )2 ]1/2 = 0.11 (k = 1) The effective degrees of freedom ν eff of the combined standard uncertainty from the Welch−Satterthwaite [10] is given by νeff (0.11 )4 = = 93 [((0.04 )4 /9) + ((0.02 )4 /∞) + ((0.02 )4 /400) + ((0.07 )4 /100) + ((0.004 )4 /∞) + ((0.04 )4 /∞) + ((0.05 )4 /6)] Then the appropriate coverage factor can be taken as k = 2 from the t-distribution for the above value of effective degrees of freedom. If the combined standard uncertainty is expressed for confidence level of 95% with, the expanded uncertainty in α is given by: Ue(α) = 0.22 (k = 2) For the expanded uncertainty in β we take as the maximum uncertainty 1.31 Uα = 0.24 Ue(β) = 1.2 5. Results and discussions The cumulative angle deviations of the seven-sided polygon reported by UME are given in Table 4 for normal and inverted position of the polygon. As the cumulative angle deviations relate to the datum face (Face 1), any bias error in the measurement of this face enters as a constant into all values of β i . In order to eliminate this dependence on the error of a single face, the Pilot Laboratory (PTB) preferred to relate the values of β i to the average of all faces. These values are called reduced angle deviations βi r [13]. βi r = βi − n 1 βk n (22) k=1 where i = 1, . . . , n: the face number The above definition states that ni=l βi r = 0 and the deviation from the nominal angle between any two faces is equal to the difference between their reduced angle deviations. The advantage of using the reduced angle deviation is that the value relates a single face to all others while the cumulative angle deviation relates to the first face only. Thus, the results of different laboratories can be evaluated less dependent on a single deviating result. Calculating β i in this way would change, and further complicate Eqs. (19) and (21), probably giving a slightly smaller value. As the differences will be small and because in use of the polygon the results are usually referred to the first polygon face, we consider our used equations and uncertainties as most useful. Table 5 illustrates the UME reduced angle deviations of the seven-sided polygon, the weighted mean as a reference value of the EUROMET intercomparison for each face, and the difference of the reduced angle deviations from the weighted mean of the faces for normal position. Table 6 Table 4 Cumulative angle deviations of the seven-sided polygon reported by UME (in arc second) Polygon in normal position Polygon in inverted position Faces Cumulative angle deviation Faces Cumulative angle deviation 1–1 1–2 1–3 1–4 1–5 1–6 1–7 1–1 β 1 = 0 −1.343 −0.271 0.370 −0.455 0.029 0.033 β 1 = 0 1–1 1–2 1–3 1–4 1–5 1–6 1–7 1–1 β 1 = 0 −1.302 −0.347 0.331 −0.395 0.092 0.007 β 1 = 0 T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 423 Table 5 Comparison of UME results with reference values of EUROMET intercomparison for normal position of polygon (in arc second) Face number Reference values (weighted mean) UME results Difference of UME results from the reference values 1 2 3 4 5 6 7 0.23 −1.08 −0.11 0.52 −0.19 0.38 0.25 0.23 −1.11 −0.04 0.60 −0.22 0.26 0.27 0.00 −0.03 0.07 0.08 −0.03 −0.12 0.02 Table 6 Comparison of UME results with reference values of EUROMET intercomparison for inverted position of polygon (in arc second) Face number Reference values (weighted mean) UME results Difference of UME results from the reference values 1 2 3 4 5 6 7 0.21 −1.08 −0.08 0.52 −0.19 0.37 0.24 0.23 −1.07 −0.12 0.56 −0.16 0.32 0.24 0.02 0.01 −0.04 0.04 0.03 −0.05 0.00 Table 7 Comparison of UME results with reference values of EUROMET intercomparison for mean of normal and inverted position of polygon (in arc second) Face number Reference values (weighted mean) UME results Difference of UME results from the reference values 1 2 3 4 5 6 7 0.22 −1.09 −0.09 0.52 −0.19 0.37 0.25 0.23 −1.09 −0.08 0.58 −0.19 0.29 0.25 0.01 0.00 −0.01 0.06 0.00 −0.08 0.00 Fig. 8. Comparison of EUROMET 371 reference values and UME results in the uncertainty limits. 424 T. Yandayan et al. / Precision Engineering 26 (2002) 412–424 shows the similar values for inverted position and Table 7 shows for mean of normal and inverted position [13]. It should be noted that the weighted mean is calculated by the Pilot Laboratory (PTB) using participant’s results and their associated standard uncertainties. It is accepted as the reference value. Participant’s results are checked against the reference values with their associated uncertainties. The closeness between the UME results and the reference values are evaluated considering the uncertainties. Fig. 8 shows a graph plotted using the values in Table 7. It can be clearly seen that the results agree with the reference values far within the uncertainty limit; expressed as a standard deviation, the difference is only 0.04 . The difference between normal and inverted position is quite small. The standard deviation of this difference among seven faces is 0.05 . All participants apart from UME have used one of two known standard measuring methods, either the cross-calibration or the two-autocollimator technique. The reference values are calculated using all results. The agreement between UME results and reference values apparently states that the new method applied by UME proves to be working well for such kind of applications. It should also be noted that the uncertainty of the applied method is also reasonably small and is the fifth smallest uncertainty among the 12 participants. 6. Conclusions 1. The new technique described in this paper for calibration of polygon angles with non-integer subdivision of an indexing table can be used by those having no high-resolution indexing tables/rotary tables, or wishing not to use any sub-indexing equipment. 2. Intercomparison results of UME with the new technique among the 12 European countries shows that the technique works very well. It is seen from the results that the measured polygon angles reported by UME corresponded very well with the reference values of EUROMET intercomparison and, thus, the validity of the method is proved. 3. The new technique has given an uncertainty of about 0.24 . This is a favorable value both in an absolute sense as well as when compared to the given participant uncertainties in the intercomparison. Acknowledgments The authors thank Dr. Reinhard Probst of PTB for his comments and support also for permitting publication of intercomparison results in the paper. Also Nuray Karaböce and Bülent Delibas are acknowledged for their kind help and support. References [1] Sim PJ. Angle standards and their calibration. In: Hewitt PL, editor. Modern techniques in metrology. Singapore: World Scientific, 1984. p. 102–21. [2] Toyoda K. Report of international comparison of angle standards. Japan: NRLM, 1990. [3] Evans JC, Taylerson CO. Revised by Palmer EW and Poole SP. Measurement of angle in engineering. NPL, 1986. [4] Lim JS. Precison angle measurement. Technical notes. Taedok Science Town (Republic of Korea): Length Standard Lab, Korea Standard Research Institute, 1985. [5] Probst R, Wittekopf R. EUROMET Project No. 371. Angle calibration on precision polygons. Instructions. Braunschweig (Germany): PTB, 1995. [6] Kiyono S, Zhang S, Uda Y. Self-calibration of precision angle sensor and polygon mirror. Measurement 1997;21(4):125–36. [7] Hume KJ. Engineering metrology. London: MacDonald & Co, 1957. [8] ANON, 1440 Precision index with mechanical or hydraulic lift and 1/10th second small angle divider. Service manual. Moore document number: 89116. Moore Special Tool Co, Inc., 800 Union, P.O. Box 4088, Bridgeport, CT 06607-0088s, USA. [9] Bell RJ. SI the international system of units. Approved translation of the international bureau of weights and measures. London: HMSO Pub., 1993. [10] Guide to the expression of uncertainty in measurement. Geneva: International Organization of Standardization (ISO), 1993. [11] Mutual recognition of national measurement standards and of calibration and measurement certificates issued by national metrology institutes (MRA). Paris: Bureau International des Poids at Measures (BIPM), 14 October 1999. [12] Tyler Estler W. Uncertainty analysis for angle calibrations using circle closure. J Res NIST 1992;103(2):141–51. [13] Probst R, Wittekopf R. EUROMET Project No. 371 Interlaboratory comparision angle calibration on precision polygons. Final report (Draft A2). Braunschweig (Germany): PTB, June 2000.
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