SiCI4
Silicon Tetrachloride
Transportation
Information
UN Number: 1818
(M)SDS Reference
P-4824
United States of America
Canada
CAS Number
10026 - 04 - 7
Mexico
Shipping Name SiliconSiliconSilicon
TetrachlorideTetrachlorideTetrachloride
Hazard Class
888
Label
CorrosiveCorrosiveCorrosive
General Description
Colorless, highly toxic, nonflammable
liquid with a pungent odor.
Product/
Purity
Part
Cylinder
Grade
Number
Semiconductor, 99.99% ST 4.0SP
ST55,
4.0 ST10
HCI TCS Other
Carbon BoronP
As Al
Resistivity Other
Chlorosilanes
Metals (1)
15 10
0.02
0.05 0.2
1.0
0.05
0.05
1000
5
ppm/wtppm/wt%wt
ppm/a ppb/a ppb/appb/appb/aohm-cm ppb/wt
Product/
Purity Part
Cylinder
BoronCarbon Donor Other
Grade
Number
(P & As) Chlorosilanes
Semiconductor, 99.98% ST 3.8SP ST55, ST10,
1
1
2
0.06% wt
3.8
SB
ppb/appm/a ppb/a
Resistivity
> 100 ohm-cm
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.
Available with hydrogen or nitrogen pressure pads upon request.
Other metals defined as Al, Fe, Ni, Cu, Cr, Mg, Mn, Zn, Ti, < 5 ppb/w each.
Other metals defined as Ni, Cu, Cr, Mg < 100 ppb/w each.
(1)
(2)
Cylinders
Cylinder
Style
Size
Type
in (cm)
ST55
Low Pressure Drum
46 x 24 (116.84 x 60.96)
ST10
Low Pressure Drum
30 x 12 (76.2 x 30.48)
SB
Low Pressure Drum
44 x 9 (111.7 x 22.8)
Connection
CGA/DISS
Based on
application
Based on
application
Based on
application
Pressure psig (bar)
0
Volume
lb (kg)
600 (272)
Gross Weight
lb (kg)
850 (385)
0
100 (45)
150 (68)
0
110 (50)
142 (65)
i
Contact your Praxair representative about equipment
recommendations for Silicon Tetrachloride.
1-877-PRAXAIR
www.praxairdirect.com
B•75
Section B – Pure Gases
Product/
PurityPart
CylinderHCl TCS Al
Fe Other
GradeNumberMetals (2)
Fiber Optic, 4.0 99.99% ST 4.0FO
ST55, 15
10
25
50
100
ST10
ppm/wt ppm/wt ppb/wtppb/wtppb/wt