Electronic Chemicals
Honeywell
Ammonium Hydroxide
Honeywell
Ammonium
Hydroxide
various grades and
packaging available
O-
N+
H
Appearance
and Odor
Colorless, transparent liquid
with very pungent odor
Odor Threshold
5–20 ppm
may not have changed significantly, the
Vapor Pressure
460mm Hg at 68˚F (30˚C)
demand for purity has increased dramati-
Formula Weight
35
cally.
Specific Gravity
0.901 (25%), 0.895 (30%) (H2O=1)
Water Solubility
Completely soluble in water
Density
7.5 lbs/gallon
Boiling Point
39.7˚C (25%), 30.4˚C (30%)
Melting Point
-57.7˚C (25%), -91.5˚C (32%)
Hazard Class
8
used in semiconductor manufacturing for
over 30 years. While fabrication processes
Device manufacturing of today and tomor-
H
H
overview
Ammonium Hydroxide (NH4OH) has been
H
H
row has little tolerance for contaminants
on the wafer surface. Honeywell has devoted a considerable amount of time and
resources to help ensure that customers
benefits
receive high-purity chemicals to meet their
• Reduced contamination and
defect densities
• Centrally located manufacturing facility enabling a wide
etch process latitude
• Guarantees for a range of
specifications
• Tunable to customers’ needs
design and yield goals.
features
• Ultra High-purity (UHP)
Ammonium Hydroxide
• Efficient logistics and supply
• In-line and finished-product
quality monitoring
• Various grades available
• Multiple container sizes
Product Characteristics:
• 1-year shelf life
• Available in 1-gallon bottles,
drums, totes and bulk
The typical specification guidelines and
typical analytical results should be used as a
reference only. Actual results may vary
depending upon grade, package type and
configuration. Furthermore, specifications
and typical reporting limits are subject to
change. Therefore, please contact your sales
representative to discuss in further detail
process capabilities and specification limits
that can be mutually agreed upon.
Honeywell Electronic Materials
USA: 1-509-252-2102
China: 86-21-28942481
Germany: 49-5137-999-9199
Japan: 81-3-6730-7092
Korea: 82-2-3483-5076
Singapore: 65-6580-3593
Taiwan: 886-3-6580300 ext.312
www.honeywell.com/sm/em
Specification
Assay (wt %)
Color
Appearance
Residue after Ignition
Residue after Evaporation
Substances Reducing KMnO4 as (O2)
Chloride
Nitrate
Phosphate
Sulfate
Carbon Dioxide
Aluminum
Antimony
Arsenic
Barium
Beryllium
Bismuth
Boron
Cadmium
Calcium
Chromium
Cobalt
Copper
Gallium
Germanium
Gold
Iron
Lead
Lithium
Magnesium
Manganese
Molybdenum
Nickel
Niobium
Potassium
Silver
Sodium
Strontium
Tantalum
Thallium
Tin
Titanium
Vanadium
Zinc
Zirconium
UNITS
—
APHA
—
—
—
—
Cl
NO3
PO4
SO4
CO2
Al
Sb
As
Ba
Be
Bi
B
Cd
Ca
Cr
Co
Cu
Ga
Ge
Au
Fe
Pb
Li
Mg
Mn
Mo
Ni
Nb
K
Ag
Na
Sr
Ta
Tl
Sn
Ti
V
Zn
Zr
TYPICAL
VLSI
28.0-30.0
7
—
2 ppm
—
To Pass Test
300 ppb
400 ppb
200 ppb
800 ppb
10 ppm
30 ppb
25 ppb
25 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
200 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
30 ppb
Packaging Group III
SPEC GUIDELINES
ULSI
SLSI
28.0-30.0
28.0-30.0
7
7
To Pass Test To Pass Test
2 ppm
—
—
—
To Pass Test To Pass Test
200 ppb
100 ppb
400 ppb
100 ppb
100 ppb
50 ppb
200 ppb
100 ppb
10 ppm
3 ppm
3 ppb
1 ppb
3 ppb
1 ppb
3 ppb
1 ppb
1 ppb
1 ppb
10 ppb
1 ppb
10 ppb
1 ppb
2 ppb
1 ppb
1 ppb
1 ppb
8 ppb
1 ppb
3 ppb
1 ppb
1 ppb
1 ppb
1 ppb
1 ppb
1 ppb
1 ppb
4 ppb
1 ppb
1 ppb
1 ppb
10 ppb
1 ppb
3 ppb
1 ppb
1 ppb
1 ppb
2 ppb
1 ppb
1 ppb
1 ppb
10 ppb
1 ppb
5 ppb
1 ppb
10 ppb
1 ppb
5 ppb
1 ppb
1 ppb
1 ppb
5 ppb
1 ppb
1 ppb
1 ppb
10 ppb
1 ppb
10 ppb
1 ppb
1 ppb
1 ppb
1 ppb
1 ppb
10 ppb
1 ppb
3 ppb
1 ppb
10 ppb
1 ppb
Although all statements and information contained herein are believed to be
accurate and reliable, they are presented without guarantee or warranty of any
kind, express or implied. Information provided herein does not relieve the user
from the responsibility of carrying out its own tests and experiments, and the
user assumes all risks and liability for use of the information and results
obtained. Statements or suggestions concerning the use of materials and processes are made without representation or warranty that any such use is free of
patent infringement and are not recommendations to infringe any patent. The
user should not assume that all toxicity data and safety measures are indicated
herein or that other measures may not be required.
PB1021011Rev9
©2011 Honeywell International Inc.
TYPICAL REPORTING LIMITS
VLSI
ULSI
SLSI
29.0
29.0
29.0
<7
<7
<7
—
—
—
<2 ppm
<2 ppm
—
—
—
—
—
—
—
<300 ppb
<200 ppb
<100 ppb
<400 ppb
<400 ppb
<100 ppb
<200 ppb
<100 ppb
<50 ppb
<800 ppb
<200 ppb
<100 ppb
<10 ppm
<10 ppm
<3 ppm
<0.30 ppb
<0.03 ppb
<0.01 ppb
<0.25 ppb
<0.03 ppb
<0.01 ppb
<0.25 ppb
<0.03 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.10 ppb
<0.01 ppb
<0.30 ppb
<0.10 ppb
<0.01 ppb
<0.30 ppb
<0.02 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.08 ppb
<0.01 ppb
<0.30 ppb
<0.03 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.04 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.10 ppb
<0.01 ppb
<0.30 ppb
<0.03 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.02 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.10 ppb
<0.01 ppb
<0.30 ppb
<0.05 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.05 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<2 ppb
<0.05 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.10 ppb
<0.01 ppb
<0.30 ppb
<0.10 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.01 ppb
<0.01 ppb
<0.30 ppb
<0.10 ppb
<0.01 ppb
<0.30 ppb
<0.03 ppb
<0.01 ppb
<0.30 ppb
<0.10 ppb
<0.01 ppb