CBr4 Gas Injector
Description
Carbon Tetrabromide (CBr4 ) is an excellent choice as a p-type
dopant used in III-V materials. It is sufficiently versatile in MBE
deposition techniques where very accurate and reproducible
p-type doping of epitaxial materials is required.
SVT Associates CBr4 module is easily adaptable to any MBE
system with safety and ease of operation the major features of the
design. The gas handling system is enclosed within a safety gas
cabinet. Carbon Tetrabromide is introduced by using a pressure
control system to control the flow of vapor. The gas panel allows
the user to precisely control the introduction of low flow rate CBr4
into the growth Chamber.
To Existing Turbo Pump
Cables
Controllers
Features
CBr4 Gas
• Adaptable to any MBE System
9.8
• High Performance Gas Injector
• Advanced Gas Handling System
12.8
Vent Ducting Ataches Here
25.5
• Safety and Simple Operation
Power Supply
Components
Gas Box
Gas Injector Source
12.0
• G
as Injector with Heater
(Custom Lengths Available)
• Temperature Controller
(Rack Mountable)
• Double Jacketed Gas Lines
Heater Assembly
w/Gas Tube
Schematic drawing of the CBr4 delivery module.
Dimension are in inches.
Models
Flange Size
SVTA-CBR4-275
2.75" CF (70 mm)
SVTA-CBR4-450
4.50" CF (114 mm)
SVTA-CBR4-600
6.00" CF (152 mm)
Gas Handling System
• External Manual Adjustable Valves
• Thermal Leak Valve and Controller
• Cold Cathode Gauge and Controller
Options
• Pneumatic Valves
• Pneumatic Valve Controller
• Bakeout for Gas Lines
T
S
MBE
7620 Executive Drive | Eden Prairie, MN 55344-3677 | USA
Phone: 952-934-2100 | Fax: 952-934-2737 | Email: [email protected] | www.svta.com
Engines for Thin Film Innovation
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