LINEAR GUIDE

Parallel Linear Gripper Clean Type
HP04NL Series
Long Stroke Type
Long Life
Perfect for clean rooms
Excellent
CENTERING
Accuracy
◆±0.07mm or less
Piping Port on 2 faces
◆Excluding φ8mm
Fluorine Grease
Positioning Hole
◆Rear Face
◆Bottom Face
Suction port
◆Internal cylinder
HP04NL Series
Fluorine Grease
◆Bearing Part
Use of
LINEAR GUIDE
◆Withstand load, withstand moment
(high rigidity)
◆High accuracy
(repeat accuracy: ±0.01 mm or less)
◆Gripping at a long point and overhang
gripping are available.
Parallel Linear Gripper Clean Type (Long Stroke Type)
Sensor Switch Groove
71
Parallel Linear Gripper Clean Type (Long Stroke Type)
HP04NL Series
■ Model Code No.
HP04NL
10 C
※
HAE
ZE235 A 2
Number of
Switches
Series Name
1:1 Switch
2:2 Switches
Bore Size
8: 8mm
10:10mm
16:16mm
20:20mm
Switch Lead Wire
Length
Action Type
A:1m
B:3m
C : Double Acting
●Switch Type No Code: No Switch
●Gripper Adaptor Type
No Code: No Gripper Adaptor
HAE (excluding φ32 and φ50)
ZE135
HFE (excluding φ8, φ32 and φ50)
HFE-L:Large Diameter Type
(φ16 only)
ES13
2 Wire System Solid State Switch, Straight Type
ZE155
ES(P)15
3 Wire System Solid State Switch, Straight Type
HP04NL Series
●Detailed specifications→P.76
ES23
ZE255
ES(P)25
3 Wire System Solid State Switch, L-shaped
●Switch details→P.521∼528
Parallel Linear Gripper Clean Type (Long Stroke Type)
■Internal Structure Diagram
Parts List
Name
NO
7
9
13
12
Material
1
Main Body
Aluminum Alloy
2
Head Cover
Aluminum Alloy
3
Piston Rod
Stainless Steel
4
Piston
Aluminum Alloy
5
Magnet
Resin
11
10
8
3
6
Pressure Cover
Aluminum Alloy
7
Linear Bearing
Bearing Steel
6
8
Action Lever
Carbon Steel
9
Knuckle
Stainless Steel
16
5
17
4
11 Hexagon Socket Head Bolt Stainless Steel
15
2
12 Press Fit Pin
Carbon Tool Steel
13 Press Fit Pin
Carbon Tool Steel
14
72
ZE235
2 Wire System Solid State Switch, L-shaped
1
10 Fulcrum Pin
Carbon Tool Steel
14 Hole Locating Snap Ring Carbon Tool Steel
15 O Ring
NBR
16 Rod Packing
NBR
17 Piston Packing
NBR
■Specifications
Fluid
Air
Maximum Operating Pressure[MPa]
Proof Pressure
[MPa]
Operating Temperature
[℃]
0.7
1.05
0∼60 (No Freezing)
Lubrication
Not Required (Required for sliding parts of the machine) Only φ8 required
Pipe Bore
M3×0.5(HP04NL-8, HP04NL-10)
M5×0.8(HP04NL-16, HP04NL-20)
Maximum Operating Cycle
[Cycle/min]
120
Centering Accuracy
[mm]
±0.07
Repeat Accuracy
[mm]
±0.01
Applicable Switch
Action
Type
Model
ZE, ES Type (Solid State Switch)
Minimum Opening/ Gripping Force Outside Dimensions
Bore Size Operating Closing
[N]
(T x W x L)
Stroke
[mm] Pressure
[mm]
[MPa]
[mm] Close Open
0.22
8
5.8
9.9
13×26×32
27
HP04NL-10C
10
0.2
12
10
15.6
20×45×49
90
HP04NL-16C
16
0.12
16
26
39
25×56×56
168
HP04NL-20C
20
0.1
22
45
60
32×73×73
368
■Allowable Load and Allowable Moment
FX
MA
MB
MC
Load and
Moment
Model
MA
MB
MC
FX
[N] [N・m] [N・m] [N・m]
HP04NL-8
12
0.04
0.04
0.08
HP04NL-10
50
0.4
0.4
0.8
HP04NL-16
120
1
1
2
HP04NL-20
200
1.5
1.5
3
Parallel Linear Gripper Clean Type (Long Stroke Type)
Note) The grip force is measured at the intermediate position of the opening/closing stroke. It is an effective value
when the grip point L is 30 mm and the pressure is 0.5 MPa.
The opening force of the single acting type indicates the spring force.
When this product is used with an extremely short stroke, it may work badly because of the lack of oil of the guide.
HP04NL Series
8
HP04NL-8C
Double
Acting
Product
Mass
[g]
73
Parallel Linear Gripper Clean Type (Long Stroke Type)
HP04NL Series
■Effective Gripping Force
Closing Force (Double Acting Type)
15
0.7MPa
0.5MPa
5
0
0.3MPa
10
20
30
0.7MPa
10
5
0.3MPa
Gripping Point L [mm]
60
0.7MPa
30
20
0.3MPa
10
0
90
0.5MPa
Gripping Point L [mm]
30
60
90
120
Gripping Point L [mm]
HP04NL-20C
0.7MPa
0.5MPa
40
0.3MPa
20
50
100
150
Gripping Point L [mm]
Opening Force (Double Acting Type)
30
0.7MPa
0.5MPa
5
0.3MPa
0
10
20
30
40
Gripping Point L [mm]
90
HP04NL-20C
0.7MPa
75
0.5MPa
50
0.3MPa
25
50
100
150
Gripping Point L [mm]
HP04NL-10C
60
0.7MPa
20
0.5MPa
0.3MPa
10
0
30
60
90
Gripping Point L [mm]
Gripping Force [N]
HP04NL-8C
Gripping Force [N]
Gripping Force [N]
Parallel Linear Gripper Clean Type (Long Stroke Type)
10
0
74
30
HP04NL-16C
60
0
Gripping Force [N]
HP04NL Series
Gripping Force [N]
80
40
0.5MPa
0
40
HP04NL-10C
Gripping Force [N]
HP04NL-8C
Gripping Force [N]
Gripping Force [N]
10
HP04NL-16C
0.7MPa
45
0.5MPa
30
0.3MPa
15
0
30
60
90
120
Gripping Point L [mm]
■Gripping Point Limit Range
HP04NL-8
HP04NL-10
40
30
0
0
20
.4
0
0
0
.7
10
0
.5
.6
M
M
10
.3
M
M
P
P
a
a
P
a
P
P
M
Overhang H[mm]
Overhang H[mm]
40
a
a
20
30
40
0
30
20
10
0
20
Gripping Point L[mm]
a
a
a
40
60
80
90
HP04NL-20
50
70
30
0
0
0
0
.4
.3
.2
M
M
P
.5 MP a
M a
0
.
P
0 6M a
.7
P
M a
P
a
20
Overhang H[mm]
40
P
a
10
40
60
80
100
120
0.
40
It shall be 5 to 10% of the effective gripping force or
any value less than that although it differs depending
on the coefficient of friction between the attachment
and the workpiece and the shape. It shall be greater
than that when great acceleration or impact is applied
during workpiece transportation.
Pa
Pa
0.
5M Pa
6M Pa
7M Pa
Pa
0.
20
0
30
0.
60
90
120
Gripping Point L[mm]
●Mounting of the attachment
●Guide for selecting a model for the workpiece weight
2M
3M
4M
Gripping Point L[mm]
Workpiece
Gripping Point
H
L (distance gripping point) and H (overhang distance)
of the attachment to be mounted to the lever shall be
within the range specified in the above drawing
(Gripping point limit range). If they exceed the limit
range, excess moment will be applied to the guide,
causing troubles that have a bad influence on the life
and accuracy (e.g. finger backlash). Even if they are
within the limit range, the attachment shall be as small
and light as possible.
0.
0.
L
150
Parallel Linear Gripper Clean Type (Long Stroke Type)
20
60
HP04NL Series
Overhang H[mm]
a
P
a
Gripping Point L[mm]
HP04NL-16
0
P
a
P
P
P
P
M
M
M
M
M
M
.2
.3
.4
.5
.6
.7
0
0
0
0
0
75
Parallel Linear Gripper Clean Type (Long Stroke Type)
HP04NL Series
■Outline Dimensional Drawing of Gripper Adaptor
HAE Type
D
A
A
B
C
D
HAE-8
10
10
3
HAE-10
15
15
3
HAE-16
15
15
HAE-20
15
15
K
H
E
F
0.8
8
1.3
10
3
1.3
3
1.3
Product Mass[g]
(Including Bolts)
J
K
L
Ancillary Bolt
(x2)
15
9
13
2.8
M2.5×0.45×6L
17
10
16
3.4
M3×0.5×8L
11
34
26
14
22
4.5
M4×0.7×10L
20
45
35
16
26
5.5
M5×0.8×10L
28
G
H
I
10
9
20
11
11
23
10
16
17
10
18
21
6
HFE Type
2−φL
J
Parallel Linear Gripper Clean Type (Long Stroke Type)
1.3
A
K
φE
φG−0.01
−0.04
HP04NL Series
76
Code
J
I
C
B
Type
F
−0
φE−0.03
−0.01
φG −0.04
2−φL
I
H
Code
Ancillary Bolt (x3)
Gripper Mounting (x2) Adapter Fixing (x1)
Product Mass[g]
(Including Bolts)
A
E
G
H
I
J
K
L
HFE-10
15
6
11
23
17
10
16
3.4
M3×0.5×16L
M3×0.5×12L
14
HFE-16
18
8
17
34
26
14
22
4.5
M4×0.7×20L
M4×0.7×16L
35
HFE-16L
18
10
17
34
26
14
22
4.5
M4×0.7×20L
M4×0.7×16L
33
HFE-20
19
13
21
45
35
16
26
5.5
M5×0.8×20L
M5×0.8×20L
55
Type
CAD data provided
■Dimensions
HP04NL-8C
(Closing Port)
(Opening Port)
(Positioning Pin)
Depth 1
(Positioning Hole)
Depth 4
Depth 3.5
View on Arrow A
Depth 1
(Positioning Hole)
Parallel Linear Gripper Clean Type (Long Stroke Type)
Depth 3
HP04NL Series
When opened: 12.8 +1.8
0
0
When closed : 5.4 −0.6
(Suction Port)
Through-Hole
77
Parallel Linear Gripper Clean Type (Long Stroke Type)
HP04NL Series
■Dimensions
CAD data provided
HP04NL-10C
Plug*1
Depth 1.5
(Positioning Hole)
pt
De
(Closing Port)
h
2
(Positioning Pin)
HP04NL Series
When opened: 20.8 +1.5
0
0
When closed : 9.4 −0.6
(Suction Port)
(Opening Port)
Depth 6
Depth 2
(Positioning Hole)
Depth 4.5
Parallel Linear Gripper Clean Type (Long Stroke Type)
Depth 5
Depth 2.5
Depth 4
View on Arrow A
Depth 6
Lower Hole φ3.4 Through-Hole*2
Depth 2.5
(Positioning Hole)
Depth 5
*1) Two faces have an air port. Select the one you use according to the mounting condition.
*2) Note
that
main
is mounted
using
the
through-hole,
you to
cannot
mount thecondition.
opening side sensor.
*1)
2 when
facesthe
have
an body
air port.
Select the
one
you
use according
the mounting
78
*2) Note that when the main body is mounted using the through-hole,
you cannot mount the opening side sensor.
CAD data provided
■Dimensions
HP04NL-16C
Plug*1
Depth 1.5
(Positioning Hole)
h
pt
De
3
(Closing Port)
(Positioning Pin)
Depth 3
(Positioning Hole)
(Opening Port)
Depth 7
Depth 5
Depth 3
Depth 5
View on Arrow A
Depth 6
Depth 3
(Positioning Hole)
Lower Hole φ3.4 Through-Hole*2
Depth 5 (Both sides)
Parallel Linear Gripper Clean Type (Long Stroke Type)
Depth 6
HP04NL Series
When opened: 27.2 +2.4
0
0
When closed : 12.4 −0.6
(Suction Port)
*1) Two faces have an air port. Select the one you use according to the mounting condition.
*1)when
2 faces
air is
port.
Selectusing
the one
use according
to the mount
mounting
*2) Note that
the have
main an
body
mounted
the you
through-hole,
you cannot
thecondition.
opening side sensor.
*2) Note that when the main body is mounted using the through-hole,
you cannot mount the opening side sensor.
79
Parallel Linear Gripper Clean Type (Long Stroke Type)
HP04NL Series
■Dimensions
CAD data provided
HP04NL-20C
Plug*1
h
pt
(Opening Port)
De
Depth 1.5
(Positioning Hole)
3
(Opening Port)
(Positioning Pin)
HP04NL Series
When opened: 37.5 +2.2
0
0
When closed : 16.6 −1.0
(Suction Port)
Depth 3
(Positioning Hole)
Depth 9
Depth 7
Parallel Linear Gripper Clean Type (Long Stroke Type)
Depth 8
Depth 3.5
Depth 7
View on Arrow A
Depth 8
Depth 3.5
(Positioning Hole)
Lower Hole φ4.2 Through-Hole*2
Depth 6 (Both sides)
*1) Two
have
an an
air air
port.
Select
the the
oneone
you you
use use
according
to the
condition.
*1) faces
2 faces
have
port.
Select
according
to mounting
the mounting
condition.
*2) Note
that when
the main
mounted
using the
through-hole,
you cannot mount the opening side sensor.
*2) Note
that when
the body
main is
body
is mounted
using
the through-hole,
80
you cannot mount the opening side sensor.
Parallel Linear Gripper Clean Type
HP04N・NL・NF Series
■Dust-proof Measure
A suction port linked to the inside of the main body is provided. Fine particles generated from the
sliding parts of the piston rod and the action levers are ejected to the outside of the clean room by
vacuuming them from the suction port for the purpose of contamination control. Use of the fluorine
grease for the bearing and the inside of the main body will reduce grease contamination.
Bearing
Action Lever
Suction Port
Fluorine Grease
Piston Rod
Operation Port
This product is blown by high cleanliness air in the clean environment after assembly and
inspection. It is packed by double antistatic bags for shipment.
Assembly,
Inspection
Packing,
Shipment
Double Packing
General Work
Environment
Clean Bench (Class 100)
General Work
Environment
For example, "Class 100" indicates that the number of particles of 0.5 μm or larger in size is
not more than 100 in the volume of 1 cf.
Test Conditions
Item
Outline Drawing of Tester
Specifications
HP04-8C、HP04-10C、HP04-16C、HP04-20C
HP04N-8C、HP04N-10C、HP04N-16C、HP04N-20C
HP04L-8C、HP04L-10C、HP04L-16C、HP04L-20C
HP04NL-8C、HP04NL-10C、HP04NL-16C、HP04NL-20C
Number of Products to be Tested
Working Pressure
Down Flow
0.17m/s
5 products each
60c.p.m
Load
No-load
Particle Counter
Suction Volume
ULPA Filter
0.5MPa
{5kgf/cm3}
Operation Frequency
Tester
Axial Flow Fan
Parallel Linear Gripper Clean Type
■Measurement of Generated Dust
・ NL
・ NF Series
HP04N
■Packing Measure
1.9m3/min
Vertical type as per JIS B9926
Dust amount measuring system in the vertical flow rate method (Fig.1)
28.3 /min
※The structure of the machine sliding part of the HP04NF series is same as that of the
HP04N series. Therefore, it is omitted from the materials to be tested on the assumption
that the HP04NF series is equal to the HP04N series in the dust measurement test.
Particle Counter
91
Parallel Linear Gripper Clean Type
HP04N・NL・NF Series
■Dust Amount Comparison
Initial value
(Average dust amount of a single product for 1000 times of operation)
(Piece)
10000
HP04-8C
HP04N-8C
HP04-10C
HP04N-10C
(Piece)
10000
HP04-16C
HP04N-16C
(Piece)
10000
1000
1000
1000
1000
500
500
500
500
300
300
300
300
100
100
100
100
50
50
50
50
0
(Piece)
10000
0
Standard Clean
Type Type
HP04L-8C
HP04NL-8C
(Piece)
10000
0
Standard Clean
Type Type
HP04L-10C
HP04NL-10C
(Piece)
10000
HP04L-16C
HP04NL-16C
(Piece)
10000
・ NL
・ NF Series
HP04N
1000
1000
1000
500
500
500
500
300
300
300
300
100
100
100
100
50
50
50
50
0
0
0
Standard Clean
Type Type
Standard Clean
Type Type
Parallel Linear Gripper Clean Type
Initial value
(Average dust amount of a single product for 1000 times of operation)
(Piece)
10000
HP04N-8C
(Piece)
10000
HP04N-10C
(Piece)
10000
HP04N-16C
(Piece)
10000
1000
1000
1000
100
100
100
100
10
10
10
10
HP04NL-8C
0 100 200 300 400
Number of operations (10000 times)
(Piece)
10000
HP04NL-10C
0 100 200 300 400
Number of operations (10000 times)
(Piece)
10000
HP04NL-16C
(Piece)
10000
1000
1000
1000
100
100
100
100
10
10
10
10
0 100 200 300 400
Number of operations (10000 times)
Standard Clean
Type Type
0 100 200 300 400
Number of operations (10000 times)
HP04N-20C
0 100 200 300 400
Number of operations (10000 times)
1000
0 100 200 300 400
Number of operations (10000 times)
HP04L-20C
HP04NL-20C
0.3μm or more
0.5μm or more
1000
0 100 200 300 400
Number of operations (10000 times)
Standard Clean
Type Type
0
Standard Clean
Type Type
■Changes in Duration (Clean Type)
HP04-20C
HP04N-20C
0
Standard Clean
Type Type
1000
(Piece)
10000
92
(Piece)
10000
0.5μm or more
0.3μm or more
HP04NL-20C
0 100 200 300 400
Number of operations (10000 times)
■Cleanliness Class of Clean Room
■ Indication method
The cleanliness is categorized into several cleanliness classes depending on the particle
concentration in the clean room.
■ History of standards
The first cleanliness class standard is Fed. Std. 209 (Federal Standard) issued in 1963. The final
revised version is Fed. Std. 209E issued in 1992. In Japan, JIS B9920 was issued in 1989.
■ Fed. Std. 209D
Up to Fed. Std. 209D, the cleanliness is expressed by the particle concentration in the volume of
1 cf (cubic feet) (1 ft on a side) using "feet" (unit used in the United States). In general,
expressions such as "Class 100" and "Class 1000" are based on this Standard. For example,
"Class 100" indicates that the number of 0.5μm particles in the volume of 1 cf is 100 or less.
■ Fed. Std. 209E
As one of the revised items in Fed. Std. 209E, the cleanliness class indication unit was changed
to the metric unit in the SI unit.
■ Units
1m=3.2803ft
1m3=35.31ft3
■ Dust Amount of HP04 Series Clean Type
The cleanliness indication of the clean room indicates the number of particles caused by dust in a
certain volume, that is "Concentration". The dust amount data of the clean type indicates local
"dust amount" generated during operation. Therefore, whether the product can be used in the
cleanliness differs because the influence of the dust amount differs depending on the use
conditions such as how many actuators are used and at which position the product is used
against the workpiece. Therefore, this result shall be considered as a guide.
Fed. Std.
209E
JIS B
9920
209D
Class2
10
1
Class3
Class
10
Class4
M3
M3.5
Class
100
Class5
M4
M4.5
Class
1,000
Class6
M5
M5.5
Class
10,000
Class7
M6
M6.5
M7
Class 100,000
Class8
m3
5μm
3
ft(cf)
m3
3
ft(cf)
(0.35)
̶
̶
(3.5)
̶
̶
0.875
10.0
0.283
̶
̶
106
3.00
35.3
1.00
̶
̶
309
8.75
2.83
̶
̶
30.9
Class
0.5μm
3
ft(cf)
1
M2
M2.5
m3
Class1
M1
M1.5
Class upper limit value
0.3μm
100
1,060
30.0
353
10.0
̶
̶
3,090
87.5
1,000
28.3
̶
̶
10,600
300
3,530
100
̶
̶
30,000
875
10,000
283
̶
̶
̶
̶
35,300
1,000
247
7
̶
̶
100,000
2,830
618
17.5
̶
̶
353,000
10,000
2,470
70
̶
̶
1,000,000
28,300
6,180
175
̶
̶
3,530,000
100,000
24,700
700
̶
̶
10,000,000
283,000
61,800
1,750
Parallel Linear Gripper Clean Type
Cleanliness Classification
・ NL
・ NF Series
HP04N
1ft=0.3048m
1ft3=1cf=0.02832m3
Note: Class upper limit values are specified for 0.1μm and 0.2μm as well. However, they are omitted from the table above.
93
Parallel Linear Gripper Clean Type
HP04N・NL・NF Series
■Terminology
Term
・ NL
・ NF Series
HP04N
Parallel Linear Gripper Clean Type
94
Description
Contamination Control
To plan, organize and implement the items required to
keep the required cleanliness for the inside, surface and
periphery of the limited space, product, etc.
Clean Room
A space whose contamination is under control. A space
where airborne particles are controlled to the limited
cleanliness level or lower, supplies to the space is kept
at the required cleanliness or better, and the
environment conditions such as temperature, humidity
and pressure are under control.
Biologicai Clean Room
A space whose microbial contamination is under control. A
space where airborne particles are controlled to the limited
cleanliness level or lower, supplies to the space is kept at the
required cleanliness or better, and the environment conditions
such as temperature, humidity and pressure are under control.
Clean Booth
Movable simple clean room with a curtain style wall and
a vertical blow type filter.
Clean Work Station
(Clean Work Bench)
A work table designed so that the air controlled under
the specified cleanliness level flows directly to the
target item.
High Efficiency Particulate
Air Filter
An air filter with a particle capture rate of 99.97% or
more for particles with a particle diameter of 0.3μm.
Ultra Low Penetration
Air Filter
An air filter with a particle capture rate of 99.9995% or
more for particles with a particle diameter of 0.1μm.
Down Flow
(Vertical unidirectional airflow)
A vertical unidirectional airflow system where air flows in
the room from the whole area of the ceiling and air flows
out from the whole area of the facing floor.
Cross Flow
(Horizontal unidirectional airflow airflow)
A horizontal unidirectional airflow where air flows in the
room from the whole area of one wall and air flows out
from the whole area of the facing wall.
Air Shower Booth
A small room to remove particles from operators and
their clothing by blowing them out forcibly.
Optical Particle Counter
Method
A method of asking the particle size and the number of
particles by making a thin flow of specimen to intersect
with a strong light and then converting the light diffused
by respective particles to electrical signals.
Cleanliness Level
The level of cleanliness ranked depending on the number
of particles in each size present in a certain volume.
Cleanliness Class
Classification of cleanliness levels
■Switch Groove Dimensions
φ5
φ50
B
8
10
16
20
15
17
24
30
B
3
10
12.5
16
B
B
B
Size
A
Code
A
A
■Switch Protrusion Distance ■Switch Mounting
The maximum switch protrusion
from the switch body end face
(when the levers are full closed)
is shown in the table below. Use
it as a guide for mounting.
■Switch Response Difference
Insert the switch into the switch
mounting groove. After setting
the mounting position, tighten the switch fixing screw with a
precision screwdriver.
The tightening torque shall be
0.1 N・m or less.
The distance from the position where
the levers move and the switch turns
on to the position where the levers
move in the reverse direction and the
switch turns off is called "response
difference".
Switch Fixing Screw
(M2.5×0.45)
L
φ8
φ10
φ16
φ20
2
0
0
0
Switch
Mounting
Groove
Response
Difference
φ8
0.3
φ10
0.3
φ16
0.4
φ20
0.4
Switch Operation Position (ON)
Switch Return Position (OFF)
■Switch Mounting Position Adjustment Method
For external gripping
②Insert the switch into the
switch mounting groove
of the main body in the
arrow direction.
③The LED lamp lights
up by turning on the
switch in the arrow
direction.
④Fix the switch by a switch fixing
screw at the position where the
switch is moved 0.6 mm in the
arrow direction from the position
where the lamp lights up in [3].
②Insert the switch into the
switch mounting groove
of the main body in the
arrow direction.
③The LED lamp lights
up by moving the
switch in the arrow
direction. It goes off
by moving it further.
④Fix the switch at the position that
is 0.6 mm moved from the position
where the LED lamp lights up when
it is returned in the arrow direction
(reverse direction) in [3].
For internal gripping
①Check the workpiece
internal gripping and
full opening.
Parallel Linear Gripper Clean Type
①Check the workpiece
external gripping and
full close.
・ NL
・ NF Series
HP04N
Cylinder
Bore
(mm)
Maximum
Protrusion
(mm)
Switch
Cylinder Maximum
Response
Bore Difference
(mm) (mm)
①Indicates the position where you need to check if the switch is ON. Mount the switch by adjusting it in the order from ① to ④.
95