PA200 Probe System
Facility Planning Guide
This guide contains information to help prepare your facility for the arrival of your PA200 probe system.
i
NOTE
Facility requirements for thermal systems are listed separately. See the Facility Planning
Guide specific to your thermal system for details.
Probe Station Requirements
Air and
Vacuum
Power
Environmental
Conditions
Vacuum
• Less than 200 mbar absolute
• Flow rate insignificant
• 8 mm (5/16-inch) hose (6 mm and 1/4-inch adapters included)
Compressed air for
vibration isolation table
•
•
•
•
Station
• 100–240 V AC nominal, 50/60 Hz, 500 VA
Protection class
• I (IEC 61140)
Filtered, dry and oil-free
Minimum 4 bar to 6 bar maximum
Flow rate insignificant
8 mm (5/16-inch) hose (6 mm and 1/4-inch adapters included)
Transient overvoltage
• Overvoltage category II (IEC 60364-4-443)
Fuse for main connector
Ensure that a 10 A lead fuse is available in your facility power line where the main
connector is plugged in.
Humidity
• Tool area: 25% to 60%
• Support equipment area: 25% to 60%
Temperature
• Operating range: 19° C to 24° C
• Target temperature: 22°C
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Additional
Equipment
NOTE
Keep electronics rack side ventilators and air expellers clear for air circulation.
Pollution level
• 1 (IEC 60664)
Clean room class
• Class 6 corresponding to DIN EN ISO 14644-1
Tolerance
• 1K
Vibrations
The facility should be free of vibrations caused by other equipment.
ProbeShield
100 mm extra space is necessary on the sides and rear for cables. Compressed air with
max. –70°C dew point, min. 6 bar, min. 3000 l/h (air dryer optional)
ShieldEnclosure
SE1000
Width
• 1000 mm + 2 x 60 mm for handles
Depth
• 1220 mm, max. 1400 mm
Height
• 1275 mm, 1900 mm with VIT
Extra space is required for access to the facility.
Dimensions
PN 153-070-E
Thermal chuck
May require a coolant: water at 1 liter/minute, 207 kPa max.
PC table
Extra space is required for the PC next to the probe system.
Vibration isolation table
For dimensions and feet support points, see diagrams.
Station + accessories
• 700 mm (W) x 750 mm (D) x 770 mm (H) (with microscope in raised position)
• Additional height added by optional accessories such as cameras and laser cutters can
add up to a maximum of 900 mm.
Electronics rack
• 450 mm (W) x 400 mm (D) x 230 mm (H), with connectors installed
Joystick Controller
• 280 mm (W) x 250 mm (D) x 140 mm (H), with connector installed
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PA200 • 1
PA200 Probe System
Weight
Station (with vibration
isolation table)
• 133 kg (293 kg)
Shipping
Dimensions
and Weight
Probe station box
• Dimensions: 1250 mm x 870 mm x 1160 mm
• Gross weight: 260 kg
Accessories box
• Dimensions: 800 mm x 1200 mm x 800 mm
VIT box
(with darkbox adapter)
• Dimensions: 1000 mm (W) x 1000 mm (D) x 1050 mm (H)
• Gross weight: 245 kg
• Net weight: 215 kg
(approx. values)
• Dimensions: 1500 mm (W) x 1400 mm (D) x 1120 mm (H)
• Gross weight 260 kg
• Net weight 230 kg
Dimensions (in mm)
Side view
Min. Height = 1520 mm
Front view
Min. Depth = 750 mm
Min. Width = 800 mm
PN 153-070-E
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PA200 • 2
PA200 Probe System
Vibration Isolation Tables
VIT 800
VIT 801/VIT 802
78 mm
800 mm
680 mm
720 mm
800 mm
50 mm
680 mm
800 mm
720 mm
800 mm
Notice of Normal Use
The statements, technical information and recommendations contained herein are believed to be accurate as of the date hereof. Information in this document is subject to
change without notice. The user has the responsibility to read and follow carefully all safety and use instructions. Since the conditions and methods of use of the product and
of the information referred to herein are beyond our control, Cascade Microtech, Inc. expressly disclaims any and all liability as to any results obtained or arising from any
use of the product or reliance on such information; NO WARRANTY OF FITNESS FOR ANY PARTICULAR PURPOSE, WARRANTY OF MERCHANTABILITY OR ANY
OTHER WARRANTY, EXPRESS OR IMPLIED, IS MADE CONCERNING THE GOODS DESCRIBED OR THE INFORMATION PROVIDED HEREIN.
The information provided herein relates only to the specific product designated and may not be applicable when such product is used in combination with other materials or
in any process. The user assumes all liability for misuse or alteration of the product, or for use in any manner not described in the Cascade Microtech, Inc. documentation.
Nothing contained herein constitutes a license to practice under any patent and it should not be construed as an inducement to infringe any patent and the user is advised
to take appropriate steps to be sure that any proposed use of the product will not result in patent infringement.
© Copyright 2015 Cascade Microtech, Inc.
All rights reserved. Cascade Microtech is
a registered trademark of Cascade
Microtech, Inc. All other trademarks are
the property of their respective owners.
Data subject to change without notice.
Cascade Microtech, Inc.
Corporate Headquarters
toll free: +1-800-550-3279
phone: +1-503-601-1000
email: [email protected]
Germany
Singapore
phone: +49-35240-73-333
phone: +65-6873-7482
email: [email protected]
email: [email protected]
Japan
Taiwan
phone: +81-3-5615-5150
phone: +886-3-5722810
email: [email protected]
email: [email protected]
China
phone: +86-21-3330-3188
email: [email protected]
PN 153-070-E
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PA200 • 3