MEMS capacitive accelerometers for
Instrumentation and Industrial Market
Bahram Arbab, Sales Director Europe & Asia
Content
Purposes :
MEMS Capacitive Accelerometer for
Instrumentation and Industrial Market
} Instrumentation
and Industrial Conditions
} Sensors
Classification & Comparison
} Sensors
used in Instrumentation and Industrial market
} Our
target markets
} What
does an accelerometer measure?
} Typical
} Why
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Industrial Application for MEMS Capacitive Accelerometer
Colibrys product is successful for Instrumentation and Industrial
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September 2011
Instruments & Industrial conditions
} Instruments
= Sensors and Actors
– Instruments are distinguished by output:
Binary (on/off)
Analog (continuous)
} Industrial
conditions:
– temperature range
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–
–
–
–
–
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commercial: (0°C to +70°C)
industry (-40°C..+85°C)
extended industrial(–55°C..+125°C)
mechanical resilience (shocks and vibrations) EN 60068
protection: Electro-Magnetic (EM)-disturbances EN 55022, EN55024)
protection: NEMP (Nuclear EM Pulse) - water distribution, civil protection
mounting and replacement
robust connectors
power: DC mostly 24V= because of battery back-up, sometimes 48V=)
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Sensor Classifications
} Vibration and Acceleration measurement:
voltage created from capacitive charge or piezoelectric materials
} Position and Speed measurement:
rate or voltage of output signal changes with input
} Stress and Strain measurement:
applied force results in changes in resistance
} Temperature measurement:
resistance or voltage of output signal changes with temp
} Pressure and Flow measurement:
often derived from sensors listed above
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Comparison Accelerometer Sensor Type
Sensor Type
Advantages
High Performance
Electro-mechanical
sensors
„
Piezo-resistive sensors
(vibration and shock
sensor)
„
„
High G
Piezo-electric sensor
(vibration sensor)
„
Large bandwidth
„
„
High g range
„
MEMS capacitive
accelerometers
„
Measures DC
acceleration
„
Measures DC
acceleration
„
Reliable & Accuracy
Excellent price
performance
„
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Disadvantages
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„
Fragile
„
Expensive
„
Long term stability
Poor temperature
performance
„
No DC response
Limited stability and
temp. performance
Low bandwidth (up to
5000 HZ)
Relatively Fragile (up
to 20’000g)
„
Example of products
Electro-mechanical
Piezo Resistive
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Piezo Electrical
MEMS Capacitive
What is MEMS?
Mechanical Die
Temperature
sensor
3mm
Micro-controller
packaging
2mm
Die attach
Low
power
ASIC
• MEMS
or Micro Electro Mechanical Systems is a technique of
combining Electrical and Mechanical components together to
produce a system of miniature dimensions
• By
miniature, we mean dimensions less than the thickness of
human hair !!!!
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Out of plane MEMS Silicon sensor
MEMS technology
} Bulk
silicon micromachining
– Wet and DRIE etching
} Assembly
of 3 wafers
– High temp. Fusion Bonding (SFB)
– Sealing at low and controlled
pressure
} Full
functional test at wafer level,
including capacitive response
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Accelerometer’s market
} The
market segments for the accelerometers differentiate themselves
by the performance vs volume.
– Low volume can generally afford high performances and higher associated cost
– High volume are in principle fully driven by cost
Performance / Reliability
High
Low
Annual volume
1K
} MEMS
10 K
100 K
1M
10 M
100 M
capacitive accelerometers combine performance and cost
– High performance products are now available for medium to high volume (few
hundreds K) industrial applications at reduced costs
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MEMS Sensors in Industrial & Instrumentation Markets
} Accelerometers
} Gyroscopes
} Pressure sensors
} Gas sensors
} Thermal sensors
} Micro-fuel cells
} Mass flow controllers
} Chemical sensors
} Acoustic sensors
} Optical sensors
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MEMS for Industrial applications
}
Industrial, Instrumentation and Energy markets are taking advantage
of the high end MEMS capacitive technology
}
Attractiveness of the products is ensured by a better control of costs
without concessions on performances
}
The Capacitive technology allows measurement of different physical
parameters:
1. Tilt products
2. Vibration and shock products
3. Seismic products
4. Inertial products
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What does an Accelerometer Measure?
1. Tilt:
Measurement of static gravitational force
}
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e.g. Tilt and inclination
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September 2011
Tilt products for industrial applications
}
From Colibrys product to high accurate instrumentation for tilt measurement
Colibrys Product
}
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MS9001.D
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September 2011
Digital Compass
Instrumentation
Tilt products for industrial applications
} Many
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industrial applications require precision tilt measurements
Platform stabilization (antenna, camera, solar cells, instrumentation table…)
Railway technology (tilting trains)
Structure monitoring (dams, bridges, nuclear plants…)
Industrial reference systems
Geodesic measurements
Pointing and distance measurement
} Latest
Colibrys tilt sensors, the MS9001, has been specifically designed
for platform stabilization
– MS9001, MS9002 and MS8002 products
– 1g and 2g with good long term stability, low
power and low temperature coefficients
} Colibrys
can adapt and offer industrial grade products at lower costs
for volume requirements
– Custom MS9001 product
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What does an Accelerometer Measure?
2. Vibration:
Measurement of dynamic acceleration
}
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e.g. Vibration and shock measurement
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Vibration and shock for industrial applications
}
From Colibrys product to bogie monitoring on high speed train
Colibrys Product
}
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VS9000.D
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Repacked and
qualified for train
High Speed Train
Siemens Velaro
Vibration and shock products for industrial applications
} Vibration
–
–
–
–
–
measurement is a pure industrial application
Industrial machinery vibration control
Preventive maintenance
Railway security, safety and comfort
Structure monitoring (bridges, building, wind turbine towers…)
Testing (automotive, truck, planes…)
} The
VS9000 family of products is advantageously replacing traditional
piezo-resistive solutions
– VS9000 product family available from 2g
to 200g with a bandwidth > 1kHz @ -5%
– Performances inherited from the high end
inertial products (DC response, long term
stability, low temperature coefficients, high
reliability under harsh environments)
} Colibrys
can adapt and offer industrial grade products at lower costs
for volume requirements
– Custom VS9000 products
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September 2011
What does an Accelerometer Measure?
3. Seismic:
Measurement of dynamic acceleration
}
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e.g. Earthquake measurement
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September 2011
Seismic products for industrial applications
}
From Colibrys product to high accurate instrument for seismic measurement
Colibrys Product
}
}
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SF1500
SF2006
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September 2011
Seismic Measurement
Instrument
Structural Health
Monitoring
Seismic products for industrial applications
} MEMS
capacitive products from Colibrys offer a unique solution for
ultra low noise seismic sensing
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–
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Strong motion earthquake monitoring
Free field seismic monitoring
Structure health monitoring (HUMS)
Homeland security (perimeter, border security)
Railway (track monitoring)
} The
seismic products are advantageously replacing traditional
geophones
– SF2006 and SF1600 are both class B
seismic sensors
– Technology can reach class A performance
(< 0.1µg/√Hz) Æ ongoing developments
} Three
axis solutions will soon be available (SF3600 and SF3006
products)
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September 2011
What does an Accelerometer Measure?
4. Inertia:
Inertial measurement of velocity and position
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}
Acceleration single integrated for velocity
}
Acceleration double integrated for position
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September 2011
Inertial products for industrial applications
}
From Colibrys product to Industrial Application for Navigation Systems
Colibrys Product
}
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MS9000.D
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September 2011
Inertial Measurement
Unit - IMU
Navigation System
for industrial
Inertial products for industrial applications
} Inertial
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–
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–
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measurements are used in a wide range of applications
Railway technology
GPS backup – Dead reckoning
Land and sea civilian guidance and navigation (i.e. blind people)
Robotics
Directional drilling
} Colibrys
offers advanced solutions for high end and small / medium
volume requirements
– MS8000 and MS9000 families of products
– 1g to 200g with good long term stability, low
temperature coefficients, low VRE
} Colibrys
can adapt and offer industrial grade products at lower costs
for volume requirements
– Custom MS9000 like family of products
– 1g to 30g
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Typical Accelerometer Application
INERTIA
SEISMIC / VIBRATION
TILT / INCLINATION
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Advanced manufacturing techniques
COLIBRYS is a world-leading supplier of standard and semi-custom MEMS
based motion sensors to the harsh-environments (Military, Aerospace and
Energy) and safety critical (Industrial and Instrumentation) applications.
(MEMS: Micro Electro Mechanical Systems)
}
Business focus:
– High performance motion sensors for Energy, Mil/Aerospace and Industrial
markets
– Contract Manufacturing services
}
Colibrys has the full breadth of MEMS capability, undertaking:
– MEMS sensor and systems design
– Sensor manufacturing
– Packaging and Test
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Colibrys value proposition
} Products
based on unique high performance sensor
technology
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Performance: stability 100 ppm (near term target 10 ppm)
Noise S/N up to >140 dB
Robustness up to 20’000 g
Near term products up to 200°C
Cost / performance ratio
} Robust
Technology with proven manufacturing record
} Partnership with key customers
– Alignment of product roadmaps
– Product customizing and qualification
– Custom sub-systems development
} Security
–
–
–
–
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of supply
In-house wafer fab and assembly line
Qualified off-shore assembly line for low cost / high volume products
Qualified and proven processes (ISO9001)
No ITAR restrictions
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September 2011
Thank you for your attention
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