Electronic Supplementary Material (ESI) for Lab on a Chip
This journal is © The Royal Society of Chemistry 2011
Complete Plastic Nanofluidic Devices for DNA Analysis via
Direct Imprinting with Polymer Stamp
Jiahao Wua,c, Rattikan Chantiwas b,c¶, Alborz Amirsadeghi a,c, Steven A. Soper b,c and
Sunggok Park* a,c
a
Mechanical Engineering Department, Louisiana State University,
Department of Chemistry, Louisiana State University,
Center for BioModular and Multi-Scale Systems, Louisiana State University,
¶
Current affiliation: Department of Chemistry and Center of Excellence for Innovation in Chemistry, Faculty of Science, Mahidol
University Rama 6 Road, Bangkok 10400, THAILAND.
b
c
Supplementary Information
1. Details about funnel inlet
The funnel structure consists of 16 trapezoid prisms. All the trapezoid prisms were mill by FIB one by one. The size of
each trapezoid prism was listed as below.
Table 1. Details about each trapezoid in funnel inlet
Top edge
Bottom edge
Height
Depth
Trapezoid #
length (μm)
length (μm)
(μm)
(μm)
1
20
50
6.5
10
2
12
20
6.5
6
3
6
12
6.5
4
4
4
6
6.5
3
5
1.8
4
6.5
2
6
1.2
1.5
6.5
1.2
7
0.8
1.2
3
0.8
8
0.6
0.8
3
0.6
9
0.5
0.6
3
0.5
10
0.35
0.5
3
0.35
11
0.26
0.35
3
0.26
12
0.2
0.26
3
0.2
13
0.15
0.2
2
0.15
14
0.12
0.15
2
0.12
15
0.09
0.12
2
0.09
16
0.075
0.09
2
0.075
Electronic Supplementary Material (ESI) for Lab on a Chip
This journal is © The Royal Society of Chemistry 2011
2. Details about reproducibility during NIL
The reproducibility of polymer stamp was studied by reuse the stamp for 10 times. SEM images were taken from 1st
and 10th copy of PMMA substrate. As it shows in Fig 1 and Fig 2, no significant deformation was observed on both
micro and nanoscale patterns.
Fig 1. The SEM images of funnel inlet on PMMA substrate for the 1st and 10th replica. The images were taken with a
tilt angle of 70°. No significant deformation was found after using UV-resin stamp for multiply times.
Fig 2. The SEM images of nanochannel on PMMA substrate for the 1st and 10th replica. No significant deformation of
nanochannel was found after using UV-resin stamp for multiply times.