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Product Safety Summary
SUBSTANCE NAME
phosphine
hydrogen phosphide
trihydrogen phosphide
phosphorus trihydride
CYPURE® phosphine CVD source
CYPURE ULTRA Phosphine
GENERAL STATEMENT
Phosphine is extremely toxic (may be fatal if inhaled), catches fire if exposed to air and causes thermal burns
of eyes and skin.
CHEMICAL IDENTITY
EC Name:
EC-No. :
CAS-No. :
REACH Registration No.:
IUPAC name:
Molecular formula:
Structural formula:
phosphine
232-260-8
7803-51-2
NA
phosphane
PH3
USES AND APPLICATIONS
High purity phosphine is commonly used in the electronics industry as an n-type dopant for silicon
semiconductor manufacture. It is also used in the production of III -V compound semiconductor devices such
as LEDs and laser diodes.
PHYSICAL CHEMICAL PROPERTIES
Appearance
Odor
Melting point
Boiling point/boiling range:
Vapor pressure:
Molecular Weight:
Specific gravity:
colorless gas
garlic
-133°C
-87°C at 760 mmHg
502 psig at 20°C
34
NA
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Flash point:
Flammability:
LogPow:
Product Safety Summary
pyrophoric
extremely flammable (catches fire if exposed to air)
NA
HEALTH EFFECTS
Based on the classification of the substance (REGULATION (EC) No 1272/2008) phosphine is classified to be
fatal if inhaled and to cause skin burns and eye damage. Workers should be properly instructed and
supervised in the handling of the substance.
EFFECT ASSESSMENT
Acute Toxicity
(oral/dermal/inhalation)
Irritation/Corrosivity
(skin/eye/respiratory tract)
Sensitization
(skin/respiratory tract)
Repeated Exposure
RESULT
Highly toxic. Phosphine may be fatal if inhaled.
Phosphine may cause skin burns and eye damage.
Phosphine is not known to be a skin sensitizer.
Carcinogenicity
Reproductive Toxicity
ENVIRONMENTAL EFFECTS
Phosphine is not classified as harmful by repeated exposure. A
LOAEL of 4.5 ppm and a NOAEL of 1 ppm were observed in mice
after exposures of 6 hours/day, 5 days/week for 13 weeks.
Phosphine caused chromosomal aberrations in male rat bone
marrow and lymphocytes. No effects were observed in female rats.
This substance is not classified as a carcinogen.
This substance is not classified as causing reproductive toxicity.
EFFECT ASSESSMENT
Aquatic Toxicity
RESULT
Phosphine is highly toxic to aquatic life.
Mutagenicity
FATE AND BEHAVIOR
Biodegradation
Bioaccumulation potential
PBT/vPvB conclusion
EXPOSURE
RESULT
Phosphine rapidly degrades in biological systems.
Phosphine has a low potential for bio-accumulation.
Phosphine is not considered to be persistent, bioaccumulating nor
toxic (PBT). This substance is not considered to be very persistent
nor very bioaccumulating (vPvB).
Human Health
Phosphine is used solely in industrial facilities. When the recommended risk management measures and
required operational conditions are observed, worker exposures are expected to be minimal during the
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Product Safety Summary
manufacture and industrial use of phosphine. There is no expected consumer exposure to phosphine,
including handling of finished products.
Environment
Due to physical/chemical characteristics phosphine has a low potential for bioaccumulation, rapidly degrades
in biological systems and accumulation in organisms is not expected. No direct release of phosphine to soil is
expected during manufacturing or industrial use. If a release does occur it is important to use appropriate
risk management procedures.
RISK MANAGEMENT RECOMMENDATIONS
Phosphine is classified as highly toxic by inhalation and may cause skin burns and eye damage. Working
with this substance requires the use of appropriate chemical resistant gloves, protective clothing. Where
exposure level is not known, wear an approved, positive pressure, self-contained respirator. Where exposure
level is known, wear approved respirator suitable for the level of exposure. Industrial workers should receive
task specific training on how to use the protective equipment and the correct use should be monitored. Food,
beverages, and tobacco products should not be carried, stored, or consumed where this material is in use.
Before eating, drinking, or smoking, wash face and hands thoroughly with soap and water. Continuously
monitoring of phosphine concentrations in the workplace is recommended. Emergency procedure should be
established for phosphine leaks. The following are first aid measures that should be taken if exposure should
occur:
•
•
•
•
Ingestion: Not an expected route of exposure.
Skin Contact: Not an expected route of exposure. Phosphine gas is not known to be absorbed
through skin.
Eye Contact: Rinse immediately with plenty of water for at least 15 minutes and seek immediate
medical attention immediately
Inhalation: Move person to fresh air. If person is not breathing, immediately call for emergency
medical support then, begin cardiopulmonary resuscitation including artificial respiration,
preferably with a bag-valve-mask device if possible. Rescuers within the areas of potentially
unsafe levels of this product (the "HOT ZONE") should employ appropriate personal protective
equipment such as a self-contained breathing apparatus (SCBA) during the rescue of the victim.
Call a poison control center or doctor for further treatment advice.
ENVIRONMENTAL PRECAUTIONS
Environmental exposure to phosphine is not anticipated and is limited due to the physical form of the
product.
GOVERNMENT AGENCY REVIEW
Phosphine is listed in the following Chemical Inventories: TSCA, ENCS, ISHL, AICS, DSL, KECL, PICCS and
IESCS.
REGULATORY INFORMATION/CLASSIFICATION AND LABELING
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Classification of the substance according to REGULATION (EC) No 1272/2008:
Flam. Gas 1
Press. Gas
Acute Tox. 2
Skin Corr. 1B
Aquatic Acute 1
Extremely flammable gas
Fatal if inhaled
Toxic by inhalation
Causes severe skin burns and eye damage
Very toxic to aquatic life
Other precautions include:
Use only outdoors or in a well-ventilated area. No smoking. Keep away from heat/sparks/open flames/hot
surfaces. Do not extinguish a leaking gas fire unless the leak can be stopped safely. Eliminate all ignition
sources if safe to do so. Protect from sunlight. Store in a well-ventilated place. Keep container tightly closed.
Store locked up. Wash contaminated clothing before reuse. Collect spillage. Dispose of contents/container in
accordance with local and national regulations.
CONCLUSION
Phosphine is used solely in the electronics industry semiconductor, LED and laser diode manufacture. Before
using phosphine, all workers should review the Material Safety Data Sheet and receive training on safety and
handling procedures, and recommended personal protective equipment. Considering these precautions, the
potential level of exposure to phosphine, in normal use, is considered to be very low.
CONTACT INFORMATION WITHIN COMPANY
For further information on this substance or product safety summaries in general, please contact:
Company:
Address:
Town/Country Postal code:
E-mail:
Worldwide Contact Info:
Cytec Industries
5 Garret Mountain Plaza
Woodland Park, NJ 07424 (USA)
[email protected]
www.cytec.com
GLOSSARY
Acute toxicity
Biodegradation
Harmful effect resulting from a single or short
term exposure to a substance.
Decomposition or breakdown of a substance under
natural conditions (actions of micro organisms
etc).
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Product Safety Summary
Bioaccumulation
Carcinogenicity
Chronic toxicity
Flash point
Genotoxicity
Hydrolyze
Mutagenicity
PBT
Persistence
Reprotoxicity
Sensitizing
Sediment
Vapor pressure
vPvB
DATE OF ISSUE
Progressive accumulation in living organisms of a
chemical substance present in the environment.
Substance effects causing cancer.
Harmful effect after repeated exposures or long
term exposure to a substance.
The lowest temperature at which vapor of the
substance may form an ignitable mixture with air.
Substance effect that causes damage to genes,
including mutagenicity and clastogenicity.
Undergo hydrolysis; decompose by reacting with
water.
Substance effect that cause mutation on genes.
Persistent, bioaccumulative, toxic chemical.
Refers to the length of time a compound stays in
the environment, once introduced.
Including teratogenicity, embryotoxicity and
harmful effects on fertility.
Allergenic.
Topsoil, sand and minerals washed from land into
water forming in the end a layer at the bottom of
rivers and sea.
A measure of a substance’s property to evaporate.
Very persistent, very bioaccumulative.
September 2012
REVISION
Version 1.0
ADDITIONAL INFORMATION
Further information can be found in the SDS.
DISCLAIMER
The information contained in this paper is intended as advice only and whilst the information is provided in
utmost good faith and has been based on the best information currently available, is to be relied upon at the
user’s own risk. No representations or warranties are made with regards to its completeness or accuracy and
no liability will be accepted by Cytec Industries for damages of any nature whatsoever resulting from the use
of or reliance on the information.
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