SEMOZON® AX8407
HIGHEST CONCENTRATION OZONE GENERATORS
W W W . M K S I N S T . C O M
Reactive Gas
AX8407 is the next
generation ozone
generator for ultra high
concentration and
extremely high purity
ozone.
Ozone is an environmentally friendly alternative to many chemical processes. It has a
high redox potential, can be generated at the point of use and is easily converted back to
oxygen. Typical semiconductor ozone applications include TEOS/Ozone CVD, Ta2O5 CVD,
photoresist strip, wafer cleaning, contaminant removal, surface conditioning, oxide
growth, and ALD. Ozone is also ideally suited for use in pharmaceutical and water
processing applications including cleaning, sterilization and disinfection, as well as
Clean-In-Place (CIP).
The SEMOZON AX8407 is the next generation in the MKS family of compact, high
concentration, ultra-clean ozone generators. Through design enhancements, the
SEMOZON AX8407 extends the capability of the patented MKS cell technology and
production-proven design of the ASTeX® AX8000 series generators to provide the highest
performance for it’s size.
The generator converts pure oxygen into ozone through silent electrical discharge and
achieves the highest output concentration levels available. The AX8407 is the highest
purity ozone generator on the market. It requires only minute levels of dopant nitrogen
gas, far below the levels required for competitive ozone generators. As a result, the ozone
is ultra-clean and the presence of contaminants, e.g. NOx compounds, is extremely low.
Features & Benefits
Highest Ozone Concentration and
Flow
Clean, Safe Alternative to
Conventional Chemical Processing
• Uniquely suited to high flow rate
processes
• Concentrations up to 18.5wt%
• High redox potential
• Flow rates from 10 to 40 slm
• Patented, welded cells with advanced
cooling
Ultra Clean Ozone
• Extremely low levels of dopant gas
reduce contaminants
• Lowest levels of NOx compounds
• Can be generated at the point of use
• Green chemical, easily converted back
to oxygen
Low Cost of Ownership
• No consumables, no preventive
maintenance
• No chemical disposal costs
CE, ETL and CSA compliant
Specifications and
Ordering Information
Model
AX8407
Maximum Ozone Output*
350 g/hr
Flow Range
10 – 40 slm
Operating Range
Ambient Temperature
10 – 40°C (50 – 104°F)
Nominal Cell Pressure (Delivery)
0.7 – 3.1 bar gauge (10 – 45 psig)
Control Interface
Front Panel Control and Remote Operation
Feed Gas
Oxygen
Grade 6 or better O2
Nitrogen
100 - 1000 ppm grade 5 or better N2
Cooling Water
Temperature
17 – 23°C (63 – 73°F)
Filtration
20 microns
Quality
Resistivity ≥50 KΩ/cm
Recommended flow
L/min
9.1 l/min minimum
Gpm
2.4 gpm minimum
AC Power
VAC (± 10%)
230 VAC
Phase
3Ø
Amps
Nominal Current 18A
Hz
50/60 Hz
Weight
61 kg (135 Lb)
Dimensions (W x D x H)
482 x 429 x 267 mm (19 x 16.89 x 10.5 in)
Compliance
CE mark, NRTL tested to UL and CSA standards
*@ 25 psi ozone delivery pressure and 17°C cooling water
Please contact your local MKS office for price and availability information.
AX8407 Front View
AX8407 Top View
O3 concentration (wt%)
20
18
16
14
12
AX8407 Rear View
10
10
15
20
25
30
35
40
O2 Flow (slm)
Typical Ozone Output in wt%
Dimensional Drawing —
Note: Unless otherwise specified, dimensions are nominal values in inches.
Global Headquarters
90 Industrial Way
Wilmington, MA 01887-4610
Tel: 978.284.4000
Tel: 800.227.8766 (in U.S.A.)
Web: www.mksinst.com
AX8407 - 11/06
© 2006 MKS Instruments, Inc.
All rights reserved.
MKS
ASTeX® Products
MKS
ASTeX® GmbH
90 Industrial Way
Wilmington, MA 01887-4610
Wattstrasse 11-13
D-13355 Berlin, Germany
Tel: 978.284-4000
Tel: +49.30.464.0030
Specifications are subject to change without notice.
ASTeX® and SEMOZON® are registered trademarks of MKS Instruments, Inc., Wilmington, MA.