Public
Public
Slide 2
January 2015
Public
Slide 3
January 2015
Agenda
• Chips are everywhere
• Introducing ASML
Chips are everywhere
• ASML’s place in the industry
• Lithography, the driving force behind Moore’s Law
• Real Estate
Faster, smaller, greener
Teun Wartenbergh
Director World Wide Real Estate
May 25th 2016
More than 200 billion ICs are made every year
Public
Slide 4
January 2015
Public
Slide 5
20 January 2016
IC units, in billions
Public
Slide 6
January 2015
250
In 2014, 221 billion
ICs were produced —
30 for every man,
woman and child on
the planet.
200
150
Introducing ASML
100
Global semiconductor
industry sales were
$333 billion.
50
2014
2013
2011
2012
2009
2010
2008
2006
2007
2004
2005
2003
2001
2002
1999
2000
1998
1994
1995
1993
1991
1992
0
1996
1997
It’s hard to imagine a world without chips
Data: WSTS
1
ASML makes the machines for making those chips
Founded in 1984 as a spin-off from Philips
A global presence
Public
Slide 7
20 January 2016
Public
Slide 8
January 2015
Public
22 March 2016
• Lithography is the critical tool
for producing chips
• All of the world’s top chip
makers are our customers
• 2015 sales: €6.3 bln
• More than 14,600 employees
(FTE) worldwide
3,300 employees
Source: ASML Q4 2015
2,500 employees
A market of 12 large ASML customers
A global presence
Public
Slide 10
January 2015
Wilton (CT)
Public
Slide 11
20 January 2016
Technology
Partnership Award
2014
San Diego(CA)
Korea
Veldhoven
Chandler (AZ)
8,800 employees
Over 70 sales and service offices located worldwide
Taiwan
Preferred
Quality Supplier Award
2014
‘Best In Value’ Award
2014
Top three with record 9.0 mark in VLSI’s
“BEST Chip Making Equipment” suppliers
2015
Company
2015 semi capex (est., $M)
Samsung
13,000
TSMC Group
9,000
Intel
7,200
SK Hynix
4,700
Globalfoundries
4,000
Micron Technology
3,800
Toshiba (incl. SanDisk)
3,095
Sony
1,991
Inotera Memories
1,836
United Microelectronics Group
1,800
SMIC Group
1,500
Infineon Technologies
896
Public
Slide 12
January 2015
ASML’s place in the industry
Source: Gartner, Q3 2015
2
Driving the semiconductor industry: Moore’s Law
Public
Slide 13
January 2015
… and more energy-efficient
Moore’s Law makes chips cheaper…
Public
Slide 14
20 January 2016
2008 + 2009 laptops
1.E+16
SiCortex SC5832
1.E+15
10
Later adjusted to two years,
the trend has held for more
than four decades.
$0.34 for 1 GB
1
1.E+13
486/25 and 486/33 Desktops
1.E+11
IBM PC
1.E+10
Cray 1 supercomputer
1.E+09
SDS 920
Commodore 64
1.E+07
Univac III (transistors)
1.E+06
1.E+05
Univac I
1.E+03
Eniac
1.E+02
Moore’s Law means doing more with less
2005
Total
2006
Total
2007
Total
2008
Total
2009
Total
2010
Total
2011
Total
Univac II
Regression results:
N = 76
Adjusted R-squared = 0.983
Comps/kWh = exp(0.440243 x year – 849.259)
Average doubling time (1946 to 2009) = 1.57 years
EDVAC
1.E+01
1.E+00
0,1
2004
Total
IBM PC-AT
IBM PC-XT
DEC PDP-11/20
1.E+08
1.E+04
NAND Flash price 1 GB [$]
Dell Optiplex GXI
IBM PS/2E + Sun SS1000
1.E+12
Computations per kWh
100
Gordon Moore (1965):
Number of transistors per
chip doubles every year.
Dell Dimension 2400
Gateway P3. 733 MHz
1.E+14
Flash price per GB (in dollars)
$110 for 1 GB
Public
Slide 15
January 2015
Computations per Kilowatt hour double every 1.5 years
1000
2012
Total
2013
Total
2014
Total
1940
2015
Est.
Total
1950
1960
1970
1980
1990
2000
2010
Source: Jonathan Koomey, Lawrence Berkeley National Laboratory and Stanford University, 2009
Moore’s Law means doing more with less
Public
Slide 16
January 2015
Public
Slide 18
January 2015
Public
Slide 17
20 January 2016
Cray 1: The first supercomputer
• 8 megabytes of memory
• Weight of an elephant (5.5 tons)
• 150 kilowatt power supply (enough
for 50 households)
• Freon cooling system
• $8.8 million ($30 million in today’s
dollars)
1976
ASML Real Estate
The supercomputer in your pocket:
a fraction of the materials,
price, power consumption
1976
2015
3
Introduction to ASML Veldhoven
Our locations in the Netherlands
June 2015
Welcome to where the magic happens
Confidential
Confidential
Slide 21
<Date>
Slide 19
26 January 2015
ASML Motion in Oirschot
Temporary offices at
High Tech Campus
in Eindhoven
Building 21 Eindhoven Airport
Main campus and
off-campus buildings
in Veldhoven
8.000
employees
(14.000 ww)
Our magic has two key ingredients: lab and fab
Lab-fab and our relentless focus on innovation
5.000
87
65.000+ m²
50.000+ m²
R&D engineers
nationalities
net office space
cleanroom space
Lab-fab and our relentless focus on innovation
Public
Slide 22
27 Aug 2015
Public
Slide 23
27 Aug 2015
Public
Slide 24
27 Aug 2015
PAS 2500 (1987)
Machine size (m)
L
A
B
F
A
B
80s
1985
Our first lab-fab:
‘Building 1’ in Veldhoven
Constructed between Nov 1984 –
Aug 1985. Our first machine was
launched at SEMICON West.
Multidisciplinary R&D environment of 5,000
engineers who design the lithography
machines that enable Moore’s Law
Cleanroom environment where lithography
machines are assembled, tested and adjusted
with diligence and care
90s
PAS 5500 (1995)
0.90 x 1.47 x 2.05
Machine size (m)
1.55 x 1.76 x 2.25
Transport weight (kg)
2500 kg
Transport weight (kg)
Cleanliness (ppm)
100.000
Cleanliness (ppm)
60.000
Number of utilities
3-7
Number of utilities
3-7
Cleanroom space
Ballroom-type
Cleanroom space
38 m², 152 m³
1991
1995
1997
1998
00s
2003
Office Building 3
Office Building 7
Office Building 8
ASML goes public. Production
capacity of Cleanroom Building
1 doubles.
Dubbed ‘Corporate
Technology Center’,
strong R&D focus.
20-floor office block houses
900 employees in a total
area of 18,500 m².
TWINSCAN is born.
Office Building 2
Scattered departments are
co-located. ASML climbs to
3rd position in world market
thanks to the PAS5500
stepper.
The campus is born:
Cleanroom Building 4
New 9,000 m2 cleanroom and new
high-speed wafer scanners help
ASML to become 2nd largest litho
vendor.
2007
2008
Construction starts on
Cleanroom Building 5,
Office Building 6
Construction to add 10,000 m²
of brand new cleanroom space
Cleanroom 5B and
gowning 5F open
Cleanroom 5B connects the main
cleanrooms 4 and 5. New cabins
available for NXT production.
80s
1985
Our first lab-fab:
‘Building 1’ in Veldhoven
Constructed between Nov 1984 –
Aug 1985. Our first machine was
launched at SEMICON West.
90s
1991
1995
1997
1998
5500 kg
00s
2003
Office Building 3
Office Building 7
Office Building 8
ASML goes public. Production
capacity of Cleanroom Building
1 doubles.
Dubbed ‘Corporate
Technology Center’,
strong R&D focus.
20-floor office block houses
900 employees in a total
area of 18,500 m².
TWINSCAN is born.
Office Building 2
Scattered departments are
co-located. ASML climbs to
3rd position in world market
thanks to the PAS5500
stepper.
The campus is born:
Cleanroom Building 4
New 9,000 m2 cleanroom and new
high-speed wafer scanners help
ASML to become 2nd largest litho
vendor.
2007
2008
Construction starts on
Cleanroom Building 5,
Office Building 6
Construction to add 10,000 m²
of brand new cleanroom space
Cleanroom 5B and
gowning 5F open
Cleanroom 5B connects the main
cleanrooms 4 and 5. New cabins
available for NXT production.
4
Lab-fab and our relentless focus on innovation
80s
Public
Slide 26
27 Aug 2015
XT (2004)
NXT (2008)
2.02 x 4.50 x 2.89
2.10 x 4.50 x 2.40
30.000 – 42.000 kg
45.000 kg
Cleanliness (ppm)
40.000
30.000
Cleanliness (ppm)
10.000
Number of utilities
12-18
18-25
Number of utilities
32
Cleanroom space
66 m2, 264 m³
95 m2, 475 m³
Cleanroom space
335 m², 1841 m³
Machine size (m)
Transport weight (kg)
90s
1985
1991
Our first lab-fab:
‘Building 1’ in Veldhoven
Constructed between Nov 1984 –
Aug 1985. Our first machine was
launched at SEMICON West.
1995
00s
1998
2003
Office Building 3
Office Building 7
Office Building 8
ASML goes public. Production
capacity of Cleanroom Building
1 doubles.
Dubbed ‘Corporate
Technology Center’,
strong R&D focus.
20-floor office block houses
900 employees in a total
area of 18,500 m².
TWINSCAN is born.
Office Building 2
Scattered departments are
co-located. ASML climbs to
3rd position in world market
thanks to the PAS5500
stepper.
The campus is born:
Cleanroom Building 4
2007
2008
Construction starts on
Cleanroom Building 5,
Office Building 6
Construction to add 10,000 m²
of brand new cleanroom space
2009
10s
New 9,000 m2 cleanroom and new
high-speed wafer scanners help
ASML to become 2nd largest litho
vendor.
Cleanroom 5B connects the main
cleanrooms 4 and 5. New cabins
available for NXT production.
7 partners
15.000 m³
20.000
steel
(1000 people)
concrete
engineering hours
The first factory and office space
dedicated to EUV systems
Cleanrooms in Wilton, San
Diego expand for EUV
6,800 m² of space dedicated
to EUV manufacturing:
includes aorta, cabins and
assembly
Wilton has added 418 m² for EUV
manufacturing and testing, while San
Diego is retooling 4,650 m² for EUV
manufacturing (ongoing)
Conventional approach is sequential engineering
Total cycle time 5-7 years
Master planning
15 km
With this (9,200 m2) cleanroom,
ASML’s total cleanroom space in
Veldhoven now tops 50,000 m²
Lab-fab also means machine and cleanroom are one
Public
Slide 29
27 Aug 2015
10.000.000 kg
mechanical piping
2015
Cleanroom 5H opens
Cleanroom 5C, gowning 5E
and Office Building 6 open
Building our new lab-fab needed a tailored approach
thermal capacity
235 km
97.000 kg
self interest
53 megawatt
electrical cabling
3.20 x 8.30 x 3.40
2014
2012
Cleanroom 5D open
Cleanroom 5B and
gowning 5F open
TRUST = competence x collaboration x flexibility
(scope/schedule/cost)
Confidential
Slide 27
<Date>
NXE (2011)
Machine size (m)
Transport weight (kg)
1997
June 2015
Our brand new EUV lab-fab will fuel the next decade
Public
Slide 25
27 Aug 2015
Land
Acquisition
Zoning &
Infra-structure
Engineering &
Budget
Permits
Tender &
Contracting
When machine design changes, the cleanroom has to change as well
Public
Slide 30
27 Aug 2015
Every day, our engineers do R&D, testing, assembly…
The machine is the heart
Realization
And it needs cabinets, source, software…
It fully integrates with the building
IN SPEC
ON TIME
IN BUDGET
750.000
ASML’s approach is concurrent engineering
Total cycle time 3-4 years
labor hours
Master planning
35
scope changes
Where it gets its utilities
All in a cleanroom
environment…
Land Acquisition
Zoning & Infra
Concurrent Engineering & Budget + scope change control
Permits
150 m
83 m³/s
2 m³/s
32
1000
distribution panels
air handling
pump capacity
different utilities
sensors
Contracting
Row 1
Row 2
etc.
5
Integration into plenum and CUB (Central Utility Building)
Ground
work
Super
structure
Shell &
installation
Utilities
Cleanroom
Ground
work
Transfer
Super
structure
Shell &
installation
Utilities
Cleanroom
Transfer
Public
Slide 32
27 Aug 2015
Public
Slide 31
27 Aug 2015
Public
Slide 33
27 Aug 2015
CUB
Plenum directly above cleanroom ceiling
Ground
work
Super
structure
Shell &
installation
Utilities
Cleanroom
•
The cleanroom has a 55-cm thick vibration-free concrete floor, weighing the amount of
1,000 Land Rover Discoveries
•
Foundation for the superstructure are 35m³ each
•
15.000 m³ of concrete
•
3.000.000 kg steel wire
•
1500 piles, each 12-23 meters deep: 25 km piles in total
Ground
work
Transfer
Super
structure
• Tolerances of 1 millimeter
Shell &
installation
Utilities
Cleanroom
Ground
work
Transfer
Super
structure
Shell &
installation
Utilities
Cleanroom
Transfer
Public
Slide 35
27 Aug 2015
•
Public
Slide 36
27 Aug 2015
Total of 32 utilities are supplied to factory–safely, efficiently and flexible to future
10
60.000 kVa
60 km
100 km
2 m³/s
83 m³/s
•
Total of 20.000 piles as base of an elevated floor (tolerance of 0.3 mm)
cooling towers
transformers
power cable
data cable
cooling water
make up air
•
Distribution of cabin utilities through floor, walls and ceiling
Waste water
treatment
18 km
40x/hour
1800 data
•
Cleanroom totals 9.200 m² (20 cabins and sub fab), each cabin and sub fab total 335 m²
connections
•
Strict cleanroom policy for gowning and cleaning
6500 Nm³/h
compressors
•
Each cabin holds 77 HEPA (High Efficiency Particulate Air) filters
• Air handling units, pumps, water distribution
• It’s all about trust: collaboration, flexibility and competence sharing
between partners are key to schedule, cost and scope management
• Total steel mass amounts to 6.000.000 kg: that’s the Eiffel tower!
• The superstructure can carry 3 office towers
Public
Slide 34
27 Aug 2015
• Main distribution network (water, air) is integrated during shell
construction due to its size and weight
• 30 prefab concrete columns of 40 tons each (1.2m x 1.2m x 12m)
18-2000 Pa
cable tray
pre-vacuum &
abatement
air refreshed
1500
test protocols
2,5 MW
53 MW
20 km
15km
4500 kW central
emergency power
thermal capacity
fire safety cabling
mechanical piping
heating
6
Ground
work
Super
structure
Shell &
installation
Utilities
Cleanroom
Transfer
Public
Slide 37
27 Aug 2015
• Every element is labeled and put in configuration control
• Pipes and utilities are flushed for 3 weeks before transfer
(contamination control)
• Punch list contained 32 items for further improvement
(a newly built house generally has 100!)
7