deposi t ion s yst ems for Com pou n d Sem icon ductor S
Close Coupled Showerhead® 3x2 inch ∙ 6x2 inch
MOCVD Systems for R&D and Small Scale Production
Close Coupled Showerhead® 3x2 inch · 6x2 inch
Product Overview
Proven Close Coupled Showerhead®
Features
Reliable 3-zone heater
- True scaling from R&D to mass production
High flexibility for optional MO and hydride sources
- Inherently uniform and reproducible growth for
all material systems – focus your effort on material and device development
Digital mass flow controllers and pressure controllers
- High flexibility in process window for excellent
material quality and uniformity
Professional AixAct® Advanced Control System with HTML based GUI
Compact foot print
Ideal for small R&D budgets: lowest running cost
- Low gas flows and high precursor efficiency
- Easy and low cost maintenance
Available applications
- GaN, InP, GaAs, InSb, GaInNAs, II-VI,
for others please talk to us!
Available configurations
- 3x2 inch, 1x4 inch, 1x3 inch, 1x2 inch –
by simple carrier exchange
- 6x2 inch, 3x3 inch, 1x6 inch –
by simple carrier exchange
Numerous customer references worldwide!
Optional
ynamic process gap adjustment – effective
D
process tuning for higher performance
1300 °C surface temperature kit
ersatile in-situ monitoring portfolio:
V
Laytec EpiTT, EpiCurveTT, many others on request
AIXTRON ARGUS thermal mapping device
IXTRON’s Epison gas concentration sensors for
A
improved accuracy of precursor injection
CCS Flip Top Reactor (3x2 inch · 6x2 inch)
Copyright AIXTRON SE • 0215 • Information subject to change without notice
Typical CCS: true scaling
CCS 3x2”
scaling rule
Concentration MMGa
0
0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
AIX R6
intrinsically uniform deposition
AIXTRON SE, Dornkaulstr. 2, 52134 Herzogenrath, Germany
PHONE
+49 (2407) 9030-0 fa x +49 (2407) 9030-40
E-MAIL
[email protected] WEB www.aixtron.com