Vapor-Liquid Equilibriumof the Binary System HF-H20 Extending to ExtremelyAnhydrousHydrogen Fluoride N. Miki, M. Maeno, and K. Maruhashi Hashimoto Chemical, Limited, Kaizan-cho Sakai 590, Osaka, Japan T. Ohmi* Department ~ Electronics, Faculty ~ Engineering, Tohoku University, Sendai 980, Japan ABSTRACT The vapor-liquid equilibrium of the binary system HF-H20 was determined, especially in the range of low water concentrations. The purity of anhydrous hydrogen fluoride used in this work was 9N (99.9999999%) with a conductivity of 0.7 • 10 -6 S c m - ' (water concentration of 0.033 ppm). We elucidated that the vapor-liquid equilibrium of the binary system HF-H20 obeyed Raoult's law below 1 x 10 3 tool dm -3 (18 ppm) water concentration. We determined the activity coefficients of H F and H20 at the boiling point of the binary system HF-H20. Munter et al. (1, 2) reported the vapor-liquid equilibrium of the binary system HF-H20 at atmospheric pressure over a considerable range of composition. The boiling points and vapor-liquid compositions of the binary system HF-H20 determined by them are now utilized as the standard for hydrofluoric acid. Figure 1 shows their boiling points and vapor-liquid compositions for the binary system HF-H20. They only measured the equilibrium up to 89% hydrogen fluoride (HF) concentration, and the equilibrium has not yet been measured in the range below 10% water concentration. Vieweg (3) has reviewed and unified the available data on vapor pressure over HF-H20 mixtures for the range of composition of 5~80% HF. It is important for promoting a technology of dehydration of HF that the equilibrium of the binary system HF-H20 is determine d in the range of trace amounts of water. Here we have determined the binary system equilibrium, especially in the range of low water concentrations, using the conductivity method developed by ourselves (4, 5). We have calculated the activity coefficient of HF and H20 at the boiling point for the entire binary system HF-H20. Experimental Composition of the binary system HF-H20.--Figure 3 shows the relation between conductivities and water concentrations determined by known additions of water and by the Karl Fischer method. The conductivity of anhydrous hydrogen fluoride in the closed system attained the level of 0.7 • 10 -6 S c m - ' for continuous flowing anhydrous hydrogen fluoride. In the range of water concentrations below 1 • 10 -2 mol dm -3 (180 ppm), a definite quantity of water was added to the anhydrous hydrogen fluoride, and the conductivity was measured. In the range of water concentrations over 1 • 10 -2 mol dm -3 (180 ppm), the water concentrations were measured using the Karl Fischer method. The calibration curve was obtained from both results (4, 5). For the vapor-liquid equilibria, measured water contents less than 1 mol dm -3 (18,000 ppm) by the conductivity method using the calibration curve and greater than 1 mol dm -3 (18,000 ppm) using a neutralization titration method. Measurement of Vapor-Liquid Equilibrium Figure 4 shows the measurement apparatus for the vapor-liquid equilibrium. First, anhydrous hydrogen fluoride was introduced into the vessel A from the ultra puri- Principle of measurement--Anhydrous hydrogen fluoride exhibits a hygroscopic nature, so measurements of the equilibrium were carried out under the following two conditions: (i) an apparatus consisting of a closed circulating system and (ii) measuring instruments set in the system. Figure 2 shows the principle of the closed circulating system. This system consists of a vaporization part and a condensation part, with conductivity cells for measuring water concentrations set in both parts. In this work, the closed conductivity cells used were entirely made of fluorocarbon polymer with two bright platinum electrodes. Materials.--The purity of anhydrous hydrogen fluoride used is 9N level (1 ppb m a x for every anion impurity and 0.1 ppb m ax for every cation impurity), and its conductivity is 0.7 x 10 -6 S cm -1 (at 0~ that is, the water concentration is below 1.85 • 10 -6 mol dm -3 (0.033 ppm). Anhydrous hydrogen fluoride was charged into the apparatus from an ultrapurifying process which is based on a new chemical distillation principle (6). The new chemical distillation principle consists of ultra dehydration and a fluorine oxidation process. The complexity of the chemical formulas of the impurities converges to simple anhydrous structures due to the extreme dehydration of the hydrogen fluoride, and the various valences of the impurities converge to the highest oxidation state by the fluorine oxidation. Consequently, all of the impurities having various chemical formulas are simplified to structures removable from hydrogen fluoride, which can be purified perfectly by the distillation. * Electrochemical Society Active Member. 120 2 "0., 100 o \ 80 4-'- C~ \ 60 \ E 40 IX 20 20 40 HF 60 80 I00 (Wt%) Fig. 1. Boiling points and vapor-liquid composition of the binary system HF-H20. 1, Liquid phase; 2, vapor phase. J. Electrochem. Soc., Vol. 137, No. 3, March 1990 9 The Electrochemical Society, Inc. 787 Downloaded on 2016-03-04 to IP 130.203.136.75 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract). J. Electrochem. Soc., Vol. 137, No. 3, March 1990 9 The Electrochemical Society, Inc. 788 I Vaporization part HF gas T . K -- . . .~ . " . 0 f Cooler T : Thermocouple K : Cell 0 HI:" liq T2 Condensation p a r t < J "5 G Fig. 2. Schematic diagram of the closed-circulating system for vaporliquid equilibrium. t y i n g p r o c e s s , after w h i c h a definite q u a n t i t y o f w a t e r w a s a d d e d f r o m i n j e c t i o n hole I. A t this t i m e , t h e w a t e r c o n c e n t r a t i o n was m e a s u r e d u s i n g c o n d u c t i v i t y cell K1. T h e hyd r o g e n fluoride w a s t h e n h e a t e d to i n c r e a s e its v a p o r p r e s s u r e a n d e x h a u s t e d f r o m t h e p o i n t F in Fig. 4 b y r e d u c e d p r e s s u r e to e l i m i n a t e t h e air in t h e s y s t e m . S u b s e q u e n t l y , h y d r o g e n fluoride w a s statically v a p o r i z e d , a n d t h e n t h e v a p o r o f h y d r o g e n fluoride was c o n d e n s e d b y c o n d e n s e r G to r e t u r n to t h e v e s s e l A. T h e k e y p o i n t for this e x p e r i m e n t is t h e static v a p o r i z a t i o n m e t h o d , b e c a u s e v i g o r o u s boiling disturbs the vapor-liquid equilibrium. Circulation was c o n t i n u e d until t e m p e r a t u r e s TI, T2, a n d T~ a n d c o n d u c t i v ities kl a n d k2 r e a c h e d c o n s t a n t values. II AHF outlet Fig. 4. Measurement apparatus for vapor-liquid equilibrium: A, vessel; B, tower; C, condensed hydrogen fluoride, D, capillary; E, control vessel for pressure; F, vacuum system; G, condenser; H, heater; I, injection hole with fluoro-polymer rubber; T1, T2, T3, thermocouple; K=, K2, cell. Results and Discussion The vapor-liquid equilibrium of the binary system HF-H20 h a s b e e n d e t e r m i n e d at a t m o s p h e r i c p r e s s u r e , esp e c i a l l y in t h e r a n g e of low w a t e r c o n c e n t r a t i o n s . Table I a n d T a b l e II p r e s e n t t h e l i q u i d a n d v a p o r c o m p o s i t i o n s a n d r e l a t e d boiling p o i n t s d e t e r m i n e d for t h e b i n a r y syst e m HF-H20. F i g u r e 5 s h o w s t h e relation b e t w e e n t h e b o i l i n g p o i n t s a n d v a p o r - l i q u i d c o m p o s i t i o n for t h e low w a t e r c o n c e n t r a t i o n s in t h e b i n a r y s y s t e m HF-H20, u s i n g t h e d a t a in Table II. T h e b i n a r y s y s t e m in t h e r e g i o n o f low w a t e r c o n c e n t r a t i o n s has b e e n a c c u r a t e l y d e t e r m i n e d in t h i s w o r k . T h e c o n v e n t i o n a l boiling p o i n t s h a v e b e e n d e m o n s t r a t e d to coi n c i d e well w i t h o u r d a t a for h y d r o g e n fluoride c o n c e n t r a t i o n s u p to 89%. O n t h e o t h e r h a n d , in t h e r e g i o n o f v e r y l o w w a t e r c o n c e n t r a t i o n s , t h e v a p o r c o m p o s i t i o n (line 2) is c o m p l e t e l y d i f f e r e n t f r o m t h e p r e v i o u s l y r e p o r t e d data (1, 2). It is c o n s i d e r e d t h a t this d i f f e r e n c e is c a u s e d b y t h e analytical m e t h o d . T h e p r e v i o u s w o r k e r s s a m p l e d t h e cond e n s a t e , d i l u t e d w i t h ice, a n d a n a l y z e d for h y d r o g e n fluoride b y titration. It is c o n s i d e r e d likely t h a t t h e s a m p l e s ab- CMzo (ppm) 1.8x10"3 1.8xlO "2 1.8xlO -I I.SxlO~ 1.8xlO= 1.8xlO2 1.8xlO~ IBxl04 10-1 _A 10-2 tf 'E r Table I. Composition in liquid and vapor phase at boiling point of the system HF-H20 T1 (~ (• 108.5 113.7 113.2 101.5 76.0 57.1 35.5 29.8 20.3 19.8 19.5 19.5 19.5 Liquid kl (0~ 1 --------46800 25500 9041 947 502 CH2O (ppm) T2 (~ Vapor 7'3 k2 (0~ (~ (• 6Scm-1) 754000 a 580000" 563000a 454000" 340000" 259000 a 125000a 84000a 5570 2390 600 44 20 108.3 113.6 113.0 101.4 75.8 57.0 35,4 29,8 20,2 20,0 19,8 19.5 19.5 15.5 15.6 15.6 15.4 15.4 15.3 15.3 15.2 14.8 15.1 15.1 15.2 15.0 ----41000 28000 13500 8700 2022 1081 350 20 10 CH2o (ppm) 932800a 481000 a 38,9500a 52900" 4600 2700 1000 570 89 46 12 0.64 0.45 "Neutralization titration. I0"~ "90 10-4 .>_ I0 "5 o s o r b e d m o i s t u r e in t h e c o u r s e of t h e analysis p r o c e s s , w h i c h r e s u l t e d in h i g h e r c o n c e n t r a t i o n s o f water. T h e conv e n t i o n a l m e t h o d is n o t able to m e a s u r e a c c u r a t e l y a t r a c e a m o u n t o f w a t e r in H F b e c a u s e o f its o p e n s y s t e m configuration and the accompanying absorption of water from t h e e n v i r o n m e n t d u e to e x t e r n a l l e a k a g e o f t h e m e a s u r i n g s y s t e m a n d b a c k d i f f u s i o n of w a t e r f r o m t h e o p e n e n d of t h e s y s t e m . In this w o r k , t h e m e a s u r i n g s y s t e m w a s / iO-e 7 / Table II. Activity coefficients in the binary system HF-H20 HF (weight Percent) / iO-V 10-7 10-6 Water 10-5 10-4 Concentration I0-3 10-2 i0-I 10o CHao ( tool dm -a) Fig. 3. The relation of water concentration and conductivity of hydrogen fluoride. (A, - - 9 (O~ this work; (B, - - 0 - - ) (O~ this work (Karl Fiscber's method); (C, ----) (15~ Ref. (11); (D, - - - - ) (15~ Ref. (7). Liquid Vapor 24.6 42.0 43.7 54.6 66.0 74.1 87.5 91.6 99.443 99.761 99.940 99.9956 99.9980 6.72 51.90 61.05 94.71 99.54 99.73 99.90 99.943 99.9911 99.9954 99.9988 99.999916 99.999955 Vapor pressure Activity Boiling point (mmHg) coefficient (~ Po (HF) Po (H20) 71 (HF) 72 (H20) 108.5 113.7 113.2 101.5 76.0 57.1 35.5 29_8 20,3 19.8 19.5 19.5 19.5 9614 10810 10690 8175 4321 2554 1311 1090 787 768 760 760 760 1021.5 1215.2 1195.3 801.6 301.4 129.8 43.4 31.5 17.9 17.3 17.0 17.0 17.0 0.02 0.09 0.10 0.18 0.27 0.41 0.67 0.77 9.97 1.00 1.00 1.00 1.00 0.90 0.52 0.45 0.12 0.04 0.06 0.14 0.17 0.68 0.86 0.90 1,00 1.00 Downloaded on 2016-03-04 to IP 130.203.136.75 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract). J. Electrochem. Sac., Vol. 137, No. 3, March 1990 9 The Electrochemical Society, Inc. I} Table III. Activity coefficients in the binary system HF-H20 from the data of Munter and Vieweg 2 I I/ 30 ~ 20 80 90 99 Fig. 5. Boiling points and vapor-liquid composition for low H20 concentrations in the binary system HF-H20 1, liquid phase; 2, vapor phase. closed, as s h o w n in Fig. 4 and, m o r e o v e r , t h e s y s t e m w a s c o m p l e t e l y c o v e r e d b y a n i t r o g e n e n v i r o n m e n t i n o r d e r to s u p p r e s s t h e i n c u r s i o n of w a t e r t h r o u g h e x t e r n a l leakage. Figure 6 shows the relation between the water content in t h e v a p o r a n d l i q u i d p h a s e s i n t h e b i n a r y s y s t e m HF-H20. T h e c o n c e n t r a t i o n o f w a t e r in t h e v a p o r p h a s e i n t h i s w o r k is d i f f e r e n t f r o m t h e v a l u e o b t a i n e d b y M u n t e r a n d V i e w e g o v e r t h e r a n g e of 60-90% H F c o n c e n t r a t i o n i n t h e l i q u i d phase. E v e r y p a r t i a l p r e s s u r e i n t h e v a p o r - l i q u i d e q u i l i b r i u m of t h e b i n a r y s y s t e m H F - H 2 0 g e n e r a l l y o b e y s H e n r y ' s l a w [1] p~ P% ~, X~ = = = = at t~ [1] p a r t i a l p r e s s u r e of n t h c o m p o n e n t v a p o r p r e s s u r e of n t h c o m p o n e n t at t~ a c t i v i t y coefficient of n t h c o m p o n e n t m o l e f r a c t i o n of n t h c o m p o n e n t i n l i q u i d T h e d a s h e d l i n e i n Fig. 6 i n d i c a t e s t h e r e l a t i o n b e t w e e n the water concentrations in the vapor and liquid phases o b t a i n e d b y c a l c u l a t i o n u s i n g ~/H2o= 1. I t is r e c o g n i z e d t h a t i0-5 I0 -4 102 i lO-Z I i ! i o This work A i0 I 9 MuntePs data 8433 9183 10046 9120 3250 1769 1224 836 950 1087 939 192 71 38 0.02 0.03 0.05 0.14 0.34 0.54 0.70 0.98 0.91 0.80 0.33 0.12 0.40 0.82 Vieweg (3) 10 2.01 20 6.78 30 19.26 40 43.52 50 74.25 60 90.99 70 98.73 80 99.91 102.8 106.6 110.3 111.7 106.2 87.0 65,5 47,6 8433 9184 10046 10337 9120 5743 3250 1923 836 950 1087 1136 939 469 192 82 0.02 0.03 0.05 0.08 0.13 0.21 0.34 0.50 0.98 0.91 0.80 0.63 0.43 0.38 0.17 0.04 the experimental data coincide with the theoretical line b e l o w 1 x 10 -~ m o l d m -3 0 8 p p m ) o f water. T h e s l o p e of the relation between the water concentrations in liquid a n d i n v a p o r b e c a m e 1 i n t h e r a n g e b e l o w 1 • 10 -z m o l d m -3 (18 p p m ) w a t e r in h y d r o g e n fluoride. T h i s r e s u l t led to t h e c o n c l u s i o n t h a t t h e v a p o r - l i q u i d e q u i l i b r i u m of t h e b i n a r y s y s t e m H F - H 2 0 o b e y s R a o u l t ' s l a w b e l o w 1 x 10 -3 m o l d m -z (18 p p m ) w a t e r c o n c e n t r a t i o n . T h e a c t i v i t y coefficient of H20(~/s2o) i n H F h a s n o t b e e n r e p o r t e d p r e v i o u s l y . A c t i v i t y coefficients of H F a n d H20 h a v e b e e n d e t e r m i n e d o v e r a w i d e r a n g e of c o m p o s i t i o n at t h e b o i l i n g p o i n t s at a t m o s p h e r i c p r e s s u r e in t h e b i n a r y s y s t e m HF-H20, as c a l c u l a t e d f r o m t h e f o l l o w i n g e q u a t i o n [2] (8, 9). T a b l e III s h o w s t h e a c t i v i t y coefficients c a l c u l a t e d f r o m t h e d a t a of M u n t e r e t a L a n d V i e w e g (2, 3). P Yi ~h at t~ [2] Pi xi ~ p pi x~ y~ = = = = = a c t i v i t y coefficient of i t h c o m p o n e n t t o t a l p r e s s u r e of s y s t e m v a p o r p r e s s u r e o f i t h c o m p o n e n t at t~ m o l e f r a c t i o n of i t h c o m p o n e n t in l i q u i d m o l e f r a c t i o n of i t h c o m p o n e n t in v a p o r T h e r e s u l t s are s h o w n i n T a b l e II a n d Fig. 7. T h e v a l u e s o f ~H~o c a l c u l a t e d f r o m t h e r e p o r t e d d a t a (1-3) are d i f f e r e n t H2OinLiquid Phase I00 1.0 80 . 60 . . 40 . (wt %) 20 0 . E ) a Vieweg*s data ---Raoult's law ,1-- ~ , I0 ~ 102.8 106.6 I10.3 106.2 65.5 44.9 33.3 I0 t (mol dm-a) I0 ~ lO-J i Munter (1) 10 2.0 20 7.1 30 19.4 50 80.0 70 98.8 81 99.3 89 99.5 I00 HF ( w t % ) p, = ~nP~ Vapor pressure Activity Boiling (mmHg) coefficient point (~ Po (HF) Po (H20) ~t (HF) ~2 (H20) (weightHF percent) Liquid Vapor 40 2 789 :~ o.8 i1-. j // o 0 ( 0.6 0 r" I0 -I // Dt'~ 10-2 r /~r .>_ 0 < sp 9 0.4 o., sS ~.0 10-3 o -r~ 10-4 lO "ll ./' I 10-4 10-3 I I0 -z I 10-I H20 of Liquid Phase X"j ._~.~-~. 0 I I0~ I I01 I0 z (wt %) Fig. 6. Vapor-liquid equilibrium of the binary system HF-H20 20 , .---- ,~ 40 60 80 O0 HFin Liquid Phase (wt%) This work o ?'~ (HF) Munter's data ,, 1', (HF) 9 I'2 (H20) 9 1'2 (H20) Vieweg'sdata u 1', (HF) 9 ~'2 (H20) Fig. 7. Activity coefficients of the binary system HF-H20 Downloaded on 2016-03-04 to IP 130.203.136.75 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract). 790 J. Electrochem. Soc., Vol. 137, No. 3, March 1990 9 The Electrochemical Society, Inc. from those calculated from our data, particularly at low water concentrations in HF, though the reported values of ~]H~ coincide well with our data in the binary system HF-H20 with decrease of water. The activity coefficient for HF (~HF) monotonically increases and approaches 1 with a decrease of water concentration, while the activity coefficient for H20 (~H2o)exhibits a m i n i m u m value at about 70% HF in the binary system HF-H20. The existence of the m i n i m u m value of "m2o is explained as follows. The liquid structure of the HF-H20 system has already been demonstrated to exhibit a m i n i m u m 'H chemical shift at about 70% H F by NMR measurement, due to a m a x i m u m formation of H30§ and, moreover, the density of HF solutions is well known to exhibit a m a x i m u m value at about 70% HF because of the strong hydrogen bond (10). In the extremely anhydrous region of the binary system HF-H20, the value of ~H2oapproaches 1, where water molecules ideally dissociate. Conclusion The vapor-liquid equilibrium of the binary system HF-H20 has been determined, especially in the range of low water concentrations. It has been demonstrated experimentally that the vaporliquid equilibrium of the binary system HF-H20 obeys Raoult's law below 1 • 10-3 mol dm -a (18 ppm) water concentration. We have determined the activity coefficients of H F and H20 at the boiling point of the binary system HF-H20. It has been shown that the activity coefficient of H20 has a m i n i m u m value at a concentration of about 70% H F and approaches 1 with a decrease of water concentration. Manuscript submitted Nov. 10, 1988; revised manuscript received Aug. 13, 1989. Hashimoto Chemical, Limited, assisted in meeting the publication costs of this article. REFERENCES 1. P. A. Munter, O. T. Aepli, and R. A. Kossatz, Ind. Eng. Chem., 39, 427 (1947). 2. P. A. Munter, O. T. Aepli, and R. A. Kossatz, ibid., 41, 1504 (1949). 3. R. Vieweg, Chem. Tech. (Berlin), 15, 734 (1963). 4. N. Miki, M. Macho, and K. Mewuhashi, JpnAnal., 29, 88 (1980). 5. N. Miki, M. Maeno, T. Ohmi, This Journal, 137, 790 (1990). 6. N. Miki, U. S. Pat. 4,668,497 (1987). 7. R. Ukazi and I. Kageyama, Jpn. Anal., 9, 604 (1960). 8. R. L. Jewry, and W. Davis, Jr., J. Phys. Chem., 57, 600 (1953). 9. Chemical Handbook, Japan Chemical Association (1984). 10. M. F. A. Dove and A. F. Clifford, "Chemistry in Nonaqueous Ionizing Solvents," Vol. II, Part I. pp. 212218, Pergamon Press (1971). 11. Draft, International Standard ISOfDIS 3700-2 (1978). Conductivity and Dissociation Equilibrium of Extremely Anhydrous Hydrogen Fluoride N. Miki and M. Maeno Hashimoto Chemical, Limited, Kaizan-cho Sakai 590, Osaka, Japan T. Ohmi* Department of Electronics, Faculty of Engineering, Tohoku University, Sendai 980, Japan ABSTRACT We have studied the conductivity of extremely anhydrous hydrogen fluoride (AHF) and obtained a m i n i m u m conductivity of 0.7 • 10 -6 S cm -1 at 0~ We have recognized that water in A H F at concentrations below 1 • 10 -3 tool dm -3 shows an ideal dissociation and that the limiting equivalent conductance of AHF is 436 S cm 2 mol-1 at 0~ The ideal relationship between the conductivity and water concentration obtained in this work was extrapolated to the ultra-micro water concentration region. The conductivity of 0.7 x 10-6 S cm -1 corresponds to a water concentration of 1.85 • 10 -6 tool dm -3 (0.033 ppm) in the above relationship; however, this conductivity is not due to the dissociation of water but to that of hydrogen fluoride. We recognized that the relationship between the conductivity and water concentration of A H F coincides completely with that of ultra-pure water in the ultra-micro conductivity region (10 -8 S cm-1). The relationship between the dissociation of water and the conductivity in anhydrous hydrogen fluoride is important for the electrochemical theory, the analytical technology of water, and the dehydration technology of hydrogen fluoride. Frendenhagen et al. studied conductivities over the range from 0.013 to 0.5N water in hydrogen fluoride and obtained a conductivity of 1.4 x 1O-5 S cm -1 for anhydrous hydrogen fluoride at 15~ (1-4). Kilpatrick et al. improved the methods for the purification of anhydrous hydrogen fluoride, which yielded acid with m u c h lower conductivity, 1.6 • 10-6 S cm ~1 at 0~ than reported previously (5-7). Rogers examined the dehydration of hydrogen fluoride by CoF2 and Hyman tried the fractional distillation of hydrogen fluoride, but their conductivities for anhydrous hydrogen fluoride were only at the 10 -4 S cm -1 level (8, 9). Ukazi et al. analytically studied conductivities over the range from 0.1 to 5% water in anhydrous hydrofluoric acid * Electrochemical Society Active Member. with a conductivity of 10 2 S cm i, which was distilled after heating a mixture of HF and F~ to 200~176 (10). Netzer et al. described a modified fractionation system from which they obtained hydrogen fluoride with a conductivity of about 1 x l0 -6 S cm -1 at 25~ (11). The International Organization for Standardization (ISO) has presented a conductometric method for determination of water concentrations in industrial anhydrous hydrogen.fluoride over the range of 0.01-0.4% water (12). We have reported previously the conductivities below 0.01% water concentration in anhydrous hydrogen fluroide (13). We now report that we have measured the conductivity of anhydrous hydrogen fluoride with lower water concentrations and studied theoretically the dissociation of water in extremely anhydrous hydrogen fluoride. Experimental Materials.--Hydrogen fluoride was purified by an ultra purifying process to reach a very low level of impurities as shown in Table I. The ultra purifying process, which is based on a new chemical distillation principle, consists of Downloaded on 2016-03-04 to IP 130.203.136.75 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).
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