WITTENSTEIN Group
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and/or otherwise protected in various countries where attocube systems products are sold or distributed. Other brands and
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attocube systems AG | Königinstrasse 11a | D - 80539 München | Germany
Tel.: +49 89 2877 809 - 0 | Fax: +49 89 2877 809 - 19 | [email protected]
www.attocube.com
Brochure version: 2017 - 01
WITTENSTEIN Group
IDS3010
Ultra Precision Sensor
IDS3010
Ultra precision optical sensor
for industry applications
2 m/s
Target Velocity
5m
Working Distance
10 MHz
Bandwidth
1 pm
Resolution
The ultra precise Industrial Displacement Sensor
IDS3010 measures positions, movements, and
vibrations in real time and with a data aquisition
bandwidth of 10 MHz. The laser based technology
enables contactless measurements directly at the
target.
Up to three sensor heads can be connected to the
basic unit. The IDS3010 can therefore simultaneously
track targets in up to 3 axes at velocities of 2 m/s. At
measurement distances of up to 5 meters, the sensor
provides a position resolution of 10 -12 m.
Its compact size (50 x 55 x 195 mm³), various real
time interfaces and an integrated webserver enable
the easy integration of the sensor in machine tools
and production plants.
Applications
The IDS3010 is widely applicable : as displacement sensing system for the
calibration of axes, in quality assurance applications, and in various machine
tools. As a vibrometer, the sensor measures vibrations in a contactless, fast and
ultra precise manner. Due to the fiber based design of the system, the base unit
can be installed arbitrarily far away from the tiny, noninvasive sensor heads. This
allows for measurements even in the most confined or inaccessible spaces.
Calibration of Machine Tools
Displacement Sensor in Semiconductor Applications
Shaft Runout measurements
• Nano precise calibration of axes and complete machines
• Compatible with extreme temperatures,
reactive gases, and vacuum environment
• Contactless detection of imbalances, out-of-roundnesses
(tolerances of form), eccentricities (tolerances of location)
• Measurements in the most confined or inaccessible spaces
• For example, on main or grinding spindles, precision
bearings, servo motor shafts, or crankshafts
• Quick and easy installation, flexible use
Displacement Sensor in Quality Assurance
• Universal measuring and testing device in precision measuring chambers
• Integration in coordinate measurement machines
Sensing System in Manufacturing Facilities
Measurement technology for ultra
precise Pick & Place Applications
• In-line process control of micro assembly systems
• Nanometer repeatability increases positioning and assembly accuracy
• Integrated displacement sensing system with up to three axes
Vibrometer
• Resolver system for high precision servo drives
(precise trajectories in CNC technology)
• Real time vibration measurements of machinery and
systems to detect machine damages
• Ultra precise real time measurements of guiding and mounting
errors such as sidestrokes, radial runouts, pitch, yaw, and roll
• Lifetime determination of tools, predictive maintenance
• Real time process analysis and control
Sensor Head Overview
The IDS3010 can be operated
with different sensor heads:
ultra compact heads for the most
confined spaces or alternative
designs where priority is given
to easy alignment or to the
compatibility with various target
materials (glass, aluminum,
ceramic, etc.).
M12/C7.6
Ø 14 mm, length 43.9 mm
Working distance: up to 30 m*
Large working distances
M15.5/C1.6
Ø 22 mm, length 20.6 mm
Working distance: up to 5 m
Easy alignment and installation/assembly
M12/C1.6
Ø 14 mm, length 17.4 mm
Working distance: up to 5 m
Standard for various appplications
D12/F13
11-15 mm
Ø 4 mm, length 11.5 mm
Working distance: 30 – 34 mm
30-45 mm
For rough and varied surfaces
D4/F8
Ø 4 mm, length 11.5 mm
Working distance: 15 – 30 mm
Only compatible with retroreflector
5-9 mm
Ø 1.2 mm, length 7.5 mm
Working distance: 30 – 45 mm
30-45 mm
For miniature applications
Working Distance up to
High reflective target
15-30 mm
Space saving, easy integration
D1.2/F7
Low reflective target
6-10 mm
0 mm
* By using special sensor heads, the IDS can realize measurement distances of up to 30 meters.
20 mm
40 mm
60 mm
90 mm
100 mm
110 mm 4900 mm
5000mm
Measurement Surfaces
The IDS3010 can directly measure on various target materials
and technical surfaces (as little as 4% reflectivity). For lower
reflectivities, small plane mirrors or retroreflectors can be
attached to the target.
• Steel (polished)
• Copper
100%
Webserver
With the integrated webserver the sensor can be
aligned, initialized, configured and controlled
remotely at anytime. Regular firmware updates
provide new functionalities and guarantee
maximum efficiency for your application.
• Silicon/Wafer
• Ceramics
I
ND
Y
TR
US
• Plastic
4.0
•Aluminium
(black anodized)
• Glass
4%
Interfaces
BiSS-C
Master
CLK
BiSS-C
The IDS3010 is delivered with a standard set of high-speed interfaces for real-time data communication with FPGA-based receivers,
CNC controllers or RTOS computers. These interfaces consist of an incremental AquadB, a proprietary serial word (HSSL), and a
synthetic analog sin/cos signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS).
Alternatively, the IDS is available with BiSS-C, an open standard sensor interface optimized for multi-device usage. Interconnectivity
with other industrial networks such as Ethernet (TCP/IP), EtherCAT, CanOPEN, Profinet, and Profinet RT can be implemented on request.
BiSS-C
Master
DAT
CLK
DAT
Master
CLK
CLK
CLK
DAT
A
DAT
CLK
1
1
1
0
1
0
1
0
0
1
0
1
0
1 HSSL
0 (digital; bandwith up to 25 MHz and 8-48 bit resolution): attocube's proprietary serial word protocol
0 1 0
provides
absolute position information - both in terms of the protocol and the measurement itself. The HSSL
1 0
1 0
interface consists of one data and one clock signal (single ended or differential); position information is packed
into one container of user-defineable bit-length, synchronization with the receiver is accomplished using
1 0
1 0the clock signal. The HSSL protocol is preferential if absolute displacement position data (i.e. sensor-target
separation) is required or if incremental position counting is inacceptable.
1
0
1
B
ACLK
0
AquadB (digital; bandwith up to 25 MHz; resolution freely assignable): The AquadB interface provides
incremental displacement information on target displacement. Position resolution and (maximum) clock rate can
be user defined using the IDS web interface. For maximum data bandwidth, the AquadB interface is best used with
differential signaling.
A
A
BBA
B
B
Sin/cos (analog; bandwith up to 25 MHz; resolution freely assignable, 1 - 224 pm): The sin/cos signal is a digitally
synthesized analog signal which provides incremental position information. As with the digital AquadB signal, the
increment (i.e. resolution) is user-definable in the system's web interface. For maximum data bandwidth, the sin/
cos signal is best used with differential signaling.
A
A
B
B
A
B
BiSS-C
1
0
BiSS-C
BiSS-C The sensor interface offers synchronous, real-time-capable data transmission. It provides point-to-point
0
1 topology
0
for data communication with motion controllers and is especially suitable for the easy integration of
several IDS sensors to the master clock at multi device facilities such as synchrotrons and spallation sources. BiSS-C
signals are routed through the 14 pin GPIO connector (all other real-time interfaces are disabled in this mode).
Master
Master
CLK
CLK
DAT
CLK
A
B
1
1
0
1
0
Industrial Interfaces on request
Other industrial interfaces can be implemented on request. For detailed information, please contact [email protected]
EtherCAT (Ethernet for Control Automation Technology) is an open, real-time Ethernet-based fieldbus network
originally developed by Beckhoff. The EtherCAT protocol is most typically used for machine control and regulation
as well as for multi-channel, synchronous measurement devices.
Profinet is a protocol based on industrial Ethernet according to IEEE 802. It connects devices, systems, and cells,
facilitating faster, safer, less costly and higher quality manufacturing.
A
B
Profinet RT is the real-time derivative of Profinet.
CANopen is a communication protocol based on CAN (Controller Area Network) which is most typically used for
the interconnection of complex, embedded systems used in automation. Apart from communication, the CANopen
protocol also provides device specification.
Specifications
IDS3010
Sensor
number of sensor axes
3
working distance
0…5000 mm (depending on sensor head)
sensor resolution
1 pm
sensor repeatability
2 nm1)
max. target velocity
2 m/s
measurement bandwidth
10 MHz
signal stability (WD: 77 mm)
0.110 nm (2σ)
Modes of Operation
measurement modes
displacement, vibrometry
remote operation
integrated webserver
output signal: electronics
sin/cos, AquadB, HSSL, field bus systems (opt.)
output signal: displacement measurement
laser light (IR)
output signal: alignment laser
laser light (VIS)
sensor alignment
via integrated webserver or DLLS
sensor initialization
via integrated webserver or DLLS
Interfaces
analog interfaces
sin/cos (real-time)
digital interfaces
AquadB, HSSL (real-time)
field bus interfaces (optional)
Biss-C
field bus interfaces (on request)
EtherCAT, CANopen, Profinet, Profinet RT
Interfaces (BiSS-C)
interface bandwidth BiSS-C
up to 10 MHz (master clock frequency)
external master clock
up to 10 MHz
clock interferometers axes
independent clock input
BiSS-C configuration
point-to-point
number of position bits
32 bit
Controller Hardware
chassis
50 x 55 x 195 mm³
weight
730 g
power supply
12 V DC
power consumption
8W
Measurement Laser
laser source
DFB laser (class 1)
laser power
400 µW
laser wavelength
1530 nm
wavelength stability
50 ppb
* at 10 mm working distance in vacuum conditions, +/-1ppm in ambient conditions
Specifications Sensor Heads
Sensor Heads
product name
M12/C7.6
D1.2/F7
D4/F8
D4/F13
M12/C1.6
M15.5/C1.6/FLEX
focussing
focussing
focussing
collimating
collimating
collimating
Modes of Operation
optics type
dimensions
Ø 1.2 mm, length 7.5 mm
Ø 4 mm, length 11.5 mm
Ø 4 mm, length 11.5 mm
Ø 14 mm, length 17.4 mm
Ø 22 mm, length 20.6 mm
Ø 14 mm, length 49.2 mm
mounting
clamped
clamped
clamped
metric M12 x 0.5
metric M15.5 x 0.5
metric M12 x 0.5
spot size
70 µm @ 7 mm
70 µm @ 8 mm
70 µm @ 13 mm
1.6 mm
1.6 mm
7.6 mm
7 mm
8 mm
13 mm
infinity
infinity
infinity
none (fiber glued)
none (fiber glued)
none (fiber glued)
FC/PC
FC/PC
FC/PC
/RT, /LT/HV, /UHV, /RAD
focal length
connector
working environment
/RT
/RT, /LT/HV, /UHV, /RAD
/RT, /LT/HV, /UHV, /RAD
/RT, /LT/HV, /UHV, /RAD
/RT, /LT/HV, /UHV, /RAD
glass, silicon wafer, mirror
glass, silicon wafer, mirror
glass, silicon wafer, mirror
glass and mirror
glass and mirror
retroreflector
vibration measurements at confined machine spaces
vibrations analysis of machines and tools
in-situ process monitoring of tools
run-out control, detection of imbalances
monitoring/error diagnostics of
machine components
calibration and synchronization of large
scale machines
linear measurement range
5..9 mm
6..10 mm
11..15 mm
bis zu 5000 mm
bis zu u5000 mm
-
alignment tolerance
± 0.20°
± 0.35°
± 0.35°
± 0.03°
± 0.03°
-
30..45 mm
15..30 mm
30..45 mm
100 mm
100 mm
-
± 0.20°
± 0.35°
± 0.35°
± 0.5° @ 50 mm
± 1° @ 30 mm
-
linear measurement range
-
-
-
bis zu 5000 mm
bis zu 5000 mm
bis zu 5000 mm
alignment tolerance
-
-
-
± 2°
± 2°
± 20 °
lateral alignment tolerance
-
-
-
-
-
± 2 mm
compatible targets
applications
Measurement Specifications
target: glass
target: mirror
linear measurement range
alignment tolerance
target: retroreflector
Environmental Conditions
/RT (ambient conditions): 0 .. 100 °C, 1x10-4 mbar .. 10 bar
/HV (high vacuum): 0 .. 150 °C, 1x10-8 mbar .. 10 bar
/UHV (ultra high vacuum): 0 .. 150 °C, 1x10-10 mbar .. 10 bar
/LT (low temperature): mK .. 423 K (150 °C 1x10-4 mbar .. 10 bar
/RAD (radiation hard): 0 .. 150 °C, up to 10 MGy radiation dose
Customized Sensor Heads
Sensor heads can be customized to specific applications in the length of the
connecting fibers, the environmental compatibility, or the lens geometry.