Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
EtherCAT® Supplemental Manual for Brooks®
GF40/GF80 Series Mass Flow Controllers
and Meters
Brooks® GF40/GF80 Series
with EtherCAT® Communications
Brooks® GF40/GF80 EtherCAT®
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
Dear Customer,
We recommend that you read this manual in its entirety as this will enable efficient and proper use of the
EtherCAT® thermal mass flow controllers and meters. Should you require any additional information concerning the
EtherCAT thermal mass flow controllers and meters, please feel free to contact your local Brooks Sales and Service
Office; see back cover for contact information, or visit us on the web at www.BrooksInstrument.com. We appreciate
this opportunity to service your fluid measurement and control requirements, and trust that we will be able to provide
you with further assistance in future.
Yours sincerely,
Brooks Instrument
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
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Installation and Operation Manual
Contents
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Paragraph
Number
Brooks® GF40/GF80 EtherCAT®
Page
Number
Section 1 General Information
1.1
Introduction ................................................................................................................................... 1-1
Section 2 Definition of Terms
2.1
Definition of Terms ........................................................................................................................ 2-1
Section 3 Before Starting
3.1
Background & Assumptions ........................................................................................................... 3-1
3.2
Numbers ........................................................................................................................................ 3-1
Section 4 Quick Start
4.0
Quick Start ..................................................................................................................................... 4-1
4.1
Master Hardware ........................................................................................................................... 4-1
4.2
Physical Interfaces ........................................................................................................................ 4-1
4.2.1 Power Supply and Analog I/O ........................................................................................................ 4-1
4.2.2 RUN and MOD LEDs ..................................................................................................................... 4-3
4.2.3 EtherCAT MFC Slave Hardware ..................................................................................................... 4-3
Section 5 Slave Configuration
5.1
Introduction ................................................................................................................................... 5-1
5.2
Outputs (Master Side) .................................................................................................................... 5-1
5.3
Inputs (Master Side) ...................................................................................................................... 5-2
5.4
COE Online Attributes .................................................................................................................... 5-3
5.4.1 Device Attributes ............................................................................................................................ 5-3
5.4.2 Flow Sensor ................................................................................................................................... 5-3
5.4.2.1 Flow Sensor Zero Adjust ................................................................................................................ 5-4
5.4.2.2 Flow Sensor Status ........................................................................................................................ 5-4
5.4.3 Temperature Sensor ...................................................................................................................... 5-5
5.4.3.1 Temperature Sensor Status ............................................................................................................ 5-6
5.4.4 Setpoint Controller ......................................................................................................................... 5-6
5.4.4.1 Setpoint Controller Status .............................................................................................................. 5-7
5.4.5 Valve Actuator Attributes ................................................................................................................ 5-8
5.4.6 Service Transfer Attributes ............................................................................................................ 5-9
5.4.7 Calibration Object Attributes ........................................................................................................... 5-9
5.4.8 Exceptions .................................................................................................................................... 5-10
5.4.8.1 Alarm- and Warning Details .......................................................................................................... 5-10
5.4.8.2 Exception Status ........................................................................................................................... 5-10
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover
i
Contents
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
Brooks® GF40/GF80 EtherCAT®
Figure
Number
4-1
4-2
4-3
4-4
5-1
5-2
5-3
5-4
5-5
5-6
5-7
5-8
5-9
5-10
5-11
5-12
5-13
5-14
ii
Figure
Number
EtherCAT Label on Cover .............................................................................................................. 4-1
M8 Male Device Connector Pin Layout, Pin Side View ................................................................. 1-4
M8 Female Mating Cable ............................................................................................................... 4-2
M8 Female Mating Cable Connector Pin Layout ........................................................................... 4-2
Output PDOs ................................................................................................................................. 5-1
Input PDOs .................................................................................................................................... 5-2
Device Attributes ............................................................................................................................ 5-3
Flow Sensor Attributes ................................................................................................................... 5-3
Flow Sensor Zero Adjust Attribute .................................................................................................. 5-4
Flow Sensor Status Attributes ........................................................................................................ 5-4
Temperature Sensor Attributes ....................................................................................................... 5-5
Temperature Sensor Status Attributes ............................................................................................ 5-6
Setpoint Controller Attributes ......................................................................................................... 5-6
Setpoint Controller Status Attribute ................................................................................................ 5-7
Valve Actuator Attributes ................................................................................................................ 5-8
Valve Actuator Status Attributes ..................................................................................................... 5-8
Service Transfer Attributes ............................................................................................................ 5-9
Calibration Object Attributes ........................................................................................................... 5-9
Table
Number
4-1
4-2
4-3
4-4
4-5
5-1
5-2
5-3
5-4
5-5
August, 2012
Table
Number
Pin Labeling of M8 Male Device and Female Mating Cable Connector .......................................... 4-2
Wire Labeling of M8 Female Mating Connector ............................................................................ 4-3
M8 Female Mating Cable Part Numbers ........................................................................................ 4-3
RUN LED Specification ................................................................................................................. 4-3
MOD LED Specification ................................................................................................................. 4-3
Valve Override Values (vdOverride) .............................................................................................. 5-11
Flow Data Units (fmUnits) ............................................................................................................. 5-11
Temperature Data Units (tmUnits) ................................................................................................. 5-11
Setpoint Control Mode (fcControlMode) ........................................................................................ 5-11
Valve Drive Data Units (vdUnits) ................................................................................................... 5-11
Installation and Operation Manual
Section 1 Introduction
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
1.1 Introduction
Many applications of Flow Controllers/Meters are moving to increasing use
of automation. Automation comes in many forms: PLC’s (Programmable
Logic Controllers such as the Siemens S7 300/4000), DCS’s (Distributed
Control Systems, such as Emerson’s Digital V), PC based solutions
(National Instrument’s LabviewTM) and Ethernet based field buses. Digital
communications from these varied systems and the devices they measure
and control, are a very effective means of not only accomplishing more
effective and rapid system integration, but also providing greatly improved
system diagnostics and maintainability. EtherCAT is an Ethernet based
communication system and is known for its high cycle time and cost
efficient cabling and master application solutions. Brooks Instrument now
introduces the EtherCAT interface on its GF Series platform.
1-1
Section 1 Introduction
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
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1-2
Section 2 Definition of Terms
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT
2.1 Definition of Terms
Abbreviation
MFC/MFM
MSB
LSB
PDO
SDO
CoE
ESI
ESC
Description
Mass Flow Controller/Meter device
Most Significant Bit
Least Significant Bit
Process Data Object
Service Data Object
CanOpen on EtherCAT
EtherCAT Slave Information (device description in XML format)
EtherCAT Slave Controller
2-1
Section 2 Definition of Terms
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT
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2-2
Installation and Operation Manual
Section 3 Before Starting
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
3 Before Starting
3.1 Background & Assumptions
This manual is a supplement to the Brooks GF40/GF80 Series installation
and operation manual. It is assumed that the owner of this EtherCAT MFC/
MFM is thoroughly familiar with the theory and operation of this device. If
not, it is recommended that the owner read the installation and operation
manual first before continuing with this supplement.
This manual assumes basic knowledge and understanding of EtherCAT (its
topology and its method of logically accessing the data or parameters
contained within the device). This manual is not intended to be a
replacement to the EtherCAT specifications. It is recommended but not
required for the purposes of this manual, that the user obtains a copy of the
EtherCAT specifications (www.ethercat.org).
This manual does not make any assumptions about any particular
manufacturer of equipment or custom software used by the user to
communicate with the Brooks device, but assumes the user has thorough
understanding of such equipment and any configuration software.
Application Notes and FAQ’s are available at the Brooks Instrument web site
(www.BrooksInstrument.com).
3.2 Numbers
Numeric values used throughout this manual will be clearly denoted as to
the base numeric system it represents. All hexadecimal numbers (base 16)
will be prefixed with a 0x, like 0xA4. All binary numbers (base 2) will be
suffixed with a b, like 1001b. All other numbers not annotated this way will
be assumed decimal (base 10).
3-1
Section 3 Before Starting
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
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3-2
Installation and Operation Manual
Section 4 Quick Start
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
4 Quick Start
This section assumes the owner of the Digital Series device has a fully
operational and trouble-free communications network with appropriate
power supplies. This section also assumes that an EtherCAT master
application is connected to the network capable of PDO and mailbox data
communication. Both types of data communication modes are supported by
the Brooks GF40/GF80 EtherCAT device
4.1 Master Hardware
Various companies provide EtherCAT master applications, e.g. TwinCAT
from Beckhoff, or offer EtherCAT master stacks to develop a master
application, e.g. Acontis. A PC can be used to run most EtherCAT master
applications but needs dedicated Ethernet hardware to support the high
cycle times and kernel mode operation of the master application, see
wwww.beckhoff.com. Screendumps of master applications used in this
manual are taken from the EtherCAT configurator tool from Beckhoff.
4.2 Physical Interfaces
The available physical interfaces on the EtherCAT device are listed below:
• 5 pin M8 threaded male connector for power and analog I/O, indicated by
PWR
• IN and OUT ports with RJ45 connectors
• ZERO push button, refer to the GF40/80 Series installation and operation
manual for more details
• 2.5mm female jack for RS485 diagnostics port indicated by DIAG, refer to
the GF40/GF80 Series installation and operation manual for more details
Figure 4-1 EtherCAT Label on Cover
4.2.1 Power Supply and Analog I/O
Power needs to be supplied via the M8 connector. This connector also
provides access to analog I/O signals, see Table 4-1.
4-1
Section 4 Quick Start
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
Figure 4-2 M8 Male Device Connector Pin Layout, Pin Side View
Table 4-1 Pin Labeling of M8 Male Device and Female Mating Cable Connector
Pin Label
P_COM
+VPWR
V_AUX_OUT
AGND
V_AUX_IN
Function at Remote Connector
Power Supply Common
Positive Power Supply Voltage
Flow Output 0-5V
Analog I/O Common
Auxiliary Input 0-5/10V for Future Use
M8 mating cables can be purchased as a second line item, details given below.
Figure 4-3 M8 Female Mating Cable
Mating Side Female Cable Connector
Figure 4-4 M8 Female Mating Cable Connector Pin Layout
4-2
Section 4 Quick Start
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
Table 4-2 Wire Labeling of M8 Female Mating Cable Connector
Wire Color
Blue
Brown
Black
White
Grey
Wire Label
P_COM
+VPWR
V_AUX_OUT
AGND
V_AUX_IN
Function at Remote Connector
Power Supply Common
Positive Power Supply Voltage
Flow Output 0-5V
Analog I/O Common
Auxiliary Input 0-5/10V for Future Use
Table 4-3 M8 Female Mating Cable Part Numbers
Supplier
Part Number
Description
Brooks
Instrument
124X049AAA
124X050AAA
M8 Mating Cable 2m
M8 Mating Cable 5m
4.2.2 RUN and MOD LEDs
The device supports a RUN and MOD LED to indicate the status of network
communication and the device. The RUN LED will indicate the following:
Table 4-4 RUN LED Specification
Flash Code
Description
Off
Blinking
Single Flash
On
Flickering
Triple Flash
The device is in state INIT
The device is in state PRE-OPERATIONAL
The device is in state SAFE-OPERATIONAL
The device is in state OPERATIONAL
The device is booting and has not yet entered the INIT state
User can set this state from the master to locate the
specific slave
The MOD LED will indicate the following:
Table 4-5 MOD LED Specification
Flash Code
Flashing
Red/Green
Solid Green
Flashing Red
Flashing Green
Solid Red
Description
The device is in the Self-Test mode
All self-tests have passed. No faults have been detected
A recovering alarm has been detected
A recoverable warning has been detected
An unrecoverable fault has occured
4.2.3 EtherCAT MFC Slave Hardware
The main parts of the EtherCAT MFC are:
• Standard Ethernet Physical Layer Components
• EtherCAT Slave Controller (ESC) and EEPROM (ESC configuration data
and application specific data)
• For intelligent slaves with an application controller: Host controller
4-3
Section 4 Quick Start
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
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4-4
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
5.1 Introduction
Based on the information provided by the EtherCAT Slave Information file
(ESI, device description in XML format) and/ or the EEPROM, master
applications are able to configure the EtherCAT network.
For the EtherCAT network configuration of the GF40/80 Series devices the
following ESI file is provided on the Brooks website
(www.BrooksInstrument.com):
• ‘Brooks GF04x.xml’ – GF40/80 Series Mass Flow Controller/Meter
5.2 Outputs (Master Side)
The request message, sent from master to slave, consists of the fields
indicated in Figure 5-1, these fields will be described in the sections below.
Figure 5-1 Output PDOs
5-1
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
Brooks® GF40/GF80 EtherCAT®
5.3 Inputs (Master Side)
Figure 5-2 Input PDOs
5-2
August, 2012
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
5.3 COE Online Attributes
5.3.1 Device Attributes
Figure 5-3 Device Attributes
5.3.2 Flow Sensor
Figure 5-4 Flow Sensor Attributes
5-3
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
Brooks® GF40/GF80 EtherCAT®
5.3.2.1 Flow Sensor Zero Adjust
Figure 5-5 Flow Sensor Zero Adjust Attribute
5.3.2.2 Flow Sensor Status
Figure 5-6 Flow Sensor Status Attributes
5-4
August, 2012
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
5.3.3 Temperature Sensor
Figure 5-4 Flow Sensor Attributes
5-5
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
Brooks® GF40/GF80 EtherCAT®
5.3.3.1 Temperature Sensor Status
Figure 5-8 Temperature Sensor Status Attribute
5.3.4 Setpoint Controller
Figure 5-9 Setpoint Controller Attributes
5-6
August, 2012
Installation and Operation Manual
Section 5 Slave Configuration
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
5.3.4.1 Setpoint Controller Status
Figure 5-10 Setpoint Controller Status Attribute
5-7
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
Brooks® GF40/GF80 EtherCAT®
5.3.5 Valve Actuator Attributes
Figure 5-11 Valve Actuator Attributes
Figure 5-12 Valve Actuator Status Attributes
5-8
August, 2012
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
5.3.6 Service Transfer Attributes
Figure 5-13 Service Transfer Attributes
5.3.7 Calibration Object Attributes
Figure 5-14 Calibration Object Attributes
5-9
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
Brooks® GF40/GF80 EtherCAT®
August, 2012
5.3.8 Exceptions
5.3.8.1 Alarm- and Warning Details
The device, flow, temperature, setpoint controller and valve actuator related
exceptions are collected in the alarm- and warning detail byte sequences.
The bitmasks are shown below
5.3.8.2 Exception Status
The exception status is a one byte summary of the alarm- and warning
details.
5-10
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
Table 5-1 Valve Override Values (vdOverride)
Table 5-2 Flow Data Units (fmUnits)
Table 5-3 Temperature Data Units (tmUnits)
Table 5-4 Setpoint Control Mode (fcControlMode)
Table 5-5 Valve Drive Data Units (vdUnits)
5-11
Section 5 Slave Configuration
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
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5-12
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
Installation and Operation Manual
X-DPT-EtherCAT-GF40-GF80-MFC-eng
Part Number: 541B170AAG
August, 2012
Brooks® GF40/GF80 EtherCAT®
LIMITED WARRANTY
Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal
use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty
extended by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault
of Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.
BROOKS SERVICE AND SUPPORT
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and
reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the
relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
START-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.
CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.
Please contact your nearest sales representative for more details.
HELP DESK
In case you need technical assistance:
888 275 8946
USA
Netherlands
+31 (0) 318 549 290
Germany
+49 351 215 2040
Japan
+81 3 5633 7100
Korea
Taiwan
China
Singapore
+82 31 708 2521
+886 3 5590 988
+86 21 5079 8828
+6297 9741
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.
TRADEMARKS
Brooks .................................................................... Brooks Instrument, LLC
HART ................................................... HART Communications Foundation