Solid State Communications 150 (2010) 2182–2185 Contents lists available at ScienceDirect Solid State Communications journal homepage: www.elsevier.com/locate/ssc Steady-state and transient electron transport within bulk wurtzite zinc oxide Stephen K. O’Leary a,∗ , Brian E. Foutz b , Michael S. Shur c , Lester F. Eastman d a School of Engineering, The University of British Columbia, Okanagan, 3333 University Way, Kelowna, British Columbia, Canada V1V 1V7 b 608 Nettle Court, Charlottesville, VA 22903, USA Department of Electrical, Computer, and Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA c d School of Electrical Engineering, Cornell University, Ithaca, NY 14853, USA article info Article history: Received 22 June 2010 Received in revised form 30 August 2010 Accepted 31 August 2010 by E.Y. Andrei Available online 8 September 2010 Keywords: A. Zinc oxide B. Gallium nitride C. Semiconductors D. Electron transport abstract We study the steady-state and transient electron transport that occurs within bulk wurtzite zinc oxide using an ensemble semi-classical three-valley Monte Carlo simulation approach. We find that for electric field strengths in excess of 180 kV/cm, the steady-state electron drift velocity associated with bulk wurtzite zinc oxide exceeds that associated with bulk wurtzite gallium nitride. We also present evidence to suggest that the negative differential mobility exhibited by the velocity-field characteristic associated with bulk wurtzite zinc oxide is not related to transitions to the upper valleys. The transient electron transport that occurs within bulk wurtzite zinc oxide is studied by examining how electrons, initially in thermal equilibrium, respond to the sudden application of a constant electric field. From these transient electron transport results, we conclude that for devices with dimensions smaller than 0.1 µm, gallium nitride based devices will offer the advantage, owing to their superior transient electron transport, while for devices with dimensions greater than 0.1 µm, zinc oxide based devices will offer the advantage, owing to their superior high-field steady-state electron transport. © 2010 Elsevier Ltd. All rights reserved. Zinc oxide (ZnO) is a direct-gap II–VI semiconductor that has recently become the focus of considerable interest [1–4]. Traditionally, this material was prepared either as a powder or in oriented polycrystalline form [5]. Unfortunately, the defective nature of these samples limited the range of applications that could be considered [6–8]. In recent years, however, dramatic advances in ZnO deposition have been achieved, and high-quality bulk wurtzite ZnO crystals have been fabricated [9]. This has greatly expanded the range of opportunities for ZnO in electronic and optoelectronic device applications. The wide energy gap of ZnO, around 3.4 eV at room temperature [10], is very similar to that of gallium nitride (GaN), suggesting that ZnO is also a suitable candidate for high temperature and high power electron device applications. Its availability in bulk wurtzite crystalline form, and the fact that it is almost exactly lattice matched with GaN, make it possible to use ZnO as a substrate in GaN epitaxy [11]. Adding to its allure, ZnO is amenable to wet chemical etching [12], possesses a large exciton binding energy [13], and is able to robustly function in extreme radiation conditions [14]. These favorable material properties suggest that ZnO will remain a focus of attention for many years to come. With its wide energy gap, large polar optical phonon energy, and large intervalley energy separation, ZnO is expected to ex- ∗ Corresponding author. Tel.: +1 250 807 8091; fax: +1 250 807 9850. E-mail address: [email protected] (S.K. O’Leary). 0038-1098/$ – see front matter © 2010 Elsevier Ltd. All rights reserved. doi:10.1016/j.ssc.2010.08.033 hibit favorable electron transport characteristics [15]. A number of studies of the electron transport that occurs within ZnO have been reported over the years. Experimental measurements of the mobility of this material were reported by Hutson [16] in 1957 and Look et al. [9] in 1998. Then, in 1999, Albrecht et al. [5] reported on Monte Carlo simulations of the steady-state electron transport that occurs within bulk wurtzite ZnO. Further Monte Carlo analyses of the steady-state electron transport that occurs within bulk wurtzite ZnO have been reported by Guo et al. [17] in 2006, by Bertazzi et al. [18] in 2007, and by Furno et al. [19] in 2008. Unfortunately, these Monte Carlo results have yet to produce a satisfactory consensus, there being large differences observed between the obtained velocity-field characteristics. Variations in the material and band structural parameter selections employed for these Monte Carlo simulations are responsible for the differences in the obtained results. In this communication, we examine the steady-state and transient electron transport that occurs within bulk wurtzite ZnO. In particular, we focus on how the electron transport that occurs within this II–VI semiconductor differs from that which occurs within bulk wurtzite GaN, another wide energy gap semiconductor currently being employed for a number of electronic and optoelectronic device applications. We start with an examination of the steady-state electron transport, initially focusing on the dependence of the electron drift velocity on the applied electric field strength. The dependence of the occupancy of the lowest energy S.K. O’Leary et al. / Solid State Communications 150 (2010) 2182–2185 conduction band valley on the applied electric field strength is also probed. We then focus on the transient electron transport that occurs within this material, examining how electrons, initially in thermal equilibrium, respond to the sudden application of a constant electric field. From these transient electron transport results, we draw conclusions about the performance of ZnO and GaN based devices. For the purposes of this analysis of the electron transport within bulk wurtzite ZnO, we employ an ensemble semi-classical threevalley Monte Carlo simulation approach. The scattering mechanisms considered are (1) ionized impurity, (2) polar optical phonon, (3) piezoelectric, and (4) acoustic deformation potential. Intervalley scattering is also considered. The non-parabolicity of each valley is treated through the application of the Kane model [20,21]. We assume that all donors are ionized and that the free electron concentration is equal to the dopant concentration. For our steady-state electron transport simulations, the motion of three thousand electrons is examined, while for our transient electron transport simulations, the motion of ten thousand electrons is considered. For our simulations, the crystal temperature is set to 300 K and the doping concentration is set to 1017 cm−3 for all cases. Electron degeneracy effects are accounted for by means of the rejection technique of Lugli and Ferry [22]. Electron screening is also accounted for following the Brooks–Herring method [23]. Further details of our Monte Carlo simulation approach are presented in the literature [24–33]. Most of the material parameter selections, used for our simulations of the electron transport within bulk wurtzite ZnO, are from Albrecht et al. [5]. Unfortunately, as Albrecht et al. [5] did not provide an exhaustive list of all of the material parameters needed for our Monte Carlo simulations, some of the material parameters employed by us are drawn from other sources in the literature, or through a direct fit with the results of Albrecht et al. [5], i.e., we tweaked the material parameters until the resultant velocity-field characteristic corresponded with that found by Albrecht et al. [5]. With the exception of the second order nonparabolicity factor, which we neglect in our analysis [20,21], we employ the same three-valley band model as that employed by Albrecht et al. [5]. The lowest energy conduction band valley electron effective mass selection, 0.17 me , where me denotes the free electron mass, while smaller than the selections of Adachi [10] (0.234 me ), Guo et al. [17] (0.54 me ), and Furno et al. [19] (0.21 me perpendicular and 0.23 me parallel), is in keeping with the relation between the electron effective mass and the direct energy gap found in other III–V and II–VI semiconductors, as can be seen in Fig. 1; given the considerable overlap in authorship between Bertazzi et al. [18] and Furno et al. [19], it will be assumed that the choice of electron effective mass is similar. As with Albrecht et al. [5], anisotropy in the bands is neglected, the simulations of Bertazzi et al. [18] and Furno et al. [19] demonstrating that accounting for this anisotropy only leads to a slight correction. In Fig. 2a, we plot the velocity-field characteristic associated with bulk wurtzite ZnO for our parameter selections. The crystal temperature is set to 300 K and the doping concentration is set to 1017 cm−3 for the purposes of this simulation. We find that initially the electron drift velocity monotonically increases with the applied electric field strength, reaching a maximum of about 3.1 × 107 cm/s when the applied electric field strength is around 270 kV/cm; the applied electric field strength at which point the peak in the velocity-field characteristic occurs will henceforth be referred to as the peak field. For applied electric fields strengths in excess of 270 kV/cm, the electron drift velocity decreases in response to further increases in the applied electric field strength, i.e., a region of negative differential mobility is observed, the electron drift velocity eventually saturating at about 2.2×107 cm/s for sufficiently high applied electric field strengths. The low-field 2183 Fig. 1. The electron effective mass associated with the lowest energy valley in the conduction band as a function of the direct energy gap for the case of a number of III–V and II–VI direct-gap and indirect-gap semiconductors. The values depicted in this plot are mostly from Adachi [10] except for the value corresponding to InN, which is drawn from O’Leary et al. [30], the value corresponding to GaN, which is drawn from O’Leary et al. [31], and a few of the ZnO values, as indicated in the plot itself. A linear least squares fit corresponding to this data is depicted with the dashed line. The nature of the energy gap, i.e., whether it is direct or indirect, is specifically indicated. For the case of GaN, the wurtzite phase is considered. For the purposes of our simulations, we follow Albrecht et al. [5] and set the electron effective mass to 0.17 me . Fig. 2a. The electron drift velocity as a function of the applied electric field strength, for the cases of bulk wurtzite ZnO and bulk wurtzite GaN. The peak fields corresponding to each material, i.e., 270 kV/cm for the case of bulk wurtzite ZnO and 140 kV/cm for the case of bulk wurtzite GaN, are indicated. The transition field, beyond which the steady-state electron drift velocity associated with bulk wurtzite ZnO exceeds that associated with bulk wurtzite GaN, i.e., 180 kV/cm, is also indicated. For both cases, we assume a crystal temperature of 300 K and a doping concentration of 1017 cm−3 . A similar plot is depicted in Figure 5 of Albrecht et al. [5]. electron drift mobility is found to be around 430 cm2 /Vs for the case of bulk wurtzite ZnO [34–37]. In Fig. 2a, we also plot the velocity-field characteristic associated with bulk wurtzite GaN, this velocity-field characteristic being determined using the same bulk wurtzite GaN material and band structural parameter selections as that employed by O’Leary et al. [31]. As before, the crystal temperature is set to 300 K and the doping concentration is set to 1017 cm−3 for the purposes of this simulation. While the low-field electron drift mobility associated with bulk wurtzite GaN, around 850 cm2 /Vs, is greater than that associated with bulk wurtzite ZnO, its peak electron drift velocity, about 2.9 × 107 cm/s, is less than that found for bulk wurtzite ZnO. The fact that the peak field associated with bulk wurtzite GaN, 2184 S.K. O’Leary et al. / Solid State Communications 150 (2010) 2182–2185 Fig. 2b. The occupancy of the lowest energy conduction band valley, Γ1 , as a function of the applied electric field strength, for the cases of bulk wurtzite ZnO and bulk wurtzite GaN. The total number of electrons considered in each simulation is three thousand. The results depicted in this plot are determined from the same simulations used to determine the results depicted in Fig. 2a. The peak field corresponding to each material is indicated. For both cases, we assume a crystal temperature of 300 K and a doping concentration of 1017 cm−3 . around 140 kV/cm, is less than that associated with bulk wurtzite ZnO, suggests that ZnO offers some distinct advantages for use in high-field electron device applications. Indeed, as can be seen in Fig. 2a, for electric fields in excess of 180 kV/cm, the steady-state electron drift velocity associated with bulk wurtzite ZnO exceeds that associated with bulk wurtzite GaN. In Fig. 2b, we plot the occupancy of the lowest energy conduction band valley as a function of the applied electric field strength for the cases of bulk wurtzite ZnO and bulk wurtzite GaN; for both materials, the lowest energy conduction band valley corresponds to the central Γ valley, which we refer to as the Γ1 valley. As before, the crystal temperature is set to 300 K and the doping concentration is set to 1017 cm−3 for the purposes of these simulations, the results depicted in Fig. 2b being obtained using the same Monte Carlo stimulations as those used to determine Fig. 2a. We note that while the onset of transitions to the upper valleys occurs at applied electric field strength selections lower than the peak field, i.e., 140 kV/cm, for the case of bulk wurtzite GaN, for the case of bulk wurtzite ZnO very few upper valley transitions occur, even for applied electric field strength selections well in excess of the peak field. A detailed analysis demonstrates that even for an applied electric field strength of 1000 kV/cm, the lowest energy conduction band valley of bulk wurtzite ZnO remains 92% populated. The large intervalley energy separation exhibited by bulk wurtzite ZnO, 4.4 eV between the lowest energy conduction band valley and the first upper conduction band valley, is the primary factor responsible for this difference [38]; for the case of bulk wurtzite GaN, O’Leary et al. [31] assert that this energy difference is 1.9 eV. Clearly, the peak exhibited in the velocity-field characteristic associated with bulk wurtzite ZnO is not related to upper valley transitions. Instead, as was noted by Albrecht et al. [5], the large non-parabolicity coefficient associated with bulk wurtzite ZnO is leading to the observed negative differential mobility exhibited by bulk wurtzite ZnO [39]. We now examine the transient electron transport that occurs within bulk wurtzite ZnO. In particular, following the approach of Foutz et al. [24,27], we study how electrons, initially in thermal equilibrium, respond to the sudden application of a constant applied electric field. For our ZnO bulk parameter selections, in Fig. 3 we plot the electron drift velocity as a function of the distance displaced since the electric field was initially applied, for a number of applied electric field strength selections. We note that for Fig. 3. The electron drift velocity as a function of the distance displaced since the application of the electric field, for various applied electric field strength selections, for the case of bulk wurtzite ZnO. For all cases, we assume a crystal temperature of 300 K and a doping concentration of 1017 cm−3 . the applied electric field strength selections 135 and 270 kV/cm that the electron drift velocity reaches steady-state very quickly, with little or no velocity overshoot. In contrast, for applied electric field strength selections in excess of 270 kV/cm, significant velocity overshoot occurs. This result suggests that for bulk wurtzite ZnO, for this particular selection of parameters, that around 270 kV/cm is a critical applied electric field strength for the onset of velocity overshoot effects. As was mentioned earlier, around 270 kV/cm also corresponds to the peak field in the velocity-field characteristic associated with bulk wurtzite ZnO; recall Fig. 2a. Similar results were found for GaN, and other III–V semiconductors, by Foutz et al. [27,24]. We now compare the transient electron transport characteristics corresponding to bulk wurtzite ZnO and bulk wurtzite GaN. From the earlier analysis of Foutz et al. [24,27], it is clear that certain materials exhibit higher peak overshoot velocities and longer overshoot relaxation times. It is not possible to fairly compare these different semiconductors by applying the same applied electric field strength to all of the materials, as the transient effects occur over such a disparate range of applied electric field strengths for each material. In order to facilitate such a comparison, we choose a field strength equal to twice the peak field for each material, i.e., 540 kV/cm for the case of bulk wurtzite ZnO and 280 kV/cm for the case of bulk wurtzite GaN. Fig. 4 shows such a comparison of the velocity overshoot effects for ZnO and GaN. We find that the peak transient electron drift velocity associated with bulk wurtzite ZnO, around 5.6 × 107 cm/s, is less than that associated with bulk wurtzite GaN, about 6.7 × 107 cm/s, and that the velocity overshoot exhibited by both materials occurs over 0.1 µm. This suggests that for devices with dimensions smaller than 0.1 µm, GaN based devices will offer the advantage, owing to their superior transient electron transport. In contrast, for devices with dimensions greater than 0.1 µm, ZnO based devices will offer the advantage, owing to their superior high-field steady-state electron transport. In conclusion, we have studied the steady-state and transient electron transport that occurs within bulk wurtzite ZnO using an ensemble semi-classical three-valley Monte Carlo simulation approach. We found that for electric field strengths in excess of 180 kV/cm, that the steady-state electron drift velocity associated with bulk wurtzite ZnO exceeds that associated with bulk wurtzite GaN. We also presented evidence to suggest that the negative differential mobility exhibited by the velocity-field characteristic associated with bulk wurtzite ZnO is not related to transitions to the upper valleys. The transient electron transport that occurs S.K. O’Leary et al. / Solid State Communications 150 (2010) 2182–2185 2185 [19] E. Furno, F. Bertazzi, M. Goano, G. Ghione, E. Bellotti, Solid-State Electron. 52 (2008) 1796. [20] In the Kane model, the energy bands are assumed to be non-parabolic, spherical, and of the form h̄2 (⃗ k − k⃗o )2 2m∗ = E (1 + α E ), where ⃗ k denotes the crystal momentum wave-vector, k⃗o represents the location of the valley minimum, E is the energy with respect to this valley minimum, i.e., E = 0 corresponds to the valley minimum, m∗ is the effective mass, and α is the non-parabolicity coefficient. Typically, one sets α= Fig. 4. A comparison of the velocity overshoot for bulk wurtzite ZnO and bulk wurtzite GaN. The applied electric field strength selections correspond to twice the peak field for each case, i.e., 540 kV/cm for the case of bulk wurtzite ZnO and 280 kV/cm for the case of bulk wurtzite GaN. For both cases, we assume a crystal temperature of 300 K and a doping concentration of 1017 cm−3 . The plots crossover where they intersect. within bulk wurtzite ZnO was studied by examining how electrons, initially in thermal equilibrium, respond to the sudden application of a constant electric field. From these transient electron transport results, we concluded that for devices with dimensions smaller than 0.1 µm, GaN based devices will offer the advantage, owing to their superior transient electron transport, while for devices with dimensions greater than 0.1 µm, ZnO based devices will offer the advantage, owing to their superior high-field steady-state electron transport. We hope that these results will stimulate further interest in this material. [21] [22] [23] [24] [25] [26] [27] [28] [29] [30] [31] [32] [33] Acknowledgements [34] The authors wish to thank Dr. Kai Liu for his assistance in translating an article written in a foreign language. Financial support from the Office of Naval Research is acknowledged. 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[36] [37] [38] [39] 1 Eg 1− m∗ me 2 , (1) where me and Eg denote the free electron mass and energy gap, respectively [21], i.e., α = 0.20 eV−1 for our parameter selections. For this analysis, however, we set α to the value adopted by Albrecht et al. [5], i.e., α = 0.66 eV−1 . W. Fawcett, A.D. Boardman, S. Swain, J. Phys. Chem. Solids 31 (1970) 1963. P. Lugli, D.K. Ferry, IEEE Trans. Electron Devices 32 (1985) 2431. K. Seeger, Semiconductor Physics: An Introduction, 9th edition, SpringerVerlag, Berlin, 2004. B.E. Foutz, L.F. Eastman, U.V. Bhapkar, M.S. Shur, Appl. Phys. Lett. 70 (1997) 2849. S.K. O’Leary, B.E. Foutz, M.S. Shur, U.V. Bhapkar, L.F. Eastman, J. Appl. Phys. 83 (1998) 826. S.K. O’Leary, B.E. Foutz, M.S. Shur, U.V. Bhapkar, L.F. Eastman, Solid State Commun. 105 (1998) 621. B.E. Foutz, S.K. O’Leary, M.S. Shur, L.F. Eastman, J. Appl. Phys. 85 (1999) 7727. S.K. O’Leary, B.E. Foutz, M.S. Shur, L.F. Eastman, Solid State Commun. 118 (2001) 79. S.K. O’Leary, B.E. Foutz, M.S. Shur, L.F. Eastman, J. Electron. Mater. 32 (2003) 327. S.K. O’Leary, B.E. Foutz, M.S. Shur, L.F. Eastman, Appl. Phys. Lett. 87 (2005) 222103. S.K. O’Leary, B.E. Foutz, M.S. Shur, L.F. Eastman, J. Mater. Sci.: Mater. Electron. 17 (2006) 87. S.K. O’Leary, B.E. Foutz, M.S. Shur, L.F. Eastman, Appl. Phys. Lett. 88 (2006) 152113. S.K. O’Leary, B.E. Foutz, M.S. Shur, L.F. Eastman, J. Mater. Sci.: Mater. Electron. 21 (2010) 218. The steady-state results of Albrecht et al. [5] differ slightly from those found by us. While we aimed to faithfully reproduce the results of Albrecht et al. [5], uncertainty as to the exact values of the material and band structural parameters probably accounts for most of these slight differences. The reasons for the differences in the value of the low-field electron drift mobility remain unknown, however; the velocity-field characteristics of Albrecht et al. [5] suggest a low-field electron drift mobility of 300 cm2 /Vs while we find 430 cm2 /Vs. A number of experimental measurements of the low-field electron mobility associated with ZnO have been reported over the years. An initial determination of the mobility associated with crystalline ZnO was reported by Hutson [16] in 1957, a Hall mobility of 180 cm2 /Vs at 300 K being found for doping concentrations of the order of 1017 cm−3 ; crystalline ZnO needles were considered in the analysis of Hutson [16]. In 1998, Look et al. [9] determined a Hall mobility of 205 cm2 /Vs at 300 K for doping concentrations of the order of 1017 cm−3 , their measurements being performed on large diameter ZnO crystals. Makino et al. [36] find much higher Hall mobility values, 440 cm2 /Vs at 300 K, for epitaxial layers of ZnO, this exceeding the bulk theoretical limit corresponding to crystalline ZnO; Makino et al. [36] find this limit to be 430 cm2 /Vs at 300 K. We suspect that this enhancement in the mobility may be due to the presence of a two-dimensional electron gas; enhancement in the low-field mobility associated with ZnO due to the presence of a two-dimensional electron gas was also found by Tampo et al. [37] in 2006. While there is some variation in the obtained experimental low-field mobility results, differences in the nature of the materials are believed to account for most of these variations. Differences between these experimental results and the results of our simulation may be accounted for if one considers the polaron mass enhancement, the quality of the crystals, the Hall coefficient, and other factors. Finally, it is interesting to note that the bulk theoretical limit corresponding to crystalline ZnO found by Makino et al. [36], 430 cm2 /Vs at 300 K, is in agreement with the results of our simulations. T. Makino, Y. Segawa, A. Tsukazaki, A. Ohtomo, M. Kawasaki, Appl. Phys. Lett. 87 (2005) 022101. H. Tampo, H. Shibata, K. Matsubara, A. Yamada, P. Fons, S. Niki, M. Yamagata, H. Kanie, Appl. Phys. Lett. 89 (2006) 132113. The large intervalley energy separation, i.e., larger than the energy gap itself, seems unusual. An intervalley energy separation that exceeds the energy gap is also found for the case of indium nitride [30]. This has yet to be widely recognized. Guo et al. [17], for example, attribute the peak observed in their velocity-field characteristic associated with bulk wurtzite ZnO as being due to transitions to the upper valleys.
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