STM-TEM
™
TEM holders for in situ STM and electrical probing
The STM-TEM system provides a unique combination of Transmission Electron Microscopy and Scanning Tunneling Microscopy techniques, which are
used simultaneously in one instrument for the full
sample characterization. It consists of a STM equipped TEM sample holder, a controller and a PC with
Nanofactory’s data acquisition software. The STM
probe scanner is integrated with a patented 3D
approach mechanism having a very wide range of
motion from picometers to millimeters, which is
employed either for a coarse adjustment of the sample
orientation, or a precise probe positioning.
The STM-TEM system has a wide variety of applications. It can be used for measuring the electrical properties at specific locations of the nanostructure with
sub-nanometer accuracy. Typical functionalities include:
STM imaging, STS, contact current measurements, field
emission spectroscopy as well as bias modulation. Engaged with the TEM imaging it provides access to the
crucial information on tunneling junctions and probesample interaction as well as on probe geometry. Combined with the other analytical techniques used in TEM
it opens another dimension for in situ sample characterization.
Applications: STM-TEM imaging
(Left) TEM image of the STM tip aligned with respect to the TEM grid sample.
(Middle) TEM high resolution image acquired from the gold STM tip (as shown).
(Right) Scanning STM image acquired in TEM using the same gold tip.
STM-TEM
™
In situ electrical characterization of nanowires
(Left, Middle) TEM images of the STM tip in contact with the nanowires.
(Right) Example of the I-V curve acquired in contact mode in such experiment.
In situ electrical characterization of semiconductor devices
(Left, Right) STEM and TEM images of the STM tip in contact with a semiconductor device.
(Middle) Example of the I-V curve acquired in such experiment.
SPECIFICATIONS
Max Current range
0-5 mA
Max bias range
+/-10V
Sample size – standard grid
Ø = 3 mm
Sample size – wire diameter
0.25 mm
Scanning range
25 µm x 25 µm
Z-range
2.5 µm
Coarse motion range (X, Y)
(2mm, 2 mm)
Coarse motion range (Z)
2 mm
Piezo resolution X, Y
0.2 Å
Piezo resolution Z
0.025 Å
Operation modes: contact, tunneling, field emission (bias +/-140 V)
Holders fit in all TEM models
Contact information: [email protected]
Chalmers Science Park, SE-41288, Göteborg, Sweden
Phone: +46 31 719 07 20 Fax: +46 31 16 59 85
www.nanofactory.com