Standard Silicon Nitride Probes The silicon nitride probes consist of a cantilever integrated with a sharp tip on the end. The properties and dimensions of the cantilever play an important role in determining the sensitivity and resolution of the AFM. For contact mode AFM imaging, it is necessary to have a cantilever which is soft enough to be deflected by very small forces (i.e. small force constant) and has a high enough resonant frequency to not be susceptible to vibrational instabilities. This is accomplished by making the cantilever short, to provide a high resonant frequency, and thin, to provide a small force constant. Each probe comes in two cantilever lengths and two widths (usually referred to as thick-legged and thin-legged) attached to a single substrate. This means there are four different cantilever geometries, resulting in four possible force (or spring) constants. Specifications Force (or Spring) Constants 0.58, 0.32, 0.12, 0.06 N/m* Nominal Tip Radius of Curvature 20 - 60nm Cantilever Lengths 100 & 200µm Cantilever Configuration V-shaped Reflective Coating Gold Shape of Tip Square Pyramidal Tip Half Angle 35° Parts List • • • • • • * Calculated spring constant values are based on the 0.6µm silicon nitride thickness; however, this value can actually vary from 0.4µm to 0.7µm. Thickness is cubed in the spring constant calculation, thus, actual values can vary substantially. Find out more by calling 1.800.776.1602 or visiting www.veecoprobes.com today. © 2002 Veeco Instruments Inc., all rights reserved. Veeco is a trademark of Veeco Instruments Inc. HS1 42001 TC5K Model NP (1wafer with 500+ probes) Model NP-20 (1 strip with 20 probes) Model NP-020 (20 probes for cantilevers without tips) Model NP-OW (500 tipless probes on one wafer) Model DNP (1 wafer with 500+ probes) DNP-20 (1 strip with 20 probes).
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