Corona PreIonization
On-Board Vacuum Pump
GAM LASER, INC Hard Science
157nm Fluorine Lasers
Low Jitter switching
The VUV laser is an all
metal/ceramic device
and uses the most
advanced design of
any
commercial
excimer laser.
VUV
Long gas lifetime
The total ceramic/metal technology and corona
preionization technology of GAM laser products is
ideal for operation on the molecular Fluorine 157nm
laser transitions. 157nm VUV lasers have always
proved especially difficult devices from which to
obtain long gas lifetime and long term stable operation
due to the high sensitivity of the laser to
contamination. The 157nm ultraviolet output is highly
absorbed by many contaminants in the active laser gas.
The unique super clean design of GAM laser products
greatly reduces gas contamination and produces
exceptional performance when the laser is operated at
157nm on the molecular Fluorine transitions; all
without the use of cryogenic gas processing. The
EX10F laser gives up to 1.4W of 157nm output at
repetition rates up to 700Hz. The EX50F provides
higher repetition rate and higher power output, up to
1000Hz and 3W is available from the EX50F laser.
The high power EX100F produces 10mJ and up to
7.5W average power.
All models of the F2 laser give over 15 Days static
gas lifetime and 10 million pulses to 50% energy. No
more refilling your F2 laser every day.
The laser chamber is an all metal/ceramic device and
uses the most advanced design of any commercial
excimer laser. The laser of course includes standard
features such as active thermal stabilization, constant
power and energy control, external triggered operation,
sync out, automatic refill and automatic gas control.
The laser can be completely controlled from a
Windows 9x/2000/XP software package. A 32 bit DLL
is available for those who wish to write custom
software for the laser, or to incorporate the laser
controls into a larger software routine.
F-version lasers give the longest available
gas lifetime at 157nm, with up to 15 days
operation on a single gas fill. F-version
lasers also operate on all other excimer
laser wavelengths but at lower energy
than standard lasers. All F-version laser
are fitted with an external optics coupling
for connection to a Nitrogen or inert gas
purge system. F2 Lasers operate with
HELIUM buffer gas for reduced running
costs compared with systems using
NEON buffer.
GAM LASER, INC Hard Science
The output of the VUV laser is terminated with a
mini conflat flange or Kwik connect vacuum
flange to quickly connect the laser to a high
vacuum system or a leak free gas purged system.
Additionally the entire laser can be operated
inside a Nitrogen purged system.
Choice of models
Several models of Fluorine laser are available
offering a number of energy/repetition rate
combinations. The EX10F mini laser is available
in a 300Hz and a 600Hz maximum repetition rate
model. The EX50F laser is available in 250Hz,
500Hz, 750Hz and 1000Hz models, and the high
power EX100F in 125Hz, 250Hz, 500Hz and
1000Hz configurations.
The optimized Fluorine lasers utilize a high
efficiency discharge system to produce high laser
efficiency and stable optical output. The EX
SERIES of lasers provide precision optical tools
for the vacuum UV.
Economical Operation
The EX50F, EX10F and EX100F Fluorine lasers
operate from a single cylinder of premix gas.
Long gas lifetime is achieved without the use of
halogen injections and the need for a separate
Fluorine cylinder source. The laser chamber can
be refilled in approximately 1 minute using the
software controls and the on board vacuum pump.
High Reliability
The EX10F, EX50F and EX100F Fluorine lasers
feature high reliability and long system lifetime.
Total system lifetime is in excess of 2 billion
pulses. All optimized Fluorine laser models are
also capable of operation at all other excimer laser
wavelengths.
VUV 157nm Fluorine Lasers
Performance benefits
PARAMETER
EX5F
EX10F
EX50F
EX100F
EX200F
4.5
10
15
0.36W@ 0.6W @
250Hz
300Hz
0.8W @
250 Hz
2.4W @
250 Hz
0.8W@
60Hz
0.65W@ 1.2W @
500Hz
600 Hz
1.6W @ 4.2W@5
500 Hz
500Hz
1.6W@
125Hz
1.0W@
1000Hz
2.8W@
1000Hz
Wavelength nm
Energy Max. mJ
Average Power W
157
2
3.5
1.9W@
1000Hz
7.5W@
1000Hz
10E7
15E6
8E6
Industrial Version
N/A
45E6
N/A
Static Gas life to
50% energy
10days
7 nS
Beam Size
6x4
mm
250/500/1000 Hz
Options
7x2
mm
1x 2
7 x 3 mm
7 x 3 mm
0.8x1.6
0.7x1.4
Air : 250/500/350/700 Hz
Water : 1kHz
Cooling
K e y
♦
60/125/ Hz
+-2% Standard Deviation
0.1 x 0.2
The package dimensions and
electrical requirements of the
various F2 laser models can be
found in the basic data sheets on the
EX SERIES lasers.
10nS
Stability
Divergence
electrical
15 days
250/500/ 300/600/
1000 Hz 1000 Hz
Pulse Length
and
N/A
Dynamic gas lifetime
Pulses to 50% energy
Repetition Rate
Dimensions
service
The longest lifetime commercially
available 157nm Lasers
♦
♦
♦
♦
Wavelength control
1000Hz Repetition Rate
Unstable Resonator Optics
Single Wavelength
B e n e f i t s
♦
Vacuum Ultraviolet in a table top package
♦
VUV Purge Connector
GAM LASER INC.
6901 TPC Drive #300
ORLANDO, FL 32822
Phone : 407-851-8999
Fax : 407-850-0700
Email : Sales@ gamlaser.com
Web : www.gamlaser.com
MADE IN USA
GAM LASER, INC Hard Science
Copyright © 2005 GAM Laser Inc.,
VUV 157nm Fluorine Lasers
Specifications