for integration into the Scanning
Electron Microscopes offering unique
Correlative Probe and Electron
Microscopy technique.
™
LiteScope
Scanning Probe Microscope designed
LiteScope™
The unique Scanning Probe Microscope (SPM)
fabrication of the nano / microstructures and
LiteScope™ is designed for easy integration
surface modifications. In this combination,
into various Scanning Electron Microscopes
the LiteScope™ offers easy and fast 3D
(SEM). The combination of the complementary
inspection of fabricated structures.
SPM and the SEM techniques enables it to utilize
advantages of both commonly used microscopy
Moreover, the LiteScope™ opens a new field
techniques. The complex sample analysis,
of applications introducing completely novel
including characterization of surface topography,
measurement techniques enabling correlative
mechanical properties, electrical properties,
microscopy called Correlative Probe and Electron
chemical composition, magnetic properties and
Microscopy (CPEM). The CPEM technology is
others, can be easily obtained by LiteScope™
the first solution on the market, which allows
measuring with different replaceable probes.
measuring of the SPM and SEM in the same place
and at the same time using the same coordination
The design of the LiteScope™ enables
system. Only the CPEM technology brings you
it to be combined also with other SEM
the full advantages of the correlative imaging
accessories such as Focused Ion Beam
of SPM and SEM techniques.
(FIB) or Gas Injection System (GIS) for
Highlights
• LiteScope™ improve the performance
of the SEM by the SPM techniques
• Ready for delivery with a new SEM
or as a plug-in into existing microscopes
• Unique Correlative Probe and Electron
Microscopy technology CPEM
• Complex surface characterization –
• Easy integration and mounting / removal of
the LiteScope™ to the stage of SEM microscope
• Compatible with FIB, GIS, EDX and other
accessories
• Operation of SPM in tilted position (tilt 0° – 60°),
WD min. 5 mm
• Possibility to retract measuring head into
Topography, Roughness, Magnetic properties,
the body of the LiteScope™ to free up space
Conductivity, Electrical properties
around the sample
• Self-sensing probes without optical detection,
no laser adjustments
• Commercially available probes, wide range
of measuring modes
• Easy and fast replacement of probes
and samples
• User friendly software, operation in web browser,
easy remote access
• LiteScope™ also works as stand-alone SPM unit
Something More…
Correlative Probe and Electron Microscopy – CPEM
LiteScope™ offers not only powerful
which is too complicated to analyze by
enhancement of existing SEM instrument‘s
the individual techniques separately.
functionality, it offers even more…
NenoVision introduces a unique technology
Correlative microscopy is an approach which
Correlative Probe and Electron Microscopy –
benefits from the imaging of the same object by
CPEM (patent pending) developed for application
two different techniques. Correlation between
in Correlative Imaging. The CPEM enables
the data provided by the separate images
simultaneous surface characterization by SEM and
provides further information about the sample,
SPM of one area at the same time and in the same
coordination system.
Electron Beam
Detector
Scanning
Electron
Microscopy
Electron
Signal
Scanning
Probe
Microscopy
SPM Signal
CPEM
Correlative
Probe & Electron
Microscopy
The CPEM technology enables correlative imaging
Simultaneous scanning with known constant
of the known standard SEM and SPM methods
offset and identical resolution ensures that
in a manner basically not available until now.
the analysis is performed on the same surface
The CPEM brings a solution, which synchronizes
and it can directly be used for on-line imaging via
the scanned area, resolution and image distortion
our NenoView software.
and enables to correlate both acquired SPM and
SEM images in real time.
Electron Beam
SPM Probe
Electron Beam
SPM Probe
X, Y, Z
Sample
Sample
Sample
Scanner
Scanning Electron
Microscopy
Scanning Probe
Microscopy
3
CPEM
Correlative Probe
& Electron Microscopy
Technical Specification
Design highlights
LiteScope™ is a fully operational SPM
microscope, which allows you to get detailed
characteristics of the sample down to
• Low profile and small size enables integration
the nanoscale. It can be used as a stand-alone
within SEM / FIB instruments
microscope, however its biggest advantage
• Easy integration procedure – mounting on
is provided in combination with an electron
the SEM / FIB manipulator
beam. LiteScope™ is usually operated in high
• Universal probe holder suitable for several SPM
vacuum, but may be adopted also for ultra high
methods and easy “Plug & Play” assembling
vacuum conditions on request. LiteScope™ is
• Sample tilt up to 60°
placed on the stage of the SEM / FIB microscope,
• Optimized mechanical design regarding low
therefore it is possible to make common
vibration level (stiffness and appropriate
movements according to user’s preferences.
resonance frequency), integrated preamplifier
LiteScope™ is able to measure even in tilted
(to eliminate the signal distortion/noise as much
position, for example for simultaneous usage with
as possible)
FIB technique. In this case the user will appreciate
LiteScope™ Data
the docking option when the whole SPM probe is
hidden in the body of LiteScope™.
1 kg
The mechanical design respects all essential
Vacuum working range
105 Pa to 10-5 Pa
construction requirements (stiffness and
Scan range X, Y, Z
100 μm × 100 μm × 100 μm
appropriate resonance frequency) to achieve
Maximum sample size
10 mm × 10 mm
highly stable framework and reliable results with
Maximum sample height
8 mm
very low level of mechanical vibrations.
Resolution
up to 0.4 nm
144
57.5
44.5
49.5
10
40
144
All dimensions are in millimeters (mm).
4
90
10
144
40
44.5
8
Total weight
Control Unit
All electronics controlling the LiteScope™ are
• 2× 16 bit DAC per scan axis (scan range, offset)
integrated and suited into one control unit.
to reach maximal resolution everywhere within
This unit is standard 19” rack and it can be easily
the view field
mounted to the free slot of SEM electronics or just
• 6× 16 bit auxiliary inputs for simultaneous
free positioned matching your actual needs.
measurements of user signals (±10 V)
• Input channels could be used in feedback-loop
Features
mixer
• Probe signal output / monitor
• Maximal PLL frequency for dynamic
• External probe excitation
measurements 75 kHz suitable for tuning fork
• All necessary connections for using external
based probes (higher frequency, using external
Lock-in / PLL
PLL, on request)
• Ethernet connection to the LAN / PC
• 110 VAC or 230 VAC operation, 200 W
Software NenoView
NenoView is a user friendly software, which
• User accounts management
allows to fully control the measurements set-up,
–– Personal user accounts
data acquisition and data processing. NenoView
–– Individually configurable accounts – layout,
saves the data with all the information about
parameters, complexity,…
measurement setup; this feature is very helpful
• Remote access to the user data,
for later analysis.
download of data from control PC to
the local computer
Features
• Remote experiment control via e. g. tablet,
smartphone
• Web based user interface
• Integrated data postprocessing, analysis,
• Easy for new users, flexible for experts
export,…
5
Imaging Modes and Probes
The LiteScope™ provides and supports a wide
technical feature of its design is the universal
spectrum of SPM imaging modes and available
probe holder enabling very easy “Plug & Play”
probes. The cornerstone and most valuable
installation of different probes.
The list of the methods and relevant probes supported by LiteScope™
Akiyama
Probe
Tuning Fork Based
Probes
PRS / A*
Pt / Ir Wire
STM (Scanning Tunneling Microscopy)
AFM – Contact Mode
AFM – Tapping Mode
AFM – Conductive
MFM (Magnetic Force Microscopy)
KPFM (Kelvin Probe Force Microscopy)
EFM (Electrostatic Force Microscopy)
FMM (Force Modulation Mode)
Local voltage measurement
Local current measurement
* Piezo-Resistive Sensing / Active (PRSA) probes
All provided probes are commercially available. Customer made probes can be utilized
with the appropriate probe holder designed on request.
SEM Integration
LiteScope™ is specifically designed for integration
The LiteScope™ can be mounted and dismounted
to the SEM microscopes in the “Plug & Play”
in less than 5 minutes. The LiteScope™ can be
approach. LiteScope™ is simply attached
easily integrated into the electron microscopes
to the electron microscope by four screws to
from different manufactures. We provide adequate
the sample stage and the electrical cables are
adapters and feedthroughs which can be adjusted
plugged into the prepared vacuum feedthrough.
as per a customer‘s request.
6
Application
LiteScope™ could be utilized in many applications
represents the ideal solution for the correct
from basic academic research to failure analysis
analysis and simple true image interpretation.
in industry. The main areas of the applications are
focused to the analysis where conventional SEM
Basic research in the field of material science
does not provide sufficient information about
and nanotechnology requires detailed and full
the sample and needs to be extended also to
analysis of the surfaces and nanostructures by
the 3D imaging offered by SPM. The application
the different analytical methods. This is based
field is even enlarged and complemented by other
on the need to fully understand the principles
imaging modes, which are also available.
in the nanoscale range. The LiteScope™ offers
the ideal tool for these scientific applications.
The unique CPEM technology with
The direct advantage is evident for technologies
the correlative imaging finds direct application
like FIB and GIS where the structures are formed
in highly demanding fields where imaging by
directly in the SEM. The tool for the 3D analysis
the conventional SEM may provide misleading
of the newly created structures is essential.
information due to the surface contaminations
Furthermore, the LiteScope™ equipped with
related to the chemical contrast which interferes
the CPEM and other imaging modes enables
with the surface topography. The CPEM
the complex analyzes of the prepared structures
and nano-devices.
SEM image
Automated FIB
preparation of pillars
with well-defined
shapes for applications
such as atom probe
or micro mechanical
testing.
Source: FEI Company
SPM image
SPM calibration grid.
Source: CEITEC
SEM image
Logic Device – 65 nm
technology.
Source: FEI Company
SPM image
Gold crystalline islands
on silica / silicon
substrate after high
temperature annealing.
Source: CEITEC
SEM image
Hexagonal pattern
etched in silicon during
optical exposure
of the photoresist.
Source: FEI Company
In the industrial quality control and R&D
The wide application range is dedicated to
laboratories, LiteScope™ helps to identify
the industry in semiconductors, solar cells,
surface structures, topography, surface
memory devices, MEMS and NEMS. These fields
roughness, contaminations etc. These abilities
require the nanoscale analysis more than anywhere
will be appreciated especially by customers from
else. Nowadays requirements for complex analysis
industry where it is necessary to verify the quality
of nano-circuits and nano-devices are increasing.
of the surface and thus save on losses due
LiteScope™ provides the demanded extension to
to failure.
the real 3D and multi-characterization of samples.
7
The NenoVision company has been founded
in 2015 as a Spin-off of the Central European
Institute of Technology / Brno University
of Technology in the Czech Republic.
The company is located in the city of Brno, which
is friendly University City with a long tradition
of scientific instruments development. Brno is
also called the “Mekka of electron microscopy”
for its long tradition in electron microscopes
development and production.
The company founders have more than
10 years of experiences with the development
of the Scanning probe microscopes designed
for wide range of applications and various
environments. NenoVision continues
in the tradition and expertise and brings to
the market innovative solutions for Scanning
probe microscopes with the innovative Correlative
Probe and Electron Microscopy technology.
NenoVision s.r.o.
Purkyňova 649/127
612 00 Brno, Czech Republic
[email protected]
+420 724 917 240
www.nenovision.com