Al2O3 Al2O3 Aluminum (III) Oxide (FW = 101.96) Surface Composition Table Description: Al2O3 (99%), analyzed at 90 deg TOA, mesh at 1mm, non-conductive fused into clear glass 1 mm thick, mp 2040 C, d 3.97 Peak ID Corrected BE (eV) Measured BE (eV) Scofield RSF RSF Exponent Normalized Peak Area O 2s 24.0 19.9 0.14 1.2 12,578 Al 2p 75.9 71.8 0.54 1.2 28,737 Al loss 90.5 86.4 0.00 1.5 1,485 Si 2p 103.2 99.1 0.82 1.5 2,122 Al 2s 120.8 116.7 0.75 1.2 42,744 Al loss 144.3 140.2 0.00 1.2 11,965 Si 2s 155.0 150.9 0.96 1.2 1,481 0.7% C 1s 286.0 281.9 1.00 1.2 57,477 30.9% C loss 307.5 303.4 0.00 1.2 4,508 Ag 3d 369.1 365.0 18.04 1.2 4,186 0.1% Survey N 1s 401.4 397.3 1.80 1.2 2,528 0.9% M-1 Na Auger 498.1 494.0 3.40 1.2 6,270 O 1s 532.4 528.3 2.93 1.2 180,659 O loss 556.8 552.7 0.00 1.2 95,458 O Auger 980.1 976.0 0.00 1.2 29,773 Atomic % 23.7% Table O (1s) 43.7% C (1s) VB M-2 © 2005 XPS International LLC Handbooks of Monochromatic XPS Spectra Volume Two - Commercially Pure Binary Oxides 43 Al2O3 Al2O3 Aluminum (III) Oxide (FW = 101.96) Sample Description: Al2O3 (99%) fused into glass 1mm thick analyzed as received at 90 deg TOA , mesh-screen at 1mm Counts Atomic % 43.7% 0.9% 0.1% 30.9% 0.7% 23.7% BE (eV) 532.35 401.36 369.11 286.02 155.03 75.85 Survey O 1s Peak ID 65000 O 1s N 1s Ag 3d 60000 C 1s Si 2s 55000 Al 2p 50000 45000 40000 35000 30000 Table Survey C 1s 25000 0 1000 Al 2p Al 2s O (1s) C (1s) VB M-2 O 2s Si 2p Al loss Si 2s Al loss C loss Ag 3d 5000 N 1s Na Auger 10000 O Auger 15000 M-1 O loss 20000 © 2005 XPS International LLC 900 Handbooks of Monochromatic XPS Spectra 800 700 600 500 Binding Energy, eV 400 Volume Two - Commercially Pure Binary Oxides 300 200 100 44 Al2O3 Al2O3 Aluminum (III) Oxide (FW = 101.96) Sample Description: Fused Al2O3 (as rec'd, surface of 1 mm thick plate, screen, 90 DEG TOA) Counts 1800 Atomic % 64.8% 35.2% BE (eV) 532.35 75.85 Label BE (eV) FWHM A 75.60 1.39 Peak-Fit Baseline: 80.83 to 71.10 eV Reduced Chi-Square: 0.589 Al (2p) A 2000 Peak ID O 1s Al 2p Height 1757.24 Gauss 85.0% Al (2p) High Res Ag(3d5) FWHM=0.75eV Asymm Norm. Area Rel. Area 0.0% 1156.98 100.0% 1600 1400 Al in Al2O3 BE = 75.6 eV FWHM = 1.39 eV 1200 1000 Table Survey 800 M-1 600 O (1s) (2p) C (1s) 400 The BE difference between Al (2p3) and Al (2p1) is about 0.4 eV and is not resolvable under these conditions. Energy correction is based on the 75.6 eV value observed for the Al 2p signal from the native oxide of Al. VB M-2 (2p) 200 © 2005 XPS International LLC 0 84 Handbooks of Monochromatic XPS Spectra 82 80 78 76 Binding Energy, eV 74 Volume Two - Commercially Pure Binary Oxides 72 70 68 66 45 Al2O3 Al2O3 Aluminum (III) Oxide (FW = 101.96) Sample Description: Fused Al2O3 (as rec'd, surface of 1 mm thick plate, screen, 90 DEG TOA) Counts Atomic % 64.8% 35.2% BE (eV) 532.35 75.85 Label BE (eV) FWHM A 532.00 1.59 B 533.42 1.61 24000 Peak-Fit Baseline: 537.59 to 527.31 eV Reduced Chi-Square: 0.000 26000 O (1s) Height 22783.5 3969.38 Gauss 82.0% 70.0% Asymm Norm. Area 0.0% 34789 0.0% 6483.58 Rel. Area 84.3% 15.7% O (1s) High Res Ag3d5 FWHM=0.75eV A Peak ID O 1s 28000 Al 2p 22000 20000 18000 O as Al2O3 BE = 532.0 eV FWHM = 1.6 eV 16000 14000 Table 12000 Survey M-1 10000 O (1s) (1s) 6000 Energy correction is based on the 75.6 eV value observed for the Al 2p signal from the native oxide of Al. C (1s) B 8000 Adsorbed water 4000 VB (1s) M-2 2000 0 © 2005 XPS International LLC 542 540 Handbooks of Monochromatic XPS Spectra 538 536 534 532 Binding Energy, eV Volume Two - Commercially Pure Binary Oxides 530 528 526 524 46 Al2O3 Al2O3 Aluminum (III) Oxide (FW = 101.96) Sample Description: Fused Al2O3 (as rec'd, surface of 1 mm thick plate, screen, 90 DEG TOA) Counts Atomic % 64.8% 35.2% BE (eV) 532.35 75.85 7500 Label BE (eV) FWHM A 286.18 1.51 7000 B 287.31 1.42 C 288.86 1.64 D 290.35 1.44 6500 Peak-Fit Baseline: 292.86 to 282.35 eV Reduced Chi-Square: 1.601 6000 C (1s) A Peak ID 8000 O 1s Al 2p Height 6596.12 760.496 320.47 298.519 Gauss 85.0% 80.0% 80.0% 80.0% Asymm Norm. Area 0.0% 9443.18 0.0% 1048.17 0.0% 510.99 0.0% 418.08 Rel. Area 82.7% 9.2% 4.5% 3.7% C (1s) High Res Ag(3d5) FWHM=0.75eV 5500 C-C C-H 5000 4500 4000 Table C-OR C-OH 3500 Survey M-1 3000 2500 Energy correction is based on the 75.6 eV value observed for the Al 2p signal from the native oxide of Al. O (1s) C (1s) C=O COOR COOH B 2000 (1s) VB (1s) D C M-2 1500 1000 500 © 2005 XPS International LLC 296 Handbooks of Monochromatic XPS Spectra 294 292 290 288 Binding Energy, eV 286 Volume Two - Commercially Pure Binary Oxides 284 282 280 278 47 Al2O3 Al2O3 Aluminum (III) Oxide (FW = 101.96) Sample Description: Fused Al2O3 (as rec'd, surface of 1 mm thick plate, screen, 90 DEG TOA) Counts Atomic % 64.8% 35.2% BE (eV) 532.35 75.85 Label BE (eV) FWHM A 6.06 2.79 B 8.28 2.94 5500 C 11.34 2.86 Peak-Fit Baseline: 16.06 to 1.16 eV Reduced Chi-Square: 1.613 5000 Label BE (eV) FWHM A 24.16 3.22 4500 B 27.04 2.52 C 30.92 3.22 4000 Peak-Fit Baseline: 35.67 to 19.78 eV Reduced Chi-Square: 2.536 6000 Valence Bands Valence Band Electrons A Peak ID 6500 O 1s Al 2p [Ne] 3s23p1 Height 1132.68 977.755 1572.69 Gauss 85.0% 85.0% 85.0% Asymm Norm. Area 0.0% 1804.28 0.0% 1637.05 0.0% 2563.92 Rel. Area 30.0% 27.3% 42.7% Height 4934.31 933.813 399.824 Gauss 85.0% 85.0% 85.0% Asymm Norm. Area 0.0% 9056.7 0.0% 1340.82 0.0% 734.645 Rel. Area 81.4% 12.0% 6.6% 3500 3000 Bandwidth = 7.9 eV (2s) Survey B 2500 Table C Al (3s) M-1 O (2s) C 2000 O (1s) C (1s) A B 1500 BE = 4.9 eV 1000 Energy correction is based on the 75.6 eV value observed for the Al 2p signal from the native oxide of Al. 500 0 VB M-2 © 2005 XPS International LLC 45 40 Handbooks of Monochromatic XPS Spectra 35 30 25 20 Binding Energy, eV 15 Volume Two - Commercially Pure Binary Oxides 10 5 0 48 Al2O3 Al2O3 Aluminum (III) Oxide (FW = 101.96) Sample Description: Fused Al2O3 (as rec'd, surface of 1 mm thick plate, screen, 90 DEG TOA) Counts Peak ID O 1s Al 2p Atomic % 64.8% 35.2% BE (eV) 532.35 75.85 Al (2s) 5000 BE (eV) FWHM A 120.08 2.04 Peak-Fit Baseline: 127.90 to 111.51 eV 4500 Reduced Chi-Square: 0.000 Height 3975.13 Gauss 70.0% Asymm Norm. Area 0.0% 8202.97 A Label Al (2s) High Res Ag3d5 FWHM=0.75eV Rel. Area 100.0% 4000 Al in Al2O3 BE = 120.1 eV FWHM = 2.0 eV 3500 3000 Table 2500 Survey M-1 2000 O (1s) (2s) 1500 C (1s) Energy correction is based on the 75.6 eV value observed for the Al 2p signal from the native oxide of Al. VB (2s) 1000 M-2 500 © 2005 XPS International LLC 128 126 Handbooks of Monochromatic XPS Spectra 124 122 120 118 Binding Energy, eV Volume Two - Commercially Pure Binary Oxides 116 114 112 110 49 AlOOH AlOOH Diaspore Diaspore Aluminum (III) Oxy-hydroxide (FW = 59.99) Surface Composition Table Description: AlOOH (Diaspore, Al2O3-H2O) a natural mineral, analyzed at 90 deg TOA, mesh at 1 mm, non-conductive white, freshly fractured in air Peak ID Corrected BE (eV) Measured BE (eV) Scofield RSF RSF Exponent Normalized Peak Area O 2s 24.2 24.2 0.15 1.4 2,945 Al 2p 75.0 75.0 0.54 1.4 6,323 Al KLL-1 99.4 99.4 0.22 1.4 2,556 Al 2s 119.9 119.9 0.75 1.4 9,912 Al loss 144.4 144.4 0.00 1.4 4,440 C 1s 286.1 286.1 1.00 1.4 11,569 C loss 303.7 303.7 0.00 1.4 1,695 O 1s 532.5 532.5 2.93 1.4 46,298 O loss 555.9 555.9 0.00 1.4 25,489 O loss 581.3 581.3 0.00 1.4 1,853 O KLL-1 979.2 979.2 0.70 1.4 6,850 Atomic % 24.8% 26.1% 49.1% Table Survey M-1 O (1s) © 2005 XPS International LLC C (1s) VB 1000 eV M-2 X1 Handbooks of Monochromatic XPS Spectra Volume Two - Commercially Pure Binary Oxides 50 AlOOH AlOOH Diaspore Diaspore Aluminum (III) Oxy-hydroxide (FW = 59.99) Sample Description: AlOOH (Diaspore, Al2O3-H2O), analyzed at 90 deg TOA, mesh at 1 mm, non-conductive white, freshly fractured in air, mp xxx, d xxx Counts Atomic % 49.1% 26.1% 24.8% BE (eV) 532.46 286.12 119.95 Survey O 1s Peak ID 60000 O 1s C 1s Al 2s 55000 50000 45000 40000 35000 30000 Table 25000 Al 2s M-1 Al 2p O (1s) C (1s) VB 1000 eV O2s 5000 Al KLL-1 Al loss C loss 10000 O KLL-1 15000 O loss O loss 20000 C 1s Survey M-2 X1 0 1000 © 2005 XPS International LLC 900 Handbooks of Monochromatic XPS Spectra 800 700 600 500 Binding Energy, (eV) 400 Volume Two - Commercially Pure Binary Oxides 300 200 100 51 AlOOH AlOOH Diaspore Diaspore Aluminum (III) Oxy-hydroxide (FW = 59.99) Sample Description: AlOOH (Diaspore, Al2O3-H2O), analyzed at 90 deg TOA, mesh at 1 mm, non-conductive white, freshly fractured in air, mp xxx, d xxx Counts Atomic % 49.1% 26.1% 24.8% BE (eV) 532.46 286.12 119.95 Label BE (eV) FWHM A 74.32 1.90 B 72.62 1.82 4000 Peak-Fit Baseline: 80.15 to 68.70 eV 3800 Reduced Chi-Square: 1.443 4200 Al (2p) Height 3826.92 184.902 Gauss 90.0% 90.0% Asymm Norm. Area Rel. Area 0.0% 1352.84 95.6% 0.0% 62.6217 4.4% A Peak ID 4800 O 1s C 1s 4600 Al 2s 4400 3600 Al in AlOOH BE = 74.3 eV FWHM = 1.9 eV 3400 3200 3000 2800 2600 2400 2200 Table 2000 Survey 1800 M-1 1600 O (1s) 1400 C (1s) 1200 VB 1000 800 M-2 B 600 Differential charging 400 200 1000 eV (2p) X1 © 2005 XPS International LLC 86 Handbooks of Monochromatic XPS Spectra 82 78 74 Binding Energy, (eV) Volume Two - Commercially Pure Binary Oxides 70 66 52 AlOOH AlOOH Diaspore Diaspore Aluminum (III) Oxy-hydroxide (FW = 59.99) Sample Description: AlOOH (Diaspore, Al2O3-H2O), analyzed at 90 deg TOA, mesh at 1 mm, non-conductive white, freshly fractured in air, mp xxx, d xxx Counts Atomic % 49.1% 26.1% 24.8% BE (eV) 532.46 286.12 119.95 Label BE (eV) FWHM A 530.77 1.41 B 531.94 1.43 C 532.96 1.43 13000 D 529.66 1.46 Peak-Fit Baseline: 537.85 to 525.35 eV 12000 Reduced Chi-Square: 2.131 14000 O (1s) Height 10817.8 9333.44 3735.92 3471.48 Gauss 90.0% 90.0% 90.0% 90.0% Asymm Norm. Area Rel. Area 0.0% 4246.12 39.1% 0.0% 3713.47 34.2% 0.0% 1492.11 13.7% 0.0% 1415.2 13.0% A Peak ID 16000 O 1s C 1s 15000 Al 2s O in AlO of AlOOH BE = 530.8 eV FWHM = 1.4 eV B 11000 10000 O in OH of AlOOH BE = 531.9 eV FWHM = 1.4 eV 9000 8000 Table 7000 Survey 6000 M-1 O (1s) D C 5000 C (1s) 4000 VB 3000 (1s) 2000 1000 eV Differential charging M-2 1000 0 X1 © 2005 XPS International LLC 540 538 Handbooks of Monochromatic XPS Spectra 536 534 532 530 Binding Energy, (eV) 528 Volume Two - Commercially Pure Binary Oxides 526 524 522 53 AlOOH AlOOH Diaspore Diaspore Aluminum (III) Oxy-hydroxide (FW = 59.99) Sample Description: AlOOH (Diaspore, Al2O3-H2O), analyzed at 90 deg TOA, mesh at 1 mm, non-conductive white, freshly fractured in air, mp xxx, d xxx Counts Atomic % 49.1% 26.1% 24.8% BE (eV) 532.46 286.12 119.95 C (1s) Label BE (eV) FWHM A 284.94 1.83 B 286.40 1.88 C 289.27 1.71 4500 D 283.31 1.54 Peak-Fit Baseline: 292.05 to 278.60 eV Reduced Chi-Square: 1.820 Height 4182.82 300.336 106.793 292.166 5000 Gauss 90.0% 90.0% 90.0% 90.0% Asymm Norm. Area Rel. Area 0.0% 2138.11 86.5% 0.0% 157.405 6.4% 0.0% 51.0441 2.1% 0.0% 125.651 5.1% A Peak ID O 1s 5500 C 1s Al 2s C-C C-H 4000 3500 3000 Table 2500 Survey M-1 2000 O (1s) C (1s) 1500 1000 eV D B (1s) C 1000 VB C-OR C-OH COOH COOR M-2 Differential charging X1 500 © 2005 XPS International LLC 294 292 Handbooks of Monochromatic XPS Spectra 290 288 286 284 Binding Energy, (eV) 282 Volume Two - Commercially Pure Binary Oxides 280 278 276 54 AlOOH AlOOH Diaspore Diaspore Aluminum (III) Oxy-hydroxide (FW = 59.99) Sample Description: AlOOH (Diaspore, Al2O3-H2O), analyzed at 90 deg TOA, mesh at 1 mm, non-conductive white, freshly fractured in air, mp xxx, d xxx Counts Peak ID 2800 O 1s C 1s Al 2s 2600 Atomic % 49.1% 26.1% 24.8% BE (eV) 532.46 286.12 119.95 Label BE (eV) FWHM A 5.44 2.54 B 7.56 2.67 C 9.93 2.49 2200 D 11.87 3.53 Peak-Fit Baseline: 15.80 to -0.40 eV Reduced Chi-Square: 1.187 2000 2400 Valence Bands Height 416.059 483.978 379.193 119.728 Gauss 90.0% 90.0% 90.0% 90.0% Asymm Norm. Area Rel. Area 0.0% 294.302 28.4% 0.0% 359.669 34.8% 0.0% 262.731 25.4% 0.0% 117.936 11.4% 1800 1600 1400 Table 1200 Survey Bandwidth = 7.4 eV 1000 M-1 O (1s) C (1s) A 600 B C 800 VB D O (2s) 400 1000 eV Å BE = 4.5 eV 200 M-2 X1 0 © 2005 XPS International LLC 40 Handbooks of Monochromatic XPS Spectra 35 30 25 20 Binding Energy, (eV) 15 Volume Two - Commercially Pure Binary Oxides 10 5 0 -5 55 AlOOH AlOOH Diaspore Diaspore Aluminum (III) Oxy-hydroxide (FW = 59.99) Sample Description: AlOOH (Diaspore, Al2O3-H2O), analyzed at 90 deg TOA, mesh at 1 mm, non-conductive white, freshly fractured in air, mp xxx, d xxx Counts Peak ID 900 O 1s C 1s Al 2s 850 Atomic % 49.1% 26.1% 24.8% BE (eV) 532.46 286.12 119.95 1,000-1,400 eV 800 750 700 650 600 550 C Auger Table 500 Survey M-1 450 O (1s) 400 C (1s) VB 350 1000 eV 300 M-2 X1 250 © 2005 XPS International LLC 1400 1360 Handbooks of Monochromatic XPS Spectra 1320 1280 1240 1200 Binding Energy, (eV) 1160 Volume Two - Commercially Pure Binary Oxides 1120 1080 1040 56 AlOOH AlOOH Diaspore Diaspore Aluminum (III) Oxy-hydroxide (FW = 59.99) Sample Description: AlOOH (Diaspore, Al2O3-H2O), analyzed at 90 deg TOA, mesh at 1 mm, non-conductive white, freshly fractured in air, mp xxx, d xxx Counts 4400 Peak ID Atomic % BE (eV) O 1s 49.1% 532.46 4200 C 1s 26.1% 286.12 Al 2s 24.8% 119.95 4000 Height 3008.82 403.898 Gauss 90.0% 90.0% Asymm Norm. Area Rel. Area 0.0% 1890.84 86.4% 0.0% 298.425 13.6% A Label BE (eV) FWHM A 119.18 2.25 B 117.58 2.65 3600 Peak-Fit Baseline: 124.40 to 112.95 eV 3400 Reduced Chi-Square: 1.779 3800 Al (2s) 3200 Al in AlOOH BE = 119.2 eV FWHM = 2.2 eV 3000 2800 2600 2400 2200 Table 2000 Survey 1800 M-1 1600 O (1s) 1400 C (1s) 1200 VB B 1000 (2s) Differential charging 800 1000 eV M-2 600 X1 400 © 2005 XPS International LLC 200 134 Handbooks of Monochromatic XPS Spectra 130 126 122 Binding Energy, (eV) Volume Two - Commercially Pure Binary Oxides 118 114 57 AlOOH AlOOH Diaspore Diaspore Aluminum (III) Oxy-hydroxide (FW = 59.99) Sample Description: AlOOH (Diaspore, Al2O3-H2O), analyzed at 90 deg TOA, mesh at 1 mm, non-conductive white, freshly fractured in air, mp xxx, d xxx Counts Atomic % 49.1% 26.1% 24.8% BE (eV) 532.46 286.12 119.95 Label BE (eV) FWHM A 968.56 3.73 B 972.19 4.16 C 975.88 4.19 2100 D 978.90 4.31 Peak-Fit Baseline: 985.10 to 961.80 eV 2000 Reduced Chi-Square: 2.004 2200 O Auger Height 211.968 403.311 517.249 746.926 Gauss 90.0% 90.0% 90.0% 90.0% Asymm Norm. Area Rel. Area 0.0% 220.252 10.1% 0.0% 467.882 21.4% 0.0% 604.843 27.6% 0.0% 897.371 41.0% D Peak ID O 1s 2400 C 1s Al 2s 2300 1900 1800 C 1700 1600 Table Survey B 1500 1400 M-1 1300 O (1s) C (1s) A 1200 VB 1100 1000 eV O Auger 1000 M-2 X1 900 © 2005 XPS International LLC 800 994 990 Handbooks of Monochromatic XPS Spectra 986 982 978 974 Binding Energy, (eV) 970 Volume Two - Commercially Pure Binary Oxides 966 962 958 58 Al(OH)3 Al(OH)3 Aluminum (III) Hydroxide (FW = 78.00) Surface Composition Table Description: Al(OH)3 (Tech.) from Perfect Parts Chem. Co., analyzed at 35 deg TOA, no mesh, non-conductive white powder pressed onto double sided tape, dec to Al2O3 >300 C, sol in aq. alkaline soln, HCl, H2SO4 Peak ID Corrected BE (eV) Measured BE (eV) Scofield RSF RSF Exponent Normalized Peak Area O 2s 24.0 20.2 0.14 0.6 3,409 Al 2p 73.9 70.1 0.54 0.6 4,885 Al loss 96.4 92.6 0.00 0.6 1,419 Al 2s 118.9 115.1 0.75 1.5 7,230 Al loss 142.3 138.5 0.00 0.6 2,350 C 1s 285.0 281.2 1.00 1.5 9,833 22.4% O 1s 532.4 528.6 2.93 1.5 54,136 59.5% O loss 555.8 552.0 0.00 0.6 28,217 O KLL-1 978.1 974.3 0.70 0.6 13,859 Atomic % 18.0% Table Survey © 2005 XPS International LLC M-1 O (1s) C (1s) VB M-2 Handbooks of Monochromatic XPS Spectra Volume Two - Commercially Pure Binary Oxides 59 Al(OH)3 Al(OH)3 Aluminum (III) Hydroxide (FW = 78.00) Sample Description: Al(OH)3 (Tech. Grade) from Perfect Parts Chemical Co. analyzed at 35 deg TOA, pressed onto double sided tape, no mesh-screen Counts Atomic % 59.5% 22.4% 18.0% BE (eV) 532.36 285.04 118.87 Survey O 1s Peak ID 17000 O 1s C 1s 16000 Al 2s 15000 14000 13000 12000 11000 10000 9000 8000 Table 7000 Survey M-1 5000 O (1s) O loss C (1s) 1000 M-2 O 2s 1000 Al 2p 2000 0 VB Al loss Al loss 3000 Al 2s C 1s 4000 O KLL-1 6000 © 2005 XPS International LLC 900 Handbooks of Monochromatic XPS Spectra 800 700 600 500 Binding Energy, (eV) 400 Volume Two - Commercially Pure Binary Oxides 300 200 100 60 Al(OH)3 Al(OH)3 Aluminum (III) Hydroxide (FW = 78.00) Sample Description: ALUMINUM HYDROXIDE (Al(OH)3) powder/tape (no mesh) TECHNICAL GRADE, PERFECT PARTS CHEMICAL CO. Counts Atomic % 59.5% 22.4% 18.0% BE (eV) 532.36 285.04 118.87 Label BE (eV) FWHM A 74.35 1.61 380 Peak-Fit Baseline: 78.70 to 69.88 eV Reduced Chi-Square: 1.443 360 400 Al (2p) Al (2p) High Res Ag(3d5) FWHM=0.75eV Height 337.886 Gauss 90.0% Asymm Norm. Area 0.0% 757.875 Rel. Area 100.0% A 460 Peak ID O 1s 440 C 1s Al 2s 420 340 320 300 280 Al in Al(OH)3 BE = 74.35 eV FWHM = 1.61 eV 260 240 220 Table 200 Survey 180 160 M-1 140 O (1s) 120 C (1s) (2p) 100 80 VB (2p) M-2 60 40 20 0 © 2005 XPS International LLC 86 84 Handbooks of Monochromatic XPS Spectra 82 80 78 76 Binding Energy, (eV) Volume Two - Commercially Pure Binary Oxides 74 72 70 68 61 Al(OH)3 Al(OH)3 Aluminum (III) Hydroxide (FW = 78.00) Sample Description: ALUMINUM HYDROXIDE (Al(OH)3) powder/tape (no mesh) TECHNICAL GRADE, PERFECT PARTS CHEMICAL CO. Counts Atomic % 59.5% 22.4% 18.0% BE (eV) 532.36 285.04 118.87 Label BE (eV) FWHM A 531.81 1.92 B 533.71 1.81 4500 Peak-Fit Baseline: 537.11 to 527.35 eV Reduced Chi-Square: 1.020 O (1s) Height 4234.86 200.122 Gauss 90.0% 90.0% Asymm Norm. Area 0.0% 11316.6 0.0% 504.507 A 5500 Peak ID O 1s C 1s Al 2s 5000 O (1s) High Res Ag(3d5) FWHM=0.75eV Rel. Area 95.7% 4.3% 4000 3500 O in Al(OH)3 BE = 531.81 eV FWHM = 1.92 eV 3000 2500 Table Survey 2000 M-1 O (1s) (1s) 1500 C (1s) VB 1000 adsorbed water M-2 (1s) 0 B 500 © 2005 XPS International LLC 540 538 Handbooks of Monochromatic XPS Spectra 536 534 532 530 Binding Energy, (eV) Volume Two - Commercially Pure Binary Oxides 528 526 524 522 62 Al(OH)3 Al(OH)3 Aluminum (III) Hydroxide (FW = 78.00) Sample Description: ALUMINUM HYDROXIDE (Al(OH)3) powder/tape (no mesh) TECHNICAL GRADE, PERFECT PARTS CHEMICAL CO. Counts Peak ID 1500 O 1s C 1s Al 2s 1400 Atomic % 59.5% 22.4% 18.0% BE (eV) 532.36 285.04 118.87 Label BE (eV) FWHM A 284.72 1.50 1300 B 285.59 1.54 C 286.86 1.58 1200 D 288.85 1.71 Peak-Fit Baseline: 292.17 to 280.04 eV 1100 Reduced Chi-Square: 1.430 C (1s) Height 704.997 384.438 160.315 94.352 Gauss 90.0% 90.0% 90.0% 90.0% Asymm Norm. Area 0.0% 983.931 0.0% 550.528 0.0% 236.108 0.0% 150.232 C (1s) High Res Ag(3d5) FWHM=0.75eV Rel. Area 51.2% 28.7% 12.3% 7.8% 1000 900 A 800 700 C-C C-H Table C-OR C-OH Survey 600 M-1 B 500 400 O (1s) (1s) C=O C (1s) O=C-OH O=C-OR VB C 300 (1s) 100 0 M-2 D 200 © 2005 XPS International LLC 296 294 Handbooks of Monochromatic XPS Spectra 292 290 288 286 Binding Energy, (eV) Volume Two - Commercially Pure Binary Oxides 284 282 280 278 63 Al(OH)3 Al(OH)3 Aluminum (III) Hydroxide (FW = 78.00) Sample Description: ALUMINUM HYDROXIDE (Al(OH)3) powder/tape (no mesh) TECHNICAL GRADE, PERFECT PARTS CHEMICAL CO. Counts Peak ID O 1s 1400 C 1s Al 2s Atomic % 59.5% 22.4% 18.0% BE (eV) 532.36 285.04 118.87 1300 Valence Bands Valence Bands [Ne] 3s23p1 Label BE (eV) FWHM A 4.90 1.87O 1200 B 6.38 2.08 C 8.12 2.01 D 10.08 1.97 1100 E 12.06 1.74 Peak-Fit Baseline: 15.87 to -0.01 eV 1000 Reduced Chi-Square: 1.271 Height (2s)155.6 240.85 198.192 232.349 142.216 Gauss 90.0% 90.0% 90.0% 90.0% 90.0% Asymm Norm. Area 0.0% 203.193 0.0% 348.905 0.0% 277.978 0.0% 318.777 0.0% 172.577 Rel. Area 15.4% 26.4% 21.0% 24.1% 13.1% 900 800 700 Bandwidth = 8.5 eV Table 600 Survey 500 M-1 Al (3s) O (1s) C (1s) B E O (2s) 300 C D 400 A VB 200 <-- BE = 4.2 eV M-2 100 0 © 2005 XPS International LLC 40 35 Handbooks of Monochromatic XPS Spectra 30 25 20 15 Binding Energy, (eV) Volume Two - Commercially Pure Binary Oxides 10 5 0 -5 64 Al(OH)3 Al(OH)3 Aluminum (III) Hydroxide (FW = 78.00) Sample Description: ALUMINUM HYDROXIDE (Al(OH)3) powder/tape (no mesh) TECHNICAL GRADE, PERFECT PARTS CHEMICAL CO. Counts Atomic % 59.5% 22.4% 18.0% BE (eV) 532.36 285.04 118.87 Label BE (eV) FWHM A 119.13 2.22 Peak-Fit Baseline: 123.65 to 114.35 eV 450 Reduced Chi-Square: 1.184 Al (2s) Al (2s) High Res Ag(3d5) FWHM=0.75eV Height 371.212 Gauss 90.0% Asymm Norm. Area 0.0% 1147.87 Rel. Area 100.0% A 550 Peak ID O 1s C 1s Al 2s 500 400 Al in Al(OH)3 BE = 119.13 eV FWHM = 2.22 eV 350 300 Table 250 Survey M-1 200 O (1s) (2s) C (1s) 150 VB (2s) 100 M-2 50 © 2005 XPS International LLC 130 128 Handbooks of Monochromatic XPS Spectra 126 124 122 120 Binding Energy, (eV) Volume Two - Commercially Pure Binary Oxides 118 116 114 112 65 As2O3 As2O3 Arsenic (III) Oxide (FW = 197.84) Surface Composition Table Description: As2O3 (99.995%) from Aldrich Lot# 04445CW, analyzed at 90 deg TOA, mesh at 1mm, non-conductive white powder pressed into 3 mm pellet, mp 312 C, d 3.7, sol in boiling water, HCl, insol. in alcohol Peak ID Corrected BE (eV) Measured BE (eV) Scofield RSF RSF Exponent Normalized Peak Area As 4p 10.4 10.4 0.12 1.4 1,945 O 2s 25.0 25.0 0.14 1.4 6,487 As 3d 45.6 45.6 1.82 1.4 68,690 As loss 67.1 67.1 0.00 1.4 29,942 As 3p 145.3 145.3 4.07 1.4 128,540 As loss 167.8 167.8 0.00 1.4 17,059 As Auger 208.8 208.8 0.00 1.4 39,047 As Auger 233.2 233.2 0.00 1.4 145,382 As LMM-3 268.4 268.4 0.40 1.4 270,869 C 1s 286.0 286.0 1.00 1.4 8,106 As Auger 341.7 341.7 0.00 1.4 62,610 M-1 As Auger 367.2 367.2 0.00 1.4 48,861 O (1s) As Auger 377.9 377.9 0.00 1.4 54,150 C (1s) As loss 400.4 400.4 0.00 1.4 10,545 VB As Auger 438.5 438.5 0.00 1.4 45,111 1000 eV As Auger 464.9 464.9 0.00 1.4 82,310 O 1s 532.4 532.4 2.93 1.4 119,613 O loss 553.9 553.9 0.00 1.4 51,082 O KLL-1 977.1 977.1 0.70 1.4 25,155 Atomic % 29.6% Table 8.9% Survey M-2 X1 61.5% © 2005 XPS International LLC Handbooks of Monochromatic XPS Spectra Volume Two - Commercially Pure Binary Oxides 66
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