KJLC Solid Shaft Rotary Feedthroughs (Thread Mount) These ferrofluid rotary feedthroughs are sealed by a fluorocarbon oring. The operator mounts these drives to the vacuum chamber by screwing them into a corresponding threaded hole. On some models the drive’s threaded end is inserted through a suitable diameter hole in the chamber wall and retained with a nut. Some models are threaded only part way. They will accommodate various wall thicknesses when used with a sleeve or spacer over the unthreaded portion so that the nut compresses the o-ring. with the thread, the feedthrough has a flat machined along the length of its threaded portion. Please refer to the technical notes about loading, temperature, and other relevant information before specifying a feedthrough. In vacuum practice, the o-ring is compressed against the vacuum chamber’s inner surface to limit virtual leaks. As shown in the dimensional drawings, most ferrofluid feedthroughs are designed to be installed this way. A few, however, are intended to have the o-ring sealing against the air surface. To reduce the virtual leaks associated Features • Special magnetic fluid in place of an o-ring seal around dynamic parts • Unlike typical o-rings, the ferrofluid remains intact for years of operation despite the shaft’s motion Specifications (Imperial Inches) Part No. KLFDTM018516 KLFDTM025716 KLFDTM050114 KLFDTM050114W KLFDTM075114 KLFDTM075114W Mounting Water Cooling Shaft O.D. Face Seal O-Ring 5/16-24 UNF-2A 7/16-20 UNF-2A 1-14 UNS-2A 1-14 UNS-2A 1-14 UNS-2A 1-14 UNS-2A No No No Yes No Yes 3/16 1/4 1/2 1/2 3/4 3/4 O-V012 O-V015 O-V128 O-V128 O-V128 O-V128 Applications Served • Rotary stages • Barrels • Platens Dimensions (Imperial inches) Part No. KLFDTM018516 KLFDTM025716 KLFDTM050114 KLFDTM050114W KLFDTM075114 KLFDTM075114W A B C D 0.1875 0.25 0.50 0.50 0.75 0.75 0.63 0.75 2.87 2.87 2.87 2.87 2.562 3.437 8.812 8.812 8.812 8.812 E • Planetaries F • Web coater rollers used in thin film deposition and etching processes 1.58 0.482 0.28 1.937 0.75 0.375 5.072 1.25 1.51 5.072 1.25 1.51 5.072 1.25 1.51 5.072 1.25 1.51 Specifications (Metric Millimeters) Part No. Mounting KLFDMTM04M12 KLFDMTM05M12 KLFDMTM06M12 KLFDMTM12M25 KLFDMTM12M25W KLFDMTM20M30 KLFDMTM20M30W M12 x 1.5 M12 x 1.5 M12 x 1.5 M25 X 1.5 M25 X 1.5 M30 X 1.5 M30 X 1.5 Water Cooling Shaft O.D. Face Seal O-Ring No No No No Yes No Yes 4 5 6 12 12 30 30 O-V015 O-V015 O-V015 O-V220 O-V220 O-V226 O-V226 D Dimensions (Metric Millimeters) Part No. A B KLFDMTM04M12 KLFDMTM05M12 KLFDMTM06M12 KLFDMTM12M25 KLFDMTM12M25W KLFDMTM20M30 KLFDMTM20M30W 4 5 6 12 12 20 20 21 76.5 21 76.5 21 76.5 48 179 48 179 63 211 63 211 C D E F Keyway 46.5 46.5 46.5 109 109 121 121 15 15 15 30 30 35 35 10 10 10 35 35 39 39 N/A N/A N/A 2.50 2.50 3.50 3.50 3.970 3.970 5.970 5.970 W W W W x x x x A D D D D x x x x 20.0 20.0 25.0 25.0 L L L L E B F C Kurt J. Lesker Company 800.245.1656 www.lesker.com [email protected] Specifications (Metric Millimeters) Part No. KLFDMHOF1090 KLFDMHOF1090W KLFDMHOF20105 KLFDMHOF20105W KLFDMHOF25120 KLFDMHOF25120W KLFDMHOF30120 KLFDMHOF30120W KLFDMHOF40145 KLFDMHOF40145W KLFDMHOF50160 KLFDMHOF50160W KLFDMHOF75210 KLFDMHOF75210W Mounting Water Cooling 90 Flange 90 Flange 105 Flange 105 Flange 120 Flange 120 Flange 120 Flange 120 Flange 145 Flange 145 Flange 160 Flange 160 Flange 210 Flange 210 Flange No Yes No Yes No Yes No Yes No Yes No Yes No Yes Shaft O.D. Accepts Accepts Accepts Accepts Accepts Accepts Accepts Accepts Accepts Accepts Accepts Accepts Accepts Accepts 10 10 20 20 25 25 30 30 40 40 50 50 75 75 (-0.01 (-0.01 (-0.01 (-0.01 (-0.01 (-0.01 (-0.01 (-0.01 (-0.01 (-0.01 (-0.01 (-0.01 (-0.01 (-0.01 / / / / / / / / / / / / / / -0.03) -0.03) -0.03) -0.03) -0.03) -0.03) -0.03) -0.03) -0.03) -0.03) -0.03) -0.03) -0.04) -0.04) Face Seal O-Ring Inner O-Ring O-V223 O-V223 O-V226 O-V226 O-V229 O-V229 O-V232 O-V232 O-V235 O-V235 O-V238 O-V238 O-V250 O-V250 O-V012 O-V012 O-V019 O-V019 O-V022 O-V022 O-V025 O-V025 O-V129 O-V129 O-V135 O-V135 O-V149 O-V149 KJLC Solid Shaft Rotary Feedthroughs (Baseplate Mount) These ferrofluid rotary feedthroughs are sealed by a fluorocarbon o-ring. The operator mounts these drives to the vacuum chamber by placing them in a suitable smooth-sided port in the chamber wall, using a capture nut to secure the unit. Some models are threaded only part way. They will accommodate various wall thicknesses when used with a sleeve or spacer over the unthreaded portion so that the nut compresses the o-ring. In vacuum practice, the o-ring is compressed against the vacuum chamber's inner surface to limit virtual leaks. As shown in the dimensional drawings, most ferrofluid feedthroughs are designed to be installed this way. A few, however, are intended to have the o-ring sealing against the air surface. To reduce the virtual leaks associated with the thread, the feedthrough has a flat machined along the length of its Specifications (Imperial Inches) Part No. Mounting Shaft O.D. Face Seal O-Ring 3/4" BP 1" BP 1" BP 1.5" BP 1" BP 1.5" BP 1/4" 1/4" 3/8" 3/8" 1/4" 1/4" O-V026 O-V026 O-V026 O-V132 O-V026 O-V132 KLFDBP02575 KLFDBP02510 KLFDBP03710 KLFDBP03715 KLFDBP02510E KLFDBP02515 KLFDBP02575 KLFDBP02510 KLFDBP03710 KLFDBP03715 KLFDBP02510E KLFDBP02515 A B C D E F 0.25 0.25 0.375 0.375 0.25 0.25 1.625 1.625 1.625 2.12 1.62 2.25 3.437 3.437 3.39 3.97 3.125 3.85 1.93 1.93 1.65 2.47 1.625 2.35 0.75 0.75 0.87 0.75 0.75 0.75 1.68 1.68 1.3 2.22 1.375 2.1 Part No. Mounting Shaft O.D. Face Seal O-Ring 32 BP 38 BP 6 10 P35 P41 KLFDMBP0632 KLFDMBP1038 F C Specifications (Metric Millimeters) Dimensions (Metric Millimeters) Part No. A B C D E F KLFDMBP0632 KLFDMBP1038 6 10 55 60 97.5 119.5 57.5 69.5 20 25 47.5 59.5 E B A Dimensions (Imperial Inches) Part No. D KJLC Solid Shaft Rotary Feedthroughs (CF Flanged) Designed to provide rotary motion under high vacuum, these ferrofluid feedthroughs have ConFlat-compatible (CF) mounting flanges. Normal helium leak detectors capable of detecting 1 x 10-11 std cc/sec of Helium flow detect no leakage for CF mounts under static and dynamic testing. CF flanged rotary motion feedthroughs routinely operate in the 10-6 torr range and, when properly prepared & installed, may be used to mid 10-10 torr. Specifications (Imperial Inches) Part No. KLFDCF025133 KLFDCF025275 KLFDCF025275W KLFDCF037275 KLFDCF037275W KLFDCF050275 Mounting 1.33 2.75 2.75 2.75 2.75 2.75 CF CF CF CF CF CF Shaft O.D. Shaft O.D. No No Yes No Yes No 1/4 1/4 1/4 3/8 3/8 1/2 D E Dimensions (Imperial Inches) Part No. KLFDCF025133 KLFDCF025275 KLFDCF025275W KLFDCF037275 KLFDCF037275W KLFDCF050275 A B C D E 0.25 0.25 0.25 0.375 0.375 0.5 0.75 1.5 1.5 1.5 1.5 2.375 3.25 4.06 4.06 4.06 4.56 8.656 1.75 2.56 2.56 2.56 3.06 4.906 0.75 0.75 0.75 0.75 0.75 1.25 A B C What’s New? • • • • • • • Kurt J. Lesker Company Things To Do Enhanced ordering tables Even more stringent security Easier to use navigation All new drawings and product views Featured products and news Even more technical resources VacuFIND—our revamped and pinpoint accurate site search 800.245.1656 • Sign up for our VacuCAD® program • Subscribe to our RSS News Feed Lesker Times • Browse our newly revamped careers section • Purchasers: order online efficiently with our Quick Order sheet found on the homepage. www.lesker.com [email protected] KJLC Solid Shaft Rotary Feedthroughs (O-Ring Flanged) These ferrofluid rotary feedthroughs are sealed by a fluorocarbon o-ring. The operator mounts these drives to the vacuum chamber by placing them in a suitable smooth-sided port in the chamber wall and using a capture nut. Some models are threaded only part way. They will accommodate various wall thicknesses when used with a sleeve or spacer over the unthreaded portion so that the nut compresses the o-ring. In vacuum practice, the o-ring is compressed against the vacuum chamber's inner surface to limit virtual leaks. As shown in the dimensional drawings, most ferrofluid feedthroughs are designed to be installed this way. A few, however, are intended to have the o-ring sealing against the air surface. To reduce the virtual leaks associated with the thread, the feedthrough has a flat machined along the length of its threaded portion. D E Dimensions (Imperial Inches) Part No. KLFDOF05060 KLFDOF05060W KLFDOF05070W KLFDOF07550W KLFDOF07560 KLFDOF10060W Mounting 6.00 6.00 7.00 5.00 6.00 6.00 Water Cooling Shaft O.D. Face Seal O-Ring No Yes Yes Yes No Yes 1/2 1/2 1/2 3/4 3/4 1 O-V234 O-V234 O-V351 O-V337 O-V234 O-V340 Flange Flange Flange Flange Flange Flange A B C Specifications (Imperial Inches) Part No. KLFDOF05060 KLFDOF05060W KLFDOF05070W KLFDOF07550W KLFDOF07560 KLFDOF10060W A 0.50 0.50 0.50 0.75 0.75 1.00 B C 2.87 6.03 2.87 6.03 5.00 16.32 3.00 9.39 2.87 6.03 4.00 12.625 D E Bolt Holes Keyway 3.56 3.56 6.00 4.88 3.56 5.38 1.22 1.22 4.32 1.84 1.25 3.00 (4) x 0.75 OD on 4.75 BC (4) x 0.75 OD on 4.75 BC (6) x 0.406 OD on 6.00 BC (6) x 0.406 OD on 6.00 BC (4) x 0.75 OD on 4.75 BC (6) x 0.406 OD on 5.00 BC 0.126 W x 0.077 D x 1.00 L 0.126 W x 0.077 D x 1.00 L 0.375 W x 0.210 D x 3.38 L 0.188 W x 0.114 D x 1.00 L (2.00 L Vac S) 0.188 W x 0.114 D x 1.00 L 0.250 W x 0.141 D x 2.50 L (3.50 L Vac S) Specifications (Metric Millimeters) Part No. KLFDMOF0680 KLFDMOF1080 KLFDMOF1290 KLFDMOF20105 KLFDMOF30160 Mounting Shaft O.D. Face Seal O-Ring 80 Flange 80 Flange 90 Flange 105 Flange 160 Flange 6 10 12 20 30 O-V214 O-V217 O-V220 O-V226 O-V346 Dimensions (Metric Millimeters) Part No. A B C D E Bolt Holes KLFDMOF0680 KLFDMOF1080 KLFDMOF1290 KLFDMOF20105 KLFDMOF30160 6 10 12 20 30 38 44 48 63 105 97.5 119.5 133.5 151.5 321 57.5 69.5 73.5 81.5 141 20 25 30 35 90 (4) x 10 OD on 60 BC (4) x 10 OD on 60 BC (4) x 10 OD on 70 BC (4) x 10 OD on 85 BC (6) x 12 OD on 135 BC Keyway 2.984 3.970 5.985 9.964 W W W W x x x x N/A 1.85 2.50 3.55 5.00 D D D D x x x x 14.0 20.0 25.0 80.0 L L L L GLOBAL VACUUM PRODUCT LINES Vacuum Services Vacuum Valves & Hardware • • • • • • Flanges, Components, & Fasteners Gate & Angle Valves OFHC Copper & Other Variety of Gaskets Bellows, Tubing, & Seals Semiconductor, PV, & FPD Process Valves Full Line of VAT® Valves • • • • • • • Full Line Pump Repair/Rebuild Services Pump Oil Recycling Technical Information Technical Consulting Decontamination Magnetron Cathode Service Contract Manufacturing Feedthroughs • • • • • • Power & High Voltage Viewports (Optical Feedthrough) USB, Coaxial & Instrumentation Thermocouple Ceramic Breaks Liquid, Gas & Cryogen (LN2) Vacuum Pumps & Accessories • • • • • • • • New & Remanufactured Rotary Vane & Piston Scroll & Diaphragm Screw & Roots Blowers Turbo & Diffusion Cryogenic & Ion Traps & Filters Complete Offering of Pump Repair Services Vacuum Fluids • • • • • • • Full Line of Mechanical Pump Oils Fomblin® PFPE - Inert PFPE Galden® PFPE - Heat Transfer Fluid Vacuum Greases, Sealants, & Solvents Pump Oil with R/O Additives Silicon Diffusion Pump Oils Pump Oil Recycling • • • • • Analog & Digital Active Gauges Pressure Indicators & Controllers Wide-Range Gauges Multi-Gauge Controllers Replacement Gauge Tubes Sample Manipulation & Motion • • • • • • • • • Rotary & Linear Motion Linear Positioners Wobble Sticks & Port Aligners XYZ Manipulators Multi-Axis Manipulators Sample Transfer Probes Sample Heating & Rotation Motion Control Sample Distribution Center • • • • • • • Sputtering Targets Precious Metals & Reclaim Evaporation Pieces Thermal Evaporation Sources E-Beam Crucible Liners Bonding Service Backing Plates Deposition Sources • • • • • • • • TORUS® Magnetron Sputtering Sources Electron Beam Evaporation Organic Material Sources Electron Beam Sources Ion Sources Thermal Evaporation Sources Pulsed Filtered Cathodic Arc Source Inverted Cathode Magnetron Sputtering Sources Process Instrumentation • • • • • Film Thickness Mass Flow Controllers RF & DC Power Supplies Pulsed DC Power Supplies Power Supplies for Evaporation System Components & Custom Engineered Solutions • • • • • • Turnkey & Partial Build Solutions Comprehensive Engineering Design Support Chambers, Frames, & Mounting Structures High Temperature & Bakeout Heater Assemblies Heater Power Supplies Substrate Load Locks & Transfer Vessels Vacuum Systems Pressure Measurement Deposition Materials • Thin Film Deposition Systems • Cluster Tools • Box Coaters • PVD 75 PRO Line • LabLine • Computerized Systems • Combinatorial Systems • Organic Material Deposition Systems • R&D Sputter Tools • Vacuum Furnaces & Ovens • Atomic Layer Deposition (ALD) • Drum Coaters • In-line & Linear Systems • ,VRÀX[6\VWHPV Vacuum Chambers & Components • Standard SS Cylindrical, D-Shaped, Spherical, & Box Chambers • Standard Pyrex® Glass Bell Jars & Cylinders • Standard Building Blocks to Customize Your System • Custom Chambers • Array of Finishes & Materials • Easily Build Your Own Chamber with the Custom Chamber Builder™ On-line • Cooling Options including Hydra~CoolTM Manufacturing & Fabrication • State-of-the-Art CNC Machining • Mechanical, Manufacturing, & Industrial Engineering • Computer Based Scheduling & Routing • CAD, CAM, & FEA Software • Coordinate Measuring Machine Inspection (CMM) • UHV Compatible Cleaning Process We have a network of representatives around the world ready to service the international vacuum community. 9LVLWRXUZHEVLWHWR¿QGWKH representative nearest you, or contact our International Sales Department. www.lesker.com/locations Fomblin® and Galden® are registered trademarks of Solvay Solexis. 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