Miniature Linear Slide
With Nanometer Resolution
 Only 24 mm width
 With integrated linear encoder
with 150 or 2 nm resolution
 Holding force 5 N
 NEXACT® piezomotors
Reference-class linear positioning system
Direct metrology with linear encoder
NEXACT® piezo stepping drive
High-resolution piezoelectric linear drive. Compact
design, holding force up to 5 N. Nanostepping mode
with <1 nm resolution. Constant velocity motion. Long
lifetime, drive principle based exclusively on mechanical
stiction
ciple. 2 or 0.5 nm designs. Direction-sensing homing
track. Compact design for easy integration in positioning
systems. Patented Technology
Fields of application
Sample handling, positioning of samples and optical
or mechanical components for installations limited in
space. For use in research and industry. Vacuum versions
available on request
PIOne linear encoder
Optional. Based on interferometric measurement prin-
w w w.p i .w s
Physik Instrumente (PI) GmbH & Co. KG 2013. Subject to change without notice. Latest releases available at www.pi.ws. 13/04/30.0
LPS-24
LPS-24
LPS-24
5862-9-11105862-9-1230
Active axes
Motion and positioning
X
Unit
Tolerance
X
Travel range
15
15
Integrated sensor
optical linear encoder
optical linear encoder PIOne
mm
Sensor resolution
150
2
nm
Open-loop resolution
0.03
0.03
nm
Min. incremental motion
300
4
nm
typ.
Velocity, closed-loop
10
10
mm/s
max.
Unidirectional repeatability
± 250
± 50
nm
typ.
Crosstalk, angular error
±100
±100
µrad
typ.
Mechanical properties
Stiffness in motion direction
1
1
N/µm
±20 %
Load capacity
10
10
N
max.
Feed force (active)
5
5
N
max.
Holding force (passive)
5
5
N
max.
Drive properties
Motor type
NEXACT® linear drive
NEXACT® linear drive
Operating voltage
-10 to +45
-10 to +45
V
0 to 50
0 to 50
°C
Miscellaneous
Operating temperature range
4
Dimensions
24 mm × 33 mm × 20 mm
24 mm × 63 mm × 20 mm
Cable length
1.5
1.5
Connector
8
HD Sub-D (m) 15-pin (motor)
HD Sub-D 15 (f) 15-pin (sensor)
Recommended controller/driver
±10 mm
m
HD Sub-D (m) 15-pin (motor)
HD Sub-D 15 (f) 15-pin (sensor)
7
6
5
E-861.1A1
E-861.1A1
A
3
2
1
4
40
20
20
5
A
M3
20
20
M2,5 3
B
B
C
20
2
1
4
3
7
6
5
11
8
5
A
DESIGN
14.11.2012
-
-
DRAWN
14.11.2012
-
APPROV.
-
-
-
-
-
-
-
-
REV
ÄNDERUNG / DESCRIPTION
NAME
RFr
esr
-
20
LPS-24 Miniatur-Nanopositionierer,
15 mm, 2 nm Auflösung
ARTIKEL-ID / ITEM-NO.
REVISION GÜLTIG BIS
VALID UNTIL
DOKUMENT-ID / DOCUMENT-NO.
REVISION GÜLTIG BIS
VALID UNTIL
00.001 FOREVER
586291230-000
DATE
BEZEICHNUNG / TITLE
586291230
-
NAME
mm
D
PROJECTION
15
-
-
Ra1.6
C
00.000 FOREVER
ABGELEITET V. TEMPLATE-PRODUCTNACHFOLGER F.
E
7,5
D
7,5
24
5
All information provided in this drawing is to be considered
confidential, proprietary and secret information. It is intended
only for the use of the individual or entity to whom it is sent.
Individual or entity agrees to not disseminate or copy this
information to anyone other than originally specified without
the written consent of PHYSIK INSTRUMENTE GmbH & Co.
FREIMASSTOLERANZ MAßSTAB OBERFLÄCHE
TREATMENT
STANDARD TOLERANCE SCALE
---
DIN ISO
2:1
LPS-24 with 150 nm
--- dimensions in mm
2768 - f resolution,
-H
LPS-24 with 2 nm resolution, dimensions in mm
F
-0,15
-0,3
WERKSTOFF / MATERIAL
-
-
-
-
KONSTR.
13.11.2012
-
-
-
-
GEZ.
13.11.2012 rfr
-
-
GEPR.
-
-
-
-
-
E
30
DATE
-
-
4
-
---
DIN ISO 2:1 WERKSTOFF / MATERIAL
2768 - f - H
---
-
-
B
RAUHEIT EINHEIT
UNIT
FINISH
M3 4
-
-
M3
MAßSTAB BEHANDLUNG / TREATMENT
FREIMASSTOLERANZ
STANDARD TOLERANCE SCALE
4
-
-
20
20
24
All information provided in this drawing is to be considered
confidential, proprietary and secret information. It is intended
only for the use of the individual or entity to whom it is sent.
Individual or entity agrees to not disseminate or copy this
information to anyone other than originally specified without
the written consent of PHYSIK INSTRUMENTE GmbH & Co.
-
40
8
( )
+0,25
+0,15
B
C
20
15
5
-0,15
-0,3
62,7
15
2,
M
15
A
D
C
33
7,5
-
( )
+0,25
+0,15
-
w w w- . p- i . w s
-
AUSGABE
-
-
ÄNDERUNG
-
-
-
-
-
-
DATUM
NAME
NAME
DATUM
RFr
RAUHEIT EINHEIT
UNIT
D
mm
PROJECTION
BEZEICHNUNG / TITLE
LPS-24 Miniatur-Linearpositionierer,
15 mm, 150 nm Auflösung
ARTIKEL-ID / ITEM-NO.
VERSION GÜLTIG BIS
DOKUMENT-ID / DOCUMENT-NO.
VERSION GÜLTIG BIS
586291110
586291110-000
ABGELEITET V.
00.001 FOREVER
00.000 FOREVER
TEMPLATE-PRODUCTNACHFOLGER F.
Physik Instrumente (PI) GmbH & Co. KG 2013. Subject to change without notice. Latest releases available at www.pi.ws. 13/04/30.0
MaterialSteel Steel
2,
M
7,5
Preliminary data