TECHNICAL REFERENCE 132 Light Sources Oriel Quartz Tungsten Halogen Lamps • High VIS-NIR output with little UV ACCESSORIES FOR ORIEL LIGHT SOURCES PHOTOLITHOGRAPHY INSTRUMENTS • High Color temperatures, >3000 K Various quartz tungsten halogen Lamps. Our QTH lamps use a doped tungsten filament inside a quartz envelope. They are filled with rare gas and a small amount of halogen. Current flowing through the filament heats the tungsten to >3000 K. The filaments of our 10 to 250 W lamps are dense planar structures for highest image brightness. The white light produced radiates through the clear quartz envelope. 1.05 C. COLOR TEMP/RATED COLOR TEMP Quartz Tungsten Halogen (QTH) lamps are popular visible and near infrared sources because of their smooth spectral curve and stable output. They do not have the sharp spectral peaks that arc lamps exhibit, and they emit little UV radiation, see the spectral irradiance curves of our QTH lamps. 1.0 0.95 0.90 0.8 Color Temperature 0.85 0.9 0.95 1.0 1.05 1.10 1.15 OPERATING VOLTAGE/RATED VOLTAGE Color temperature and total radiated lumens are useful for comparison of lamp performance in the visible. The efficiency in the visible, the number of lumens per watt, increases with color temperature because the spectral distribution curve moves to shorter wavelengths, i.e. towards the visible, with increasing temperature (Fig. 1). The emissivity of tungsten is ~0.4, in the visible, so the output is less than that of a full radiator of equivalent temperature. Because the emissivity varies with wavelength, there is not an exact match of spectral distribution with a full radiator (see Fig. 2). The color temperature listed for our lamps, in the Ordering Information Table, is the “correlated color temperature”. This is the temperature in K (Kelvin) of a full radiator (black body), which emits light of similar color balance (chromaticity) as the tungsten halogen lamp. It is a recognized mathematical best match. For a filament temperature of 3300 K, the color temperature is approximately 3390 K. Fig. 1 Correlated color temperature and voltage relationship. 4000 1 SPECTRAL EXITANCE (Wm -2 nm -1) SOLAR SIMULATORS MONOCHROMATOR AND FIBER ILLUMINATORS INCANDESCENT SOURCES ARC SOURCES DEUTERIUM SOURCES CALIBRATION SOURCES • Smooth spectrum, stable output 3000 2000 3 1000 2 and 3 Lamp Life and Operating Voltage The filament parameters are chosen for a specific operating voltage. Lamp life is the average life of a number of lamps run in open air at the “rated voltage.” Operating these lamps at a higher voltage greatly reduces the life. A 6% increase in voltage reduces the operating life by 50% (Fig. 4). A small reduction in voltage gives a longer lamp life; a reduction of more than 10% may drastically shorten lamp life as the halogen cycle cannot operate effectively under this condition. 2 0 0.25 0.5 1.0 2.0 3.0 WAVELENGTH (µm) Fig. 2 Spectral exitance of (1) full radiator, (2) a tungsten surface and (3) a gray body with emissivity of 0.425, at all 3100 K. Phone: 1-800-222-6440 • Fax: 1-949-253-1680 Light Sources 20 6333 at 100 W INPUT 90 0 50 100 150 200 RUNNING TIME (% OF RATED) Fig. 3 Typical Light Output vs. Time, of the 6333 QTH lamp and a conventional filament lamp. 10 5 CALIBRATION SOURCES 1.0 0.5 0.1 0.8 0.9 1.0 1.1 1.15 OPERATING VOLTAGE/RATED VOLTAGE Fig. 4 Lamp Life vs. Voltage. (For some Lamps, operating below 90% of rated voltage may drastically shorten life.) Availability – Guaranteed on select items @ newport.com These lamp specifications are nominal and subject to change at any time. Lamp Wattage DC Voltage (V) Approximate Flux Filament Size (Lumens) (WxH) (mm) Color Filament Type** Temperature (K) Permissible Burning Position Average Life (Hours) 6318 10 W QTH 6 200 1.7 x 0.65 TC 3200 0 or 90° 6319 20 W QTH 6 450 2.3 x 0.8 RD 3200 0 or 90° 100 63358 45 W Calibrated QTH 6.8 705 4.75 H x 1.5 Dia. CC **** 0 or 90° **** **** 100 45 W QTH 6,8 705 4.75 H x 1.5 Dia. CC **** 0 or 90° 6332 50 W, Short Filament 12 1600 3.3 x 1.6 RD 3300 0 or 90° 50 6337 50 W Long Filament* 12 850 5.2 x 1.5 TC 3000 0 or 90° 3000 6333 100 W QTH 12 3600 4.2 x 2.3 RD 3300 0 or 90° 50 63355 200 W Calibrated QTH 30 5000 7.0 H x 3.6 Dia. CC **** 0 or 90° **** **** 63368 200 W QTH 30 5000 7.0 H x 3.6 Dia. CC **** 0 or 90° 6334NS 250 W QTH 24 10000 7.0 x 3.5 RD 3400 0 or 90° 50 6336 600 W QTH 120 16500 4.0 x 13.5 CC 3200 Any 75 6317 1000 W QTH 120 28000 5.0 x 18.0 CC 3200 Any 150 6315 1000 W FEL QTH 120 27500 6.0 x 16.0 CC 3200 0 or 90° 300 63350 1000 W Calibrated FEL QTH 120 27500 6.0 x 16.0 CC 3200 0 or 90° **** 63362 1000 W FEL QTH 120 27500 6.0 x 16.0 CC 3200 0 or 90° **** SOLAR SIMULATORS * Long tubular filament for longer life, but slightly lower output ** Filament Type: RD = Rectangular Dense CC = Coiled Coil TC = Tight Coil *** Permissible Burning Position: 0° refers to the position of the lamp in the drawings. **** Refer to calibration certificate supplied with lamp. MONOCHROMATOR AND FIBER ILLUMINATORS 63360 INCANDESCENT SOURCES Model ARC SOURCES Ordering Information DEUTERIUM SOURCES AVERAGE LIFE/AVERAGE LIFE AT RATED VOLTAGE CONVENTIONAL INCANDESCENT LAMP TECHNICAL REFERENCE RELATIVE LUMINOUS OUTPUT (%) 100 80 133 PHOTOLITHOGRAPHY INSTRUMENTS ACCESSORIES FOR ORIEL LIGHT SOURCES Email: [email protected] • Web: newport.com 134 Light Sources 0.50 TECHNICAL REFERENCE (12.7) 0.35 A (9) 1.18 0.77 6318 10 W (30) (19.5) DEUTERIUM SOURCES CALIBRATION SOURCES B C 6318 10 W 6319 20 W 6319 20 W 3.75 4.0 (95) (101.6) 6332 50 W 0.38 SHORT FILAMENT (9.5) 6333 100 W 6334 250 W 1.9 (48) 2.0 (50.8) MODEL A B C 6332 0.45 1.73 1.18 0.45 1.73 1.18 0.53 2.17 1.30 1.63 (41) 1.18 (30) 6333 6334 6337 50 W (11.5) (11.5) (13.5) (44) (44) (55) (30) (30) (33) 6336 600 W 0.34 LONG FILAMENT (8.64) ARC SOURCES 63358/60 45 W INCANDESCENT SOURCES MONOCHROMATOR AND FIBER ILLUMINATORS 0.75 0.70 (19) 0.75 (17.8) (19) 1.0 (25.4) 4.10 (104) 3.1 4.10 (78.7) (104) 3.74 3.0 (76.2) (95) 2.76 1.55 (70) (39.3) 1.87 SOLAR SIMULATORS (47.5) 1.0 (25.4) 63350/62 1000 W 0.56 (14.2) 63355/668 200 W 6317 1000 W 6315 1000 W 1.56 ACCESSORIES FOR ORIEL LIGHT SOURCES PHOTOLITHOGRAPHY INSTRUMENTS (39.6) WEB See our website for more info Phone: 1-800-222-6440 • Fax: 1-949-253-1680
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