Central European Institute of Technology BRNO | CZECH REPUBLIC Scanning Near-Field Optical Microscope (NSOM, SNOM) Instrument description SNOM is a microscopic tool, which breaks the far-field light resolution limit by mapping the near-field light (evanescent waves) distribution of nanostructures. In order to achieve this, there is a very sharp optical probe (detectors/illuminators), which has an aperture of tens of nanometers. This scans the sample surface at a distance much smaller than the wavelengths of the light interacting with it. The optical resolution and structure size resolution is limited by the probe size, not by the wavelength of the incidental light (resolution ~100 nm). This technique provides for the capabilities of the basic experimental setup – illumination by a SNOM probe set to collect interacting light in reflection or transmission; to illuminate a sample in transmission or reflection and collection the interacting light via a SNOM probe. Instrument: Nanonics MultiView 4000 multi-probe independent Scanning Probe Microscope (SPM) fully integrated with upright and inverted optical microscope Features: • SPM techniques - SNOM, Atomic Force Microscopy (AFM), conductive AFM, Scanning Tunneling Microscopy (STM) • two-independent probe scanning system, sample scanning • combined SNOM collection, illumination with reflection and transmission modes • probes - bent optical fibres on tuning fork according to applications • liquid cell • optical and acoustic hoods Application Hexacomb structure 72.68 nm 21.64 nm 12 12 12 10 10 10 8 [µm] 14 8 8 6 6 6 4 4 4 2 2 2 0 0 0 2 4 6 8 [µm] 10 12 14 0.00 nm 0 2 4 6 8 10 [µm] 12 14 0 0.00 nm 0 collection transmission 14 12 12 10 10 10 [µm] 14 12 8 8 6 6 4 4 4 2 2 2 0 0 2 4 6 8 10 [µm] 12 14 interaction of near-field illumination with nanometer scale structure 4 6 8 10 [µm] 12 14 8 6 0 2 collection reflection 14 [µm] [µm] 44.41 nm 14 illumination reflection SNOM images Square of three slits structures 14 [µm] [µm] Topography images Lithographic structure 0 0 2 4 6 8 10 [µm] 12 14 binary sample - transparent (centers) opaque (corners) features 0 2 4 6 8 [µm] 10 12 14 four-way evanescent waves interaction 0.00 nm Technical specification SNOM modes: illumination transmission/reflection collection transmission/reflection detectors s or ct te de in con pu fo t/o ca ut l pu t AFM non-contact mode AFM conductive STM lase inp r fiber ut er r fib lase ut p in Lasers: fiber coupler + bandpass filters Nd:YAG λ = 532 nm - green, power 20 mW, PGL-020-11-A HeNe λ = 632.8 nm - red, power 10 mW, JDSU 1135/P Detectors: Avalanche PhotoDiode (APD) - SPCM-AQR-14 Perkin Elmer - λ∈<400, 1100> nm - photoncounting mode PhotoMultiplier Tube (PMT) - MP942 Perkin Elmer - λ∈<165, 650> nm - photoncounting mode eye-p iec came e, ra er r fib lase ut inp detectors reflection path upright optical microscope tuning fork xyz micromanipulator tuning fork xyz scanner 1 xyz micromanipulator xyz scanner 2 bent optical fiber bent optical fiber TOWER 1 TOWER 2 xyz sample scanner inverted optical microscope Manipulators: xyz scanner 1: xyz scanner 2: xyz sample scanner: xyz micromanipulators: 40 μm x 40 μm x 30 μm 40 μm x 40 μm x 30 μm 80 μm x 80 μm x 30 μm 5 mm x 5 mm x 10 mm transmission path de te c to r s eye-p iec came e, ra fiber laser t p in u in con pu fo t/o ca ut l pu t Optical microscopes: upright - Olympus BXFM inverted - Olympus BXFM objectives - 50x NA 0.45, 10x confocal input/output module - pinhole 50 μm Attenuated Total Reflection module outgoing light incoming light fiber probes optimized for selected measurement Contact Core Facility: Nanofabrication and Nanocharacterization Section: Probe Microscopy & Nanomanipulation Contact person: David Škoda [email protected] Detailed information: www.ceitec.eu Instrument location: Masaryk University Faculty of Science Department of Condensed Matter Physics Kotlářská 267/2, 611 37 Brno Czech Republic www.ceitec.eu
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