An Artificial Compound Eyes Imaging System Based on MEMS

基于MEMS技术的人造复眼成像系统
基于MEMS技术的人造复眼成像系统
An Artificial Compound Eyes Imaging
System Based on MEMS Technology
邸思 林慧 杜如虚
摘 要 本文介绍了一种基于MEMS制造技术的人造复眼成像系统。该系统主要包括两大部分:用于模拟生物复眼成像机
理的微透镜阵列和用于图像采集的CMOS工业相机。作为人造复眼的9×9微透镜阵列通光刻胶热熔法制作被制作在平面玻
璃基底上,其横向尺寸为0.9cm×0.9cm,厚度不足1mm,与生物复眼尺寸接近。实验中,每一个微透镜均对目标物单独
成像,因此CMOS相机捕捉到的是物体的多重像。这与同位生物复眼的成像机理相类似。通过对多重目标像进行数字重
建,即可获得最终所需要的目标像。该系统成功模拟了生物复眼的成像机理并具有可与之相比拟的微小尺寸,具有重要的
实际应用价值。
关键词 人造复眼;微透镜阵列;图像重建
ABSTRACT This paper introduces an artificial compound eyes imaging system with planar structure based on MEMS
fabrication technology. Firstly, we used the photo-resist reflow method to fabricate a 9×9 microlens array on a planar
glass substrate, as the lenses of the compound eyes. Its transverse size is 0.9×0.9 cm2 and thickness is about 0.7 mm.
Then we built an imaging system where object images are captured by the micro- lens array using a CMOS camera.
In the experiment, the imaging system is used to view a character “A”. It is found that each microlens can image the
character “A” effectively. As a result, a 9×9 multiple-image is captured in the CMOS camera. Finally, the object image is
reconstructed from the multiple-image by digital process algorithm. The experimental results indicate that our system can
effectively imitate the imaging mechanism of the compound eyes.
KEYWORDS Artificial Compound eye; Microlens Array; Image Reconstruction
1 Introduction
D
ifferent from human beings, many species in
nature use their compound eyes to view. The vision
systems of most insects are typically compound eyes,
which have several advantages such as small in size,
large filed of vision and high sensitivity to moving object
[1, 2]
. Therefore, many researchers have paid their attention
on artificial compound eyes imaging system since 1990s [3 - 5].
Microlens array are often used to imitate compound eyes
in bionics. In 2000, Tanida et al developed a compound
eyes imaging system consisting of a microlens array with
planar structure, an optical separate layer and a photodetector array [6-8]. Each microlens of the array imaged
the object independently. Accordingly, a multiple-image
were formed through the microlens array and captured
by the photo-detector array. The function of optical
separate layer was to avoid the interference between the
optical channels. After the digital processing, the final
object image was reconstructed. A clear object image
could be reconstructed by proper algorithm even if the
multiple-image was blurry. After that, they brought the
imaging system into several applications such as colorful
imaging, fingerprint identification and 3D information
acquisition [9-11].
In 2004, Duparre et al introduced another artificial
compound eyes structure with planar microlens array
[12-15]
. Different from [6-8] , each microlens in their
system imaged only a small part of the object space
corresponding to given view field angle. The final
object image is formed by splicing the partial images
directly. They fabricated the microlens array on a planar
glass substrate by photo-resist reflow method. On the
backside of the substrate they fabricated a titanium
pinhole array by photo-lithography and wet etching.
The microlens array and the pinhole array were matched
and aligned. Each pair of the microlens and the pinhole
constitutes an optical channel. The pitch of the pinholes
differs from that of the microlens arrays to produce an
individual view angle of each channel. After that, they
also developed a compound eyes imaging system with
a chirped microlens array in 2005 [16-18]. In their chirped
microlens array, the optical axis direction, aperture size
and shape of each microlens were determined according
19
Vol. 4 No.2/ Feb. 2010
to the view angle of each optical channel. Therefore, the
is achieved finally. As shown in fig. 2, the photodesign of the chirped microlens array could decrease the
resist isolated-island is cylindrical before melting and
aberration and improve the imaging quality significantly.
its diameter and height are expressed as D and H,
Recently, they advanced a compound eyes imaging
respectively. After melting, the photo-resist cylinder
system with spherical structure [19]. They fabricated the
changes to a spherical crown whose diameter, height
microlens array and pinhole array on two concentric
and radius of curvature are expressed as d, h and R,
bulk lenses respectively. Therefore, the view angle extent
respectively. Therefore, the volume of photo-resist isolatedof this imaging system was larger than that of artificial
island before and after meting can be expressed as:
compound eyes with planar structure.
Vcylinder S D 2 H / 4 Vsphere S h 2 ( R h / 3)(1)
In this paper, we introduce an artificial compound eyes
imaging system based on MEMS technology. It2 is a
Vcylinder
D H /4
VVsphere
SkV
h 2cylinder
( R h /cos
3) D R h / R
multiple imaging system similar to that
in [6, 7]. S
However,
(2)
sphere
our system is simpler, for it has no need of optical
Inevitably, the volume of photo-resist cylinder will
separator and the microlens array is made by common
Vsphere kVcylinder cos decrease
DF # Rfafter
Rsin D because
d / 2 R of the
/hd / melting
R volatilization
f (n 1) of
MEMS technique. Experimental results show that our
photo-resist
during
the
period
of
heating.
Therefore, the
system can form a clear multiple-image. In section II,
2
2
#
V
S
D
H
/
4
V
S
h
(
R
h / 3)
volumes
of
photo-resist
before
and
after
melting
should
#
we describe the fabrication process
2 R 1/Rª¬ 2 nf (n1 sin
F of the
f /microlens
d sin D d /Fcylinder
1) D º¼ sphere
satisfy
the
following
relationship:
array and related concepts. In section III, we present the
experimental setup. Section IV includes# the experimental
(3)
F 1/
ª¬ 2 n 1 sin D V
º¼ sphere kVcylinder cos D R h / R
results and discussions. Section V contains
conclusions.
Where, k is the volume loss factor of the photo-resist,
2 Fabrication Process for
d / 2 R conditions.
F # related
f / d tosin
R f (n Measured
1)
which
theDexperimental
Microlens Array
by multiple experiments, the value of k is about 0.8 under
our
2.1 Technology Process
F # experimental
1/ ª 2 n conditions.
1 sin D º¼ According to the volume of
microlens ¬and above equations,
we can design the proper
ince 1980s, many techniques were developed to
patterns of mask.
manufacture microlens arrays, such as ion exchange
method, photosensitive method, thermal reflow method,
2.3 Contact Angle and F-number of the
chemical vapor deposition, hydrophobic method, focused
Microlens
ion beam method, hot embossing, micro-machining
Contact
angle is a key parameter which stands for the
and so on [20-27]. The thermal reflow method has many
geometrical contour of the spherical microlens. As shown
advantages such as simple fabrication process,
low price,
the contact
expressed as α and defined
Vcylinder
S D 2 H / 4in fig.2,
Vsphere
S h 2 (angle
R his/ 3)
and low surface roughness, so it has become
a popular
by the following equation:
microlens array fabrication technique.
kVcylinder cos D R h / R (4)
The key component of our compound Veyes
sphere imaging
system is a 9×9 microlens array on the planar glass
Considering the (2) and (4), it is clear that the contact
substrate fabricated by thermal reflow method
based
#
angle
sin
D
d /will
2 R determine
F
f
/
d
R f (n the
1) geometrical size of the
on MEMS technology [22, 28-34]. As shown in Fig. 1, the
microlens uniquely when the volume of microlens is a
process of thermal reflow method can be divided into 3
const.
F # 1/ ª¬onto
2 n 1 sin D º¼
steps. Firstly, the photo-resist layer is spin-coated
As an important
parameter which usually
is used to
the substrate and then exposured by UV-light. The mask
2
Vcylinder the
SD
H / 4quality
Vsphere
S h 2 ( R F-number
h / 3) is
evaluate
optical
of
microlens,
is usually designed to be circles array patterns. Secondly,
a key factor we have to consider when the microlens is
the photo-resist layer is developed and the cylindrical
#
designed.
F-number (abbreviated
of a microlens
isolated-islands array pattern is formed. Finally, the
Vsphere kV
cos D R as
hF )/ R
cylinder
usually
defined
by
the
following
equation:
2
2
photo-resist islands are heated until they melted. The
Vcylinder S D H / 4
Vsphere S h ( R h / 3)
2
2
cylindrical islands will turn into spherical contour
#
V
S
D
H
/
4
R1)h / 3)(5)
sphere R S hf ((n
2R
F cylinder
f / d sin D d / V
spontaneously because of the effect of surface tension.
S
2.2 Volume Relationship of Photo-resist
before and after Melting
The key step of the fabrication process is the thermal
reflow of photo-resist. The shape of photo-resist isolatedisland changes from cylinder to sphere crown after
melting so that the photo-resist refractive microlens
Vsphere
kVcylinderd arecos
D R h / R
Where, f and
the focal length and diameter of
#
R h / Rgeometrical
FVsphere
1/ ª¬ 2kV
respectively.
1 sin cos
D º¼ D Considering
ncylinder
the
microlens,
#
of
Frelationship
f / d sin D d / 2 R and
R thef (relationship
n 1)
#
sin D of curvature
d / 2 R R f (n 1) , we
F length
f / dand radius
focal
#
relationship
of F-number and contact
Fcan derive
1/ ª¬ 2 out
n the
1 sin
D º¼
#
angle:
F 1/ ª¬ 2 n 1 sin D º¼
20
Vcylinder
Vsphere
F#
S D2 H / 4
kVcylinder
f /d
sin D
Vsphere
cos D
S h 2 ( R h / 3)
R h / R
d / 2R
F # 1/ ª¬ 2 n 1 sin D º¼ R
f (n 1)
基于MEMS技术的人造复眼成像系统
ray tracing results of the experiment system as shown
in Fig. 4. Due to the symmetrical structure of the
microlens array, we paid our attention only on one row
of microlenses. From Fig. 4, we can see that the point
source at random position images after each microlens
and focuses on the CMOS photo-detectors again.
Considering the randomicity of the position of point
source, we can get the conclusion that an object can be
imaged by each microlens of the array and the multipleimage will be captured by the camera successfully.
(6)
Where, n is the refractive index of the microlens.
Therefore, the contact angle of microlens will determine
the microlens’ F-number uniquely as n usually is a const.
From the above equations, we can see that the contact
angle of microlens is a key factor for the geometrical
contour and optical quality of the microlens. Usually,
we expect to design and fabricate microlens with given
geometrical size and F-number corresponding to a fixed
value of the contact angle. Unfortunately, maybe we can
not get the right contact angle in experiments because
it is only related to the wettability of the material on
substrate and environmental air but unrelated to the
volume and geometrical size of photo-resist isolatedisland [34]. In the practical fabrication experiments, we
adjusted the developing time to achieve proper contact
angle of the microlens. Usually, the contact angle is
fixed at about 20° for the case of completed developing.
But if the developing time is not sufficient, some of the
photo-resist will be left on the substrate. In that case,
the contact angle of microlens can decrease to about 5°
which we expected.
4.2 The Multiple-image Achieved by
Experimental System
In our artificial compound eyes imaging system, each
microlens imaged the character “A” independently.
Therefore, we captured a 9×9 multiple-image by the
CMOS camera as shown in Fig. 5. The edge of the whole
image is blurrier than the center, which is probably due
to the non-homogeneity of the illuminance of the light
source. Besides, we can see that the contrast of the
picture is not good enough and some noise still exists.
We try to improve the quality of original multiple-image
by applying the contrast enhancing and high frequency
filtering process. From the fig. 6, we can see that the
contrast is enhanced obviously and most of noise is
eliminated after the digital process.
Furthermore, from the Fig. 5 we can see that there are
differences among the unit images achieved by different
microlenses. On one hand, the fabrication error of the
microlens array leads to the non-uniformity of the 81
microlenses. On the other hand, the position of each
microlens corresponding to the optical axis of the
imaging system is different, so the aberration of the unit
images is different. These two reasons result in the nonhomogeneity of the whole multiple-image. A chirped
microlens array in which the each of microlens designed
according to its position may improve the non-uniformity
of the multiple-image.
3 Experiment Setup
S
hown as Fig.3, the artificial compound eyes
experiment system consists of a light source, an
object (character “A”), a microlens array and a CMOS
camera. The experimental system was fixed on a shock
proof platform. A white lamp with or a semiconductor
laser can be selected as the light source. The object is a
film with the pattern of character “A”. The size of film
and “A” is 3cm*3cm and 1cm*1cm, respectively. Only
the area of “A” is transparent.
The material of the substrate is Schott B270 glass and its
refractive index is about 1.52 on the wavelength range of
visual light. The material of microlens is AZ4620 photoresist (Shipley, USA) and its refractive index is about
1.72 for the same wavelength range. The aperture of each
microlens is 900μm and the focal length is about 6mm.
The size of whole array is 9mm*9mm.
The CMOS camera (MV-130UM, Microvision, China)
is used to capture the image of object. Its pixel number
is 1280×1024 and pixel size is 5.2um×5.2um. The focal
length and the aperture of the camera lens (VS-2514M,
Microvision, China) is 25mm and 35mm, respectively.
4.3 Object Image Reconstruction Processing
Since the artificial compound eyes imaging system
developed by Tanida and et al, several digital processing
methods were used to reconstruct object image from
the multiple-image. At first, Tanida adopted sampling
method and back-projection method to reconstruction
object image in [8] . After that, Kitamura advanced
pixel rearrange method and improved the resolution
of the object image [31]. Besides, other researchers also
developed their reconstruction algorithm to achieve highresolution object image for the compound eyes imaging
system [32-34].
In this paper, we adopted the pixel rearrangement method
to reconstruction object image from the multiple-image.
As shown in fig.7, this method collects all the pixels
4 Experimental Results and Analysis
4.1 Ray Tracing Simulation of the Imaging System
for a Point Source at Random Position
I
n order to validate the imaging performance of our
compound eyes imaging system, we simulated the
21
Vol. 4 No.2/ Feb. 2010
of unit images and arranges them at the corresponding
position of reconstructed image. The pixels at same
position of unit images are arranged according to the
unit images rank order. So this method will reconstruct
the object and make use of all the pixels of the whole
multiple-image.
The detailed reconstruction process contains following
steps:
・ Divide the multiple-image into unit images.
・ Select central unit as the standard image.
・ Compute the offset between objects in each unit and
・ Adjust the object image position in each unit
according to the offset.
・ Rearrange pixels of all the unit images.
The final reconstructed result is shown as Fig. 8. From
the picture, we can see that the image of character “A”
is reconstructed successfully and its pixel scale is same
with the multiple-image. But the resolution of the object
image is not satisfied. It is mainly because that the
quality of original unit image is not good enough. In the
future, we will try to resolve the problem by evaluating
the point spread function of the imaging system. It is
useful to improve the quality of unit images.
Fig .1
Fig .2
Fig .3
Fig .4
Fig .8
Fig .1: The process of microlens array fabrication by
thermal reflow method
Fig .2: The volume relationship of photoresist before and
after melting
Fig .3: The experimental system of the artificial compound
eyes imaging system.
Fig .4: The ray tracing simulation of the experiment
system for a point source on random position.
Fig .5: The multiple-image of the object “A” achieved by
the experiment system.
Fig .6: The multiple image after the contrast enhancing
and filtering.
Fig .7: The concept of pixel rearrangement method for
object image reconstruction.
Fig .8: Final object image of “A” achieved by pixels
rearrangement for the multiple-image.
standard unit.
Fig .7
5 Conclusions
I
n conclusion, we introduced an artificial compound
eyes imaging system based on MEMS technology.
We used photo-resist reflow method to fabricate a 9×9
microlens array with planar structure as the compound
eyes. The fabrication process and microlens design
rules were introduced in detail. A simple and compact
imaging system based on the microlens array was built.
Experimental results indicated that our imaging system
can effectively imitate the imaging mechanism of the
compound eyes. Also, we reconstructed the final object
by pixels rearrangement method. The reconstructed
image has the same pixel scale with the multiple-image.
However, the resolution of the reconstruction result is not
satisfied. In the future, we will try our best to improve
the final objet image quality of our artificial compound
eyes imaging system by improving experimental
condition and reconstruction algorithm. Besides, we will
also pay our attention on applied the system in practice
such as detecting of the high speed moving object.
6 Acknowledgment
W
e are grateful to Tan Chen and Zhan-hui Wang
with Shenzhen Institute of advanced technology
for their help on the microlens array fabrication.
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作者简介
邸 思 2007级博士研究生。2000年和2004年于北
京交通大学分别获得工学学士和工学硕士学
位,专业分别为通信工程和电磁场与微波技
术。主要研究方向为基于MEMS技术的人造
复眼成像系统的研究。
林 慧 工学博士,2004年、2009年分别获清华大
学精密仪器与机械学系学士、博士学位,
2009年加入先进院精密工程中心。研究方
向:光谱仪器及其在食品、环境检测中的应
用;微纳加工及微光机电系统。
杜如虚 作者简介见本期封2页。
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