基于MEMS技术的人造复眼成像系统 基于MEMS技术的人造复眼成像系统 An Artificial Compound Eyes Imaging System Based on MEMS Technology 邸思 林慧 杜如虚 摘 要 本文介绍了一种基于MEMS制造技术的人造复眼成像系统。该系统主要包括两大部分:用于模拟生物复眼成像机 理的微透镜阵列和用于图像采集的CMOS工业相机。作为人造复眼的9×9微透镜阵列通光刻胶热熔法制作被制作在平面玻 璃基底上,其横向尺寸为0.9cm×0.9cm,厚度不足1mm,与生物复眼尺寸接近。实验中,每一个微透镜均对目标物单独 成像,因此CMOS相机捕捉到的是物体的多重像。这与同位生物复眼的成像机理相类似。通过对多重目标像进行数字重 建,即可获得最终所需要的目标像。该系统成功模拟了生物复眼的成像机理并具有可与之相比拟的微小尺寸,具有重要的 实际应用价值。 关键词 人造复眼;微透镜阵列;图像重建 ABSTRACT This paper introduces an artificial compound eyes imaging system with planar structure based on MEMS fabrication technology. Firstly, we used the photo-resist reflow method to fabricate a 9×9 microlens array on a planar glass substrate, as the lenses of the compound eyes. Its transverse size is 0.9×0.9 cm2 and thickness is about 0.7 mm. Then we built an imaging system where object images are captured by the micro- lens array using a CMOS camera. In the experiment, the imaging system is used to view a character “A”. It is found that each microlens can image the character “A” effectively. As a result, a 9×9 multiple-image is captured in the CMOS camera. Finally, the object image is reconstructed from the multiple-image by digital process algorithm. The experimental results indicate that our system can effectively imitate the imaging mechanism of the compound eyes. KEYWORDS Artificial Compound eye; Microlens Array; Image Reconstruction 1 Introduction D ifferent from human beings, many species in nature use their compound eyes to view. The vision systems of most insects are typically compound eyes, which have several advantages such as small in size, large filed of vision and high sensitivity to moving object [1, 2] . Therefore, many researchers have paid their attention on artificial compound eyes imaging system since 1990s [3 - 5]. Microlens array are often used to imitate compound eyes in bionics. In 2000, Tanida et al developed a compound eyes imaging system consisting of a microlens array with planar structure, an optical separate layer and a photodetector array [6-8]. Each microlens of the array imaged the object independently. Accordingly, a multiple-image were formed through the microlens array and captured by the photo-detector array. The function of optical separate layer was to avoid the interference between the optical channels. After the digital processing, the final object image was reconstructed. A clear object image could be reconstructed by proper algorithm even if the multiple-image was blurry. After that, they brought the imaging system into several applications such as colorful imaging, fingerprint identification and 3D information acquisition [9-11]. In 2004, Duparre et al introduced another artificial compound eyes structure with planar microlens array [12-15] . Different from [6-8] , each microlens in their system imaged only a small part of the object space corresponding to given view field angle. The final object image is formed by splicing the partial images directly. They fabricated the microlens array on a planar glass substrate by photo-resist reflow method. On the backside of the substrate they fabricated a titanium pinhole array by photo-lithography and wet etching. The microlens array and the pinhole array were matched and aligned. Each pair of the microlens and the pinhole constitutes an optical channel. The pitch of the pinholes differs from that of the microlens arrays to produce an individual view angle of each channel. After that, they also developed a compound eyes imaging system with a chirped microlens array in 2005 [16-18]. In their chirped microlens array, the optical axis direction, aperture size and shape of each microlens were determined according 19 Vol. 4 No.2/ Feb. 2010 to the view angle of each optical channel. Therefore, the is achieved finally. As shown in fig. 2, the photodesign of the chirped microlens array could decrease the resist isolated-island is cylindrical before melting and aberration and improve the imaging quality significantly. its diameter and height are expressed as D and H, Recently, they advanced a compound eyes imaging respectively. After melting, the photo-resist cylinder system with spherical structure [19]. They fabricated the changes to a spherical crown whose diameter, height microlens array and pinhole array on two concentric and radius of curvature are expressed as d, h and R, bulk lenses respectively. Therefore, the view angle extent respectively. Therefore, the volume of photo-resist isolatedof this imaging system was larger than that of artificial island before and after meting can be expressed as: compound eyes with planar structure. Vcylinder S D 2 H / 4 Vsphere S h 2 ( R h / 3)(1) In this paper, we introduce an artificial compound eyes imaging system based on MEMS technology. It2 is a Vcylinder D H /4 VVsphere SkV h 2cylinder ( R h /cos 3) D R h / R multiple imaging system similar to that in [6, 7]. S However, (2) sphere our system is simpler, for it has no need of optical Inevitably, the volume of photo-resist cylinder will separator and the microlens array is made by common Vsphere kVcylinder cos decrease DF # Rfafter Rsin D because d / 2 R of the /hd / melting R volatilization f (n 1) of MEMS technique. Experimental results show that our photo-resist during the period of heating. Therefore, the system can form a clear multiple-image. In section II, 2 2 # V S D H / 4 V S h ( R h / 3) volumes of photo-resist before and after melting should # we describe the fabrication process 2 R 1/Rª¬ 2 nf (n1 sin F of the f /microlens d sin D d /Fcylinder 1) D º¼ sphere satisfy the following relationship: array and related concepts. In section III, we present the experimental setup. Section IV includes# the experimental (3) F 1/ ª¬ 2 n 1 sin D V º¼ sphere kVcylinder cos D R h / R results and discussions. Section V contains conclusions. Where, k is the volume loss factor of the photo-resist, 2 Fabrication Process for d / 2 R conditions. F # related f / d tosin R f (n Measured 1) which theDexperimental Microlens Array by multiple experiments, the value of k is about 0.8 under our 2.1 Technology Process F # experimental 1/ ª 2 n conditions. 1 sin D º¼ According to the volume of microlens ¬and above equations, we can design the proper ince 1980s, many techniques were developed to patterns of mask. manufacture microlens arrays, such as ion exchange method, photosensitive method, thermal reflow method, 2.3 Contact Angle and F-number of the chemical vapor deposition, hydrophobic method, focused Microlens ion beam method, hot embossing, micro-machining Contact angle is a key parameter which stands for the and so on [20-27]. The thermal reflow method has many geometrical contour of the spherical microlens. As shown advantages such as simple fabrication process, low price, the contact expressed as α and defined Vcylinder S D 2 H / 4in fig.2, Vsphere S h 2 (angle R his/ 3) and low surface roughness, so it has become a popular by the following equation: microlens array fabrication technique. kVcylinder cos D R h / R (4) The key component of our compound Veyes sphere imaging system is a 9×9 microlens array on the planar glass Considering the (2) and (4), it is clear that the contact substrate fabricated by thermal reflow method based # angle sin D d /will 2 R determine F f / d R f (n the 1) geometrical size of the on MEMS technology [22, 28-34]. As shown in Fig. 1, the microlens uniquely when the volume of microlens is a process of thermal reflow method can be divided into 3 const. F # 1/ ª¬onto 2 n 1 sin D º¼ steps. Firstly, the photo-resist layer is spin-coated As an important parameter which usually is used to the substrate and then exposured by UV-light. The mask 2 Vcylinder the SD H / 4quality Vsphere S h 2 ( R F-number h / 3) is evaluate optical of microlens, is usually designed to be circles array patterns. Secondly, a key factor we have to consider when the microlens is the photo-resist layer is developed and the cylindrical # designed. F-number (abbreviated of a microlens isolated-islands array pattern is formed. Finally, the Vsphere kV cos D R as hF )/ R cylinder usually defined by the following equation: 2 2 photo-resist islands are heated until they melted. The Vcylinder S D H / 4 Vsphere S h ( R h / 3) 2 2 cylindrical islands will turn into spherical contour # V S D H / 4 R1)h / 3)(5) sphere R S hf ((n 2R F cylinder f / d sin D d / V spontaneously because of the effect of surface tension. S 2.2 Volume Relationship of Photo-resist before and after Melting The key step of the fabrication process is the thermal reflow of photo-resist. The shape of photo-resist isolatedisland changes from cylinder to sphere crown after melting so that the photo-resist refractive microlens Vsphere kVcylinderd arecos D R h / R Where, f and the focal length and diameter of # R h / Rgeometrical FVsphere 1/ ª¬ 2kV respectively. 1 sin cos D º¼ D Considering ncylinder the microlens, # of Frelationship f / d sin D d / 2 R and R thef (relationship n 1) # sin D of curvature d / 2 R R f (n 1) , we F length f / dand radius focal # relationship of F-number and contact Fcan derive 1/ ª¬ 2 out n the 1 sin D º¼ # angle: F 1/ ª¬ 2 n 1 sin D º¼ 20 Vcylinder Vsphere F# S D2 H / 4 kVcylinder f /d sin D Vsphere cos D S h 2 ( R h / 3) R h / R d / 2R F # 1/ ª¬ 2 n 1 sin D º¼ R f (n 1) 基于MEMS技术的人造复眼成像系统 ray tracing results of the experiment system as shown in Fig. 4. Due to the symmetrical structure of the microlens array, we paid our attention only on one row of microlenses. From Fig. 4, we can see that the point source at random position images after each microlens and focuses on the CMOS photo-detectors again. Considering the randomicity of the position of point source, we can get the conclusion that an object can be imaged by each microlens of the array and the multipleimage will be captured by the camera successfully. (6) Where, n is the refractive index of the microlens. Therefore, the contact angle of microlens will determine the microlens’ F-number uniquely as n usually is a const. From the above equations, we can see that the contact angle of microlens is a key factor for the geometrical contour and optical quality of the microlens. Usually, we expect to design and fabricate microlens with given geometrical size and F-number corresponding to a fixed value of the contact angle. Unfortunately, maybe we can not get the right contact angle in experiments because it is only related to the wettability of the material on substrate and environmental air but unrelated to the volume and geometrical size of photo-resist isolatedisland [34]. In the practical fabrication experiments, we adjusted the developing time to achieve proper contact angle of the microlens. Usually, the contact angle is fixed at about 20° for the case of completed developing. But if the developing time is not sufficient, some of the photo-resist will be left on the substrate. In that case, the contact angle of microlens can decrease to about 5° which we expected. 4.2 The Multiple-image Achieved by Experimental System In our artificial compound eyes imaging system, each microlens imaged the character “A” independently. Therefore, we captured a 9×9 multiple-image by the CMOS camera as shown in Fig. 5. The edge of the whole image is blurrier than the center, which is probably due to the non-homogeneity of the illuminance of the light source. Besides, we can see that the contrast of the picture is not good enough and some noise still exists. We try to improve the quality of original multiple-image by applying the contrast enhancing and high frequency filtering process. From the fig. 6, we can see that the contrast is enhanced obviously and most of noise is eliminated after the digital process. Furthermore, from the Fig. 5 we can see that there are differences among the unit images achieved by different microlenses. On one hand, the fabrication error of the microlens array leads to the non-uniformity of the 81 microlenses. On the other hand, the position of each microlens corresponding to the optical axis of the imaging system is different, so the aberration of the unit images is different. These two reasons result in the nonhomogeneity of the whole multiple-image. A chirped microlens array in which the each of microlens designed according to its position may improve the non-uniformity of the multiple-image. 3 Experiment Setup S hown as Fig.3, the artificial compound eyes experiment system consists of a light source, an object (character “A”), a microlens array and a CMOS camera. The experimental system was fixed on a shock proof platform. A white lamp with or a semiconductor laser can be selected as the light source. The object is a film with the pattern of character “A”. The size of film and “A” is 3cm*3cm and 1cm*1cm, respectively. Only the area of “A” is transparent. The material of the substrate is Schott B270 glass and its refractive index is about 1.52 on the wavelength range of visual light. The material of microlens is AZ4620 photoresist (Shipley, USA) and its refractive index is about 1.72 for the same wavelength range. The aperture of each microlens is 900μm and the focal length is about 6mm. The size of whole array is 9mm*9mm. The CMOS camera (MV-130UM, Microvision, China) is used to capture the image of object. Its pixel number is 1280×1024 and pixel size is 5.2um×5.2um. The focal length and the aperture of the camera lens (VS-2514M, Microvision, China) is 25mm and 35mm, respectively. 4.3 Object Image Reconstruction Processing Since the artificial compound eyes imaging system developed by Tanida and et al, several digital processing methods were used to reconstruct object image from the multiple-image. At first, Tanida adopted sampling method and back-projection method to reconstruction object image in [8] . After that, Kitamura advanced pixel rearrange method and improved the resolution of the object image [31]. Besides, other researchers also developed their reconstruction algorithm to achieve highresolution object image for the compound eyes imaging system [32-34]. In this paper, we adopted the pixel rearrangement method to reconstruction object image from the multiple-image. As shown in fig.7, this method collects all the pixels 4 Experimental Results and Analysis 4.1 Ray Tracing Simulation of the Imaging System for a Point Source at Random Position I n order to validate the imaging performance of our compound eyes imaging system, we simulated the 21 Vol. 4 No.2/ Feb. 2010 of unit images and arranges them at the corresponding position of reconstructed image. The pixels at same position of unit images are arranged according to the unit images rank order. So this method will reconstruct the object and make use of all the pixels of the whole multiple-image. The detailed reconstruction process contains following steps: ・ Divide the multiple-image into unit images. ・ Select central unit as the standard image. ・ Compute the offset between objects in each unit and ・ Adjust the object image position in each unit according to the offset. ・ Rearrange pixels of all the unit images. The final reconstructed result is shown as Fig. 8. From the picture, we can see that the image of character “A” is reconstructed successfully and its pixel scale is same with the multiple-image. But the resolution of the object image is not satisfied. It is mainly because that the quality of original unit image is not good enough. In the future, we will try to resolve the problem by evaluating the point spread function of the imaging system. It is useful to improve the quality of unit images. Fig .1 Fig .2 Fig .3 Fig .4 Fig .8 Fig .1: The process of microlens array fabrication by thermal reflow method Fig .2: The volume relationship of photoresist before and after melting Fig .3: The experimental system of the artificial compound eyes imaging system. Fig .4: The ray tracing simulation of the experiment system for a point source on random position. Fig .5: The multiple-image of the object “A” achieved by the experiment system. Fig .6: The multiple image after the contrast enhancing and filtering. Fig .7: The concept of pixel rearrangement method for object image reconstruction. Fig .8: Final object image of “A” achieved by pixels rearrangement for the multiple-image. standard unit. Fig .7 5 Conclusions I n conclusion, we introduced an artificial compound eyes imaging system based on MEMS technology. We used photo-resist reflow method to fabricate a 9×9 microlens array with planar structure as the compound eyes. The fabrication process and microlens design rules were introduced in detail. A simple and compact imaging system based on the microlens array was built. Experimental results indicated that our imaging system can effectively imitate the imaging mechanism of the compound eyes. Also, we reconstructed the final object by pixels rearrangement method. The reconstructed image has the same pixel scale with the multiple-image. However, the resolution of the reconstruction result is not satisfied. 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Sign Process, vol. 18, 2007, pp. 83-101. 作者简介 邸 思 2007级博士研究生。2000年和2004年于北 京交通大学分别获得工学学士和工学硕士学 位,专业分别为通信工程和电磁场与微波技 术。主要研究方向为基于MEMS技术的人造 复眼成像系统的研究。 林 慧 工学博士,2004年、2009年分别获清华大 学精密仪器与机械学系学士、博士学位, 2009年加入先进院精密工程中心。研究方 向:光谱仪器及其在食品、环境检测中的应 用;微纳加工及微光机电系统。 杜如虚 作者简介见本期封2页。 24
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