Ne w p ro duct
Valves for process gas
LGD Series
VALVE FOR PROCESS GAS
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valves fo
Manual valves
Air operated valves
Refer to the "Safety precautions" in the "High Purity Gas
Control Systems" (No.CB-035A) catalog before use.
CC-1171A 1
Air operated valve for process gas
LGD** Series
Metal diaphragm
Specifications
Descriptions
LGD1*
LGD2*
Working fluid
Inert gas, process gas
1.3 × 10-6 to 0.99
Working pressure
Pa(abs)-MPa(G)
Fluid temperature
°C
Ambient temperature
°C
Valve seat leakage
Pa·m3/sec.He
1.0 × 10-10 or less
External leakage
Pa·m3/sec.He
1.0 × 10-10 or less
Cv
5 to 80
5 to 80
(23°C, under pressure)
3/8" : 0.65
0.3
Connection
1/2" : 0.7
1/4" VCR male fitting equivalent
1/2" VCR male fitting equivalent (3/8" compatible)
1/4" VCR female fitting equivalent
1/2" VCR female fitting equivalent (3/8" compatible)
1/4" double barbed fitting
3/8" double barbed fitting
-
1/2" double barbed fitting
NC type (Normally closed)
Actuation
NO type (Normally open)
Operating pressure NC : 0.4 to 0.6
MPa
NO : 0.4 to 0.5
Operating port
M5
Weight
kg
0.57 Note 1
0.23 Note 1
Note 1: The weight is with VCR male fitting equivalent.
How to order
LGD1 1
LGD2 1
4RM
Symbol
A
Actuation
B
Connection
A
B
8RM
Descriptions
Symbol
Actuation
1
NC type (Normally closed)
2
NO type (Normally open)
Connection
4RM
1/4" male fitting (VCR equivalent)
4R
4S
A
A
Actuation
B
Connection
B
Descriptions
Actuation
1
NC type (Normally closed)
2
NO type (Normally open)
Connection
8RM
1/2" male fitting (VCR equivalent)
1/4" female fitting (VCR equivalent)
8R
1/2" female fitting (VCR equivalent)
1/4" double barbed fitting
6S
3/8" double barbed fitting
8S
1/2" double barbed fitting
Internal structure and parts list
1
Materials for wetted areas
IN
2
3
1
OUT
No.
Part name
Material
1
Diaphragm
Ni-Co alloy
2
Valve seat
PCTFE
3
Body
SUS316L
LGD** Series
Dimensions
Dimensions
LGD1*-4RM
LGD1*-4R
Operating port M5
φ 37
Operating port M5
OUT
OUT
11
IN
11
IN
(64)
(64)
φ 37
φ 28
φ 28
1/4" male fitting
2-M5 thread depth 5
φ 17
1/4" female fitting
78
57
2-M5 thread depth 5
φ 17
45°
45°
LGD1*-4S
LGD2*-8RM
Operating port M5
φ 48.3
Operating port M5
(64)
(87)
φ 37
OUT
IN
OUT
φ 28
39.1
16
11
IN
1/4" double barbed fitting
φ 38
77
(67)
2-M5 thread depth 5
φ 17
45°
φ 28
1/2" male fitting
2-M5 thread depth 6
45°
2
LGD** Series
Dimensions
LGD2*-8R
LGD2*-6S
Operating port M5
Operating port M5
φ 48.3
(87)
(87)
φ 48.3
IN
OUT
16
OUT
16
IN
φ 38
φ 38
1/2" female fitting
3/8" double barbed fitting
48.9
104.6
(82.5)
φ 28
φ 28
2-M5 thread depth 6
45°
45°
LGD2*-8S
Operating port M5
OUT
16
IN
(87)
φ 48.3
φ 38
44.6
1/2" double barbed fitting
(90.2)
φ 28
2-M5 thread depth 6
45°
3
2-M5 thread depth 6
Manual valves for process gas
LGD*0 Series
Metal diaphragm
180° rotation type
Specifications
Descriptions
LGD10
LGD20
Working fluid
Inert gas, process gas
Working pressure
1.3 × 10-6 to 0.99
Pa(abs)-MPa(G)
Fluid temperature
°C
5 to 80
Ambient temperature
°C
5 to 60
Valve seat leakage
Pa·m3/sec.He
1.0 × 10-10 or less
External leakage
Pa·m3/sec.He
1.0 × 10-10 or less
Cv
(23°C, under pressure)
Connection
Weight
0.3
0.7
1/4" VCR male fitting equivalent
1/2" VCR male fitting equivalent (3/8" compatible)
1/4" VCR female fitting equivalent
1/2" VCR female fitting equivalent (3/8" compatible)
1/4" double barbed fitting
3/8" double barbed fitting
-
1/2" double barbed fitting
0.26 Note 1
0.57 Note 1
kg
Note 1: The weight is with VCR male fitting equivalent.
How to order
LGD10 - 4RM
LGD20 - 8RM
Symbol
A
Connection
A
Descriptions
Symbol
Connection
4RM
1/4" male fitting (VCR equivalent)
4R
4S
A
Connection
A
Descriptions
Connection
8RM
1/2" male fitting (VCR equivalent)
1/4" female fitting (VCR equivalent)
8R
1/2" female fitting (VCR equivalent)
1/4" double barbed fitting
6S
3/8" double barbed fitting
8S
1/2" double barbed fitting
Internal structure and parts list
1
Materials for wetted areas
IN
2
OUT
No.
Part name
Material
1
Diaphragm
Ni-Co alloy
2
Valve seat
PCTFE
3
Body
SUS316L
3
4
LGD*0 Series
Dimensions
LGD10-4RM
LGD10-4R
φ 45
65
65
φ 45
IN
OUT
11
OUT
11
IN
φ 28
57
φ 28
1/4" male fitting
1/4" female fitting
78
2-M5 thread depth 5
φ 17
2-M5 thread depth 5
φ 17
45
°
45°
LGD10-4S
LGD20-8RM
φ 45
OUT
IN
OUT
φ 28
39.1
16
11
IN
79
65
φ 45
1/4" double barbed fitting
φ 38
(67)
2-M5 thread depth 5
φ 17
45°
5
1/2" male fitting
77
2-M5 thread depth 6
φ 28
45°
LGD*0 Series
Internal structure and parts list
Dimensions
LGD20-8R
LGD20-6S
79
OUT
IN
OUT
φ 38
16
16
IN
φ 38
1/2" female fitting
104.6
79
φ 45
φ 45
48.9
3/8" double barbed fitting
(82.5)
2-M5 thread depth 6
φ 28
2-M5 thread depth 6
φ 28
45°
45°
LGD20-8S
CLOSE
OUT
16
IN
79
φ 45
φ 38
44.6
1/2" double barbed fitting
(90.2)
2-M5 thread depth 6
φ 28
45°
6
LGD Series
Safety precautions
Refer to the instruction manual and the "Safety precautions" in the "High Purity Gas Control Systems" (No.CB-035A)
catalog before use.
WARNING
Design & selection
This product is designed to fulfill the performance in fluid temperature of 5 - 80°C.
Do not use this product outside of the temperature range listed in specifications.
Tailored contents of product introductions for
semiconductor manufacturing processes and
equipment are published!
Solution for Semiconductor
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2015.9