HELIOS
Actively Q-Switched Compact DPSS
sub-ns Laser
The lasers of the HELIOS series are compact, rugged systems with
high pulse energy and pulse duration of only a few hundred picoseconds. This allows for a precision and quality in micromachining and
FEATURES
• Pulse-width: 600 ps to 900 ps
• High output power
- Up to 6W at 1064 nm
- Up to 3.75W at 532 nm
microelectronics applications which are not possible with nanosecond
• Repetition rate from single-shot
up to 125 kHz
lasers.
• Exact pulse control
HELIOS MOPA (Master Oscillator/Power Amplifier) technology makes
high power generation and power scaling especially efficient. In con-
• High beam quality: TEM00/M2 <1.25
• Excellent pointing stability
trast to standard acousto-optical (AOM) devices HELIOS electro-optical
(EOM) Q-switch operates faster and more precise. This results in an
APPLICATIONS
outstanding pulse control – a must for e.g. contour processing and
• Thin-Film Scribing
applications that demand a precise pulse overlap.
• LED Dicing
HELIOS lasers are designed for industrial 24/7 operation. Due to their
• Marking, Engraving
- Ceramics, Glass, Sapphire, Diamond
excellent beam quality including beam pointing, their compactness and
digital control the lasers can be exchanged quickly without significant
downtime of the user’s tool. The infrared and green HELIOS versions
come with identical form, fit, function allowing the user for an easy and
quick wavelength change.
HELIOS lasers are the right economic choice for surface-near applications like thin-film processing, scribing, dicing, and marking.
•Repair
- Displays, Memories, etc.
HELIOS Datasheet
SPECIFICATIONS
HELIOSHELIOSHELIOS
1064-2.5-50
1064-5-50
1064-6-125
Wavelength (nm) Average Power1 (W) 1064
2.5
Pulse Energy (at nominal values) (µJ)
Pulse Repetition Frequency Range (kHz) 5.0
>50
>100
>45
Single-shot to 70
Single-shot to 125
Nominal Pulse Repetition Frequency (kHz)
Pulse Width (ns)
50
50
125
<0.79
<0.69
<0.95
Spatial Mode
TEM00
M2 (Beam Quality) <1.25
Beam Diameter,
1/e2
(mm)
3.5
2.5
Polarization Jitter (ns)
between sequential pulses, gating mode
trigger to laser pulse, single pulse triggering
<±2
<±5
<±2
<±5
Type A
Type B
Type B
128 x 177 x 270 mm
(5.0 x 7.0 x 10.6 in.)
128 x 104 x 257 mm
(5.0 x 4.1 x 10.1 in.)
128 x 104 x 257 mm
(5.0 x 4.1 x 10.1 in.)
150 x 45 x 130 mm
(5.9 x 1.8 x 5.1 in.)
150 x 45 x 130 mm
(5.9 x 1.8 x 5.1 in.)
9.5 kg (20.9 lbs.)
5.6 kg (12.3 lbs.)
5.6 kg (12.3 lbs.)
integrated
1.4 kg (3.0 lbs.)
1.4 kg (3.0 lbs.)
Laser Electronics Size (W x H x L)
integrated
Laser Head Weight Laser Electronics Weight Operating Baseplate Temperature (°C) 20 to 30
Operating Ambient Temperature (°C)
15 to 45
Storage Condition (°C) -10 to +50
Relative Humidity (%) <80
Cable Length Laser Head (m) none
1
Operating Voltage (V) 1
24 ±2
Average power/pulse energy at nominal repetition rate, maximum decrease over warranty <10%.
Typical Pulsewidth vs Repetition Frequency
Pulse Width (ps)
1200
1000
800
600
400
200
0
0
20
2.5
> 50:1, vertical
<±2
<±2
Laser Assembly Type
Laser Head Size (W x H x L)
6.0
Single-shot to 70 1
40
60
80
100
Pulse Repetition Frequency (kHz)
120
140
1
HELIOS Datasheet
S P E C I F I C A T I O N S HELIOS
HELIOS
HELIOS
HELIOS
532-1-50532-1.5-50532-3-50 532-4-125
Wavelength (nm) 532
Average Power1 (W) 1.0
Pulse Energy (at nominal values) (µJ)
3.0
>20
>30
>60
>30
Single-shot to 70
Single-shot to 70
Single-shot to 125
Nominal Pulse Repetition Frequency (kHz)
Pulse Width (ns)
50
50
50
125
<0.69
<0.69
<0.69
<0.85
Spatial Mode
TEM00
M2 (Beam Quality) Beam Diameter,
1/e2
<1.25
(mm)
2.0
Polarization > 50:1, vertical
Jitter (ns)
between sequential pulses, gating mode
trigger to laser pulse, single pulse triggering
<±2
<±2
<±2
<±2
<±2
<±5
<±2
<±5
Type A
Type A
Type B
Type B
128 x 177 x 270 mm
(5.0 x 7.0 x 10.6 in.)
128 x 177 x 270 mm
(5.0 x 7.0 x 10.6 in.)
128 x 104 x 257 mm
(5.0 x 4.1 x 10.1 in.)
128 x 104 x 257 mm
(5.0 x 4.1 x 10.1 in.)
150 x 45 x 130 mm
(5.9 x 1.8 x 5.1 in.)
150 x 45 x 130 mm
(5.9 x 1.8 x 5.1 in.)
Laser Assembly Type
Laser Head Size (W x H x L)
Laser Electronics Size (W x H x L)
integrated
integrated
Laser Head Weight 9.5 kg (20.9 lbs.)
9.5 kg (20.9 lbs.)
5.6 kg (12.3 lbs.)
5.6 kg (12.3 lbs.)
integrated
integrated
1.4 kg (3.0 lbs.)
1.4 kg (3.0 lbs.)
Laser Electronics Weight Operating Baseplate Temperature (°C) 20 to 30
Operating Ambient Temperature (°C)
15 to 45
Storage Condition (°C) -10 to +50
Relative Humidity (%) <80
Cable Length Laser Head (m) none
none
1
Operating Voltage (V) 1
3.75
Single-shot to 70 1
Pulse Repetition Frequency Range (kHz) 1.5
24 ±2
Average power/pulse energy at nominal repetition rate, maximum decrease over warranty <10%.
Typical Pulse Energy vs Repetition Frequency
Pulse Energy (µJ)
120
1064-5-50
1064-6-125
532-3-50
532-4-125
100
80
60
40
20
0
0
20
40
60
80
100
Pulse Repetition Frequency (kHz)
120
1
128 mm (5.04 in.)
55.5 mm
(2.19 in.)
HELIOS Datasheet
128 mm
(5.04 in.)
MECHANICAL SPECIFICATION
257Smm (10.12 in.)
HELIOS Assembly Type A
Side View
Front View
177.3 mm
(6.98 in.)
83.9 mm
(3.30 in.)
Laser Aperture
55.5 mm (2.19 in.)
Top View
128 mm (5.04 in.)
128 mm
(5.04 in.)
270 mm (10.63 in.)
HELIOS Assembly Type B
Side View
Laser Aperture
Front View
104 mm
(4.10 in.)
83.9 mm
(3.30 in.)
128 mm (5.04 in.)
Top View
55.5 mm
(2.19 in.)
128 mm
(5.04 in.)
257 mm (10.12 in.)
Coherent, Inc.,
5100 Patrick Henry Drive Santa Clara, CA 95054
p. (800) 527-3786 | (408) 764-4983
f. (408) 764-4646
177.3 mm
(6.98 in.)
83.9 mm
(3.30 in.)
[email protected] www.Coherent.com
Laser Aperture
55.5 mm
in.) Regulations
Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent’s scientific and industrial lasers are certified to comply
with (2.19
the Federal
(21 CFR Subchapter J) as administered by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976.
128 mm (5.04 in.)
Coherent offers a limited warranty for all HELIOS lasers. For full details of this warranty coverage, please refer to the Service section at www.Coherent.com or contact your local Sales or Service Representative.
Printed in the U.S.A. MC-010-13-1M0117Rev.C Copyright ©2017 Coherent, Inc.
128 mm
(5.04 in.)
VISIBLE AND INVISIBLE LASER RADIATION.
AVOID EYE OR SKIN EXPOSURE TO
DIRECT OR SCATTERED RADIATION.
CLASS IV LASER PRODUCT
PER EN 60825-1:2001.
λ
1064 nm
532 nm
355 nm
Max. Power
<10W
<6W
<3W
Max. Pulse
1.5 mJ/0.3-2 ns
0.8 mJ/0.3-2 ns
0.1 mJ/0.3-2 ns