Vacuum unit ideal for controlling large flow rates
Vacuum ejector/vacuum unit
Vacuum unit VSQ/VSQP series
Features
This 31.5 mm width vacuum unit is ideal for controlling large flow rates.
A vacuum ejector unit and vacuum switching unit are available to respond to different needs.
Three types of vacuum ejector units are available: single-nozzle, two-step nozzle and twin
nozzle types.
The twin nozzle is for uses with a long suction time and transfer time.
The vacuum startup to the reference vacuum pressure is controlled with the large bore size
nozzle, and the pressure higher than the reference vacuum pressure is controlled with the
small bore nozzle, thereby greatly reducing the consumed flow rate. (Patent pending)
The vacuum generation is controlled with one signal.
Large/small nozzle switching pressure adjusting trimmer
Pilot valve for large bore size nozzle
Reference vacuum pressure
(random setting possible)
Valve timing
Pilot valve for vacuum break
Consumption flow rate
Pilot valve for small bore size nozzle
Atmosphere
Large bore size nozzle Small bore size nozzle
Release flow rate adjusting needle
SW1
SW2
kPa
Nozzle type
T15
T20
Consumption flow rate
100
23
200
46
The two-step nozzle suction flow rate is about 40% more than the conventional signal.
The single-nozzle is an orthodox integrated large flow vacuum generator.
A full lineup of vacuum generating valve variations is available.
Single-nozzle: Normally open, normally closed, double
Two-step nozzle: Normally open, normally closed
Twin-nozzle: Normally closed
Vacuum switching unit: Normally open, normally closed
173
Release circuit
Release flow rate adjusting needle
Filter element
Sensor unit
Pilot valve
Vacuum release main valve
Air supply port
Nozzle
Vacuum pad
Vacuum port
Silencer element
Diffuser
Vacuum circuit
Pilot valve
Vacuum ejector/vacuum unit
Structure drawing (Vacuum ejector unit, single nozzle type)
Filter element
Sensor unit
Vacuum generating main valve unit
Air supply port
Nozzle
Diffuser
Silencer element
Structure drawing (Vacuum ejector unit, two-step nozzle type)
Release circuit
Pilot valve
Vacuum release main valve
Release flow rate adjusting needle
Filter element
Sensor unit
Vacuum port
Air supply port
Nozzle Diffuser 1 Diffuser 2
Silencer element
Vacuum circuit
Pilot valve
Vacuum generating main valve unit
Check valve Filter element
Sensor unit
Vacuum port
Pilot exhaust port
Air supply port
Nozzle Diffuser 1 Diffuser 2
Related components
Pilot exhaust port
Inch/NPT specifications
Vacuum related components
Vacuum port
Silencer element
174
Vacuum ejector/vacuum unit
VSQ/VSQP series
Structure drawing (Vacuum ejector unit, twin nozzle type)
Release circuit
Break flow rate adjusting needle
Pilot valve
Vacuum break main valve
Large/small nozzle switching pressure
adjusting trimmer
Filter element
Sensor unit
Vacuum port
Air supply port
Nozzle 1
Nozzle 2
Diffuser
Silencer element
Vacuum circuit
Pilot valve Check valve
Large bore size vacuum generating main valve unit
Check valve Filter element
Sensor unit
Large/small nozzle switching pressure adjusting trimmer
Vacuum port
Small diameter vacuum generating main valve unit
Pilot exhaust port
Air supply port
Nozzle 1
Nozzle 2
Diffuser
Silencer element
Structure drawing (Vacuum switching unit)
Release circuit
Pilot valve
Vacuum release main valve
Release flow rate adjusting needle
Filter element
Sensor unit
Vacuum port
Vacuum supply port
Vacuum circuit
Pilot valve
Vacuum generating main valve unit
Filter element
Sensor unit
Vacuum port
Pilot exhaust port
Air supply port
Vacuum supply port
175
Operation explanation drawing (Vacuum ejector unit, single-nozzle type (normally closed))
Vacuum generation stopped state
Relase circuit
Vacuum circuit
Release flow rate adjusting needle
Pilot valve
Filter element
Vacuum release
main valve
Vacuum generating main valve unit
Vacuum pad
Sensor unit
Vacuum port
Silencer element
Nozzle
Air supply port
Vacuum ejector/vacuum unit
VSQ series
Diffuser
Vacuum release air supply
Release circuit
Vacuum circuit
Inch/NPT specifications
Vacuum circuit
Related components
Release circuit
Vacuum related components
Vacuum generating state
176
Vacuum ejector/vacuum unit
VSQ series
Operation explanation drawing (Vacuum ejector unit, two-step nozzle type (normally closed))
Vacuum generation stopped state
Release circuit
Vacuum circuit
Release flow rate adjusting needle
Pilot valve
Vacuum release
main valve
Filter element
Sensor unit
Pilot valve
Vacuum generating
main valve unit
Vacuum port
Nozzle Diffuser 1 Diffuser 2
Silencer element
Air supply port
Vacuum generating state
Release circuit
Vacuum circuit
Vacuum release air supply
Release circuit
177
Vacuum circuit
Check valve
Release circuit
Vacuum circuit
Vacuum release
main valve
Release flow rate adjusting needle
Filter element
Pilot valve
Large/small nozzle
switching pressure
adjusting trimmer
Sensor unit
Check valve
Pilot valve
Check valve
Large bore size
vacuum generating
main valve unit
Vacuum port
Nozzle 1
Nozzle 2 Diffuser
Silencer element
Small diameter vacuum generating main valve unit
Air supply port
Vacuum ejector/vacuum unit
Vacuum generation stopped state
Vacuum pad
Operation explanation drawing (vacuum ejector unit, twin nozzle type)
Vacuum generating state (Vacuum startup to reference vacuum pressure: Large bore size nozzle)
Vacuum circuit
Vacuum generating state (Higher than reference vacuum pressure: small bore size nozzle)
Vacuum circuit
Vacuum release air supply
Release circuit
Vacuum circuit
Related components
Inch/NPT specifications
Release circuit
Vacuum related components
Release circuit
178
Vacuum ejector/vacuum unit
VSQP series
Operation explanation drawing (Vacuum switching unit (normally closed))
Vacuum generation stopped state
Release circuit
Vacuum circuit
Release flow rate adjusting needle
Pilot valve
Filter element
Pilot valve
Sensor unit
Vacuum generating
main valve unit
Vacuum break main valve
Vacuum port
Vacuum supply port
Vacuum supply state
Release circuit
Vacuum circuit
Vacuum release air supply
Release circuit
179
Vacuum circuit
Vacuum switchover unit
Air
0.3 to 0.7MPa
5 to 50˚C
-100 to 0kPa
Ejector characteristics
H15
L15
E15
Single nozzle
H20
L20
E20
T15
Twin nozzles
T20
D07
Two-step nozzle D10
D12
Nozzle diameter
(mm)
Ultimate vacuum
(-kPa)
Suction flow
( /min(ANR))
0.35
93
66
92
93
66
92
63
95
42
110
180
84
0.5
93 (93)
Rated pressure
(MPa)
0.5
1.5
0.35
0.5
2.0
0.7
1.5
(Small bore size) (Large bore size)
1.0
2.0
(Small bore size) (Large bore size)
0.7
1.0
1.2
0.5
93
Consumed flow
( /min(ANR))
100
70
200
150
40 (24)
100 (23)
70 (36)
200 (46)
24
36
40
23
46
70
*.Values in parentheses for the twin-nozzle are small bore nozzle values.
Solenoid valve
Pilot valve
Operation method
Valve structure
Rated voltage
Tolerable voltage fluctuation range
Surge protective circuit
Power consumption
Manual operation
Operation display
Direct operation
Rubber seal, poppet valve
24V DC
24V DC 10%
Surge absorber
0.55W
100V AC
100V AC 10%
Bridge diode
1VA
Push type locking valve
During coil energizing: Red LED ON
Switching valve
Twin nozzles types
Item
Operation method
Valve structure
Valve type
Lubrication
Effective sectional area (Cv value)
Small bore size valve
Large bore size valve
Vacuum release valve
Air pressure operation using pilot valve
Rubber seal, poppet valve
Normally closed
Normally closed
Normally closed
Not required
16.5mm2 (0.89)
3.5mm2 (0.19)
3.5mm2 (0.19)
Two-step nozzle type
Item
Operation method
Valve structure
Valve type
Lubrication
Effective sectional area (Cv value)
Vacuum generating valve
Vacuum release valve
Air pressure operation using pilot valve
Rubber seal, poppet valve
Normally closed, normally open
Normally closed
Not required
3.5mm2 (0.19)
3.5mm2 (0.19)
Vacuum related components
Nozzle type
Inch/NPT specifications
Vacuum ejector unit
Related components
Common
Unit
Working fluid
Working pressure range
Ambient temperature range
Working vacuum pressure range
Vacuum pad
Specifications
Vacuum ejector/vacuum unit
VSQ/VSQP series
180
Vacuum ejector/vacuum unit
VSQ/VSQP series
Single nozzle type
Item
Operation method
Valve structure
Valve type
Lubrication
Effective sectional area (Cv value)
Minimum excitation time
Vacuum generating valve
Vacuum release valve
Air pressure operation using pilot valve
Rubber seal, poppet valve
Normally closed, normally open, double solenoid
Normally closed
Not required
3.5mm2 (0.19)
16.5mm2 (0.89)
50 msec or more
Vacuum switchover unit
Item
Operation method
Valve structure
Valve type
Lubrication
Effective sectional area (Cv value)
Vacuum generating valve
Vacuum release valve
Air pressure operation using pilot valve
Rubber seal, poppet valve
Normally closed, normally open
Normally closed
Not required
3.5mm2 (0.19)
16.5mm2 (0.89)
Vacuum sensor specifications
Working pressure range
-100 to 100kPa
Withstanding pressure
200kPa
Storage temperature range
-20 to 70˚C
Working temperature range
-10 to 50˚C
Working humidity range
35 to 85%RH
Power supply voltage
12 to 24V DC 10% ripple (P-P) 10% or less
Protective structure
IEC Standards IP40 or equivalent
Number of pressure setting points
2
Switch output
NPN open collector 30V DC 100mA or less Residual voltage: 1.2V or less (at load current 100mA)
Hysteresis
0 to 30 digit (variable)
Repeatability
Within 0.3%F.S.
Responsiveness
5msec max.
Display
2 1/2-digit 7-segment LED display
Number of displays
4 times/sec.
Display accuracy
1%F.S.
Temperature characteristics
0.3%F.S.(0 to 50˚C, 25˚C reference)
Vacuum filter specifications
Element material
Filtration degree
Element area
Replacement filter element ordering type
PVF (Poly-vinyl formal)
10µm
1507mm2
VSQ-E
Vacuum release function
Release air flow rate
0 to 50 /min(ANR) (at supply pressure: 0.5 MPa)
Valve lead wire colors
181
24V DC specifications
Twin nozzles types
Two-step nozzle type
Single nozzle type
Vacuum switching unit
Black
Vacuum generation (-)
Vacuum generation (-)
Vacuum generation (-)
Vacuum generation (-)
Gray
Vacuum relese (-)
Vacuum relese (-)
Vacuum relese (-)
Vacuum relese (-)
100 VAC specifications
Two-step nozzle type
Single nozzle type
Vacuum switching unit
Black
Gray
Vacuum generation (-) Vacuum relese (-)
Vacuum generation (-) Vacuum relese (-)
Vacuum generation (-) Vacuum relese (-)
Blue
Minus (-)
Brown
24V DC (+ common)
24V DC (+ common)
24V DC (+ common)
24V DC (+ common)
Blue
Brown
common
common
common
100V AC
+
—
+
—
Internal
circuit
0V
Supply valve
(Black)
24V DC
0V
common Vacuum release valve
(Gray)
(Brown)
0V
(Blue)
Single nozzle type
Two-step nozzle type
Vacuum pump system compatible type
0V
Vacuum release valve
(Gray)
0V
Supply valve
(Black)
Supply valve Common Vacuum release valve
(Gray)
(Brown)
(Black)
24V DC
common
(Brown)
Twin nozzles types
Single nozzle type
Two-step nozzle type
Vacuum pump system compatible type
Vacuum ejector/vacuum unit
24V DC
Vacuum pad
Electric circuit (solenoid valve)
Load
Power supply
12 to 24V DC
Load
(Black) SW OUT1
(White) SW OUT2
(Blue)
COM
Inch/NPT specifications
Main circuit
Sensor
(Brown)
Related components
Pressure display
Vacuum related components
Vacuum sensor electrical circuit diagram
182
Single nozzle type characteristics
VSQ-H20
VSQ-L20
VSQ-E20
Vacuum characteristics diagram
200
100
Vacuum characteristics diagram
400
100
H type ultimate vacuum
H type ultimate vacuum
E type ultimate vacuum
E type ultimate vacuum
80
m
e
yp
60
Lt
va
H
L
and
e
um
ons
c
ype
ow
d fl
120
t
L type suction flow
40
80
160
320
u
ons
ec
yp
Et
flow
80
H type suction flow
Ultimate vacuum (-kPa)
ate
im
ult
d
me
Flow rate ( /min (A.N.R))
u
cu
um
cu
ate
va
L
e
typ
ult
me
nsu
im
60
w
d flo
nd
40
w
d flo
240
L type suction flow
160
E
Ha
co
type
pe
L ty
me
su
con
H type suction flow
E type suction flow
40
20
80
20
E type suction flow
0
0
0.3
0.4
0.5
Supply pressure (MPa)
0.6
0
0
0.7
0.3
0.4
0.5
Supply pressure (MPa)
0.6
0.7
Two-step nozzle type characteristics
VSQ-D07
VSQ-D07
Vacuum characteristics diagram
100
50
100
40
80
Flow rate characteristics diagram
ed
um
ons
60
flow
C
30
ow
tion fl
Suc
60
40
20
20
10
20
0
0
0
0.3
183
Vacuum (-kPa)
Ultimate vacuum (-kPa)
80
Flow rate ( /min (A.N.R) )
Ultimate vacuum
0.4
0.5
Supply pressure (MPa)
0.6
0.7
40
0
10
20
30
Suction flow ( /min (A.N.R) )
40
Flow rate ( /min (A.N.R))
VSQ-H15
VSQ-L15
VSQ-E15
Ultimate vacuum (-kPa)
Vacuum ejector/vacuum unit
VSQ series
100
100
80
80
Flow rate characteristics diagram
40
40
w
Suction flo
20
0.4
VSQ-D12
0.5
Supply pressure (MPa)
0.6
40
20
20
0
0
0
0.3
60
Vacuum pad
60
0
0.7
20
30
40
50
Suction flow ( /min (A.N.R) )
VSQ-D12
Vacuum characteristics diagram
100
10
100
100
80
80
60
70
Flow rate characteristics diagram
low
ed f
sum
Con
60
60
Suction flow
Vacuum (-kPa)
Ultimate vacuum (-kPa)
80
Flow rate ( /min (A.N.R) )
Ultimate vacuum
60
40
40
20
20
20
0
0
0
0.3
0.4
0.5
Supply pressure (MPa)
0.6
0.7
40
0
20
40
60
Suction flow ( /min (A.N.R) )
80
Vacuum related components
ow
d fl
me
su
Con
Inch/NPT specifications
60
Vacuum (-kPa)
Ultimate vacuum (-kPa)
80
Flow rate ( /min (A.N.R) )
Ultimate vacuum
Vacuum ejector/vacuum unit
VSQ-D10
Vacuum characteristics diagram
Related components
VSQ-D10
100
184
Twin nozzle type characteristics
VSQ-T15B
VSQ-T15B
Vacuum characteristics diagram
100
Large bore size nozzle ultim
200
100
160
80
Flow rate characteristics diagram
(small bore size nozzle)
ate vacuum
Small bore size noz
flow
rate
120
sum
on
le c
z
ize
ge
Lar
40
s
ore
noz
b
80
Large bore size nozzle suction flow rate
20
Vacuum (-kPa)
n
ptio
60
Flow rate ( /min (A.N.R) )
zle ultimate vacuum
80
Ultimate vacuum (-kPa)
Vacuum ejector/vacuum unit
VSQ series
60
40
40
20
0
0
Small bore size nozzle suction flow rate
rate
umption flow
e nozzle cons
Small bore siz
0
0.4
0.5
Supply pressure (MPa)
0
Vacuum characteristics diagram
100
Large bore size nozzle ultimate vacuum
Small bore size
nozzle ultimate
vacuum
80
Ultimate vacuum (-kPa)
0.7
60
Lar
g
or
eb
es
ize
z
noz
le c
ons
um
n
ptio
flow
rate
300
100
240
80
180
120
40
5
VSQ-T20B
Vacuum (-kPa)
VSQ-T20B
0.6
Flow rate ( /min (A.N.R) )
0.3
10
15
20
Suction flow ( /min (A.N.R) )
25
30
Flow rate characteristics diagram
(small bore size nozzle)
60
40
Large bore size nozzle suction flow rate
20
nozzle
ll bore size
tion flow
consump
rate
60
20
0
0
Sma
Small bore size nozzle suction flow rate
0
0.3
185
0.4
0.5
Supply pressure (MPa)
0.6
0.7
0
5
10
15
20
25
Suction flow ( /min (A.N.R) )
30
35
T15
(2)
B
(3)
10
(4)
10
(5)
S
(6)
3
(7)
SW
(8)
(8) Vacuum sensor specifications
Symbol
SW
Specifications 2-point output with LED display
Blank
No vacuum sensor
(7) Solenoid valve voltage
Symbol
3
1
Specifications
24V DC
100V AC
*. Only the 24V DC (symbol: 3) is available for the twin-nozzle type.
Vacuum ejector/vacuum unit
VSQ
(1)
Vacuum pad
How to order vacuum ejector unit (Example)
(6) Exhaust port (EX)
Symbol
S
J
Exhaust method Atmospheric exhaust type ø12mm push in joint common exhaust type
Symbol
Tube O. D.
8
8mm push-in joint
10
10mm push-in joint
(3) Valve type
Symbol
B
A
D
Valve type
Normally closed type
Normally open type
Double solenoid type
*1. Only the normally closed type (symbol: B) is available when the twin-nozzle type is selected for item (1).
*2. Only the normally closed type (symbol: B) or normally open type (symbol: A) is available when the two-step
nozzle type is selected for item (1)
(2) Vacuum characteristics, nozzle diameter
Nozzle diameter
Rated pressure Ultimate vacuum Suction flow Consumed flow
(mm)
(l/min(ANR)) (l/min(ANR))
(MPa)
(-kPa)
ø1.5
93
63
H15
100
0.5
ø1.5
66
95
L15
ø1.5
92
42
E15
70
0.35
Single nozzle type
ø2.0
93
110
H20
200
0.5
ø2.0
66
180
L20
ø2.0
92
84
E20
150
0.35
ø0.7
ø1.5
40 (24)
T15
100 (23)
(small bore size) (large bore size)
93 (93)
Twin nozzle type
0.5
ø1.0
ø2.0
70 (36)
T20
200 (46)
(small bore size) (large bore size)
24
ø0.7
D07
23
93
36
ø1.0
Two-step nozzle type D10
46
0.5
40
ø1.2
D12
70
*.Values in parentheses for the twin-nozzle are small bore nozzle values.
Symbol
(1) Discrete vacuum ejector unit type: VSQ
*. The ø6 mm push in joint is attached to the pilot valve's exhaust port.
Inch/NPT specifications
(4) Vacuum port (V)
Related components
Symbol
6
8
10
Exhaust method 6 mm push-in joint 8 mm push-in joint 10 mm push-in joint
*. ø6 mm is available only when the two-step nozzle type is selected for item (1).
Vacuum related components
(5) Air supply port (PS)
186
Vacuum ejector/vacuum unit
Vacuum unit VSQ
series
How to order vacuum ejector unit (Example)
VSQP
(1)
B
(2)
10
(3)
10
(4)
3
(5)
SW
(6)
(6) Vacuum sensor specifications
Symbol
SW
Specifications 2-point output with LED display
(5) Solenoid valve voltage
Symbol
Specifications
3
24V DC
1
100V AC
(4) Vacuum supply port (PV)
Symbol
Tube O. D.
10
10 mm push-in joint
12
12 mm push-in joint
(3) Vacuum port (V)
Symbol
Tube O. D.
10
10 mm push-in joint
12
12 mm push-in joint
(2) Valve type
Symbol
Valve type
B
Normally closed type
A
Normally open type
(1) Discrete vacuum switching unit type: VSQP
*. The ø6 mm push in joint is attached to the pilot valve's exhaust port and air supply port.
Fixing method
Fix the vacuum unit VSQ with M3 screws using the fixing
holes on the resin body. (See the dimensions for the fixing
hole pitch.)
187
Blank
No vacuum sensor
Vacuum ejector/vacuum unit
Vacuum pad
Vacuum related components
1. Compressed air contains large amounts of drainage (water, oxidized oil, tar, foreign matter, etc.) that
may adversely affect VSJ/VSJP performance. Dehumidify air with an after cooler or dryer and improve
air quality.
2. Do not use a lubricator.
3. Rust, etc., in piping may result in operation faults. Install a 5 µm or smaller filter preceding the supply
port. Flush pipes before use and at an appropriate cycle.
4. Do not apply excessive tension or bending to the pilot valve or vacuum sensor leads. Wires or
connectors may break.
5. Avoid using this vacuum ejector in environments with corrosive or flammable gas. Do not use this unit
for fluids.
6. This product does not have a drip proof or dustproof structure. Avoid using it where it could be subject
to water, oil or dust.
7. Avoid sucking in dust, salt or iron chips, etc.
8. Do not operate the vacuum break valve when generating vacuum.
9. When replacing the cartridge joint at the supply or vacuum port, remove all matter adhered to the seal,
and accurately insert the pin.
10. Keep the piping for the vacuum, common exhaust, pilot exhaust, and supply as short as possible. The
vacuum component's true performance may not be attained if there is piping resistance.
11. Use a stable DC power supply.
12. Insert a surge voltage absorption circuit in the relay or solenoid valve, etc., connected to the output
terminal or power terminal. Avoid uses in which the current exceeds the rating.
13. Ground the FG terminal when using the unit power, such as the switching power.
14. Do not short-circuit the output terminal with other terminals.
15. Do not apply an excessive load on the component as it could break.
16. Wiring or uses that apply a load on the nozzle, etc., could result in damage.
17. When using the twin-nozzle, provide a margin between the vacuum during workpiece suction and for
the large/small nozzle switching pressure sensor's setting value. If the vacuum and setting value are
the same, the large/small bore size pilot valve may operate in sequence.
Inch/NPT specifications
WARNING
1. The working temperature range is 5˚C to 50˚C. Do not use this product under other temperature conditions.
2. When continuously energizing the pilot valve for a long time, heat is generated from the coil. This heat could
cause burns or affect peripheral devices. Contact your nearest CKD sales office when using energizing
continuously for long times.
3. When using the double solenoid, the switching valve position is neutral when the pilot air supply is stopped
and restarted, including when using for the first time after delivery. When restarting the pilot air supply, issue
a signal to the pilot valve or accurately switch the valve with manual operations.
4. Check that leakage current is 1 mA or less when operating the valve. Malfunctions may result from the
leakage current and cause problems.
5. Vacuum leaks are tolerated with the with vacuum changeover unit vacuum holding function and with check
valve function. Provide separate safety measures if the vacuum must be held for a long time.
6. Avoid using this product in environments containing corrosive gas. Do not use this product for fluid purposes.
7. Do not use this product in an atmosphere containing flammable or explosive gases or fluids. This product
does not have an explosion proof structure, so there is a risk of fires and explosions.
8. Do not this product for applications that generate heat exceeding the working temperature range. The sensor
could fail.
9. Turn the power OFF before wiring. Check the lead wire color and terminal numbers when wiring, and check
that the output terminal, power terminal and common terminal are not short-circuited. The sensor could fail if
these terminals are short-circuited.
CAUTION
Read before using. See pages 3 to 6 in the introduction for Safety Precautions and Precautions common to
products. See pages 3 to 5 in the introduction for Precautions common to vacuums.
Related components
Special precautions
188
VSQ vacuum ejector unit, single-nozzle type (atmospheric model)
No vacuum sensor
Vacuum release pilot valve
Manual button
5
Vacuum generating pilot valve
7
3
LED
Release flow rate adjusting needle
20 30
Approx. 500
ø6 (pilot valve exhaust port)
3.9
Vacuum ejector/vacuum unit
VSQ series
22.1
Exhaust port
øD2 (vacuum port)
61.8
40
79
83
21 20.3
13
43
9.1
2ø3.5
2-¿3.5
23.5
31.5
14.7 29
øD1 (air supply port)
L1
120
6.5 L2
Unit: mm
Circuit diagram
PS
EX
Tube O. D.
øD1
Air supply port
8
10
Vacuum port
-
V
L1
Tube O. D.
øD2
L2
12.2
14.7
-
-
12.2
14.7
8
10
31mm width, with 2-point output vacuum sensor
Vacuum release pilot valve
Manual button
Release flow rate adjusting needle
7
22.1
Up key
Mode key
Down key
5
3
LED
20 30
Approx. 500
3.9
ø6 (pilot valve exhaust port)
SW2
SW1
kPa
Vacuum generating pilot valve
61.8
øD2 (vacuum port)
Approx. 1500
40
79
83
21 20.3
13
43
9.1
2ø3.5
2-¿3.5
31.5
14.7 29
øD1 (air supply port)
L1
120
6.5 L2
Exhaust port
Unit: mm
Circuit diagram
PS
Tube O. D.
øD1
EX
V
189
Air supply port
8
10
Vacuum port
-
Tube O. D.
L2
øD2
12.2
14.7
8
12.2
10
14.7
L1
Vacuum ejector/vacuum unit
VSQ vacuum ejector unit, single-nozzle type (common exhaust model)
No vacuum sensor
Vacuum release pilot valve
Vacuum generating pilot valve
5
Manual button
3
Release flow rate adjusting needle
22.1
øD2 (vacuum port)
61.8
Vacuum pad
7
LED
20 30
Approx. 500
3.9
ø6 (pilot valve exhaust port)
40
79
83
21 20.3
ø3.5
22-¿3.5
13
13
43
9.1
L1
31.5
5.2
14.7 29
øD1 (air supply port)
120
ø12 (exhaust port)
6.5 L2
PS
Tube O. D.
øD1
EX
Air supply port
8
10
Vacuum port
-
V
L1 Tube O. D. L2
øD2
12.2
14.7
8
12.2
10
14.7
31mm width, with 2-point output vacuum sensor
Vacuum release pilot valve
Manual button
Release flow rate adjusting needle
øD2 (vacuum port)
Approx. 1500
61.8
40
79
83
21 20.3
2ø3.5
2-¿3.5
øD1 (air supply port)
13
13
43
9.1
31.5
5.2
14.7 29
L1
120
ø12 (exhaust port)
6.5 L2
Unit: mm
Circuit diagram
PS
Tube O. D.
øD1
EX
V
Air supply port
8
10
Vacuum port
-
Inch/NPT specifications
5
3
22.1
Up key
Mode key
Down key
Tube O. D.
L2
øD2
12.2
14.7
8
12.2
10
14.7
L1
Related components
7
LED
20 30
Approx. 500
3.9
ø6 (pilot valve exhaust port)
SW2
SW1
kPa
Vacuum generating pilot valve
Vacuum related components
Unit: mm
Circuit diagram
190
VSQ-D vacuum ejector unit, two-step nozzle type (atmospheric model)
No vacuum sensor
Vacuum generating pilot valve
Vacuum releaqse pilot valve
5
Manual button
7
Release flow rate adjusting needle
3
LED
20 30
Approx. 500
ø6 (pilot valve exhaust port)
3.9
Vacuum ejector/vacuum unit
VSQ series
22.1
Exhaust port
61.8
øD2 (vacuum port)
40
79
83
21 20.3
13
43
9.1
2ø3.5
2-ø3.5
31.5
14.7 29
L1
øD1 (air supply port)
120
6.5 L2
Unit: mm
Circuit diagram
PS
Tube O. D.
øD1
EX
Air supply port
6
8
Vacuum port
-
V
Tube O. D.
L2
øD2
11.1
12.2
8
12.2
10
14.7
L1
31mm width, with 2-point output vacuum sensor
Vacuum generating pilot valve
Manual button
release flow rate adjusting needle
SW1
7
22.1
Up key
5
3
LED
20 30
Approx. 500
3.9
ø6 (pilot valve exhaust port)
SW2
kPa
Vacuum release pilot valve
Mode key
Down key
61.8
øD2 (vacuum port)
Approx. 1500
40
79
83
21 20.3
13
43
9.1
2ø3.5
2-ø3.5
14.7 29
L1
øD1 (air supply port)
31.5
120
6.5 L2
Exhaust port
Unit: mm
Circuit diagram
PS
Tube O. D.
øD1
EX
V
191
Air supply port
6
8
Vacuum port
-
Tube O. D.
L1
L2
øD2
11.1
12.2
8
12.2
10
14.7
Vacuum ejector/vacuum unit
No vacuum sensor
Vacuum generating pilot valve
Vacuum release pilot valve
5
Manual button
7
Break flow rate adjusting needle
3
LED
20 30
Approx. 500
3.9
ø6 (pilot valve exhaust port)
22.1
61.8
øD2 (vacuum port)
40
79
83
21 20.3
2ø3.5
2-ø3.5
13
13
43
9.1
øD1 (air supply port)
31.5
5.2
14.7 29
L1
Vacuum pad
VSQ-D vacuum ejector unit, two-step nozzle type (common exhaust model)
120
ø12 (exhaust port)
6.5 L2
PS
Tube O. D.
øD1
EX
Air supply port
6
8
Vacuum port
-
V
Tube O. D.
L1
L2
øD2
11.1
12.2
8
12.2
10
14.7
31mm width, with 2-point output vacuum sensor
Vacuum generating pilot valve
Manual button
Release flow rate adjusting needle
Mode key
Down key
øD2 (vacuum port)
Approx. 1500
61.8
40
79
83
21 20.3
2ø3.5
2-ø3.5
13
13
43
9.1
5.2
14.7 29
L1
120
31.5
ø12 (exhaust port)
6.5 L2
øD1 (air supply port)
Unit: mm
Circuit diagram
PS
Tube O. D.
øD1
EX
V
Air supply port
6
8
Vacuum port
-
Inch/NPT specifications
5
3
22.1
Up key
Tube O. D.
L2
øD2
11.1
12.2
8
12.2
10
14.7
L1
Related components
SW1
7
LED
20 30
Approx. 500
3.9
ø6 (pilot valve exhaust port)
SW2
kPa
Vacuum release pilot valve
Vacuum related components
Unit: mm
Circuit diagram
192
VSQ-T vacuum ejector unit, twin-nozzle type (atmospheric type)
No vacuum sensor
Pilot valve for small bore size nozzle
Vacuum release pilot valve
Manual button
5
Pilot valve for large bore size nozzle
Large/small nozzle switching pressure adjusting trimmer
3
LED
7
Release flow rate adjusting needle
20 30
Approx. 500
ø6 (pilot valve exhaust port)
3.9
Vacuum ejector/vacuum unit
VSQ series
22.1
Exhaust port
61.8
øD2 (vacuum port)
13
79
40
43
83
21 20.3
9.1
2-ø3.5
23.5
2-ø3.5
31.5
14.7 29
øD1 (air supply port)
L1
120
6.5 L2
Unit: mm
Circuit diagram
Tube O. D.
øD1
PS
Air supply port
8
10
Vacuum port
-
EX
L1
Tube O. D.
øD2
12.2
14.7
-
-
L2
12.2
14.7
8
10
V
31mm width, with 2-point output vacuum sensor
Pilot valve for small bore size nozzle
Vacuum release pilot valve
Manual button
Release flow rate adjusting needle
SW1
3
LED
7
22.1
20 30
Approx. 500
3.9
ø6 (pilot valve exhaust port)
Up key
5
Large/small nozzle switching pressure adjusting trimmer
SW2
kPa
Pilot valve for large bore size nozzle
Mode key
Down key
61.8
øD2 (vacuum port)
Approx. 1500
40
79
83
21 20.3
13
43
9.1
2-ø3.5
2-ø3.5
31.5
14.7 29
øD1 (air supply port)
L1
120
6.5 L2
Exhaust port
Circuit diagram
Tube O. D.
øD1
PS
Air supply port
8
10
Vacuum port
-
EX
V
193
Unit: mm
L1
12.2
14.7
-
Tube O. D.
øD2
-
8
10
L2
12.2
14.7
Vacuum ejector/vacuum unit
VSQ-T vacuum ejector unit, twin-nozzle type (common exhaust model)
No vacuum sensor
Pilot valve for small bore size nozzle
Vacuum release pilot valve
Manual button
5
Pilot valve for large bore size nozzle
Large/small nozzle switching pressure adjusting trimmer
3
Release flow rate adjusting needle
22.1
61.8
øD2 (vacuum port)
Vacuum pad
7
LED
20 30
Approx. 500
3.9
ø6 (pilot valve exhaust port)
79
40
2-ø3.5
2-ø3.5
23.5
13
13
43
83
21 20.3
9.1
øD1 (air supply port)
31.5
5.2
14.7 29
L1
120
ø12 (exhaust port)
6.5 L2
Unit: mm
Tube O. D.
øD1
PS
Air supply port
8
10
Vacuum port
-
EX
L1
Tube O. D.
øD2
12.2
14.7
-
-
L2
12.2
14.7
8
10
V
31mm width, with 2-point output vacuum sensor
Pilot valve for small bore size nozzle
Vacuum release pilot valve
Manual button
Inch/NPT specifications
release flow rate adjusting needle
7
22.1
Up key
Mode key
Down key
61.8
øD2 (vacuum port)
Approx. 1500
40
79
83
21 20.3
2-ø3.5
2-ø3.5
13
13
43
9.1
øD1 (air supply port)
31.5
5.2
14.7 29
L1
120
ø12 (exhaust port)
6.5 L2
Unit: mm
Circuit diagram
Tube O. D.
øD1
PS
Air supply port
8
10
Vacuum port
-
EX
L1
12.2
14.7
-
Tube O. D.
øD2
-
8
10
L2
12.2
14.7
Related components
3
LED
20 30
Approx. 500
3.9
ø6 (pilot valve exhaust port)
5
Large/small nozzle switching pressure adjusting trimmer
SW2
SW1
kPa
Pilot valve for large bore size nozzle
Vacuum related components
Circuit diagram
V
194
VSQP vacuum switching nozzle
No vacuum sensor
Vacuum release pilot valve
Vacuum generating pilot valve
5
Manual button
Release flow rate adjusting needle
20 30
Approx. 500
77
LED
3
ø6 (air supply port)
ø6 (pilot valve exhaust port)
3.9
Vacuum ejector/vacuum unit
VSQP series
22.1
øD2 (vacuum port)
61.8
40
79
83
21 20.3
2-ø3.5
2-ø3.5
23.5
13
13
43
2-9.1
31.5
14.7 29
L1
120
6.5 L2
øD1 (vacuum supply port)
Unit: mm
Circuit diagram
Tube O. D.
øD1
PV
V
Air supply port
10
12
16
Vacuum port
-
PS
Tube O. D.
L1
L2
øD2
14.7
18.8
23.9
10
14.7
12
14.7
23.9
16
31mm width, with 2-point output vacuum sensor
Vacuum release pilot valve
Manual button
Release flow rate adjusting needle
SW1
Up key
Mode key
Down key
5
3
22.1
20 30
Approx. 500
3.9
ø6 (air supply port)
ø6 (pilot valve exhaust port)
77
LED
SW2
kPa
Vacuum generating pilot valve
61.8
øD2 (vacuum port)
Approx. 1500
40
79
83
21 20.3
2-ø3.5
2-ø3.5
13
13
43
2-9.1
14.7 29
L1
31.5
120
6.5 L2
øD1 (vacuum supply port)
Unit: mm
Circuit diagram
PV
Tube O. D.
øD1
Air supply port
10
12
16
Vacuum port
-
V
PS
195
L1
14.7
18.8
23.9
-
Tube O. D.
øD2
-
10
12
16
L2
14.7
14.7
23.9
· Turn power ON. (Check wiring, and turn power ON.)
· Energize the lead of the solenoid valve to be operated (black: vacuum, gray: vacuum break). The valve starts
operating.
2. Using the twin-nozzle type valve
· When using the twin-nozzle type valve, apply constant voltage to the brown and blue leads.
· Adjust the reference vacuum pressure setting with the large/small nozzle switching pressure adjusting
trimmer.
*. The large/small nozzle switching is controlled with an internal circuit when the vacuum generation valve is
energized.
2 1/2 digits
LED display
section
Display unit
SW2
Switch output 2 indicator lamp
(Red LED)
kPa
UP key
and M simultaneously.
Display OFF setting (2 types)
Initialization
mode
Hold down M for more than 1 second.
Press M and
Display magnification setting (5 types)
Switch output setting (8-type combinations)
SW1 setting
simultaneously.
Pressure
setting
Hold down M for more than 1 second.
mode
SW2 setting
Hysteresis (0 to 30 digits)
Filter setting (F0 to F2)
Vacuum related components
Minus indicator lamp
(Red LED)
Press
MODE key
DOWN key
4. Vacuum sensor initialization mode
Enter initialization mode.
SW1
Press the key and M key simultaneously in operation mode.
When initialization mode is entered, the 3rd digit blinks.
-00 is displayed when used for the first time.
SW2
kPa
Set initial conditions.
The digit moves once each time the M
key is pressed. The settable digit blinks.
Setting conditions change each time the
SW2
kPa
key or
key is pressed.
Moves 1 digit when M key is pressed
SW1
Display
Display magnification
: Normal
mode
:X1
: Display OFF
mode
: X 0.75
Switch output
: Separate mode
: X 0.01
Exit initialization mode.
SW1
Hold down the M key for more than 1
second.
Initial conditions are set, and the mode
SW2
kPa
returns to operation mode.
: X 0.145
: Window comparator
mode
Inch/NPT specifications
SW1
Related components
Switch output 1 indicator lamp
(Red LED)
Operation mode
3. Vacuum sensor parts and operation procedures
Vacuum pad
1. Using the valve
Vacuum ejector/vacuum unit
Precautions
196
Vacuum ejector/vacuum unit
VSQ/VSQP series
5. Vacuum sensor pressure setting mode
Enter pressure setting mode.
Press the M key and key simultaneously in operation mode.
When pressure setting mode is entered, SW1 blinks and the setting 1 value is displayed.
50 is displayed when used for the first time.
SW2
kPa
SW1
Set pressure.
SW1
"Setting 1 (P1)"
The SW1 LED blinks.
Set setting 1 (P1) with the key or key.
SW2
kPa
( 50 is displayed when used for the first time.)
Note 1) Pressure is set within displayed range.
Press the M key. Note 2) If window comparator mode is selected, the setting satisfies this equation: P1 <
= P2-2H.
SW1
SW2
kPa
Press the M key.
SW1
SW2
kPa
Press the M key.
"Setting hysteresis (H)"
SW1 and SW2 LEDs blink.
Set hysteresis (H) with the key or key.
( 00 is displayed when used for the first time.)
Note 1) Hysteresis is set within 30 digits.
Note 2) If window comparator mode is selected, the setting satisfies this equation: P1 <
= P2-2H.
"Setting the digital filter"
Set the digital filter with the
SW1
SW2
"Setting 2 (P2)"
The SW2 LED blinks.
Set setting 2 (P2) with the key or key.
( 50 is displayed when used for the first time.)
Note 1) Pressure is set within displayed range.
Note 2) If window comparator mode is selected, the setting satisfies this equation: P1 <
= P2-2H.
kPa
: No filter,
: 25 ms filter,
key or
key.
: 250 ms filter
( F0 is displayed when used for the first time.)
Press the M key.
Exit pressure setting mode.
SW1
Hold down the M key for more than 1 second.
Pressure conditions are set, and the mode returns to operation mode.
SW2
197
kPa
Pressure range
Display magnification
Display range
X 1 (kPa)
-100 to 100
X 0.75 (cmHg)
-75 to 75
X 0.01 (bar)
-1.00 to 1.00
X 0.145 (psi)
-14.5 to 14.5
Selected number
Switch output
Switch output is selected from the following table:
Note 1) Setting 1 and SW1, and setting 2 and SW2 operate together in separate mode.
Note 2) SW1 and SW2 operate with the common minimum (Setting 1) and maximum (setting 2) in window
comparator mode.
* See the explanation on initialization mode (page 196) for details on setting switch output.
Output
Mode
Operation
SW1
Separate Window comparator
HI
LO
A
B
Separate mode
SW2
Separate Window comparator
HI
LO
A
B
(HI operation)
Selected number
OFF
-Pr
ON
Setting 1
Note 1
Setting 2
Note 1
Lower limit: Setting 1
Upper limit: Setting 2
Note 2
(A operation)
ON
ON
OFF
P1:SW1
P2:SW2
Pr
H
H
-Pr
P1
P2
H
(LO operation)
Pr
H
(B operation)
ON
P1:SW1
-Pr
P2:SW2
H
H
> P2
P1 <
= P2 or P1 =
Lower limit: Setting 1
Upper limit: Setting 2
Note 2
Window comparator mode
ON
OFF
Pr
OFF
-Pr
P1
P2
H
H
P1 <
= P2-2H
P1: Setting 1, P2: Setting 2
H: Hysteresis
Digital filter
Two digital filters (25 ms, 250 ms) is selected.
Use this when pressure fluctuates greatly, and display cannot be read easily.
Note 1) The selected digital filter is applied to pressure display and switch output.
* See the explanation on pressure setting mode (page 197) for details on setting the digital filter.
OFF
Inch/NPT specifications
Display magnification
Display magnification is selected from ranges at right.
* See the explanation on initialization mode (page
196) for details on setting display OFF mode.
kPa
Related components
SW2
Vacuum ejector/vacuum unit
SW1
Vacuum pad
Display OFF
If no keys are pressed for 10 seconds, display turns OFF, and the LED display turns OFF. The LED display
turns ON again if a key is pressed while the LED is OFF.
Note 1) The decimal point below blinks during display OFF mode.
Note 2) Switch output and switch output indicator lamp function even during display OFF mode.
Note 3) Air is not displayed during display OFF mode.
* See the explanation on initialization mode (page 196) for details on setting display OFF mode.
Vacuum related components
6. Vacuum sensor functions
198
Vacuum ejector/vacuum unit
VSQ/VSQP series
7. Adjusting the vacuum sensor zero point, error display
Adjust the zero point.
Release pressure applied on the pressure port to atmospheric pressure (state with no pressure
applied).
Press the key and key simultaneously in operation mode.
SW2
kPa
OA blinks when zero point adjustment is started.
SW1
Quit zero point adjustment.
Release the key and key while OA is blinking.
After one second, the zero point is adjusted, and display returns to operation mode.
SW1
SW2
kPa
SW1
SW2
kPa
E2 is displayed when pressure is applied during zero point adjustment. Press the M key for
more than one second, and reset E2 .
Release pressure applied to the pressure port to atmospheric pressure, and adjust the zero point
again.
Take the following measures if an error occurs:
Error display
Descriptions
Remedy
Overload current is flowing. (The LED for SW1 or SW2,
Turn power OFF, and check the state of the load.
where the overload is detected, blinks.)
Pressure is applied during zero point adjustment.
Press the M key to reset E2 . Release pressure applied
on pressure port to atmospheric pressure, and adjust
the zero point again.
110% of the rated pressure range is exceeded. (When
Check applied pressure.
111 kPa is displayed with 102R)
Applied pressure exceeds the maximum of display
Check applied pressure.
pressure range.
Applied pressure is less than the minimum of the
Check applied pressure.
display pressure range.
*. An error is not displayed when display OFF mode is selected.
199
Filter element
Type: VSQ-E
9. Replacing the silencer element
Replace the silencer element as follows:
(1) Remove the two element cover fixing screws.
(2) Remove the element.
(3) Insert the element, attach the element cover, and securely tighten with a tightening torque of 0.4 to 0.5 N·m.
Silencer element
Type: VSQ-SE
Element cover
Fixing screw
Vacuum ejector/vacuum unit
Vacuum pad
Filter cover
Vacuum related components
Fixing screw
Inch/NPT specifications
Remove the fixing screw, and replace the filter
element. After replacing the element, confirm that the
filter packing is attached, and securely fix with a
tightening torque of 0.3 to 0.5 N·m.
Related components
8. Replacing the filter element
200
Vacuum ejector/vacuum unit
VSQ/VSQP series
10. Replacing and cleaning the nozzle and diffuser
Replace and clean the nozzle as follows:
(1) Using a suitable Phillips screwdriver, remove the two-element cover fixing screws, and remove the
element cover.
(2)-1. For single-nozzle: Pull out parts in the order of the nozzle retainer, diffuser, and nozzle 1.
(2)-2. For twin-nozzle: Pull out parts in the order of the nozzle retainer, diffuser, nozzle 2, and nozzle 1.
(2)-3. For two-step nozzle: Pull out parts in the order of nozzle retainer, diffuser 2, diffuser 1, and nozzle.
(3)-1. For single-nozzle: Remove all matter on the inner side of nozzle 1 and diffuser and the seal with
compressed air or by wiping it off.
(3)-2. For twin-nozzle: Remove all matter on the inner side of nozzles 1 and 2 and the diffuser and the seal
with compressed air or by wiping it off.
(3)-3. For two-step nozzle: Remove all matter on the inner side of the nozzle and diffusers 1 and 2 and the
seal with compressed air or by wiping it off.
Note: Do not scratch the inside of the nozzle and diffuser or the seal.
(4)-1. For single-nozzle: Insert parts into the unit in the order of nozzle 1, diffuser, and nozzle retainer.
(4)-2. For twin-nozzle: Insert parts into the unit in the order of nozzle 1, nozzle 2, diffuser, and nozzle retainer.
(4)-3. For two-step nozzle: Insert parts into the unit in the order of nozzle, diffuser 1, diffuser 2, and nozzle
retainer.
(5) Mount the element cover, and securely fix it with the fixing screws.
Silencer element
Element cover
Nozzle retainer
Nozzle 1 (nozzle)
Nozzle 2 (diffuser 1)
Fixing screw
Diffuser (diffuser 2)
*. Parts in parentheses are for the two-step nozzle.
11. Replacing the cartridge joint
Replace the cartridge joint as follows:
(1) Pull out the set pin with a flat-tip screwdriver, etc.
(2) Pull the cartridge out in the connection direction.
Note: Before installing the cartridge in the unit, check that no dirt or lint, etc., is caught on the O-ring.
Fixing pin
Cartridge
Cartridge
Fixing pin
201
Related components
Inch/NPT specifications
Vacuum related components
Vacuum pad
Vacuum ejector/vacuum unit
MEMO
202