NaugaNeedles
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NaugaNeedles' Ultra Sharp NanoProbe (USNP)
NaugaNeedles has developed a very unique nanofabrication technology to selectively
grow individual metallic Silver/Gallium (Ag2Ga) nanoneedles at the end of standard
tungsten probes. The Ag2Ga nanoneedles have superior electrical, mechanical and
chemical stability that significantly improve the performance
of Micro-Probe-Stations and Nano-Manipulators. Figure 1 shows
SEM images of an ultra sharp
NanoProbe (USNP). A 5 µm
long and 60 nm diameter Ag2Ga
nanoneedles is grown on a standard tungsten probe, with a radius
of curvature of ~ 13 nm at the tip.
The nanoneedles is attached to the
tungsten probe by a taper shape
structure made of Ag2Ga alloy,
that significantly enhances the
mechanical stability of the nanoneedle.
Advantages:
•
•
•
•
•
•
•
10 µm
Tungsten wire
2 µm
Crystalline Ag2Ga structure
Single Crystalline, cylindrical Ag2Ga Nanoneedle
60 nm
R = 13 nm
Figure 1: Optical (top) and SEM images of NaugaNeedles'
Ultra Sharp NanoProbes (USNP)
The smallest tip radius in the market
The most durable NanoProbe in the market
Platinum corrosion protection
The best probe for multi-probing with Zero taper angle
Highly conductive
Excellent mechanical properties with high elasticity
Cylindrical shape single metallic crystal with atomically uniform diameter
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Specification:
Figure 2 shows schematics of different component of the USNP. The USNP are made of three
parts; (1) A crystalline nanoneedle tip, (2) A polycrystalline tungsten wire, and (3) A probe shank.
(1) Specification for Crystalline Nanoneedle tip:
Tip radius of curvature:
Nanoneedles length: Category 1: 1 to 5 µm, Contact resistance: Category 1: ≤ 30 Ohm, 25 to 50 nm
Category 2 : 5 to 10 µm
Category 2 : ≤ 100 Ohm
(2) Specification for polycrystalline tungsten wire
Diameter : ~100 µm,
Length : ~5.0 mm,
(3) Specification for Probe Shank:
Diameter : ~ 0.25 mm, Length : ~15 mm,
~ 20 mm
Total probe length : ~ 20 mm
1-5 µm
or
5 - 10 µm
~ 0.5
mm
~ 4.5
mm
~5
mm
Taper angle : ~ 10 o
R= 15 – 50 nm
Ø 100 µm
Probe Shank
Tungsten wire
Wire
and tip
Ag2Ga
Ø 0.25 mm
Figure 2: Schematic of different components of the USNP
NaugaNeedles' ultra sharp NanoProbe (USNP)
2mm
Standard tungsten probes in the market
2mm
(a)
2mm
(a)
(b)
2mm
(b)
Figure 3. Comparison between mechanical properties of (a) an USSP and (b) a standard tungsten probes.
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Due to crystallinity of their tip, the USNPs have excellent mechanical properties. Figure
shows the SEM images of a USNP as it is pushed against a silicon surface. Despite stand
tungsten probes that are plastically deformed (Figure 3b), the USSPs can be elastically deform
up to 50% of their length and return to the original shape without any plastic deformation.
NaugaNeedles
NaugaNeedles' ultra sharp NanoProbe (USNP)
Standard tungsten probes in the market
2m
2m
A comparison between mechanical properties of the
USSP and standard tungsten probes:
(a)
(b)
Due to crystallinity of their tip, the USNPs
have excellent mechanical properties. Figure 3 a shows
Figure 3. Comparison between mechanical properties of (a) an USSP and (b) a standard tungsten
the SEM images of a USNP as it is pushed against a silicon surface. Despite
probes.standard tungsten probes
that are plastically deformed (Figure 3b), the USSPs can be elastically deformed up to 50% of their
Electrical properties of USSP:
length and return to the original shape without any plastic deformation.
Table 1 summarizes the resistance data taken from 9 USNPs with various Ag2Ga nanoneedles
platinum coated substrate. For shorter (3 
nanoneedles the resistance is as low as 40 ohm and for the longer nanoneedles (18.5 m),
is as high
as 2200 Ohm.
as high
0.5 mA
can be passed tip
through
Table 1 summarizes the resistance data resistance
taken from
9 USNPs
withCurrent
various
Agas2Ga
nanoneedles
sizethe shor
USNP (1 to 5 µm) without any damage to the nanoneedle.
Based on these measurements,
-7
-8
when they brought in contact with a platinum
coatedofsubstrate.
For
shorterat(31.35×10
µm) nanoneedles
electrical resistivity
Ag2Ga material
is estimated
Ωm ± 3×10 Ωm the
that is can
categorized
as ananoneedles
very good electrical
conductor.
resistance is as low as 40 ohm and for the
longer
(18.5
µm), the resistance is as high as
size when
they brought in
with a
Electrical
properties
ofcontact
USSP:
2200 Ohm. Current as high as 0.5 mA can be passed through
the shorter USNP (1 to 5 µm) withTable 1. Resistance measurement of individual USNP
3
14
9.7 27.7 39
10
25
22
18.5
out any damage to the nanoneedle. Based on L (m)
these measurements, the electrical resistivity R (nm)
50
125
85
150 105
72
78
70
56
of Ag2Ga material is estimated at 1.35×10 7 R (Ohm) 40 35 52 56 272 400 1400 1500 2200
Ωm ± 3×10 8 Ωm that is can be categorized (ρ, Ωm)×
-7
1.0
1.2
1.2
1.4
2.4
1.8
1.0
1.1
1.1
10
as a very good electrical conductor.
Table 1. Resistance measurement of individual USNP
Since the resistance of the contact point between the surface and the USNP was also a part of
resistance measurement, the real value for resistivity of Ag2Ga material should be smaller th
point
between
the
surface
and
the USNP
alsounder
a part
of condition.
the
the reported
values
above.
All of the
measurements
herewas
were done
ambient
Since the resistance of the contact
resistance measurement, the real value for resistivity of Ag2Ga material should be smaller than the
reported values above. All of the measurements here were done under ambient condition.
Optical Evaluation of USSP, suitable for probe station probes:
Due to their crystallinity, even very thin (50 to 100 nm) Ag2Ga nanoneedles are easily being seen
under optical lenses. Figure 4 shows
Optical image of an Ag2Ga Nanoneedle on a
an optical image of a nanoneedle grown
tungsten probe
on a tungsten wire. As it is seen in Fig- Tungsten
ure 4, the brightness of the nanoneedle Substrate
is even higher than the tungsten wire
5 µm
which makes it visible under relatively
good optical lenses. We have been able
Figure 4: Optical evaluation of USSP
to detect the nanoneedles with various
types of optical lenses (e.g. Keyence, Navetar).
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NaugaNeedles
NNAUG
AU
www.nauganeedles.com
N
augaNeedles
11509 Commonwealth Dr., Suite 2 • Louisville, KY, 40299
Phone: (502) 619-5156
Email: [email protected]
www.nauganeedles.com